DE602004009740D1 - Halbleiterbauelemente mit Transistoren und Herstellungsverfahren dazu - Google Patents

Halbleiterbauelemente mit Transistoren und Herstellungsverfahren dazu

Info

Publication number
DE602004009740D1
DE602004009740D1 DE602004009740T DE602004009740T DE602004009740D1 DE 602004009740 D1 DE602004009740 D1 DE 602004009740D1 DE 602004009740 T DE602004009740 T DE 602004009740T DE 602004009740 T DE602004009740 T DE 602004009740T DE 602004009740 D1 DE602004009740 D1 DE 602004009740D1
Authority
DE
Germany
Prior art keywords
transistors
manufacturing
semiconductor devices
semiconductor
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004009740T
Other languages
English (en)
Other versions
DE602004009740T2 (de
Inventor
Jong-Ho Lee
Ho-Kyu Kang
Hyung-Suk Jung
Seok-Jo Doh
Yun-Seok Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020030079908A external-priority patent/KR100618815B1/ko
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of DE602004009740D1 publication Critical patent/DE602004009740D1/de
Application granted granted Critical
Publication of DE602004009740T2 publication Critical patent/DE602004009740T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823857—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate insulating layers, e.g. different gate insulating layer thicknesses, particular gate insulator materials or particular gate insulator implants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
    • H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
    • H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
    • H01L27/0922—Combination of complementary transistors having a different structure, e.g. stacked CMOS, high-voltage and low-voltage CMOS

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
DE602004009740T 2003-11-12 2004-11-10 Halbleiterbauelemente mit Transistoren und Herstellungsverfahren dazu Active DE602004009740T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1020030079908A KR100618815B1 (ko) 2003-11-12 2003-11-12 이종의 게이트 절연막을 가지는 반도체 소자 및 그 제조방법
KR2003079908 2003-11-12
US930943 2004-09-01
US10/930,943 US20050098839A1 (en) 2003-11-12 2004-09-01 Semiconductor devices having different gate dielectrics and methods for manufacturing the same

Publications (2)

Publication Number Publication Date
DE602004009740D1 true DE602004009740D1 (de) 2007-12-13
DE602004009740T2 DE602004009740T2 (de) 2008-08-28

Family

ID=34437030

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004009740T Active DE602004009740T2 (de) 2003-11-12 2004-11-10 Halbleiterbauelemente mit Transistoren und Herstellungsverfahren dazu

Country Status (6)

Country Link
US (1) US7586159B2 (de)
EP (1) EP1531496B1 (de)
JP (1) JP4939744B2 (de)
CN (1) CN100442517C (de)
DE (1) DE602004009740T2 (de)
TW (1) TWI258811B (de)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7952118B2 (en) 2003-11-12 2011-05-31 Samsung Electronics Co., Ltd. Semiconductor device having different metal gate structures
US6921691B1 (en) 2004-03-18 2005-07-26 Infineon Technologies Ag Transistor with dopant-bearing metal in source and drain
US7105889B2 (en) * 2004-06-04 2006-09-12 International Business Machines Corporation Selective implementation of barrier layers to achieve threshold voltage control in CMOS device fabrication with high k dielectrics
US8399934B2 (en) 2004-12-20 2013-03-19 Infineon Technologies Ag Transistor device
US8178902B2 (en) 2004-06-17 2012-05-15 Infineon Technologies Ag CMOS transistor with dual high-k gate dielectric and method of manufacture thereof
US7592678B2 (en) 2004-06-17 2009-09-22 Infineon Technologies Ag CMOS transistors with dual high-k gate dielectric and methods of manufacture thereof
JP2006086511A (ja) * 2004-08-17 2006-03-30 Nec Electronics Corp 半導体装置
JP2006108439A (ja) * 2004-10-06 2006-04-20 Samsung Electronics Co Ltd 半導体装置
US7344934B2 (en) 2004-12-06 2008-03-18 Infineon Technologies Ag CMOS transistor and method of manufacture thereof
US7253050B2 (en) 2004-12-20 2007-08-07 Infineon Technologies Ag Transistor device and method of manufacture thereof
US7564108B2 (en) * 2004-12-20 2009-07-21 Taiwan Semiconductor Manufacturing Company, Ltd. Nitrogen treatment to improve high-k gate dielectrics
US7160781B2 (en) 2005-03-21 2007-01-09 Infineon Technologies Ag Transistor device and methods of manufacture thereof
US7361538B2 (en) 2005-04-14 2008-04-22 Infineon Technologies Ag Transistors and methods of manufacture thereof
US7202535B2 (en) * 2005-07-14 2007-04-10 Infineon Technologies Ag Manufacturing method for an integrated semiconductor structure and corresponding integrated semiconductor structure
US8188551B2 (en) 2005-09-30 2012-05-29 Infineon Technologies Ag Semiconductor devices and methods of manufacture thereof
US7462538B2 (en) 2005-11-15 2008-12-09 Infineon Technologies Ag Methods of manufacturing multiple gate CMOS transistors having different gate dielectric materials
US7495290B2 (en) 2005-12-14 2009-02-24 Infineon Technologies Ag Semiconductor devices and methods of manufacture thereof
US7510943B2 (en) * 2005-12-16 2009-03-31 Infineon Technologies Ag Semiconductor devices and methods of manufacture thereof
JP2007243009A (ja) * 2006-03-10 2007-09-20 Renesas Technology Corp 半導体装置およびその製造方法
US20080001237A1 (en) * 2006-06-29 2008-01-03 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device having nitrided high-k gate dielectric and metal gate electrode and methods of forming same
EP1914800A1 (de) * 2006-10-20 2008-04-23 Interuniversitair Microelektronica Centrum Verfahren zur Herstellung eines Halbleiterbauelements mit mehreren Dielektrika
US20080135953A1 (en) * 2006-12-07 2008-06-12 Infineon Technologies Ag Noise reduction in semiconductor devices
US7564114B2 (en) * 2006-12-21 2009-07-21 Qimonda North America Corp. Semiconductor devices and methods of manufacture thereof
US7659156B2 (en) * 2007-04-18 2010-02-09 Freescale Semiconductor, Inc. Method to selectively modulate gate work function through selective Ge condensation and high-K dielectric layer
JP2008306051A (ja) * 2007-06-08 2008-12-18 Rohm Co Ltd 半導体装置およびその製造方法
JP2008311464A (ja) * 2007-06-15 2008-12-25 National Institute Of Advanced Industrial & Technology 半導体装置とその製造方法
US7998820B2 (en) 2007-08-07 2011-08-16 Taiwan Semiconductor Manufacturing Company, Ltd. High-k gate dielectric and method of manufacture
JP5196954B2 (ja) * 2007-10-31 2013-05-15 株式会社東芝 半導体装置の製造方法
JP5280670B2 (ja) * 2007-12-07 2013-09-04 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
EP2083441A1 (de) * 2008-01-23 2009-07-29 Interuniversitair Microelektronica Centrum vzw Halbleiterbauelement und Herstellungsverfahren dafür
EP2093796A1 (de) * 2008-02-20 2009-08-26 Imec Halbleitervorrichtung und Herstellungsverfahren dafür
EP2112687B1 (de) * 2008-04-22 2012-09-19 Imec Verfahren zur Herstellung eines Halbleiterebaulements mit dualer Austrittsarbeit-Funktion und das damit gefertigte Element
JP2009283770A (ja) 2008-05-23 2009-12-03 Renesas Technology Corp 半導体装置の製造方法
JP5286052B2 (ja) * 2008-11-28 2013-09-11 株式会社東芝 半導体装置及びその製造方法
US8017469B2 (en) * 2009-01-21 2011-09-13 Freescale Semiconductor, Inc. Dual high-k oxides with sige channel
DE102009021486B4 (de) 2009-05-15 2013-07-04 Globalfoundries Dresden Module One Llc & Co. Kg Verfahren zur Feldeffekttransistor-Herstellung
US8268683B2 (en) * 2009-06-12 2012-09-18 Taiwan Semiconductor Manufacturing Company, Ltd. Method for reducing interfacial layer thickness for high-K and metal gate stack
JP5375362B2 (ja) * 2009-06-24 2013-12-25 富士通セミコンダクター株式会社 半導体装置の製造方法
CN101930979B (zh) * 2009-06-26 2014-07-02 中国科学院微电子研究所 控制器件阈值电压的CMOSFETs结构及其制造方法
JP5442332B2 (ja) * 2009-06-26 2014-03-12 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
JP5387173B2 (ja) * 2009-06-30 2014-01-15 富士通セミコンダクター株式会社 半導体装置及びその製造方法
JP5432621B2 (ja) * 2009-07-23 2014-03-05 富士通セミコンダクター株式会社 半導体装置の製造方法
DE102009039418B4 (de) 2009-08-31 2013-08-22 GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG Einstellung der Austrittsarbeit in Gate-Stapeln mit großem ε, die Gatedielektrika mit unterschiedlicher Dicke enthalten
KR101656443B1 (ko) * 2009-11-20 2016-09-22 삼성전자주식회사 금속 게이트 스택 구조물을 갖는 씨모스 소자
CN102104042B (zh) * 2009-12-21 2013-01-09 中国科学院微电子研究所 一种半导体器件
KR101627509B1 (ko) * 2010-03-04 2016-06-08 삼성전자주식회사 식각액, 식각액을 사용한 게이트 절연막의 형성 방법 및 식각액을 사용한 반도체 소자의 제조 방법
US8435878B2 (en) 2010-04-06 2013-05-07 International Business Machines Corporation Field effect transistor device and fabrication
CN102299155A (zh) * 2010-06-22 2011-12-28 中国科学院微电子研究所 一种半导体器件及其制造方法
JP2012231123A (ja) 2011-04-15 2012-11-22 Hitachi Kokusai Electric Inc 半導体装置、半導体装置の製造方法、基板処理システムおよびプログラム
CN102709166B (zh) * 2012-05-22 2015-05-20 上海华力微电子有限公司 降低n型掺杂和非掺杂多晶硅栅极刻蚀后形貌差异的方法
KR20150035164A (ko) * 2013-09-27 2015-04-06 삼성전자주식회사 반도체 장치 및 그 제조 방법
KR102342850B1 (ko) 2015-04-17 2021-12-23 삼성전자주식회사 반도체 소자의 제조를 위한 유전체층의 큐어링 방법
CN104934373B (zh) * 2015-06-30 2018-10-26 厦门天马微电子有限公司 一种阵列基板及其制作方法
DE102016203154B4 (de) * 2015-12-14 2017-09-28 Globalfoundries Inc. Verfahren zum Bilden einer Halbleitervorrichtungsstruktur
US11114347B2 (en) * 2017-06-30 2021-09-07 Taiwan Semiconductor Manufacturing Co., Ltd. Self-protective layer formed on high-k dielectric layers with different materials
US11664417B2 (en) * 2018-09-13 2023-05-30 Intel Corporation III-N metal-insulator-semiconductor field effect transistors with multiple gate dielectric materials
US11038034B2 (en) * 2019-04-25 2021-06-15 Taiwan Semiconductor Manufacturing Co., Ltd. Method and related apparatus for integrating electronic memory in an integrated chip

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960481A (de) * 1972-10-12 1974-06-12
JP3025385B2 (ja) * 1993-01-21 2000-03-27 シャープ株式会社 半導体装置
US5763922A (en) * 1997-02-28 1998-06-09 Intel Corporation CMOS integrated circuit having PMOS and NMOS devices with different gate dielectric layers
US6841439B1 (en) 1997-07-24 2005-01-11 Texas Instruments Incorporated High permittivity silicate gate dielectric
US6261887B1 (en) * 1997-08-28 2001-07-17 Texas Instruments Incorporated Transistors with independently formed gate structures and method
US6064102A (en) * 1997-12-17 2000-05-16 Advanced Micro Devices, Inc. Semiconductor device having gate electrodes with different gate insulators and fabrication thereof
US6261978B1 (en) * 1999-02-22 2001-07-17 Motorola, Inc. Process for forming semiconductor device with thick and thin films
JP3415496B2 (ja) * 1999-07-07 2003-06-09 Ｎｅｃエレクトロニクス株式会社 半導体装置及びその製造方法
JP2001257344A (ja) * 2000-03-10 2001-09-21 Toshiba Corp 半導体装置及び半導体装置の製造方法
JP4895430B2 (ja) * 2001-03-22 2012-03-14 ルネサスエレクトロニクス株式会社 半導体装置及び半導体装置の製造方法
US6573134B2 (en) * 2001-03-27 2003-06-03 Sharp Laboratories Of America, Inc. Dual metal gate CMOS devices and method for making the same
EP1677361A2 (de) * 2001-04-02 2006-07-05 Matsushita Electric Industrial Co., Ltd. Halbleiterbauelement und Verfahren zu seiner Herstellung
KR100399356B1 (ko) 2001-04-11 2003-09-26 삼성전자주식회사 듀얼 게이트를 가지는 씨모스형 반도체 장치 형성 방법
US6891231B2 (en) 2001-06-13 2005-05-10 International Business Machines Corporation Complementary metal oxide semiconductor (CMOS) gate stack with high dielectric constant gate dielectric and integrated diffusion barrier
JP4086272B2 (ja) * 2001-07-26 2008-05-14 株式会社東芝 半導体装置
JP3943881B2 (ja) * 2001-09-25 2007-07-11 株式会社東芝 半導体装置及びその製造方法
US6495422B1 (en) * 2001-11-09 2002-12-17 Taiwan Semiconductor Manfacturing Company Methods of forming high-k gate dielectrics and I/O gate oxides for advanced logic application
US6563183B1 (en) * 2001-12-31 2003-05-13 Advanced Micro Devices, Inc. Gate array with multiple dielectric properties and method for forming same
US6555879B1 (en) * 2002-01-11 2003-04-29 Advanced Micro Devices, Inc. SOI device with metal source/drain and method of fabrication
US6528858B1 (en) * 2002-01-11 2003-03-04 Advanced Micro Devices, Inc. MOSFETs with differing gate dielectrics and method of formation
JP2003309188A (ja) * 2002-04-15 2003-10-31 Nec Corp 半導体装置およびその製造方法
TW535265B (en) * 2002-04-29 2003-06-01 Powerchip Semiconductor Corp Structure and manufacturing method of CMOS process compatible single poly-silicon erasable and programmable ROM
US6797525B2 (en) 2002-05-22 2004-09-28 Agere Systems Inc. Fabrication process for a semiconductor device having a metal oxide dielectric material with a high dielectric constant, annealed with a buffered anneal process
KR100476926B1 (ko) 2002-07-02 2005-03-17 삼성전자주식회사 반도체 소자의 듀얼 게이트 형성방법
US6670248B1 (en) 2002-08-07 2003-12-30 Chartered Semiconductor Manufacturing Ltd. Triple gate oxide process with high-k gate dielectric
US6706581B1 (en) * 2002-10-29 2004-03-16 Taiwan Semiconductor Manufacturing Company Dual gate dielectric scheme: SiON for high performance devices and high k for low power devices
US7122414B2 (en) 2002-12-03 2006-10-17 Asm International, Inc. Method to fabricate dual metal CMOS devices
JP2004214376A (ja) * 2002-12-27 2004-07-29 Toshiba Corp 半導体装置
US6696327B1 (en) 2003-03-18 2004-02-24 Intel Corporation Method for making a semiconductor device having a high-k gate dielectric
JP4524995B2 (ja) * 2003-03-25 2010-08-18 ルネサスエレクトロニクス株式会社 半導体装置
US6809370B1 (en) 2003-07-31 2004-10-26 Texas Instruments Incorporated High-k gate dielectric with uniform nitrogen profile and methods for making the same
US6872613B1 (en) 2003-09-04 2005-03-29 Advanced Micro Devices, Inc. Method for integrating metals having different work functions to form CMOS gates having a high-k gate dielectric and related structure
US7148546B2 (en) 2003-09-30 2006-12-12 Texas Instruments Incorporated MOS transistor gates with doped silicide and methods for making the same
KR100618815B1 (ko) * 2003-11-12 2006-08-31 삼성전자주식회사 이종의 게이트 절연막을 가지는 반도체 소자 및 그 제조방법
TWI228789B (en) 2004-01-20 2005-03-01 Ind Tech Res Inst Method for producing dielectric layer of high-k gate in MOST
US6897095B1 (en) 2004-05-12 2005-05-24 Freescale Semiconductor, Inc. Semiconductor process and integrated circuit having dual metal oxide gate dielectric with single metal gate electrode
US7105889B2 (en) 2004-06-04 2006-09-12 International Business Machines Corporation Selective implementation of barrier layers to achieve threshold voltage control in CMOS device fabrication with high k dielectrics

Also Published As

Publication number Publication date
TWI258811B (en) 2006-07-21
EP1531496A3 (de) 2005-08-10
JP4939744B2 (ja) 2012-05-30
JP2005150737A (ja) 2005-06-09
EP1531496A2 (de) 2005-05-18
TW200524013A (en) 2005-07-16
US7586159B2 (en) 2009-09-08
CN100442517C (zh) 2008-12-10
DE602004009740T2 (de) 2008-08-28
EP1531496B1 (de) 2007-10-31
CN1619817A (zh) 2005-05-25
US20070176242A1 (en) 2007-08-02

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