JPS55134239A - Clean box - Google Patents

Clean box

Info

Publication number
JPS55134239A
JPS55134239A JP3975879A JP3975879A JPS55134239A JP S55134239 A JPS55134239 A JP S55134239A JP 3975879 A JP3975879 A JP 3975879A JP 3975879 A JP3975879 A JP 3975879A JP S55134239 A JPS55134239 A JP S55134239A
Authority
JP
Japan
Prior art keywords
box
air
clean
fan
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3975879A
Other languages
Japanese (ja)
Inventor
Masakazu Yokoyama
Shinichi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3975879A priority Critical patent/JPS55134239A/en
Publication of JPS55134239A publication Critical patent/JPS55134239A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Abstract

PURPOSE:To obtain a clean box suitable for transporting and storing semifinished products of semiconductor by a method wherein a fan for supplying air with pressure and a filter for filtering it are provided on a box having an air intake and an outlet of the atomosphere in the box, and thereby clean air is introduced. CONSTITUTION:Air intake 8a is provided on the upper part of a box 7, and outlet 8b for the atmosphere in the box is provided on its lower part. A fan 9, which is connected to a motor 10 and which is used for supplying air with pressure, and a filter 11 for filtering air are arranged. By the fan 9, air is sent with pressure from intake 8a to the filter 11 and it is filtered, and it becomes clean air. This is introduced into a clean chamber 12 and then it is discharged from outlet 8b. A work 1 is put into the clean chamber 12 from a door 7a. Since the work 1 is kept in a clean atmosphere, this box is suitable for storing and transporting components and semifinished products which detect contamination.
JP3975879A 1979-04-04 1979-04-04 Clean box Pending JPS55134239A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3975879A JPS55134239A (en) 1979-04-04 1979-04-04 Clean box

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3975879A JPS55134239A (en) 1979-04-04 1979-04-04 Clean box

Publications (1)

Publication Number Publication Date
JPS55134239A true JPS55134239A (en) 1980-10-18

Family

ID=12561842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3975879A Pending JPS55134239A (en) 1979-04-04 1979-04-04 Clean box

Country Status (1)

Country Link
JP (1) JPS55134239A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5981034U (en) * 1982-11-22 1984-05-31 日立プラント建設株式会社 Wafer transfer device
JPS62172126A (en) * 1986-01-25 1987-07-29 Teru Saamuko Kk Cleaning device
JPS62269334A (en) * 1986-05-19 1987-11-21 Fujitsu Ltd Wafer carrier
JPS6411945U (en) * 1987-07-10 1989-01-23
US4927438A (en) * 1987-12-01 1990-05-22 Varian Associates, Inc. Horizontal laminar air flow work station
JPH0298640U (en) * 1989-01-25 1990-08-06
JPH04131636A (en) * 1990-09-21 1992-05-06 Kondo Kogyo Kk Clean storing device and storing box used in clean storing device
WO2011108215A1 (en) * 2010-03-04 2011-09-09 東京エレクトロン株式会社 Substrate storing device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843676U (en) * 1971-09-24 1973-06-06
JPS505120U (en) * 1973-05-11 1975-01-20

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843676U (en) * 1971-09-24 1973-06-06
JPS505120U (en) * 1973-05-11 1975-01-20

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6317254Y2 (en) * 1982-11-22 1988-05-16
JPS5981034U (en) * 1982-11-22 1984-05-31 日立プラント建設株式会社 Wafer transfer device
JPH0573975B2 (en) * 1986-01-25 1993-10-15 Tel Sagami Ltd
JPS62172126A (en) * 1986-01-25 1987-07-29 Teru Saamuko Kk Cleaning device
JPS62269334A (en) * 1986-05-19 1987-11-21 Fujitsu Ltd Wafer carrier
JPS6411945U (en) * 1987-07-10 1989-01-23
JPH052449Y2 (en) * 1987-07-10 1993-01-21
US4927438A (en) * 1987-12-01 1990-05-22 Varian Associates, Inc. Horizontal laminar air flow work station
JPH0298640U (en) * 1989-01-25 1990-08-06
JPH04131636A (en) * 1990-09-21 1992-05-06 Kondo Kogyo Kk Clean storing device and storing box used in clean storing device
JPH0660758B2 (en) * 1990-09-21 1994-08-10 近藤工業株式会社 Clean stocker device
WO2011108215A1 (en) * 2010-03-04 2011-09-09 東京エレクトロン株式会社 Substrate storing device
JP2011186006A (en) * 2010-03-04 2011-09-22 Tokyo Electron Ltd Substrate storage device
CN102714169A (en) * 2010-03-04 2012-10-03 东京毅力科创株式会社 Substrate storing device

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