JPS5320867A - Housing and conveying machine of articles - Google Patents

Housing and conveying machine of articles

Info

Publication number
JPS5320867A
JPS5320867A JP9487076A JP9487076A JPS5320867A JP S5320867 A JPS5320867 A JP S5320867A JP 9487076 A JP9487076 A JP 9487076A JP 9487076 A JP9487076 A JP 9487076A JP S5320867 A JPS5320867 A JP S5320867A
Authority
JP
Japan
Prior art keywords
articles
housing
conveying machine
conveying
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9487076A
Other languages
Japanese (ja)
Inventor
Kinya Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9487076A priority Critical patent/JPS5320867A/en
Publication of JPS5320867A publication Critical patent/JPS5320867A/en
Pending legal-status Critical Current

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  • Ventilation (AREA)

Abstract

PURPOSE: Maintaining articles always clean and their conveying are made possible by providing a hermetic door, a clean air supply mechanism and a check valve.
COPYRIGHT: (C)1978,JPO&Japio
JP9487076A 1976-08-11 1976-08-11 Housing and conveying machine of articles Pending JPS5320867A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9487076A JPS5320867A (en) 1976-08-11 1976-08-11 Housing and conveying machine of articles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9487076A JPS5320867A (en) 1976-08-11 1976-08-11 Housing and conveying machine of articles

Publications (1)

Publication Number Publication Date
JPS5320867A true JPS5320867A (en) 1978-02-25

Family

ID=14122073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9487076A Pending JPS5320867A (en) 1976-08-11 1976-08-11 Housing and conveying machine of articles

Country Status (1)

Country Link
JP (1) JPS5320867A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114422A (en) * 1978-02-27 1979-09-06 Nippon Steel Corp Production of ferritic stainless steel having good pressing property free of ridging generation
JPS62269334A (en) * 1986-05-19 1987-11-21 Fujitsu Ltd Wafer carrier
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114422A (en) * 1978-02-27 1979-09-06 Nippon Steel Corp Production of ferritic stainless steel having good pressing property free of ridging generation
JPS5761095B2 (en) * 1978-02-27 1982-12-22 Nippon Steel Corp
JPS62269334A (en) * 1986-05-19 1987-11-21 Fujitsu Ltd Wafer carrier
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer
JPH0424855B2 (en) * 1988-05-20 1992-04-28 Hitachi Ltd

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