DE3767362D1 - Wafer-traeger fuer halbleiterbauteilerzeugung. - Google Patents
Wafer-traeger fuer halbleiterbauteilerzeugung.Info
- Publication number
- DE3767362D1 DE3767362D1 DE8787107139T DE3767362T DE3767362D1 DE 3767362 D1 DE3767362 D1 DE 3767362D1 DE 8787107139 T DE8787107139 T DE 8787107139T DE 3767362 T DE3767362 T DE 3767362T DE 3767362 D1 DE3767362 D1 DE 3767362D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor component
- wafer support
- component production
- production
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0471—Storage devices mechanical with access from beneath
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S55/00—Gas separation
- Y10S55/18—Work bench
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S55/00—Gas separation
- Y10S55/29—Air curtains
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Packaging Frangible Articles (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61115391A JPH0736418B2 (ja) | 1986-05-19 | 1986-05-19 | ウエーハキャリア |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3767362D1 true DE3767362D1 (de) | 1991-02-21 |
Family
ID=14661386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787107139T Expired - Fee Related DE3767362D1 (de) | 1986-05-19 | 1987-05-18 | Wafer-traeger fuer halbleiterbauteilerzeugung. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4770680A (de) |
EP (1) | EP0246587B1 (de) |
JP (1) | JPH0736418B2 (de) |
KR (1) | KR900004050B1 (de) |
DE (1) | DE3767362D1 (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3637880C2 (de) * | 1986-11-06 | 1994-09-01 | Meissner & Wurst | Transportierbares Behältnis zur Handhabung von Halbleiterelementen während ihrer Herstellung sowie Verfahren zur partikelfreien Übergabe von Produkten |
US4934920A (en) * | 1987-06-17 | 1990-06-19 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for producing semiconductor device |
US4927438A (en) * | 1987-12-01 | 1990-05-22 | Varian Associates, Inc. | Horizontal laminar air flow work station |
EP0319145A3 (de) * | 1987-12-01 | 1991-05-29 | Varian Associates, Inc. | Arbeitsplatz mit horizontaler wirbelfreier Luftströmung |
JPH01240291A (ja) * | 1988-03-22 | 1989-09-25 | Texas Instr Japan Ltd | ロボット |
JPH0451544A (ja) * | 1990-06-19 | 1992-02-20 | Fujitsu Ltd | ウエハ収納器 |
US5238503A (en) * | 1991-04-09 | 1993-08-24 | International Business Machines Corporation | Device for decontaminating a semiconductor wafer container |
US5380503A (en) * | 1992-03-13 | 1995-01-10 | Ebara Research Co., Ltd. | Stocker |
FR2697000B1 (fr) * | 1992-10-16 | 1994-11-25 | Commissariat Energie Atomique | Boîte plate de confinement d'un objet plat sous atmosphère spéciale. |
DE4310149C2 (de) * | 1993-03-29 | 1996-05-02 | Jenoptik Jena Gmbh | Einrichtung zur Handhabung von scheibenförmigen Objekten in einer Handhabungsebene eines lokalen Reinraumes |
US5570987A (en) * | 1993-12-14 | 1996-11-05 | W. L. Gore & Associates, Inc. | Semiconductor wafer transport container |
US5713711A (en) * | 1995-01-17 | 1998-02-03 | Bye/Oasis | Multiple interface door for wafer storage and handling container |
US5833726A (en) * | 1995-05-26 | 1998-11-10 | Extraction System, Inc. | Storing substrates between process steps within a processing facility |
US5910727A (en) * | 1995-11-30 | 1999-06-08 | Tokyo Electron Limited | Electrical inspecting apparatus with ventilation system |
US5843196A (en) * | 1997-01-21 | 1998-12-01 | International Business Machines Corporation | Ultra-clean transport carrier |
KR100576758B1 (ko) * | 1997-11-28 | 2006-05-03 | 가부시키가이샤 에바라 세이사꾸쇼 | 반도체기판용 반송박스 |
US6284020B1 (en) * | 1997-12-02 | 2001-09-04 | Kabushiki Kaisha Toshiba | Method of maintaining cleanliness of substrates and box for accommodating substrates |
US6521007B1 (en) | 1997-12-03 | 2003-02-18 | Ebara Corporation | Clean box |
JP3916380B2 (ja) * | 1999-07-06 | 2007-05-16 | 株式会社荏原製作所 | 基板搬送容器待機ステーション |
JP3998386B2 (ja) * | 2000-01-26 | 2007-10-24 | 三菱電機株式会社 | 液晶表示装置の製造装置および液晶表示装置の製造方法 |
JP3871508B2 (ja) | 2000-11-15 | 2007-01-24 | 株式会社荏原製作所 | 基板搬送容器の給電装置 |
JP2002313867A (ja) * | 2001-02-09 | 2002-10-25 | Toshiba Corp | 半導体装置の製造方法 |
JP2002299427A (ja) * | 2001-03-29 | 2002-10-11 | Mitsubishi Electric Corp | 基板カセット、基板汚染防止装置および半導体装置の製造方法 |
US6875282B2 (en) | 2001-05-17 | 2005-04-05 | Ebara Corporation | Substrate transport container |
DE10254762A1 (de) * | 2002-11-22 | 2004-06-09 | Transcoject Gesellschaft für medizinische Geräte mbH & Co. KG | Verfahren zur Herstellung und/oder Handhabung eines hochreinen Gegenstandes |
JP4597137B2 (ja) * | 2004-09-27 | 2010-12-15 | 三菱電機株式会社 | 半導体製造装置および半導体製造方法 |
US20080156679A1 (en) * | 2006-12-08 | 2008-07-03 | Bonora Anthony C | Environmental isolation system for flat panel displays |
US20090016862A1 (en) * | 2007-07-12 | 2009-01-15 | Gould Richard H | Method and apparatus for providing flat panel display environmental isolation |
CN103502508B (zh) | 2010-12-30 | 2016-04-27 | 维易科仪器公司 | 使用承载器扩展的晶圆加工 |
CN102364668B (zh) * | 2011-10-28 | 2014-08-13 | 北京太阳能电力研究院有限公司 | 硅片料盒以及硅片上料装置 |
KR102249316B1 (ko) | 2014-08-18 | 2021-05-07 | 삼성전자주식회사 | 웨이퍼 캐리어 |
JP2016219620A (ja) * | 2015-05-21 | 2016-12-22 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法およびそれに用いられるfoup |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3534862A (en) * | 1968-09-13 | 1970-10-20 | Rca Corp | Semiconductor wafer transporting jig |
DE2133877A1 (de) * | 1971-07-07 | 1973-01-18 | Siemens Ag | Anordnung zum eindiffundieren von dotierstoffen in halbleiterscheiben |
US4018183A (en) * | 1973-11-15 | 1977-04-19 | U.S. Philips Corporation | Apparatus for treating a plurality of semiconductor slices to a reacting gas current |
US4098923A (en) * | 1976-06-07 | 1978-07-04 | Motorola, Inc. | Pyrolytic deposition of silicon dioxide on semiconductors using a shrouded boat |
JPS5320867A (en) * | 1976-08-11 | 1978-02-25 | Hitachi Ltd | Housing and conveying machine of articles |
US4037830A (en) * | 1976-09-07 | 1977-07-26 | International Business Machines Corporation | Wafer handler |
US4232063A (en) * | 1978-11-14 | 1980-11-04 | Applied Materials, Inc. | Chemical vapor deposition reactor and process |
US4228902A (en) * | 1979-02-21 | 1980-10-21 | Kasper Instruments, Inc. | Carrier for semiconductive wafers |
JPS55134239A (en) * | 1979-04-04 | 1980-10-18 | Toshiba Corp | Clean box |
US4256229A (en) * | 1979-09-17 | 1981-03-17 | Rockwell International Corporation | Boat for wafer processing |
JPS57141928A (en) * | 1981-01-15 | 1982-09-02 | Fluoroware Inc | Wafer treating container |
US4412849A (en) * | 1981-04-09 | 1983-11-01 | Klenzaids Engineers Private Limited | Method and apparatus for control of gas-borne particulates |
JPS5939019A (ja) * | 1982-08-27 | 1984-03-03 | Hitachi Ltd | クリ−ン保管箱 |
JPS5969919A (ja) * | 1982-10-15 | 1984-04-20 | Yamato Scient Co Ltd | クリ−ンベンチの風速制御装置 |
JPS59172713A (ja) * | 1983-03-22 | 1984-09-29 | Nec Corp | 可搬型清浄容器 |
JPS60206017A (ja) * | 1984-03-30 | 1985-10-17 | Toshiba Corp | 清浄搬送システム |
US4582020A (en) * | 1984-05-04 | 1986-04-15 | Anicon, Inc. | Chemical vapor deposition wafer boat |
JPS6162740A (ja) * | 1984-09-03 | 1986-03-31 | Sanki Eng Co Ltd | クリ−ントンネル送風清浄装置 |
US4666429A (en) * | 1986-02-26 | 1987-05-19 | Intelligent Medicine, Inc. | Infusion device having improved valving apparatus |
-
1986
- 1986-05-19 JP JP61115391A patent/JPH0736418B2/ja not_active Expired - Lifetime
-
1987
- 1987-05-11 US US07/048,350 patent/US4770680A/en not_active Expired - Fee Related
- 1987-05-18 KR KR8704880A patent/KR900004050B1/ko not_active IP Right Cessation
- 1987-05-18 DE DE8787107139T patent/DE3767362D1/de not_active Expired - Fee Related
- 1987-05-18 EP EP87107139A patent/EP0246587B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR900004050B1 (en) | 1990-06-09 |
EP0246587B1 (de) | 1991-01-16 |
EP0246587A1 (de) | 1987-11-25 |
US4770680A (en) | 1988-09-13 |
JPH0736418B2 (ja) | 1995-04-19 |
KR870011668A (ko) | 1987-12-26 |
JPS62269334A (ja) | 1987-11-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |