DE3877875D1 - Bestandteil zum erzeugen von halbleitergeraeten und verfahren zu dessen herstellung. - Google Patents
Bestandteil zum erzeugen von halbleitergeraeten und verfahren zu dessen herstellung.Info
- Publication number
- DE3877875D1 DE3877875D1 DE8888114166T DE3877875T DE3877875D1 DE 3877875 D1 DE3877875 D1 DE 3877875D1 DE 8888114166 T DE8888114166 T DE 8888114166T DE 3877875 T DE3877875 T DE 3877875T DE 3877875 D1 DE3877875 D1 DE 3877875D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- component
- semiconductor devices
- producing semiconductor
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/14—Substrate holders or susceptors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/901—Printed circuit
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Structural Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62216490A JP2548949B2 (ja) | 1987-09-01 | 1987-09-01 | 半導体製造用構成部材 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3877875D1 true DE3877875D1 (de) | 1993-03-11 |
DE3877875T2 DE3877875T2 (de) | 1993-07-01 |
Family
ID=16689248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888114166T Expired - Fee Related DE3877875T2 (de) | 1987-09-01 | 1988-08-31 | Bestandteil zum erzeugen von halbleitergeraeten und verfahren zu dessen herstellung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4987016A (de) |
EP (1) | EP0308695B1 (de) |
JP (1) | JP2548949B2 (de) |
DE (1) | DE3877875T2 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05152229A (ja) * | 1991-11-26 | 1993-06-18 | Mitsubishi Materials Corp | 熱処理炉 |
JP2606932Y2 (ja) * | 1992-06-29 | 2001-02-19 | 株式会社福井信越石英 | 縦型ウエーハ保持ボート |
FR2702088B1 (fr) * | 1993-02-24 | 1995-05-24 | Sgs Thomson Microelectronics | Nacelle pour plaquettes de silicium. |
US5538230A (en) * | 1994-08-08 | 1996-07-23 | Sibley; Thomas | Silicon carbide carrier for wafer processing |
US5443649A (en) * | 1994-11-22 | 1995-08-22 | Sibley; Thomas | Silicon carbide carrier for wafer processing in vertical furnaces |
JPH09306980A (ja) * | 1996-05-17 | 1997-11-28 | Asahi Glass Co Ltd | 縦型ウエハボート |
US5702997A (en) * | 1996-10-04 | 1997-12-30 | Saint-Gobain/Norton Industrial Ceramics Corp. | Process for making crack-free silicon carbide diffusion components |
KR100303752B1 (ko) * | 1997-09-02 | 2001-11-30 | 이와나미 기요히사 | Cvd 실리콘 카바이드 필름 코팅을 갖는 반도체 웨이퍼 홀더 |
EP0901152B1 (de) * | 1997-09-03 | 2003-04-02 | Nippon Pillar Packing Co., Ltd. | Träger für einen Halbleiterwafer mit einer CVD Siliziumkarbiden Filmbeschichtung |
US6673198B1 (en) | 1999-12-22 | 2004-01-06 | Lam Research Corporation | Semiconductor processing equipment having improved process drift control |
EP1184355B1 (de) * | 2000-02-15 | 2006-12-13 | Toshiba Ceramics Co., Ltd. | Verfahren zur herstellung von si-sic-gliedern zur thermischen behandlung von halbleitern |
JP2001345268A (ja) * | 2000-05-31 | 2001-12-14 | Matsushita Electric Ind Co Ltd | 半導体製造装置及び半導体の製造方法 |
US6811040B2 (en) | 2001-07-16 | 2004-11-02 | Rohm And Haas Company | Wafer holding apparatus |
US20040188319A1 (en) * | 2003-03-28 | 2004-09-30 | Saint-Gobain Ceramics & Plastics, Inc. | Wafer carrier having improved processing characteristics |
CN101018885B (zh) * | 2004-08-24 | 2010-07-14 | 圣戈本陶瓷及塑料股份有限公司 | 半导体加工部件及用该部件进行的半导体加工 |
DE102009052308B3 (de) * | 2009-11-09 | 2011-02-10 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung eines Quarzglaszylinders sowie Träger zur Durchführung des Verfahrens |
JP5991284B2 (ja) * | 2013-08-23 | 2016-09-14 | 信越半導体株式会社 | シリコンウェーハの熱処理方法 |
JP6845020B2 (ja) * | 2017-01-11 | 2021-03-17 | グローバルウェーハズ・ジャパン株式会社 | シリコンウェーハの熱処理方法 |
JP2020090420A (ja) * | 2018-12-07 | 2020-06-11 | 住友金属鉱山株式会社 | 黒鉛製またはセラミックス製の基板、基板の製造方法、炭化珪素の成膜方法および炭化珪素基板の製造方法 |
WO2021065355A1 (ja) * | 2019-10-02 | 2021-04-08 | 日本碍子株式会社 | 耐火物 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2641723A1 (de) * | 1976-09-16 | 1978-03-30 | Wacker Chemitronic | Verfahren zur erhoehung der durch induktionsheizung in duennen kohleplatten erreichbaren temperatur |
JPS6045154A (ja) * | 1983-08-18 | 1985-03-11 | 大日本印刷株式会社 | ポリエステル樹脂複合容器およびその製造方法 |
JP2573480B2 (ja) * | 1985-11-22 | 1997-01-22 | 東芝セラミックス 株式会社 | 半導体熱処理用治具 |
-
1987
- 1987-09-01 JP JP62216490A patent/JP2548949B2/ja not_active Expired - Lifetime
-
1988
- 1988-08-31 DE DE8888114166T patent/DE3877875T2/de not_active Expired - Fee Related
- 1988-08-31 EP EP88114166A patent/EP0308695B1/de not_active Expired - Lifetime
- 1988-09-01 US US07/239,609 patent/US4987016A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE3877875T2 (de) | 1993-07-01 |
EP0308695B1 (de) | 1993-01-27 |
EP0308695A3 (en) | 1990-06-06 |
EP0308695A2 (de) | 1989-03-29 |
US4987016A (en) | 1991-01-22 |
JPS6461376A (en) | 1989-03-08 |
JP2548949B2 (ja) | 1996-10-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |