DE60217172T2 - Verfahren zur laserbearbeitung eines flüssigkeitsschlitzes - Google Patents

Verfahren zur laserbearbeitung eines flüssigkeitsschlitzes Download PDF

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Publication number
DE60217172T2
DE60217172T2 DE60217172T DE60217172T DE60217172T2 DE 60217172 T2 DE60217172 T2 DE 60217172T2 DE 60217172 T DE60217172 T DE 60217172T DE 60217172 T DE60217172 T DE 60217172T DE 60217172 T2 DE60217172 T2 DE 60217172T2
Authority
DE
Germany
Prior art keywords
slot
substrate
laser
laser beam
microns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60217172T
Other languages
German (de)
English (en)
Other versions
DE60217172D1 (de
Inventor
David Celebridge CAHILL
R. Jeffrey Corvallis POLLARD
John Declan Rush O'REILLY
Graeme Maynooth SCOTT
Noel Mcloughlin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Development Co LP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co LP filed Critical Hewlett Packard Development Co LP
Application granted granted Critical
Publication of DE60217172D1 publication Critical patent/DE60217172D1/de
Publication of DE60217172T2 publication Critical patent/DE60217172T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multi-focusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/384—Removing material by boring or cutting by boring of specially shaped holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Laser Beam Processing (AREA)
DE60217172T 2001-12-20 2002-06-21 Verfahren zur laserbearbeitung eines flüssigkeitsschlitzes Expired - Fee Related DE60217172T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US138594 1998-08-22
US34347601P 2001-12-20 2001-12-20
US343476P 2001-12-20
US10/138,594 US7357486B2 (en) 2001-12-20 2002-05-02 Method of laser machining a fluid slot
PCT/US2002/019752 WO2003053627A1 (en) 2001-12-20 2002-06-21 Method of laser machining a fluid slot

Publications (2)

Publication Number Publication Date
DE60217172D1 DE60217172D1 (de) 2007-02-08
DE60217172T2 true DE60217172T2 (de) 2007-10-11

Family

ID=26836344

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60217172T Expired - Fee Related DE60217172T2 (de) 2001-12-20 2002-06-21 Verfahren zur laserbearbeitung eines flüssigkeitsschlitzes

Country Status (7)

Country Link
US (1) US7357486B2 (https=)
EP (1) EP1455986B1 (https=)
JP (1) JP4302527B2 (https=)
CN (1) CN1738693B (https=)
AU (1) AU2002318383A1 (https=)
DE (1) DE60217172T2 (https=)
WO (1) WO2003053627A1 (https=)

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US20050219327A1 (en) * 2004-03-31 2005-10-06 Clarke Leo C Features in substrates and methods of forming
US7268315B2 (en) * 2005-07-13 2007-09-11 Hewlett-Packard Development Company, L.P. Monitoring slot formation in substrates
US20080308884A1 (en) * 2005-10-13 2008-12-18 Silex Microsystems Ab Fabrication of Inlet and Outlet Connections for Microfluidic Chips
FR2909297B1 (fr) * 2006-11-30 2010-03-05 Snecma Procede de percage laser d'une piece en materiau composite a matrice ceramique, trou obtenu par ce procede, piece en materiau composite a matrice ceramique le comportant, turboreacteur comportant une telle piece.
US7855151B2 (en) * 2007-08-21 2010-12-21 Hewlett-Packard Development Company, L.P. Formation of a slot in a silicon substrate
JP5405859B2 (ja) * 2009-03-12 2014-02-05 株式会社ディスコ インクジェットプリンタヘッドのインク溜めの加工方法
DE102010011508B4 (de) * 2010-03-15 2015-12-10 Ewag Ag Verfahren zur Herstellung zumindest einer Spannut und zumindest einer Schneidkante und Laserbearbeitungsvorrichtung
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CN103998246B (zh) * 2011-12-21 2016-12-14 惠普发展公司，有限责任合伙企业 流体分配器
CN102769083A (zh) * 2012-07-16 2012-11-07 江苏扬景光电有限公司 倒装焊氮化物发光二极管及其透光衬底和制造方法
US9991090B2 (en) * 2012-11-15 2018-06-05 Fei Company Dual laser beam system used with an electron microscope and FIB
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CN103240526B (zh) * 2013-05-10 2015-06-10 中国电子科技集团公司第五十四研究所 基于纳米级粒子流的激光打孔方法
US10357848B2 (en) * 2015-01-19 2019-07-23 General Electric Company Laser machining systems and methods
US10580725B2 (en) * 2017-05-25 2020-03-03 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
CN109352185B (zh) * 2018-10-23 2021-03-09 深圳赛意法微电子有限公司 碳化硅基晶圆的分束激光切割方法
KR20230043207A (ko) * 2020-08-01 2023-03-30 아보니시스 아게 두꺼운 세라믹 기판들로 정밀한 마이크로 홀들을 머시닝하기 위한 방법들 및 시스템들
WO2026015152A1 (en) * 2024-07-12 2026-01-15 Hewlett-Packard Development Company, L.P. Fluidic devices with slots

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Also Published As

Publication number Publication date
US7357486B2 (en) 2008-04-15
WO2003053627A1 (en) 2003-07-03
JP2005512848A (ja) 2005-05-12
JP4302527B2 (ja) 2009-07-29
CN1738693A (zh) 2006-02-22
EP1455986B1 (en) 2006-12-27
AU2002318383A1 (en) 2003-07-09
DE60217172D1 (de) 2007-02-08
EP1455986A1 (en) 2004-09-15
US20030117449A1 (en) 2003-06-26
CN1738693B (zh) 2010-06-16

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8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, US

8328 Change in the person/name/address of the agent

Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER & ZINKLER, 82049 P

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee