DE1919820A1 - Mittel zum Aufloesen von Metallen - Google Patents

Mittel zum Aufloesen von Metallen

Info

Publication number
DE1919820A1
DE1919820A1 DE19691919820 DE1919820A DE1919820A1 DE 1919820 A1 DE1919820 A1 DE 1919820A1 DE 19691919820 DE19691919820 DE 19691919820 DE 1919820 A DE1919820 A DE 1919820A DE 1919820 A1 DE1919820 A1 DE 1919820A1
Authority
DE
Germany
Prior art keywords
pickling
copper
urea
hydrogen
radicals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19691919820
Other languages
German (de)
English (en)
Inventor
Russell Banush
Hagerty Donald Paul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Allied Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Allied Chemical Corp filed Critical Allied Chemical Corp
Publication of DE1919820A1 publication Critical patent/DE1919820A1/de
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • C23F1/18Acidic compositions for etching copper or alloys thereof
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
DE19691919820 1968-08-09 1969-04-18 Mittel zum Aufloesen von Metallen Pending DE1919820A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US75138868A 1968-08-09 1968-08-09

Publications (1)

Publication Number Publication Date
DE1919820A1 true DE1919820A1 (de) 1970-06-25

Family

ID=25021760

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691919820 Pending DE1919820A1 (de) 1968-08-09 1969-04-18 Mittel zum Aufloesen von Metallen

Country Status (4)

Country Link
US (1) US3668131A (enExample)
DE (1) DE1919820A1 (enExample)
FR (1) FR2019333A1 (enExample)
GB (1) GB1228693A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0265578A1 (en) * 1986-10-30 1988-05-04 Jan-Olof Eriksson A non-abrasive polish or cleaning composition and process for its preparation
EP0926265A1 (en) * 1997-12-19 1999-06-30 McGean-Rohco, Inc. Method and compositions for producing copper surfaces for improved bonding and articles made therefrom

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US4174253A (en) * 1977-11-08 1979-11-13 Dart Industries Inc. Dissolution of metals utilizing a H2 O2 -H2 SO4 solution catalyzed with hydroxy substituted cycloparaffins
US4220706A (en) * 1978-05-10 1980-09-02 Rca Corporation Etchant solution containing HF-HnO3 -H2 SO4 -H2 O2
US4222779A (en) * 1979-06-04 1980-09-16 Dart Industries Inc. Non-chromate conversion coatings
US4225351A (en) * 1979-06-04 1980-09-30 Dart Industries Inc. Non-chromate conversion coatings
US4225350A (en) * 1979-06-04 1980-09-30 Dart Industries Inc. Non-chromate conversion coatings
US4233113A (en) * 1979-06-25 1980-11-11 Dart Industries Inc. Dissolution of metals utilizing an aqueous H2 O2 -H2 SO4 -thioamide etchant
US4233112A (en) * 1979-06-25 1980-11-11 Dart Industries Inc. Dissolution of metals utilizing an aqueous H2 SO4 -H2 O2 -polysulfide etchant
US4233111A (en) * 1979-06-25 1980-11-11 Dart Industries Inc. Dissolution of metals utilizing an aqueous H2 SO4 -H2 O2 -3-sulfopropyldithiocarbamate etchant
US4236957A (en) * 1979-06-25 1980-12-02 Dart Industries Inc. Dissolution of metals utilizing an aqueous H2 SOY --H2 O.sub. -mercapto containing heterocyclic nitrogen etchant
US4351675A (en) * 1981-03-02 1982-09-28 Rohco, Inc. Conversion coatings for zinc and cadmium surfaces
US4370197A (en) * 1981-06-24 1983-01-25 International Business Machines Corporation Process for etching chrome
US4401509A (en) * 1982-09-07 1983-08-30 Fmc Corporation Composition and process for printed circuit etching using a sulfuric acid solution containing hydrogen peroxide
US4636282A (en) * 1985-06-20 1987-01-13 Great Lakes Chemical Corporation Method for etching copper and composition useful therein
US4859281A (en) * 1987-06-04 1989-08-22 Pennwalt Corporation Etching of copper and copper bearing alloys
CH682023A5 (enExample) * 1990-10-26 1993-06-30 Recytec Sa
GB9425090D0 (en) * 1994-12-12 1995-02-08 Alpha Metals Ltd Copper coating
US20040140288A1 (en) * 1996-07-25 2004-07-22 Bakul Patel Wet etch of titanium-tungsten film
US20040134873A1 (en) * 1996-07-25 2004-07-15 Li Yao Abrasive-free chemical mechanical polishing composition and polishing process containing same
KR100302671B1 (ko) * 1996-07-25 2001-09-22 피. 제리 코더 화학기계적연마용조성물및화학기계적연마방법
US5783489A (en) * 1996-09-24 1998-07-21 Cabot Corporation Multi-oxidizer slurry for chemical mechanical polishing
US6039891A (en) * 1996-09-24 2000-03-21 Cabot Corporation Multi-oxidizer precursor for chemical mechanical polishing
US6033596A (en) * 1996-09-24 2000-03-07 Cabot Corporation Multi-oxidizer slurry for chemical mechanical polishing
US6068787A (en) * 1996-11-26 2000-05-30 Cabot Corporation Composition and slurry useful for metal CMP
US5958288A (en) * 1996-11-26 1999-09-28 Cabot Corporation Composition and slurry useful for metal CMP
US5954997A (en) 1996-12-09 1999-09-21 Cabot Corporation Chemical mechanical polishing slurry useful for copper substrates
US6309560B1 (en) 1996-12-09 2001-10-30 Cabot Microelectronics Corporation Chemical mechanical polishing slurry useful for copper substrates
US6126853A (en) * 1996-12-09 2000-10-03 Cabot Microelectronics Corporation Chemical mechanical polishing slurry useful for copper substrates
US6083419A (en) * 1997-07-28 2000-07-04 Cabot Corporation Polishing composition including an inhibitor of tungsten etching
US6177026B1 (en) 1998-05-26 2001-01-23 Cabot Microelectronics Corporation CMP slurry containing a solid catalyst
US6435947B2 (en) 1998-05-26 2002-08-20 Cabot Microelectronics Corporation CMP polishing pad including a solid catalyst
US6117250A (en) * 1999-02-25 2000-09-12 Morton International Inc. Thiazole and thiocarbamide based chemicals for use with oxidative etchant solutions
US6444140B2 (en) 1999-03-17 2002-09-03 Morton International Inc. Micro-etch solution for producing metal surface topography
US6533905B2 (en) * 2000-01-24 2003-03-18 Tini Alloy Company Method for sputtering tini shape-memory alloys
US20040099637A1 (en) * 2000-06-16 2004-05-27 Shipley Company, L.L.C. Composition for producing metal surface topography
US20030178391A1 (en) * 2000-06-16 2003-09-25 Shipley Company, L.L.C. Composition for producing metal surface topography
JP3930732B2 (ja) * 2000-12-27 2007-06-13 荏原ユージライト株式会社 銅および銅合金用のマイクロエッチング剤並びにこれを用いる銅または銅合金の微細粗化方法
JP3930885B2 (ja) * 2000-12-27 2007-06-13 荏原ユージライト株式会社 銅および銅合金用のマイクロエッチング剤
JP3932193B2 (ja) * 2000-12-27 2007-06-20 荏原ユージライト株式会社 銅および銅合金用のマイクロエッチング剤並びにこれを用いる銅または銅合金の微細粗化方法
US6383065B1 (en) 2001-01-22 2002-05-07 Cabot Microelectronics Corporation Catalytic reactive pad for metal CMP
US6841084B2 (en) * 2002-02-11 2005-01-11 Nikko Materials Usa, Inc. Etching solution for forming an embedded resistor
JP2006199888A (ja) * 2005-01-24 2006-08-03 Seiko Epson Corp 水性インク組成物及びそれを用いたインクジェット記録方法、並びに記録物
US8584767B2 (en) * 2007-01-25 2013-11-19 Tini Alloy Company Sprinkler valve with active actuation
US8684101B2 (en) * 2007-01-25 2014-04-01 Tini Alloy Company Frangible shape memory alloy fire sprinkler valve actuator
WO2009018289A2 (en) 2007-07-30 2009-02-05 Tini Alloy Company Method and devices for preventing restenosis in cardiovascular stents
US8303832B2 (en) * 2009-08-17 2012-11-06 Palo Alto Research Center Incorporated Solid inks for masks for printed circuit boards and other electronic devices
US8211617B2 (en) * 2009-08-17 2012-07-03 Palo Alto Research Center Incorporated Solid inks for printed masks
US8858755B2 (en) 2011-08-26 2014-10-14 Tel Nexx, Inc. Edge bevel removal apparatus and method
CN103184523B (zh) * 2011-12-27 2016-01-27 中建材浚鑫科技股份有限公司 一种单晶硅制绒剂及绒面单晶硅的制备方法
US10124197B2 (en) 2012-08-31 2018-11-13 TiNi Allot Company Fire sprinkler valve actuator
US11040230B2 (en) 2012-08-31 2021-06-22 Tini Alloy Company Fire sprinkler valve actuator
CN112831658B (zh) * 2019-11-25 2023-08-22 荆门格林循环电子废弃物处置有限公司 一种废电路板中金的回收方法
EP3922755A1 (en) * 2020-06-12 2021-12-15 ATOTECH Deutschland GmbH An aqueous basic etching composition for the treatment of surfaces of metal substrates
CN115997785A (zh) * 2022-12-30 2023-04-25 宁波三江益农化学有限公司 一种藻类控制用组合物

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2894986A (en) * 1956-07-23 1959-07-14 Monsanto Chemicals Diphenyl urea derivatives
DE1155432B (de) * 1960-02-27 1963-10-10 Dehydag Gmbh Verfahren zur Herstellung von Thioharnstoffabkoemmlingen
NL120737C (enExample) * 1961-06-08
US3074825A (en) * 1962-04-03 1963-01-22 Chemical Cleaning Inc Method of removing copper-containing iron oxide incrustations from ferriferous surfaces
DE1255443B (de) * 1964-08-22 1967-11-30 Degussa Verfahren zum chemischen AEtzen von gedruckten Schaltungen
US3407141A (en) * 1966-02-03 1968-10-22 Allied Chem Dissolution of metal with acidified hydrogen peroxide solutions

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0265578A1 (en) * 1986-10-30 1988-05-04 Jan-Olof Eriksson A non-abrasive polish or cleaning composition and process for its preparation
US4861374A (en) * 1986-10-30 1989-08-29 Eriksson Jan Olof Non-abrasive polish or cleaning composition and process for its preparation
EP0926265A1 (en) * 1997-12-19 1999-06-30 McGean-Rohco, Inc. Method and compositions for producing copper surfaces for improved bonding and articles made therefrom

Also Published As

Publication number Publication date
US3668131A (en) 1972-06-06
GB1228693A (enExample) 1971-04-15
FR2019333A1 (enExample) 1970-07-03

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