DE602007004626D1 - Verbundzusammensetzung für mikrostrukturierte schichten - Google Patents

Verbundzusammensetzung für mikrostrukturierte schichten

Info

Publication number
DE602007004626D1
DE602007004626D1 DE200760004626 DE602007004626T DE602007004626D1 DE 602007004626 D1 DE602007004626 D1 DE 602007004626D1 DE 200760004626 DE200760004626 DE 200760004626 DE 602007004626 T DE602007004626 T DE 602007004626T DE 602007004626 D1 DE602007004626 D1 DE 602007004626D1
Authority
DE
Germany
Prior art keywords
composite composition
microstructured layers
patterned
micropatterns
hydrolysate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200760004626
Other languages
English (en)
Inventor
Pamela Kalmes
Michael Veith
Carsten Becker-Willinger
Etsuko Hino
Norio Ohkuma
Mitsutoshi Noguchi
Yoshikazu Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH
Canon Inc
Original Assignee
Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH, Canon Inc filed Critical Leibniz Institut fuer Neue Materialien Gemeinnuetzige GmbH
Publication of DE602007004626D1 publication Critical patent/DE602007004626D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Silicon Polymers (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Paints Or Removers (AREA)
  • Polymerisation Methods In General (AREA)
  • Epoxy Resins (AREA)
  • Polyethers (AREA)
DE200760004626 2006-07-18 2007-07-11 Verbundzusammensetzung für mikrostrukturierte schichten Active DE602007004626D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200610033280 DE102006033280A1 (de) 2006-07-18 2006-07-18 Kompositzusammensetzung für mikrostrukturierte Schichten
PCT/EP2007/057103 WO2008009608A1 (en) 2006-07-18 2007-07-11 Composite composition for micropatterned layers

Publications (1)

Publication Number Publication Date
DE602007004626D1 true DE602007004626D1 (de) 2010-03-18

Family

ID=38738873

Family Applications (2)

Application Number Title Priority Date Filing Date
DE200610033280 Withdrawn DE102006033280A1 (de) 2006-07-18 2006-07-18 Kompositzusammensetzung für mikrostrukturierte Schichten
DE200760004626 Active DE602007004626D1 (de) 2006-07-18 2007-07-11 Verbundzusammensetzung für mikrostrukturierte schichten

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE200610033280 Withdrawn DE102006033280A1 (de) 2006-07-18 2006-07-18 Kompositzusammensetzung für mikrostrukturierte Schichten

Country Status (8)

Country Link
US (1) US8680179B2 (de)
EP (1) EP2049949B1 (de)
JP (1) JP5089690B2 (de)
AT (1) ATE456823T1 (de)
DE (2) DE102006033280A1 (de)
ES (1) ES2339501T3 (de)
TW (1) TWI434140B (de)
WO (1) WO2008009608A1 (de)

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Also Published As

Publication number Publication date
WO2008009608A1 (en) 2008-01-24
EP2049949A1 (de) 2009-04-22
US20100260978A9 (en) 2010-10-14
ATE456823T1 (de) 2010-02-15
JP2009543920A (ja) 2009-12-10
EP2049949B1 (de) 2010-01-27
US8680179B2 (en) 2014-03-25
ES2339501T3 (es) 2010-05-20
TWI434140B (zh) 2014-04-11
TW200811601A (en) 2008-03-01
JP5089690B2 (ja) 2012-12-05
DE102006033280A1 (de) 2008-01-24
US20090258197A1 (en) 2009-10-15

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