DE3543251C2 - - Google Patents
Info
- Publication number
- DE3543251C2 DE3543251C2 DE3543251A DE3543251A DE3543251C2 DE 3543251 C2 DE3543251 C2 DE 3543251C2 DE 3543251 A DE3543251 A DE 3543251A DE 3543251 A DE3543251 A DE 3543251A DE 3543251 C2 DE3543251 C2 DE 3543251C2
- Authority
- DE
- Germany
- Prior art keywords
- electrodes
- holes
- electrode
- state component
- piezoelectric solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 claims description 54
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 239000004020 conductor Substances 0.000 claims description 7
- 238000010304 firing Methods 0.000 claims description 3
- 238000005245 sintering Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59261507A JPS61139112A (ja) | 1984-12-10 | 1984-12-10 | 周波数調整可能な積層型圧電素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3543251A1 DE3543251A1 (de) | 1986-06-12 |
DE3543251C2 true DE3543251C2 (US06272168-20010807-M00014.png) | 1993-02-04 |
Family
ID=17362861
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19853543251 Granted DE3543251A1 (de) | 1984-12-10 | 1985-12-06 | Piezoelektrisches festkoerperbauelement |
Country Status (3)
Country | Link |
---|---|
US (1) | US4759107A (US06272168-20010807-M00014.png) |
JP (1) | JPS61139112A (US06272168-20010807-M00014.png) |
DE (1) | DE3543251A1 (US06272168-20010807-M00014.png) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63155808A (ja) * | 1986-12-18 | 1988-06-29 | Nec Corp | 積層圧電素子 |
WO1990003044A1 (en) * | 1988-09-12 | 1990-03-22 | Microflex Technology, Inc. | Protected piezoelectric polymer bimorph |
JPH07105685B2 (ja) * | 1988-12-23 | 1995-11-13 | 株式会社村田製作所 | 圧電共振装置の製造方法 |
JPH0733087B2 (ja) * | 1989-06-09 | 1995-04-12 | シャープ株式会社 | インクジェットプリンタ |
JP2867437B2 (ja) * | 1989-07-19 | 1999-03-08 | ブラザー工業株式会社 | 圧電式インクジェットプリンタヘッド |
JPH04159785A (ja) * | 1990-10-23 | 1992-06-02 | Nec Corp | 電歪効果素子 |
JP3185226B2 (ja) * | 1991-01-30 | 2001-07-09 | 株式会社村田製作所 | 圧電バイモルフ素子の駆動方法及び圧電バイモルフ素子 |
JP2611554B2 (ja) * | 1991-02-28 | 1997-05-21 | 株式会社村田製作所 | 圧電部品 |
DE69315767T2 (de) * | 1992-08-25 | 1998-05-07 | Canon Kk | Verfahren zur Herstellung einer laminierten piezoelektrischen Anordnung und Polarisationsverfahren und vibrationswellengetriebener Motor |
US6050679A (en) * | 1992-08-27 | 2000-04-18 | Hitachi Koki Imaging Solutions, Inc. | Ink jet printer transducer array with stacked or single flat plate element |
US5367500A (en) * | 1992-09-30 | 1994-11-22 | The United States Of America As Represented By The Secretary Of The Navy | Transducer structure |
JP3241129B2 (ja) * | 1992-11-20 | 2001-12-25 | 太平洋セメント株式会社 | 振動波モータ用の積層型圧電素子及びその製造方法 |
JPH06334236A (ja) * | 1993-05-20 | 1994-12-02 | Fujitsu Ltd | 積層型圧電・電歪アクチュエータの製造方法 |
EP0661764B1 (en) * | 1993-12-27 | 1999-03-10 | Canon Kabushiki Kaisha | Vibration wave actuator |
US5786655A (en) * | 1994-05-26 | 1998-07-28 | Canon Kabushiki Kaisha | Strain element and vibration device |
JP3432321B2 (ja) * | 1995-01-31 | 2003-08-04 | 太平洋セメント株式会社 | 積層セラミックス圧電体素子 |
JP2996137B2 (ja) * | 1995-03-31 | 1999-12-27 | 株式会社村田製作所 | 振動ジャイロ |
US5814919A (en) * | 1995-04-28 | 1998-09-29 | Canon Kabushiki Kaisha | Electro-mechanical energy conversion element and a vibration wave actuator using the electro-mechanical energy conversion element |
JP3266031B2 (ja) * | 1996-04-18 | 2002-03-18 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
JP3271517B2 (ja) * | 1996-04-05 | 2002-04-02 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
US6016024A (en) * | 1996-04-05 | 2000-01-18 | Murata Manufacturing Co., Ltd. | Piezoelectric component |
US5939819A (en) * | 1996-04-18 | 1999-08-17 | Murata Manufacturing Co., Ltd. | Electronic component and ladder filter |
JPH1079639A (ja) * | 1996-07-10 | 1998-03-24 | Murata Mfg Co Ltd | 圧電共振子およびそれを用いた電子部品 |
ATE248438T1 (de) * | 1996-07-12 | 2003-09-15 | Taiheiyo Cement Corp | Piezoelektrische transformatoranordnung |
JPH1084244A (ja) * | 1996-07-18 | 1998-03-31 | Murata Mfg Co Ltd | 圧電共振子およびそれを用いた電子部品 |
JP3271541B2 (ja) * | 1996-07-26 | 2002-04-02 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
JP3577170B2 (ja) * | 1996-08-05 | 2004-10-13 | 株式会社村田製作所 | 圧電共振子とその製造方法およびそれを用いた電子部品 |
JPH10107579A (ja) * | 1996-08-06 | 1998-04-24 | Murata Mfg Co Ltd | 圧電部品 |
JPH10126203A (ja) * | 1996-08-27 | 1998-05-15 | Murata Mfg Co Ltd | 圧電共振子およびそれを用いた電子部品 |
JPH10126202A (ja) * | 1996-10-23 | 1998-05-15 | Murata Mfg Co Ltd | 圧電共振子およびそれを用いた電子部品 |
JP3147793B2 (ja) * | 1996-11-22 | 2001-03-19 | 株式会社村田製作所 | ラダー型フィルタ |
JP3271538B2 (ja) * | 1996-11-28 | 2002-04-02 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
JP4026885B2 (ja) * | 1997-05-16 | 2007-12-26 | キヤノン株式会社 | 圧電素子および振動型駆動装置 |
JP3378775B2 (ja) * | 1997-07-07 | 2003-02-17 | 株式会社村田製作所 | 圧電共振子およびその周波数調整方法 |
JPH11168246A (ja) * | 1997-09-30 | 1999-06-22 | Matsushita Electric Ind Co Ltd | 圧電アクチュエータ、赤外線センサおよび圧電光偏向器 |
DK176073B1 (da) * | 1998-03-03 | 2006-04-03 | Limiel Aps | Piezoelektrisk transformer |
JP3381779B2 (ja) * | 1998-09-17 | 2003-03-04 | セイコーエプソン株式会社 | 圧電振動子ユニット、圧電振動子ユニットの製造方法、及びインクジェット式記録ヘッド |
DE19909482A1 (de) * | 1999-03-04 | 2000-09-07 | Bosch Gmbh Robert | Piezoelektrischer Aktor |
US6339276B1 (en) * | 1999-11-01 | 2002-01-15 | Agere Systems Guardian Corp. | Incremental tuning process for electrical resonators based on mechanical motion |
JP4573969B2 (ja) * | 2000-08-23 | 2010-11-04 | 北陸電気工業株式会社 | 圧電型三軸加速度センサ |
JP2002198770A (ja) * | 2000-12-26 | 2002-07-12 | Murata Mfg Co Ltd | 圧電共振子 |
US6515403B1 (en) * | 2001-07-23 | 2003-02-04 | Honeywell International Inc. | Co-fired piezo driver and method of making for a ring laser gyroscope |
JP4617078B2 (ja) * | 2003-12-08 | 2011-01-19 | 北陸電気工業株式会社 | 積層圧電体及び圧電型振動素子 |
US8813324B2 (en) | 2010-03-24 | 2014-08-26 | Western Digital (Fremont), Llc | Method for providing a piezoelectric multilayer |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH429228A (de) * | 1964-12-10 | 1967-01-31 | Kistler Instrumente Ag | Piezoelektrischer Einbaukörper zum Einbau in einen piezoelektrischen Wandler |
US3378704A (en) * | 1966-01-05 | 1968-04-16 | Bourns Inc | Piezoelectric multilayer device |
GB1207974A (en) * | 1966-11-17 | 1970-10-07 | Clevite Corp | Frequency selective apparatus including a piezoelectric device |
US3489931A (en) * | 1968-08-30 | 1970-01-13 | Bourns Inc | Monolithic electrical transformer |
US4356421A (en) * | 1980-03-25 | 1982-10-26 | Tohoku Metal Industries, Ltd. | Piezoelectric resonators of an energy-trapping type of a width extensional vibratory mode |
US4471256A (en) * | 1982-06-14 | 1984-09-11 | Nippon Soken, Inc. | Piezoelectric actuator, and valve apparatus having actuator |
US4564782A (en) * | 1983-09-02 | 1986-01-14 | Murata Manufacturing Co., Ltd. | Ceramic filter using multiple thin piezoelectric layers |
-
1984
- 1984-12-10 JP JP59261507A patent/JPS61139112A/ja active Granted
-
1985
- 1985-12-06 DE DE19853543251 patent/DE3543251A1/de active Granted
-
1986
- 1986-10-03 US US06/914,585 patent/US4759107A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0535607B2 (US06272168-20010807-M00014.png) | 1993-05-27 |
US4759107A (en) | 1988-07-26 |
JPS61139112A (ja) | 1986-06-26 |
DE3543251A1 (de) | 1986-06-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition |