DE3862699D1 - Vorrichtung zur behandlung eines prozessgases. - Google Patents

Vorrichtung zur behandlung eines prozessgases.

Info

Publication number
DE3862699D1
DE3862699D1 DE8888111226T DE3862699T DE3862699D1 DE 3862699 D1 DE3862699 D1 DE 3862699D1 DE 8888111226 T DE8888111226 T DE 8888111226T DE 3862699 T DE3862699 T DE 3862699T DE 3862699 D1 DE3862699 D1 DE 3862699D1
Authority
DE
Germany
Prior art keywords
treating
process gas
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888111226T
Other languages
English (en)
Inventor
Takashi Nagaoka
Ichiro Gyobu
Kimio Muramatsu
Keiji Ueyama
Masahiro Mase
Yoshihisa Awada
Akira Nishiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Plant Technologies Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=15983057&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3862699(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3862699D1 publication Critical patent/DE3862699D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/52—Outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE8888111226T 1987-07-15 1988-07-13 Vorrichtung zur behandlung eines prozessgases. Expired - Lifetime DE3862699D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62174695A JPS6419198A (en) 1987-07-15 1987-07-15 Vacuum pump

Publications (1)

Publication Number Publication Date
DE3862699D1 true DE3862699D1 (de) 1991-06-13

Family

ID=15983057

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888111226T Expired - Lifetime DE3862699D1 (de) 1987-07-15 1988-07-13 Vorrichtung zur behandlung eines prozessgases.

Country Status (4)

Country Link
US (1) US4904155A (de)
EP (1) EP0299458B1 (de)
JP (1) JPS6419198A (de)
DE (1) DE3862699D1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5217346A (en) * 1988-07-13 1993-06-08 Osaka Vacuum, Ltd. Vacuum pump
JP2557551Y2 (ja) * 1989-07-24 1997-12-10 セイコー精機 株式会社 真空ポンプ
JP2854628B2 (ja) * 1989-10-31 1999-02-03 富士通株式会社 排気装置
JP2564038B2 (ja) * 1990-02-28 1996-12-18 株式会社島津製作所 ターボ分子ポンプ
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
DE69016198T2 (de) * 1990-07-06 1995-05-18 Cit Alcatel Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit.
JP2611039B2 (ja) * 1990-10-25 1997-05-21 株式会社島津製作所 磁気軸受タ−ボ分子ポンプ
JPH05209589A (ja) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd 流体回転装置
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
WO1994000694A1 (de) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Gasreibungsvakuumpumpe
US5524792A (en) * 1992-07-08 1996-06-11 Murata Manufacturing Co., Ltd. Cup vendor delivery nozzle
GB2270117A (en) * 1992-08-20 1994-03-02 Ibm Laminar flow fan and apparatus incorporating such a fan.
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower
JP3125207B2 (ja) * 1995-07-07 2001-01-15 東京エレクトロン株式会社 真空処理装置
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
DE19702456B4 (de) * 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP3735749B2 (ja) * 1997-07-22 2006-01-18 光洋精工株式会社 ターボ分子ポンプ
JP3734613B2 (ja) * 1997-12-26 2006-01-11 株式会社荏原製作所 ターボ分子ポンプ
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
DE19942410A1 (de) * 1999-09-06 2001-03-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
FR2810375B1 (fr) * 2000-06-15 2002-11-29 Cit Alcatel Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide
JP2002048088A (ja) * 2000-07-31 2002-02-15 Seiko Instruments Inc 真空ポンプ
US6793466B2 (en) * 2000-10-03 2004-09-21 Ebara Corporation Vacuum pump
JP2002155891A (ja) * 2000-11-22 2002-05-31 Seiko Instruments Inc 真空ポンプ
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP4007130B2 (ja) * 2002-09-10 2007-11-14 株式会社豊田自動織機 真空ポンプ
FR2923556A1 (fr) * 2007-11-09 2009-05-15 Alcatel Lucent Sas Unite de pompage et dispositif de chauffage correspondant
KR20110044170A (ko) * 2008-08-19 2011-04-28 에드워즈 가부시키가이샤 진공 펌프
JP6147988B2 (ja) * 2012-11-08 2017-06-14 エドワーズ株式会社 真空ポンプ
JP6287475B2 (ja) * 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ
JP6353257B2 (ja) * 2014-03-31 2018-07-04 エドワーズ株式会社 排気口部品、および真空ポンプ
JP6943629B2 (ja) * 2017-05-30 2021-10-06 エドワーズ株式会社 真空ポンプとその加熱装置
CN116591934A (zh) * 2023-04-13 2023-08-15 北京通嘉宏瑞科技有限公司 泵体加热控制系统及泵体加热控制方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL45601C (de) * 1936-07-06
US2139740A (en) * 1937-06-24 1938-12-13 Distillation Products Inc Production of high vacuum and high vacuum pumps
US2707746A (en) * 1954-04-19 1955-05-03 Thomas C Gregg Space heater for dwellings incorporating the domestic hot water system
FR1304689A (fr) * 1961-08-04 1962-09-28 Snecma Pompe à vide turbomoléculaire perfectionnée
US3241322A (en) * 1963-02-11 1966-03-22 Gilbert Associates Turbine steam admission controls
US4167820A (en) * 1978-01-19 1979-09-18 Indola Cosmetics B.V. Electric hair dryer
JPS6043197B2 (ja) * 1981-12-23 1985-09-26 日本鋼管株式会社 ごみ焼却炉洗煙廃水処理方法
DE3216404C2 (de) * 1982-05-03 1984-05-03 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Heizung für eine Turbo-Molekularpumpe
DE3224506C1 (de) * 1982-07-01 1983-07-07 B.A.T. Cigaretten-Fabriken Gmbh, 2000 Hamburg Einrichtung zur Bestimmung der Anteile an kondensierbaren und unkondensierbaren Gasen bzw. Daempfen in Prozessgasstroemen
JPS5948318A (ja) * 1982-09-07 1984-03-19 Dainippon Printing Co Ltd 防火区画貫通コンベヤ−
JPS6043197U (ja) * 1983-05-19 1985-03-27 日電アネルバ株式会社 ねじ溝付き軸流分子ポンプ
JPS6043197A (ja) * 1983-08-19 1985-03-07 Japanese National Railways<Jnr> 換気装置
JPS60198394A (ja) * 1984-03-21 1985-10-07 Anelva Corp 真空処理装置の排気装置
JPS6128837A (ja) * 1984-07-18 1986-02-08 Shimadzu Corp 振動試験機
US4777022A (en) * 1984-08-28 1988-10-11 Stephen I. Boldish Epitaxial heater apparatus and process
US4693777A (en) * 1984-11-30 1987-09-15 Kabushiki Kaisha Toshiba Apparatus for producing semiconductor devices
JPS61247893A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 真空ポンプ
US4767914A (en) * 1986-09-16 1988-08-30 Glucksman Dov Z Electric hairdryer having a cage-shaped heater element

Also Published As

Publication number Publication date
US4904155A (en) 1990-02-27
EP0299458B1 (de) 1991-05-08
JPS6419198A (en) 1989-01-23
EP0299458A3 (en) 1989-04-05
JPH0525040B2 (de) 1993-04-09
EP0299458A2 (de) 1989-01-18

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8365 Fully valid after opposition proceedings
8327 Change in the person/name/address of the patent owner

Owner name: HITACHI PLANT TECHNOLOGIES, LTD., TOKIO, JP

8339 Ceased/non-payment of the annual fee