DE602006009746D1 - Verfahren zum Ätzen von nichtleitenden Substratoberflächen - Google Patents
Verfahren zum Ätzen von nichtleitenden SubstratoberflächenInfo
- Publication number
- DE602006009746D1 DE602006009746D1 DE602006009746T DE602006009746T DE602006009746D1 DE 602006009746 D1 DE602006009746 D1 DE 602006009746D1 DE 602006009746 T DE602006009746 T DE 602006009746T DE 602006009746 T DE602006009746 T DE 602006009746T DE 602006009746 D1 DE602006009746 D1 DE 602006009746D1
- Authority
- DE
- Germany
- Prior art keywords
- conductive substrate
- substrate surfaces
- etching non
- etching
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005530 etching Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/22—Roughening, e.g. by etching
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2073—Multistep pretreatment
- C23C18/2086—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/22—Roughening, e.g. by etching
- C23C18/24—Roughening, e.g. by etching using acid aqueous solutions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/30—Activating or accelerating or sensitising with palladium or other noble metal
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- ing And Chemical Polishing (AREA)
- Chemically Coating (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005051632A DE102005051632B4 (de) | 2005-10-28 | 2005-10-28 | Verfahren zum Beizen von nicht leitenden Substratoberflächen und zur Metallisierung von Kunststoffoberflächen |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602006009746D1 true DE602006009746D1 (de) | 2009-11-26 |
Family
ID=37866041
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102005051632A Withdrawn - After Issue DE102005051632B4 (de) | 2005-10-28 | 2005-10-28 | Verfahren zum Beizen von nicht leitenden Substratoberflächen und zur Metallisierung von Kunststoffoberflächen |
DE602006009746T Active DE602006009746D1 (de) | 2005-10-28 | 2006-08-24 | Verfahren zum Ätzen von nichtleitenden Substratoberflächen |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102005051632A Withdrawn - After Issue DE102005051632B4 (de) | 2005-10-28 | 2005-10-28 | Verfahren zum Beizen von nicht leitenden Substratoberflächen und zur Metallisierung von Kunststoffoberflächen |
Country Status (7)
Country | Link |
---|---|
US (1) | US7578947B2 (de) |
EP (1) | EP1785507B1 (de) |
JP (1) | JP2007119919A (de) |
KR (1) | KR100868138B1 (de) |
CN (1) | CN1958844B (de) |
DE (2) | DE102005051632B4 (de) |
ES (1) | ES2332104T3 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
PL2025708T3 (pl) * | 2007-08-10 | 2010-03-31 | Enthone | Roztwór trawiący do powierzchni tworzyw sztucznych nie zawierający chromu |
US20090136771A1 (en) * | 2007-11-28 | 2009-05-28 | Evans Ronald J | Composition for preparing a surface for coating and methods of making and using same |
US20110266158A1 (en) | 2008-06-19 | 2011-11-03 | Fundacion Cidetec | Method for electrochemically covering an insulating substrate |
FR2942221B1 (fr) * | 2009-02-18 | 2012-01-27 | Seppic Sa | Compositions de depolissage du verre contenant du sel de fer |
DE102011000138A1 (de) | 2011-01-14 | 2012-07-19 | Lpkf Laser & Electronics Ag | Verfahren zur selektiven Metallisierung eines Substrats sowie ein nach diesem Verfahren hergestellter Schaltungsträger |
US20130084395A1 (en) * | 2011-09-29 | 2013-04-04 | Roshan V. Chapaneri | Treatment of Plastic Surfaces After Etching in Nitric Acid Containing Media |
US10260000B2 (en) * | 2012-01-23 | 2019-04-16 | Macdermid Acumen, Inc. | Etching of plastic using acidic solutions containing trivalent manganese |
ES2556981T3 (es) | 2012-04-24 | 2016-01-21 | Enthone Inc. | Composición de pre-ataque químico y proceso de ataque químico para sustratos de plástico |
US8603352B1 (en) * | 2012-10-25 | 2013-12-10 | Rohm and Haas Electroncis Materials LLC | Chrome-free methods of etching organic polymers |
DE102012112550A1 (de) | 2012-12-18 | 2014-06-18 | Lpkf Laser & Electronics Ag | Verfahren zur Metallisierung eines Werkstücks sowie ein Schichtaufbau aus einem Werkstück und einer Metallschicht |
US9267077B2 (en) * | 2013-04-16 | 2016-02-23 | Rohm And Haas Electronic Materials Llc | Chrome-free methods of etching organic polymers with mixed acid solutions |
EP2937446B1 (de) * | 2013-10-22 | 2018-06-13 | Okuno Chemical Industries Co., Ltd. | Zusammensetzung zur ätzbehandlung eines harzmaterials |
ES2646237B2 (es) | 2017-09-28 | 2018-07-27 | Avanzare Innovacion Tecnologica S.L. | Formulación para el mordentado de materiales poliméricos previo al recubrimiento de los mismos |
KR102241457B1 (ko) * | 2019-06-19 | 2021-04-19 | 대영엔지니어링 주식회사 | 비 전도성 플라스틱의 습식 표면처리 방법 |
KR102232079B1 (ko) * | 2019-06-19 | 2021-03-25 | 대영엔지니어링 주식회사 | 비 전도성 플라스틱의 표면특성 개선을 위한 도금방법 |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3125474A (en) * | 1964-03-17 | Pickling zirconium and zirconium base alloys | ||
DE2022109C3 (de) * | 1970-05-06 | 1974-03-21 | Celfa Ag, Seewen (Schweiz) | Verfahren zur Herstellung von metallisierbaren Kunststofformkörpern |
GB1372694A (en) * | 1970-10-22 | 1974-11-06 | Iws Nominee Co Ltd | Textile finishing |
DE2652152A1 (de) | 1975-11-18 | 1977-09-15 | Diamond Shamrock Techn | Elektrode fuer elektrolytische reaktionen und verfahren zu deren herstellung |
JPS5798529A (en) * | 1980-12-09 | 1982-06-18 | Mitsubishi Rayon Co Ltd | Metal plating on polyamide resin |
US4325991A (en) * | 1981-01-05 | 1982-04-20 | Crown City Plating Co. | Electroless plating of polyesters |
JPS58225130A (ja) * | 1982-06-24 | 1983-12-27 | Kizai Kk | ポリアミド樹脂成形品のエツチング方法 |
DE3339856A1 (de) * | 1983-11-04 | 1985-05-15 | Bayer Ag, 5090 Leverkusen | Verfahren zur haftaktivierung von polyamidsubstraten fuer die stromlose metallisierung |
DE3339857A1 (de) * | 1983-11-04 | 1985-05-15 | Bayer Ag, 5090 Leverkusen | Verfahren zur vorbehandlung von polyamidsubstraten fuer die stromlose metallisierung |
DE3435898A1 (de) * | 1984-09-29 | 1986-04-10 | Röhm GmbH, 6100 Darmstadt | Kunststoffsubstrat zur verankerung von metallueberzuegen |
FR2555185A1 (fr) | 1983-11-17 | 1985-05-24 | Roehm Gmbh | Substrat de matiere synthetique pour l'ancrage de revetements metalliques |
DE3584623D1 (de) | 1984-05-29 | 1991-12-12 | Enthone | Zusammensetzung und verfahren zur konditionierung der oberflaeche von kunststoffsubstraten vor der metallplattierung. |
DE3437084A1 (de) * | 1984-10-05 | 1986-04-10 | Schering AG, Berlin und Bergkamen, 1000 Berlin | Verfahren zum an- und abaetzen von kunststoffschichten in bohrungen von basismaterial fuer leiterplatten |
JPS61257480A (ja) * | 1985-05-09 | 1986-11-14 | Seiko Epson Corp | ポリアミド成形品のエツチング方法 |
JPS6263674A (ja) * | 1985-09-17 | 1987-03-20 | Toray Ind Inc | 樹脂成形品の表面金属化方法 |
JPS6314880A (ja) * | 1986-07-04 | 1988-01-22 | Dainippon Ink & Chem Inc | 金属メツキ処理方法 |
DE3719604A1 (de) * | 1987-06-12 | 1988-12-22 | Markus Maria Dipl In Bringmann | Beizen von halbzeugen |
JPH01150000A (ja) | 1987-12-07 | 1989-06-13 | Nippon Steel Corp | 電気メッキ用不溶性陽極 |
JPH01152294A (ja) | 1987-12-09 | 1989-06-14 | Nippon Mining Co Ltd | 不溶性アノード用材料の製造方法 |
JPH086198B2 (ja) | 1990-08-15 | 1996-01-24 | 株式会社アルメックス | 水平搬送型メッキ装置 |
JPH05320981A (ja) * | 1992-05-19 | 1993-12-07 | Kawasaki Steel Corp | めっき密着性に優れた電気めっき鋼板の製造方法 |
DE19510855C2 (de) * | 1995-03-17 | 1998-04-30 | Atotech Deutschland Gmbh | Verfahren zum selektiven oder partiellen elektrolytischen Metallisieren von Substraten aus nichtleitenden Materialien |
DE19740431C1 (de) * | 1997-09-11 | 1998-11-12 | Atotech Deutschland Gmbh | Verfahren zum Metallisieren eines elektrisch nichtleitende Oberflächenbereiche aufweisenden Substrats |
DE19834353C2 (de) | 1998-07-30 | 2000-08-17 | Hillebrand Walter Gmbh & Co Kg | Alkalisches Zink-Nickelbad |
CA2350422A1 (en) | 1998-11-13 | 2000-05-25 | Leonas Naruskevicius | Process for metallizing a plastic surface |
US6712948B1 (en) | 1998-11-13 | 2004-03-30 | Enthone Inc. | Process for metallizing a plastic surface |
CN1210356C (zh) * | 2000-05-11 | 2005-07-13 | 日本巴卡莱近估股份有限公司 | 金属表面处理剂、金属表面处理方法及表面处理金属材料 |
US6902766B1 (en) * | 2000-07-27 | 2005-06-07 | Lord Corporation | Two-part aqueous metal protection treatment |
DE10054544A1 (de) | 2000-11-01 | 2002-05-08 | Atotech Deutschland Gmbh | Verfahren zum chemischen Metallisieren von Oberflächen |
DE10124631C1 (de) * | 2001-05-18 | 2002-11-21 | Atotech Deutschland Gmbh | Verfahren zum direkten elektrolytischen Metallisieren von elektrisch nichtleiteitenden Substratoberflächen |
US6559242B1 (en) * | 2002-05-02 | 2003-05-06 | Ford Global Technologies, Inc. | Surface activation and coating processes of a thermoplastic olefin using an aqueous immersion bath and products produced thereby |
JP4304459B2 (ja) | 2002-11-19 | 2009-07-29 | 宇部興産株式会社 | 金属薄膜付きポリイミドフィルム |
DE10259187B4 (de) * | 2002-12-18 | 2008-06-19 | Enthone Inc., West Haven | Metallisierung von Kunststoffsubstraten und Lösung zum Beizen und Aktivieren |
DE10261493A1 (de) | 2002-12-23 | 2004-07-08 | METAKEM Gesellschaft für Schichtchemie der Metalle mbH | Anode zur Galvanisierung |
EP1639155B1 (de) | 2003-06-03 | 2016-11-02 | Coventya, Inc. | Galvanische abscheidung von zink und zinklegierungen |
KR100845534B1 (ko) * | 2004-12-31 | 2008-07-10 | 엘지전자 주식회사 | 전도성 금속 도금 폴리이미드 기판 및 그 제조 방법 |
-
2005
- 2005-10-28 DE DE102005051632A patent/DE102005051632B4/de not_active Withdrawn - After Issue
-
2006
- 2006-08-24 ES ES06017605T patent/ES2332104T3/es active Active
- 2006-08-24 EP EP06017605A patent/EP1785507B1/de active Active
- 2006-08-24 DE DE602006009746T patent/DE602006009746D1/de active Active
- 2006-10-26 JP JP2006290925A patent/JP2007119919A/ja active Pending
- 2006-10-26 CN CN2006101424887A patent/CN1958844B/zh active Active
- 2006-10-27 KR KR1020060105106A patent/KR100868138B1/ko active IP Right Grant
- 2006-10-30 US US11/554,100 patent/US7578947B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
ES2332104T3 (es) | 2010-01-26 |
JP2007119919A (ja) | 2007-05-17 |
DE102005051632A1 (de) | 2007-05-10 |
EP1785507A2 (de) | 2007-05-16 |
DE102005051632B4 (de) | 2009-02-19 |
US7578947B2 (en) | 2009-08-25 |
KR100868138B1 (ko) | 2008-11-10 |
CN1958844B (zh) | 2010-06-16 |
EP1785507B1 (de) | 2009-10-14 |
CN1958844A (zh) | 2007-05-09 |
KR20070045998A (ko) | 2007-05-02 |
EP1785507A3 (de) | 2008-07-09 |
US20070099425A1 (en) | 2007-05-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE602006009746D1 (de) | Verfahren zum Ätzen von nichtleitenden Substratoberflächen | |
DE602006006325D1 (de) | Verfahren zum bleichen von substraten | |
DE602005012673D1 (de) | Schnelles Verfahren zum Detektieren von Objekten durch statistischen Mustervergleich | |
DE602004000051D1 (de) | Verfahren zum Beschichten von grossflächigen Substraten | |
DE602006019273D1 (de) | Verfahren zum doppelseitigen polieren von wafern | |
DE502005003910D1 (de) | Verfahren zur modifizierung faserartiger substrate mit siloxancopolymeren | |
ATE532847T1 (de) | Verfahren zum reinigen von wäsche oder harten oberflächen | |
DE602005012672D1 (de) | Verfahren zum Detektieren von Gesichtsmerkmalen | |
DE502006007540D1 (de) | Verfahren zum herstellen von keramischen schichten | |
DE602007004783D1 (de) | Verfahren zur Reinigung von Photomasken | |
DE602006015892D1 (de) | Verfahren zur Beschichtung von metallen | |
PL1943197T3 (pl) | Sposób obróbki podłoża | |
DE602006009593D1 (de) | Verfahren zum Polieren von Halbleiterscheiben | |
DE602006014670D1 (de) | Verfahren zur doppelbindungs-hydroisomerisierung von butenen | |
DE602006007648D1 (de) | Verfahren zur implementierung der zugriffsbereichs | |
DE502006006827D1 (de) | Verfahren zum Verkleben von Werkstücken | |
DE102009028762A8 (de) | Verfahren zum Ätzen von Siliziumoberflächen | |
DE602005021449D1 (de) | Verfahren zur modifizierung der Oberfläche von Halbleiter-Nanopartikeln | |
DE502006005802D1 (de) | Verfahren zum fertigen von bohrungen | |
DE602006001652D1 (de) | Verfahren zur bildung von spiegeln auf einem leitfähigen substrat | |
DE60320734D1 (de) | Verfahren zum Beschichten von mikro-elektromechanischen Vorrichtungen | |
DE10352144B8 (de) | Vakuumbeschichtungsanlage zum Beschichten von längserstreckten Substraten | |
DE602007006601D1 (de) | Verfahren zur reinigung von tacrolimus | |
DE602007009482D1 (de) | Verfahren zur elektroleitfähigen schaltungsbildung | |
ATE448218T1 (de) | Chemisches verfahren |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |