JPH0646447B2
(ja)
*
|
1984-07-25 |
1994-06-15 |
株式会社日立製作所 |
薄膜磁気ヘツドの製造方法
|
US4642162A
(en)
*
|
1986-01-02 |
1987-02-10 |
Honeywell Inc. |
Planarization of dielectric layers in integrated circuits
|
JPS63234533A
(ja)
*
|
1987-03-24 |
1988-09-29 |
Agency Of Ind Science & Technol |
ジヨセフソン接合素子の形成方法
|
NL8703039A
(nl)
*
|
1987-12-16 |
1989-07-17 |
Philips Nv |
Werkwijze voor het patroonmatig vervaardigen van een dunne laag uit een oxidisch supergeleidend materiaal.
|
US5049972A
(en)
*
|
1988-01-29 |
1991-09-17 |
Hitachi, Ltd. |
Method of manufacturing semiconductor integrated circuit device
|
US5223454A
(en)
*
|
1988-01-29 |
1993-06-29 |
Hitachi, Ltd. |
Method of manufacturing semiconductor integrated circuit device
|
GB8804668D0
(en)
*
|
1988-02-27 |
1988-03-30 |
Blamire M G |
Whole-wafer superconducting tunnel junctions
|
KR930008866B1
(ko)
*
|
1990-04-20 |
1993-09-16 |
가부시키가이샤 도시바 |
반도체장치 및 그 제조방법
|
EP0538077B1
(de)
*
|
1991-10-18 |
1996-05-22 |
Shinko Electric Industries Co. Ltd. |
Supraleitende Quanteninterferenz-Einrichtung
|
US5300813A
(en)
*
|
1992-02-26 |
1994-04-05 |
International Business Machines Corporation |
Refractory metal capped low resistivity metal conductor lines and vias
|
US7830587B2
(en)
*
|
1993-03-17 |
2010-11-09 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light with semiconductor substrate
|
US6674562B1
(en)
*
|
1994-05-05 |
2004-01-06 |
Iridigm Display Corporation |
Interferometric modulation of radiation
|
WO1995002901A1
(en)
*
|
1993-07-15 |
1995-01-26 |
Astarix, Inc. |
Top level via structure for programming prefabricated multi-level interconnect
|
US7460291B2
(en)
|
1994-05-05 |
2008-12-02 |
Idc, Llc |
Separable modulator
|
US7550794B2
(en)
|
2002-09-20 |
2009-06-23 |
Idc, Llc |
Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
|
US8081369B2
(en)
*
|
1994-05-05 |
2011-12-20 |
Qualcomm Mems Technologies, Inc. |
System and method for a MEMS device
|
US8014059B2
(en)
|
1994-05-05 |
2011-09-06 |
Qualcomm Mems Technologies, Inc. |
System and method for charge control in a MEMS device
|
US7826120B2
(en)
*
|
1994-05-05 |
2010-11-02 |
Qualcomm Mems Technologies, Inc. |
Method and device for multi-color interferometric modulation
|
US7776631B2
(en)
*
|
1994-05-05 |
2010-08-17 |
Qualcomm Mems Technologies, Inc. |
MEMS device and method of forming a MEMS device
|
US7852545B2
(en)
|
1994-05-05 |
2010-12-14 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US7839556B2
(en)
*
|
1994-05-05 |
2010-11-23 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US7808694B2
(en)
|
1994-05-05 |
2010-10-05 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US5648298A
(en)
*
|
1995-03-04 |
1997-07-15 |
Hyundai Electronics Industries Co., Ltd. |
Methods for forming a contact in a semiconductor device
|
US7898722B2
(en)
*
|
1995-05-01 |
2011-03-01 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device with restoring electrode
|
US7929197B2
(en)
*
|
1996-11-05 |
2011-04-19 |
Qualcomm Mems Technologies, Inc. |
System and method for a MEMS device
|
US7830588B2
(en)
*
|
1996-12-19 |
2010-11-09 |
Qualcomm Mems Technologies, Inc. |
Method of making a light modulating display device and associated transistor circuitry and structures thereof
|
US6140234A
(en)
|
1998-01-20 |
2000-10-31 |
International Business Machines Corporation |
Method to selectively fill recesses with conductive metal
|
US8928967B2
(en)
|
1998-04-08 |
2015-01-06 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
WO1999052006A2
(en)
|
1998-04-08 |
1999-10-14 |
Etalon, Inc. |
Interferometric modulation of radiation
|
WO2003007049A1
(en)
*
|
1999-10-05 |
2003-01-23 |
Iridigm Display Corporation |
Photonic mems and structures
|
DE60041314D1
(de)
*
|
1999-11-10 |
2009-02-26 |
Boeing Co |
Herstellungsverfahren für Dünnschichtbauelemente
|
DE10058886C1
(de)
*
|
2000-11-27 |
2002-05-23 |
Infineon Technologies Ag |
Verfahren zur Herstellung eines integrierten Halbleiter-Produkts
|
US7781850B2
(en)
|
2002-09-20 |
2010-08-24 |
Qualcomm Mems Technologies, Inc. |
Controlling electromechanical behavior of structures within a microelectromechanical systems device
|
US7129590B2
(en)
*
|
2003-05-14 |
2006-10-31 |
Intel Corporation |
Stencil and method for depositing material onto a substrate
|
JP2005286161A
(ja)
*
|
2004-03-30 |
2005-10-13 |
Ebara Corp |
形状修復方法及び装置、並びにそれらを用いた半導体デバイス製造方法
|
EP1779173A1
(de)
|
2004-07-29 |
2007-05-02 |
Idc, Llc |
System und verfahren zum mikroelektromechanischen betrieb eines interferometrischen modulators
|
US7630119B2
(en)
|
2004-09-27 |
2009-12-08 |
Qualcomm Mems Technologies, Inc. |
Apparatus and method for reducing slippage between structures in an interferometric modulator
|
US7564612B2
(en)
|
2004-09-27 |
2009-07-21 |
Idc, Llc |
Photonic MEMS and structures
|
US7420725B2
(en)
|
2004-09-27 |
2008-09-02 |
Idc, Llc |
Device having a conductive light absorbing mask and method for fabricating same
|
US7304784B2
(en)
|
2004-09-27 |
2007-12-04 |
Idc, Llc |
Reflective display device having viewable display on both sides
|
US7944599B2
(en)
|
2004-09-27 |
2011-05-17 |
Qualcomm Mems Technologies, Inc. |
Electromechanical device with optical function separated from mechanical and electrical function
|
US7372613B2
(en)
*
|
2004-09-27 |
2008-05-13 |
Idc, Llc |
Method and device for multistate interferometric light modulation
|
US7936497B2
(en)
|
2004-09-27 |
2011-05-03 |
Qualcomm Mems Technologies, Inc. |
MEMS device having deformable membrane characterized by mechanical persistence
|
US8008736B2
(en)
|
2004-09-27 |
2011-08-30 |
Qualcomm Mems Technologies, Inc. |
Analog interferometric modulator device
|
US7527995B2
(en)
*
|
2004-09-27 |
2009-05-05 |
Qualcomm Mems Technologies, Inc. |
Method of making prestructure for MEMS systems
|
US7583429B2
(en)
|
2004-09-27 |
2009-09-01 |
Idc, Llc |
Ornamental display device
|
US7289259B2
(en)
|
2004-09-27 |
2007-10-30 |
Idc, Llc |
Conductive bus structure for interferometric modulator array
|
US7302157B2
(en)
|
2004-09-27 |
2007-11-27 |
Idc, Llc |
System and method for multi-level brightness in interferometric modulation
|
US7884989B2
(en)
|
2005-05-27 |
2011-02-08 |
Qualcomm Mems Technologies, Inc. |
White interferometric modulators and methods for forming the same
|
CN101228092A
(zh)
|
2005-07-22 |
2008-07-23 |
高通股份有限公司 |
用于mems装置的支撑结构及其方法
|
EP2495212A3
(de)
|
2005-07-22 |
2012-10-31 |
QUALCOMM MEMS Technologies, Inc. |
MEMS-Vorrichtungen mit Stützstrukturen und Herstellungsverfahren dafür
|
US7795061B2
(en)
|
2005-12-29 |
2010-09-14 |
Qualcomm Mems Technologies, Inc. |
Method of creating MEMS device cavities by a non-etching process
|
US7916980B2
(en)
|
2006-01-13 |
2011-03-29 |
Qualcomm Mems Technologies, Inc. |
Interconnect structure for MEMS device
|
US7382515B2
(en)
|
2006-01-18 |
2008-06-03 |
Qualcomm Mems Technologies, Inc. |
Silicon-rich silicon nitrides as etch stops in MEMS manufacture
|
US7450295B2
(en)
|
2006-03-02 |
2008-11-11 |
Qualcomm Mems Technologies, Inc. |
Methods for producing MEMS with protective coatings using multi-component sacrificial layers
|
US20070268201A1
(en)
*
|
2006-05-22 |
2007-11-22 |
Sampsell Jeffrey B |
Back-to-back displays
|
US7649671B2
(en)
|
2006-06-01 |
2010-01-19 |
Qualcomm Mems Technologies, Inc. |
Analog interferometric modulator device with electrostatic actuation and release
|
US7471442B2
(en)
|
2006-06-15 |
2008-12-30 |
Qualcomm Mems Technologies, Inc. |
Method and apparatus for low range bit depth enhancements for MEMS display architectures
|
US7835061B2
(en)
|
2006-06-28 |
2010-11-16 |
Qualcomm Mems Technologies, Inc. |
Support structures for free-standing electromechanical devices
|
US7527998B2
(en)
|
2006-06-30 |
2009-05-05 |
Qualcomm Mems Technologies, Inc. |
Method of manufacturing MEMS devices providing air gap control
|
US7763546B2
(en)
*
|
2006-08-02 |
2010-07-27 |
Qualcomm Mems Technologies, Inc. |
Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
|
US7615385B2
(en)
|
2006-09-20 |
2009-11-10 |
Hypres, Inc |
Double-masking technique for increasing fabrication yield in superconducting electronics
|
US8115987B2
(en)
|
2007-02-01 |
2012-02-14 |
Qualcomm Mems Technologies, Inc. |
Modulating the intensity of light from an interferometric reflector
|
US7916378B2
(en)
*
|
2007-03-08 |
2011-03-29 |
Qualcomm Mems Technologies, Inc. |
Method and apparatus for providing a light absorbing mask in an interferometric modulator display
|
US7733552B2
(en)
|
2007-03-21 |
2010-06-08 |
Qualcomm Mems Technologies, Inc |
MEMS cavity-coating layers and methods
|
US7643202B2
(en)
|
2007-05-09 |
2010-01-05 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical system having a dielectric movable membrane and a mirror
|
US7719752B2
(en)
|
2007-05-11 |
2010-05-18 |
Qualcomm Mems Technologies, Inc. |
MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
|
US7782517B2
(en)
|
2007-06-21 |
2010-08-24 |
Qualcomm Mems Technologies, Inc. |
Infrared and dual mode displays
|
US7630121B2
(en)
|
2007-07-02 |
2009-12-08 |
Qualcomm Mems Technologies, Inc. |
Electromechanical device with optical function separated from mechanical and electrical function
|
EP2183623A1
(de)
|
2007-07-31 |
2010-05-12 |
Qualcomm Mems Technologies, Inc. |
Einrichtungen zur verstärkung der farbverschiebung interferometrischer modulatoren
|
US7847999B2
(en)
|
2007-09-14 |
2010-12-07 |
Qualcomm Mems Technologies, Inc. |
Interferometric modulator display devices
|
US7773286B2
(en)
|
2007-09-14 |
2010-08-10 |
Qualcomm Mems Technologies, Inc. |
Periodic dimple array
|
JP5302322B2
(ja)
|
2007-10-19 |
2013-10-02 |
クォルコム・メムズ・テクノロジーズ・インコーポレーテッド |
一体型光起電力を有するディスプレイ
|
US8058549B2
(en)
|
2007-10-19 |
2011-11-15 |
Qualcomm Mems Technologies, Inc. |
Photovoltaic devices with integrated color interferometric film stacks
|
WO2009055393A1
(en)
|
2007-10-23 |
2009-04-30 |
Qualcomm Mems Technologies, Inc. |
Adjustably transmissive mems-based devices
|
US8941631B2
(en)
|
2007-11-16 |
2015-01-27 |
Qualcomm Mems Technologies, Inc. |
Simultaneous light collection and illumination on an active display
|
US8164821B2
(en)
|
2008-02-22 |
2012-04-24 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device with thermal expansion balancing layer or stiffening layer
|
US7944604B2
(en)
|
2008-03-07 |
2011-05-17 |
Qualcomm Mems Technologies, Inc. |
Interferometric modulator in transmission mode
|
US7612933B2
(en)
|
2008-03-27 |
2009-11-03 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device with spacing layer
|
US7898723B2
(en)
|
2008-04-02 |
2011-03-01 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical systems display element with photovoltaic structure
|
US7969638B2
(en)
|
2008-04-10 |
2011-06-28 |
Qualcomm Mems Technologies, Inc. |
Device having thin black mask and method of fabricating the same
|
US7851239B2
(en)
|
2008-06-05 |
2010-12-14 |
Qualcomm Mems Technologies, Inc. |
Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices
|
US8023167B2
(en)
|
2008-06-25 |
2011-09-20 |
Qualcomm Mems Technologies, Inc. |
Backlight displays
|
US7768690B2
(en)
*
|
2008-06-25 |
2010-08-03 |
Qualcomm Mems Technologies, Inc. |
Backlight displays
|
US7859740B2
(en)
|
2008-07-11 |
2010-12-28 |
Qualcomm Mems Technologies, Inc. |
Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
|
US7855826B2
(en)
*
|
2008-08-12 |
2010-12-21 |
Qualcomm Mems Technologies, Inc. |
Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices
|
US8358266B2
(en)
|
2008-09-02 |
2013-01-22 |
Qualcomm Mems Technologies, Inc. |
Light turning device with prismatic light turning features
|
US8270056B2
(en)
|
2009-03-23 |
2012-09-18 |
Qualcomm Mems Technologies, Inc. |
Display device with openings between sub-pixels and method of making same
|
US7864403B2
(en)
|
2009-03-27 |
2011-01-04 |
Qualcomm Mems Technologies, Inc. |
Post-release adjustment of interferometric modulator reflectivity
|
US9121979B2
(en)
|
2009-05-29 |
2015-09-01 |
Qualcomm Mems Technologies, Inc. |
Illumination devices and methods of fabrication thereof
|
US8270062B2
(en)
|
2009-09-17 |
2012-09-18 |
Qualcomm Mems Technologies, Inc. |
Display device with at least one movable stop element
|
US8488228B2
(en)
|
2009-09-28 |
2013-07-16 |
Qualcomm Mems Technologies, Inc. |
Interferometric display with interferometric reflector
|
WO2011126953A1
(en)
|
2010-04-09 |
2011-10-13 |
Qualcomm Mems Technologies, Inc. |
Mechanical layer of an electromechanical device and methods of forming the same
|
WO2012024238A1
(en)
|
2010-08-17 |
2012-02-23 |
Qualcomm Mems Technologies, Inc. |
Actuation and calibration of a charge neutral electrode in an interferometric display device
|
US9057872B2
(en)
|
2010-08-31 |
2015-06-16 |
Qualcomm Mems Technologies, Inc. |
Dielectric enhanced mirror for IMOD display
|
US9134527B2
(en)
|
2011-04-04 |
2015-09-15 |
Qualcomm Mems Technologies, Inc. |
Pixel via and methods of forming the same
|
US8963159B2
(en)
|
2011-04-04 |
2015-02-24 |
Qualcomm Mems Technologies, Inc. |
Pixel via and methods of forming the same
|
US8659816B2
(en)
|
2011-04-25 |
2014-02-25 |
Qualcomm Mems Technologies, Inc. |
Mechanical layer and methods of making the same
|
US8736939B2
(en)
|
2011-11-04 |
2014-05-27 |
Qualcomm Mems Technologies, Inc. |
Matching layer thin-films for an electromechanical systems reflective display device
|