DE3105295A1 - Halbfabrikat fuer die herstellung von optischen fasern, verfahren zur herstellung des halbfabrikats und die aus dem halbfabrikat hergestellten optischen fasern - Google Patents

Halbfabrikat fuer die herstellung von optischen fasern, verfahren zur herstellung des halbfabrikats und die aus dem halbfabrikat hergestellten optischen fasern

Info

Publication number
DE3105295A1
DE3105295A1 DE19813105295 DE3105295A DE3105295A1 DE 3105295 A1 DE3105295 A1 DE 3105295A1 DE 19813105295 DE19813105295 DE 19813105295 DE 3105295 A DE3105295 A DE 3105295A DE 3105295 A1 DE3105295 A1 DE 3105295A1
Authority
DE
Germany
Prior art keywords
titanium
silica
fluorine
doped
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19813105295
Other languages
German (de)
English (en)
Other versions
DE3105295C2 (enExample
Inventor
Pierre 45300 Pithiviers Guerder
Andre 92500 Rueil-Malmaison Ranson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Quartz SAS
Original Assignee
Quartz and Silice SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quartz and Silice SA filed Critical Quartz and Silice SA
Publication of DE3105295A1 publication Critical patent/DE3105295A1/de
Application granted granted Critical
Publication of DE3105295C2 publication Critical patent/DE3105295C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C03B37/01426—Plasma deposition burners or torches
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C03B37/01823—Plasma deposition burners or heating means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/87—Controlling the temperature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/15—Nonoxygen containing chalogenides
    • Y10S65/16—Optical filament or fiber treatment with fluorine or incorporating fluorine in final product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Glass Compositions (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)
DE19813105295 1980-02-15 1981-02-13 Halbfabrikat fuer die herstellung von optischen fasern, verfahren zur herstellung des halbfabrikats und die aus dem halbfabrikat hergestellten optischen fasern Granted DE3105295A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8003369A FR2476058A1 (fr) 1980-02-15 1980-02-15 Semi-produit pour la production de fibres optiques, procede de preparation du semi-produit et fibres optiques obtenues a partir du semi-produit

Publications (2)

Publication Number Publication Date
DE3105295A1 true DE3105295A1 (de) 1981-12-10
DE3105295C2 DE3105295C2 (enExample) 1991-01-17

Family

ID=9238625

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813105295 Granted DE3105295A1 (de) 1980-02-15 1981-02-13 Halbfabrikat fuer die herstellung von optischen fasern, verfahren zur herstellung des halbfabrikats und die aus dem halbfabrikat hergestellten optischen fasern

Country Status (4)

Country Link
US (1) US4367013A (enExample)
JP (1) JPS56129626A (enExample)
DE (1) DE3105295A1 (enExample)
FR (1) FR2476058A1 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3106389A1 (de) * 1980-02-22 1982-01-28 Nippon Telegraph & Telephone Public Corp., Tokyo "strahlungsfeste optische glasfaser und verfahren zu deren herstellung"
DE3206143A1 (de) * 1982-02-20 1983-09-01 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren und anordnung zur herstellung einer vorform, aus der optische fasern ziehbar sind
DE3523992A1 (de) * 1984-07-13 1986-01-16 Sumitomo Electric Industries, Ltd., Osaka Verfahren zur herstellung einer glasvorform fuer optische fasern
DE4026371A1 (de) * 1990-08-21 1992-02-27 Daimler Benz Ag Verfahren zur herstellung eines quarzglasrohlings
WO2015022152A1 (de) * 2013-08-16 2015-02-19 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung von titan-dotiertem kieselglas für den einsatz in der euv-lithographie und danach hergestellter rohling

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038343B2 (ja) * 1981-03-06 1985-08-31 信越化学工業株式会社 石英ガラスの製造方法
US4714488A (en) * 1982-09-29 1987-12-22 Corning Glass Works Apparatus for producing an optical fiber preform
JPS59125703A (ja) * 1983-01-06 1984-07-20 Sumitomo Electric Ind Ltd 光伝送用ガラスフアイバ
JPS59202401A (ja) * 1983-05-02 1984-11-16 Sumitomo Electric Ind Ltd 光フアイバおよびその製造方法
JPS60200836A (ja) * 1984-03-27 1985-10-11 Sumitomo Electric Ind Ltd 光フアイバ−用プリフオ−ムの製造方法
US4822136A (en) * 1984-06-15 1989-04-18 Polaroid Corporation Single mode optical fiber
GB2164934B (en) * 1984-09-29 1988-10-05 Stc Plc Optical fibres
FR2574950B1 (fr) * 1984-12-18 1987-09-25 Corning Glass Works Composants optiques integres en verre et leur fabrication
DE3500672A1 (de) * 1985-01-11 1986-07-17 Philips Patentverwaltung Lichtleitfaser mit fluordotierung und verfahren zu deren herstellung
US5028246A (en) * 1986-02-03 1991-07-02 Ensign-Bickford Optical Technologies, Inc. Methods of making optical waveguides
US4689212A (en) * 1986-05-14 1987-08-25 Polaroid Corporation Method for forming doped optical preforms
GB8713081D0 (en) * 1987-06-04 1987-07-08 Pirelli General Plc Optical fibre attenuators
DE3731604A1 (de) * 1987-09-19 1989-03-30 Philips Patentverwaltung Verfahren zur herstellung einer monomode-lichtleitfaser
US5019301A (en) * 1989-01-12 1991-05-28 Codenoll Technology Corporation Method of injection molding star-couplers
ATE151538T1 (de) * 1989-01-12 1997-04-15 Codenoll Technology Corp Durch einspritzgiessformung erzeugte sternkoppler und verfahren zur herstellung
US5035480A (en) * 1989-09-06 1991-07-30 Codenoll Technology Corporation Star-couplers with biconical mixing elements and methods for making the same
US5211730A (en) * 1989-12-15 1993-05-18 Sumitomo Electric Industries, Ltd. Method for heating glass body
US5318611A (en) * 1992-03-13 1994-06-07 Ensign-Bickford Optical Technologies, Inc. Methods of making optical waveguides and waveguides made thereby
US5755850A (en) * 1992-09-24 1998-05-26 Iowa State University Research Foundation Method of making a surgical laser fiber from a monolithic silica titania glass rod
FR2713621B1 (fr) * 1993-12-14 1996-01-05 Alcatel Fibres Optiques Procédé de recharge par plasma d'une préforme pour fibre optique et fibre optique issue de la préforme rechargée selon ce procédé.
US5572618A (en) * 1994-07-13 1996-11-05 Lucent Technologies Inc. Optical attenuator
US5868734A (en) * 1995-11-29 1999-02-09 Iowa State University Research Foundation, Inc. Methods of using silica-titania clad fibers
FR2755124B1 (fr) * 1996-10-24 1998-11-27 Alsthom Cge Alcatel Procede de fabrication d'une preforme de fibre optique
JP2000264671A (ja) * 1999-03-12 2000-09-26 Shin Etsu Chem Co Ltd 合成石英ガラス部材
US6598425B1 (en) * 2000-03-08 2003-07-29 Corning Incorporated Method for collecting soot
US6374642B1 (en) * 2000-03-15 2002-04-23 Corning Incorporated Method and apparatus for combustion-enhanced vaporization
DE10054270B4 (de) * 2000-11-02 2006-02-16 Schott Ag Verfahren zur Herstellung von Photomaskensubstraten
WO2002055445A2 (en) * 2001-01-12 2002-07-18 Corning Incorporated Optical fiber and preform, method of manufacturing same, and optical component made therefrom
US6698247B2 (en) * 2001-05-04 2004-03-02 Corning Incorporated Method and feedstock for making silica by flame combustion
US20030000260A1 (en) * 2001-06-25 2003-01-02 Roba Giacomo Stefano Device for manufacturing a preform for optical fibres through chemical deposition
US20030027054A1 (en) * 2001-08-01 2003-02-06 Ball Laura J. Method for making photomask material by plasma induction
US20030027055A1 (en) * 2001-08-01 2003-02-06 Ball Laura J. Method and feedstock for making photomask material
DE202004021665U1 (de) * 2003-04-26 2009-11-26 Schott Ag Glaskörper aus dotiertem Quarzglas
WO2006004169A1 (en) * 2004-07-01 2006-01-12 Asahi Glass Company, Limited Silica glass containing tio2 and process for its production
WO2007001387A2 (en) * 2004-10-01 2007-01-04 Ceranova Corporation Polycrystalline alumina articles and methods of manufacture
WO2010082586A1 (ja) * 2009-01-13 2010-07-22 旭硝子株式会社 ＴｉＯ２を含有するシリカガラスからなる光学部材

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2313276A1 (de) * 1972-03-30 1973-10-18 Corning Glass Works Verfahren zur herstellung von optischem glas
US3782914A (en) * 1972-03-30 1974-01-01 Corning Glass Works Heat treating optical waveguides for oh ion removal
DE2420476A1 (de) * 1974-04-27 1975-11-06 Licentia Gmbh Verfahren zur herstellung von lichtleitfasern
DE2627821A1 (de) * 1975-09-11 1977-03-17 Northern Telecom Ltd Lichtleitfaser
US4162908A (en) * 1975-08-16 1979-07-31 Heraeus Quarzschmelze Gmbh Method of producing synthetic quartz glass, apparatus for the practice of the method, and use of the synthetic quartz glass
US4165915A (en) * 1975-08-16 1979-08-28 Heraeus Quarzschmelze Gmbh Light conducting fiber

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL128054C (enExample) 1963-01-29
FR2002589A1 (enExample) 1968-02-26 1969-10-31 Corning Glass Works
GB1391177A (en) * 1971-08-09 1975-04-16 Thermal Syndicate Ltd Vitreous siliceous material
DE2247307C3 (de) 1972-09-27 1982-01-21 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Herstellung eines Ausgangsstabes zum Ziehen einer aus einem dotierten Kern und einem undotierten Mantel bestehenden Lichtleitfaser
US4002512A (en) * 1974-09-16 1977-01-11 Western Electric Company, Inc. Method of forming silicon dioxide
US4135901A (en) * 1974-12-18 1979-01-23 Sumitomo Electric Industries, Ltd. Method of manufacturing glass for optical waveguide
CH620181A5 (en) 1975-08-16 1980-11-14 Heraeus Schott Quarzschmelze Process for the preparation of synthetic quartz glass, apparatus to carry out the process, and the use of the synthetic quartz glass

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2313276A1 (de) * 1972-03-30 1973-10-18 Corning Glass Works Verfahren zur herstellung von optischem glas
US3782914A (en) * 1972-03-30 1974-01-01 Corning Glass Works Heat treating optical waveguides for oh ion removal
DE2420476A1 (de) * 1974-04-27 1975-11-06 Licentia Gmbh Verfahren zur herstellung von lichtleitfasern
US4162908A (en) * 1975-08-16 1979-07-31 Heraeus Quarzschmelze Gmbh Method of producing synthetic quartz glass, apparatus for the practice of the method, and use of the synthetic quartz glass
US4165915A (en) * 1975-08-16 1979-08-28 Heraeus Quarzschmelze Gmbh Light conducting fiber
DE2627821A1 (de) * 1975-09-11 1977-03-17 Northern Telecom Ltd Lichtleitfaser

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3106389A1 (de) * 1980-02-22 1982-01-28 Nippon Telegraph & Telephone Public Corp., Tokyo "strahlungsfeste optische glasfaser und verfahren zu deren herstellung"
DE3206143A1 (de) * 1982-02-20 1983-09-01 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren und anordnung zur herstellung einer vorform, aus der optische fasern ziehbar sind
DE3523992A1 (de) * 1984-07-13 1986-01-16 Sumitomo Electric Industries, Ltd., Osaka Verfahren zur herstellung einer glasvorform fuer optische fasern
DE4026371A1 (de) * 1990-08-21 1992-02-27 Daimler Benz Ag Verfahren zur herstellung eines quarzglasrohlings
WO2015022152A1 (de) * 2013-08-16 2015-02-19 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung von titan-dotiertem kieselglas für den einsatz in der euv-lithographie und danach hergestellter rohling
US9586850B2 (en) 2013-08-16 2017-03-07 Heraeus Quarzglas Gmbh & Co. Kg Method for producing titanium-doped silica glass for use in EUV lithography and blank produced in accordance therewith

Also Published As

Publication number Publication date
JPS56129626A (en) 1981-10-09
FR2476058A1 (fr) 1981-08-21
DE3105295C2 (enExample) 1991-01-17
JPH0127005B2 (enExample) 1989-05-26
US4367013A (en) 1983-01-04
FR2476058B1 (enExample) 1984-10-19

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8128 New person/name/address of the agent

Representative=s name: HERRMANN-TRENTEPOHL, W., DIPL.-ING., PAT.-ANW., 46

D2 Grant after examination
8363 Opposition against the patent
8365 Fully valid after opposition proceedings