DE3667361D1 - Verfahren zum herstellen eines metallischen verbindungsmusters fuer hochintegrierte schaltungsbauelemente. - Google Patents
Verfahren zum herstellen eines metallischen verbindungsmusters fuer hochintegrierte schaltungsbauelemente.Info
- Publication number
- DE3667361D1 DE3667361D1 DE8686402138T DE3667361T DE3667361D1 DE 3667361 D1 DE3667361 D1 DE 3667361D1 DE 8686402138 T DE8686402138 T DE 8686402138T DE 3667361 T DE3667361 T DE 3667361T DE 3667361 D1 DE3667361 D1 DE 3667361D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- integrated circuit
- circuit components
- highly integrated
- connection pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/5329—Insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76819—Smoothing of the dielectric
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Local Oxidation Of Silicon (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8514670A FR2588418B1 (fr) | 1985-10-03 | 1985-10-03 | Procede de formation d'un reseau metallique multicouche d'interconnexion des composants d'un circuit integre de haute densite et circuit integre en resultant |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3667361D1 true DE3667361D1 (de) | 1990-01-11 |
Family
ID=9323499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686402138T Expired - Fee Related DE3667361D1 (de) | 1985-10-03 | 1986-10-01 | Verfahren zum herstellen eines metallischen verbindungsmusters fuer hochintegrierte schaltungsbauelemente. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4826786A (de) |
EP (1) | EP0221798B1 (de) |
JP (1) | JPS62176147A (de) |
DE (1) | DE3667361D1 (de) |
FR (1) | FR2588418B1 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4994402A (en) * | 1987-06-26 | 1991-02-19 | Hewlett-Packard Company | Method of fabricating a coplanar, self-aligned contact structure in a semiconductor device |
JPH063804B2 (ja) * | 1988-01-21 | 1994-01-12 | シャープ株式会社 | 半導体装置製造方法 |
US4986878A (en) * | 1988-07-19 | 1991-01-22 | Cypress Semiconductor Corp. | Process for improved planarization of the passivation layers for semiconductor devices |
JPH02237135A (ja) * | 1989-03-10 | 1990-09-19 | Fujitsu Ltd | 半導体装置の製造方法 |
US4988405A (en) * | 1989-12-21 | 1991-01-29 | At&T Bell Laboratories | Fabrication of devices utilizing a wet etchback procedure |
JP2518435B2 (ja) * | 1990-01-29 | 1996-07-24 | ヤマハ株式会社 | 多層配線形成法 |
US5250468A (en) * | 1990-02-05 | 1993-10-05 | Mitsubishi Denki Kabushiki Kaisha | Method of manufacturing semiconductor device including interlaying insulating film |
US5132774A (en) * | 1990-02-05 | 1992-07-21 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device including interlayer insulating film |
US5245213A (en) * | 1991-10-10 | 1993-09-14 | Sgs-Thomson Microelectronics, Inc. | Planarized semiconductor product |
US5576225A (en) * | 1992-05-09 | 1996-11-19 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming electric circuit using anodic oxidation |
US5250472A (en) * | 1992-09-03 | 1993-10-05 | Industrial Technology Research Institute | Spin-on-glass integration planarization having siloxane partial etchback and silicate processes |
US5264386A (en) * | 1992-09-08 | 1993-11-23 | United Microelectronics Corporation | Read only memory manufacturing method |
US5312512A (en) * | 1992-10-23 | 1994-05-17 | Ncr Corporation | Global planarization using SOG and CMP |
JPH06302599A (ja) * | 1993-04-13 | 1994-10-28 | Toshiba Corp | 半導体装置およびその製造方法 |
US5486493A (en) * | 1994-02-25 | 1996-01-23 | Jeng; Shin-Puu | Planarized multi-level interconnect scheme with embedded low-dielectric constant insulators |
US5461010A (en) * | 1994-06-13 | 1995-10-24 | Industrial Technology Research Institute | Two step etch back spin-on-glass process for semiconductor planarization |
DE4434891B4 (de) * | 1994-09-29 | 2005-01-05 | Infineon Technologies Ag | Verfahren zum Freilegen einer oberen Stegfläche eines auf der Oberfläche eines Substrats ausgebildeten und mit einem Material umformten schmalen Steges im Mikrometerbereich und Anwendung eines solchen Verfahrens zur Kontaktierung schmaler Stege |
US5856707A (en) * | 1995-09-11 | 1999-01-05 | Stmicroelectronics, Inc. | Vias and contact plugs with an aspect ratio lower than the aspect ratio of the structure in which they are formed |
US5665657A (en) * | 1995-09-18 | 1997-09-09 | Taiwan Semiconductor Manufacturing Company, Ltd | Spin-on-glass partial etchback planarization process |
US6204107B1 (en) * | 1998-12-08 | 2001-03-20 | United Microelectronics Corp. | Method for forming multi-layered liner on sidewall of node contact opening |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3506880A (en) * | 1963-06-28 | 1970-04-14 | Ibm | Semiconductor device |
FR1542658A (fr) * | 1966-09-30 | Ibm | Technique de formation de verre photosensible pour faire des trous de contact dans des couches de verre de protection | |
JPS5849026B2 (ja) * | 1976-06-23 | 1983-11-01 | 株式会社日立製作所 | 多層配線の製法 |
JPS5621332A (en) * | 1979-07-31 | 1981-02-27 | Fujitsu Ltd | Manufacture of semiconductor device |
US4222792A (en) * | 1979-09-10 | 1980-09-16 | International Business Machines Corporation | Planar deep oxide isolation process utilizing resin glass and E-beam exposure |
JPS57177558A (en) * | 1981-04-24 | 1982-11-01 | Fujitsu Ltd | Semiconductor device and manufacture thereof |
US4492717A (en) * | 1981-07-27 | 1985-01-08 | International Business Machines Corporation | Method for forming a planarized integrated circuit |
CA1169022A (en) * | 1982-04-19 | 1984-06-12 | Kevin Duncan | Integrated circuit planarizing process |
JPS58184741A (ja) * | 1982-04-23 | 1983-10-28 | Toshiba Corp | 半導体装置の製造方法 |
JPS58197827A (ja) * | 1982-05-14 | 1983-11-17 | Toshiba Corp | 半導体装置の製造方法 |
JPS5966147A (ja) * | 1982-10-08 | 1984-04-14 | Hitachi Ltd | 多層配線の製造方法 |
JPS59169151A (ja) * | 1983-03-17 | 1984-09-25 | Toshiba Corp | 半導体装置の製造方法 |
JPS59215747A (ja) * | 1983-05-24 | 1984-12-05 | Nec Corp | 半導体装置の製造方法 |
JPS60138940A (ja) * | 1983-12-27 | 1985-07-23 | Toshiba Corp | 半導体装置の製造方法 |
JPS61116858A (ja) * | 1984-10-24 | 1986-06-04 | Fujitsu Ltd | 層間絶縁膜の形成方法 |
US4654113A (en) * | 1984-02-10 | 1987-03-31 | Fujitsu Limited | Process for fabricating a semiconductor device |
US4481070A (en) * | 1984-04-04 | 1984-11-06 | Advanced Micro Devices, Inc. | Double planarization process for multilayer metallization of integrated circuit structures |
US4519872A (en) * | 1984-06-11 | 1985-05-28 | International Business Machines Corporation | Use of depolymerizable polymers in the fabrication of lift-off structure for multilevel metal processes |
US4541169A (en) * | 1984-10-29 | 1985-09-17 | International Business Machines Corporation | Method for making studs for interconnecting metallization layers at different levels in a semiconductor chip |
JPS61180458A (ja) * | 1985-02-05 | 1986-08-13 | Nec Corp | 半導体装置の製造方法 |
US4662064A (en) * | 1985-08-05 | 1987-05-05 | Rca Corporation | Method of forming multi-level metallization |
FR2588417B1 (fr) * | 1985-10-03 | 1988-07-29 | Bull Sa | Procede de formation d'un reseau metallique multicouche d'interconnexion des composants d'un circuit integre de haute densite et circuit integre en resultant |
-
1985
- 1985-10-03 FR FR8514670A patent/FR2588418B1/fr not_active Expired
-
1986
- 1986-10-01 EP EP86402138A patent/EP0221798B1/de not_active Expired
- 1986-10-01 DE DE8686402138T patent/DE3667361D1/de not_active Expired - Fee Related
- 1986-10-02 US US06/914,356 patent/US4826786A/en not_active Expired - Fee Related
- 1986-10-03 JP JP61236067A patent/JPS62176147A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS62176147A (ja) | 1987-08-01 |
US4826786A (en) | 1989-05-02 |
EP0221798B1 (de) | 1989-12-06 |
FR2588418A1 (fr) | 1987-04-10 |
EP0221798A1 (de) | 1987-05-13 |
FR2588418B1 (fr) | 1988-07-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |