DE3575241D1 - Halbleiteranordnung und verfahren zum herstellen derselben. - Google Patents
Halbleiteranordnung und verfahren zum herstellen derselben.Info
- Publication number
- DE3575241D1 DE3575241D1 DE8585306249T DE3575241T DE3575241D1 DE 3575241 D1 DE3575241 D1 DE 3575241D1 DE 8585306249 T DE8585306249 T DE 8585306249T DE 3575241 T DE3575241 T DE 3575241T DE 3575241 D1 DE3575241 D1 DE 3575241D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- same
- semiconductor arrangement
- semiconductor
- arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66636—Lateral single gate silicon transistors with source or drain recessed by etching or first recessed by etching and then refilled
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41766—Source or drain electrodes for field effect devices with at least part of the source or drain electrode having contact below the semiconductor surface, e.g. the source or drain electrode formed at least partially in a groove or with inclusions of conductor inside the semiconductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59182810A JPS6161441A (ja) | 1984-09-03 | 1984-09-03 | 半導体装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3575241D1 true DE3575241D1 (de) | 1990-02-08 |
Family
ID=16124832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585306249T Expired - Lifetime DE3575241D1 (de) | 1984-09-03 | 1985-09-03 | Halbleiteranordnung und verfahren zum herstellen derselben. |
Country Status (5)
Country | Link |
---|---|
US (2) | US4860084A (de) |
EP (1) | EP0174185B1 (de) |
JP (1) | JPS6161441A (de) |
KR (1) | KR900008359B1 (de) |
DE (1) | DE3575241D1 (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04368182A (ja) * | 1991-06-17 | 1992-12-21 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
US4795436A (en) * | 1983-11-14 | 1989-01-03 | Bio-Mimetics, Inc. | Bioadhesive composition and method of treatment therewith |
JPH0226049A (ja) * | 1988-07-14 | 1990-01-29 | Matsushita Electron Corp | 半導体装置の製造方法 |
US5084418A (en) * | 1988-12-27 | 1992-01-28 | Texas Instruments Incorporated | Method of making an array device with buried interconnects |
US5216264A (en) * | 1989-06-07 | 1993-06-01 | Sharp Kabushiki Kaisha | Silicon carbide MOS type field-effect transistor with at least one of the source and drain regions is formed by the use of a schottky contact |
US5585288A (en) * | 1990-07-16 | 1996-12-17 | Raytheon Company | Digital MMIC/analog MMIC structures and process |
JPH0496336A (ja) * | 1990-08-11 | 1992-03-27 | Nec Corp | Mos型半導体装置 |
US5506421A (en) * | 1992-11-24 | 1996-04-09 | Cree Research, Inc. | Power MOSFET in silicon carbide |
US5447871A (en) * | 1993-03-05 | 1995-09-05 | Goldstein; Edward F. | Electrically conductive interconnection through a body of semiconductor material |
US6310384B1 (en) * | 1993-07-02 | 2001-10-30 | Hitachi, Ltd. | Low stress semiconductor devices with thermal oxide isolation |
US5395777A (en) * | 1994-04-06 | 1995-03-07 | United Microelectronics Corp. | Method of producing VDMOS transistors |
US5466616A (en) * | 1994-04-06 | 1995-11-14 | United Microelectronics Corp. | Method of producing an LDMOS transistor having reduced dimensions, reduced leakage, and a reduced propensity to latch-up |
US5387534A (en) * | 1994-05-05 | 1995-02-07 | Micron Semiconductor, Inc. | Method of forming an array of non-volatile sonos memory cells and array of non-violatile sonos memory cells |
FR2720191B1 (fr) * | 1994-05-18 | 1996-10-18 | Michel Haond | Transistor à effet de champ à grille isolée, et procédé de fabrication correspondant. |
US5895766A (en) | 1995-09-20 | 1999-04-20 | Micron Technology, Inc. | Method of forming a field effect transistor |
JP3012187B2 (ja) * | 1996-02-05 | 2000-02-21 | 松下電子工業株式会社 | 半導体装置の製造方法 |
US5831312A (en) * | 1996-04-09 | 1998-11-03 | United Microelectronics Corporation | Electrostic discharge protection device comprising a plurality of trenches |
US5721146A (en) * | 1996-04-29 | 1998-02-24 | Taiwan Semiconductor Manufacturing Company Ltd | Method of forming buried contact architecture within a trench |
US5719409A (en) * | 1996-06-06 | 1998-02-17 | Cree Research, Inc. | Silicon carbide metal-insulator semiconductor field effect transistor |
US5736418A (en) * | 1996-06-07 | 1998-04-07 | Lsi Logic Corporation | Method for fabricating a field effect transistor using microtrenches to control hot electron effects |
TW313674B (en) * | 1996-09-21 | 1997-08-21 | United Microelectronics Corp | High pressure metal oxide semiconductor device and manufacturing method thereof |
DE19711165A1 (de) * | 1997-03-18 | 1998-09-24 | Smi Syst Microelect Innovat | Kontaktanordnung einer planaren, integrierbaren Halbleiteranordnung und Verfahren zur Herstellung dieser Kontaktanordnung |
US6297533B1 (en) * | 1997-12-04 | 2001-10-02 | The Whitaker Corporation | LDMOS structure with via grounded source |
US6153934A (en) * | 1998-07-30 | 2000-11-28 | International Business Machines Corporation | Buried butted contact and method for fabricating |
JP3996286B2 (ja) * | 1998-11-27 | 2007-10-24 | 株式会社ルネサステクノロジ | 半導体装置およびその製造方法 |
JP3566885B2 (ja) * | 1999-06-02 | 2004-09-15 | シャープ株式会社 | トレンチアイソレーションの形成方法及び半導体装置の製造方法 |
US7217977B2 (en) * | 2004-04-19 | 2007-05-15 | Hrl Laboratories, Llc | Covert transformation of transistor properties as a circuit protection method |
US6815816B1 (en) * | 2000-10-25 | 2004-11-09 | Hrl Laboratories, Llc | Implanted hidden interconnections in a semiconductor device for preventing reverse engineering |
US7049667B2 (en) | 2002-09-27 | 2006-05-23 | Hrl Laboratories, Llc | Conductive channel pseudo block process and circuit to inhibit reverse engineering |
AU2003293540A1 (en) | 2002-12-13 | 2004-07-09 | Raytheon Company | Integrated circuit modification using well implants |
JP2004363302A (ja) * | 2003-06-04 | 2004-12-24 | Toshiba Corp | Mosfet |
KR100604527B1 (ko) * | 2003-12-31 | 2006-07-24 | 동부일렉트로닉스 주식회사 | 바이폴라 트랜지스터 제조방법 |
US7242063B1 (en) | 2004-06-29 | 2007-07-10 | Hrl Laboratories, Llc | Symmetric non-intrusive and covert technique to render a transistor permanently non-operable |
KR101101192B1 (ko) * | 2004-08-26 | 2012-01-03 | 동부일렉트로닉스 주식회사 | 반도체 소자의 금속 배선 형성 방법 |
US8168487B2 (en) | 2006-09-28 | 2012-05-01 | Hrl Laboratories, Llc | Programmable connection and isolation of active regions in an integrated circuit using ambiguous features to confuse a reverse engineer |
CN113611736B (zh) * | 2020-05-29 | 2022-11-22 | 联芯集成电路制造(厦门)有限公司 | 半导体元件及其制作方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3553536A (en) * | 1968-11-19 | 1971-01-05 | Rca Corp | Semiconductor rectifiers having controlled storage and recovery characteristics |
GB1507299A (en) * | 1974-03-26 | 1978-04-12 | Signetics Corp | Integrated semiconductor devices |
US4151546A (en) * | 1976-01-14 | 1979-04-24 | Tokyo Shibaura Electric Co., Ltd. | Semiconductor device having electrode-lead layer units of differing thicknesses |
JPS5363983A (en) * | 1976-11-19 | 1978-06-07 | Toshiba Corp | Semiconductor device |
JPS5379378A (en) * | 1976-12-23 | 1978-07-13 | Matsushita Electric Ind Co Ltd | Semoconductor davice and its production |
US4116720A (en) * | 1977-12-27 | 1978-09-26 | Burroughs Corporation | Method of making a V-MOS field effect transistor for a dynamic memory cell having improved capacitance |
JPS55107260A (en) * | 1979-02-08 | 1980-08-16 | Shindengen Electric Mfg Co Ltd | Power transistor |
DE2929939A1 (de) * | 1979-07-24 | 1981-02-19 | Licentia Gmbh | Halbleiteranordnung und verfahren zu ihrer herstellung |
JPS5633823A (en) * | 1979-08-29 | 1981-04-04 | Toshiba Corp | Preparation of semiconductor device |
JPS56111217A (en) * | 1980-02-07 | 1981-09-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Preparation of semiconductor device |
US4397075A (en) * | 1980-07-03 | 1983-08-09 | International Business Machines Corporation | FET Memory cell structure and process |
EP0067566A3 (de) * | 1981-06-13 | 1985-08-07 | Plessey Overseas Limited | Integrierter Lichtdetektor oder -generator mit Verstärker |
US4458259A (en) * | 1981-11-12 | 1984-07-03 | Gte Laboratories Incorporated | Etched-source static induction transistor |
JPS58137245A (ja) * | 1982-02-10 | 1983-08-15 | Hitachi Ltd | 大規模半導体メモリ |
US4625388A (en) * | 1982-04-26 | 1986-12-02 | Acrian, Inc. | Method of fabricating mesa MOSFET using overhang mask and resulting structure |
US4503598A (en) * | 1982-05-20 | 1985-03-12 | Fairchild Camera & Instrument Corporation | Method of fabricating power MOSFET structure utilizing self-aligned diffusion and etching techniques |
JPS5963719A (ja) * | 1982-10-04 | 1984-04-11 | Matsushita Electronics Corp | 半導体装置 |
JPS60126861A (ja) * | 1983-12-13 | 1985-07-06 | Fujitsu Ltd | 半導体記憶装置 |
US4633281A (en) * | 1984-06-08 | 1986-12-30 | Eaton Corporation | Dual stack power JFET with buried field shaping depletion regions |
US4622569A (en) * | 1984-06-08 | 1986-11-11 | Eaton Corporation | Lateral bidirectional power FET with notched multi-channel stacking and with dual gate reference terminal means |
-
1984
- 1984-09-03 JP JP59182810A patent/JPS6161441A/ja active Pending
-
1985
- 1985-06-05 KR KR1019850003944A patent/KR900008359B1/ko not_active IP Right Cessation
- 1985-09-03 EP EP85306249A patent/EP0174185B1/de not_active Expired - Lifetime
- 1985-09-03 DE DE8585306249T patent/DE3575241D1/de not_active Expired - Lifetime
-
1989
- 1989-01-03 US US07/293,570 patent/US4860084A/en not_active Expired - Fee Related
- 1989-06-07 US US07/362,653 patent/US4914050A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR860002862A (ko) | 1986-04-30 |
KR900008359B1 (ko) | 1990-11-17 |
EP0174185A2 (de) | 1986-03-12 |
US4914050A (en) | 1990-04-03 |
JPS6161441A (ja) | 1986-03-29 |
EP0174185A3 (en) | 1988-01-07 |
US4860084A (en) | 1989-08-22 |
EP0174185B1 (de) | 1990-01-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) |