JPS5320867A - Housing and conveying machine of articles - Google Patents
Housing and conveying machine of articlesInfo
- Publication number
- JPS5320867A JPS5320867A JP9487076A JP9487076A JPS5320867A JP S5320867 A JPS5320867 A JP S5320867A JP 9487076 A JP9487076 A JP 9487076A JP 9487076 A JP9487076 A JP 9487076A JP S5320867 A JPS5320867 A JP S5320867A
- Authority
- JP
- Japan
- Prior art keywords
- articles
- housing
- conveying machine
- conveying
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Abstract
PURPOSE: Maintaining articles always clean and their conveying are made possible by providing a hermetic door, a clean air supply mechanism and a check valve.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9487076A JPS5320867A (en) | 1976-08-11 | 1976-08-11 | Housing and conveying machine of articles |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9487076A JPS5320867A (en) | 1976-08-11 | 1976-08-11 | Housing and conveying machine of articles |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5320867A true JPS5320867A (en) | 1978-02-25 |
Family
ID=14122073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9487076A Pending JPS5320867A (en) | 1976-08-11 | 1976-08-11 | Housing and conveying machine of articles |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5320867A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54114422A (en) * | 1978-02-27 | 1979-09-06 | Nippon Steel Corp | Production of ferritic stainless steel having good pressing property free of ridging generation |
JPS62269334A (en) * | 1986-05-19 | 1987-11-21 | Fujitsu Ltd | Wafer carrier |
JPS64738A (en) * | 1988-05-20 | 1989-01-05 | Hitachi Ltd | Heat treatment of semiconductor wafer |
-
1976
- 1976-08-11 JP JP9487076A patent/JPS5320867A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54114422A (en) * | 1978-02-27 | 1979-09-06 | Nippon Steel Corp | Production of ferritic stainless steel having good pressing property free of ridging generation |
JPS5761095B2 (en) * | 1978-02-27 | 1982-12-22 | Nippon Steel Corp | |
JPS62269334A (en) * | 1986-05-19 | 1987-11-21 | Fujitsu Ltd | Wafer carrier |
JPS64738A (en) * | 1988-05-20 | 1989-01-05 | Hitachi Ltd | Heat treatment of semiconductor wafer |
JPH0424855B2 (en) * | 1988-05-20 | 1992-04-28 | Hitachi Ltd |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5377057A (en) | 1,2-benxisoxazole derivatives | |
JPS5320867A (en) | Housing and conveying machine of articles | |
ES451329A1 (en) | 1,2-Benzoisoxazole derivatives and the production thereof | |
JPS52118604A (en) | Screw fluid machine | |
JPS539942A (en) | Sound-proof type engine operation machine | |
JPS5222111A (en) | Blower | |
JPS5234160A (en) | Breather valve | |
JPS5336877A (en) | Line type conveying device | |
JPS53109370A (en) | Aligning device | |
JPS5264009A (en) | Screw compressor | |
JPS524961A (en) | Hinge | |
JPS5299417A (en) | Package type fluid machine | |
FI895601A0 (en) | EN STERILIZERS AEROSOLBEHAOLLARE, SOM INNEHAOLLER EN VATTENHALTIG FYSIOLOGISK SALTLOESNING OCH ETT FOERFARANDE FOER STERILISERING AV BEHAOLLAREN. | |
JPS52100483A (en) | Isoleucomycin a5 | |
JPS5230901A (en) | Pumping plant | |
JPS51133810A (en) | Reciprocating gas compressor | |
JPS5326200A (en) | Automatic vending machine | |
JPS52129170A (en) | Article conveying apparatus | |
JPS51121812A (en) | The vibration proof apparatus of a compressor | |
JPS52108925A (en) | Protease inhibitor | |
JPS51139071A (en) | Sheet-shaped product supply device | |
JPS52150799A (en) | Calcium borate and production thereof | |
JPS5315326A (en) | N,n,n',n'-tetraglycidyltolylenediamine | |
JPS51121695A (en) | Door valve | |
JPS537672A (en) | 4-aminomethyl-5,6,7-trihydroxyisocoumarin |