DE112018001998B4 - Basismaterial, formpackung, die dasselbe verwendet, basismaterialherstellungsverfahren und formpackungsherstellungsverfahren - Google Patents

Basismaterial, formpackung, die dasselbe verwendet, basismaterialherstellungsverfahren und formpackungsherstellungsverfahren Download PDF

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DE112018001998B4
DE112018001998B4 DE112018001998.5T DE112018001998T DE112018001998B4 DE 112018001998 B4 DE112018001998 B4 DE 112018001998B4 DE 112018001998 T DE112018001998 T DE 112018001998T DE 112018001998 B4 DE112018001998 B4 DE 112018001998B4
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rough
area
sealed
metal particles
stacked
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DE112018001998T5 (de
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Takumi Nomura
Wataru Kobayashi
Kazuki KODA
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Denso Corp
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Denso Corp
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    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8538Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/85399Material
    • H01L2224/854Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/85438Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/85444Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8538Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/85399Material
    • H01L2224/854Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/85438Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/85455Nickel (Ni) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8538Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/85399Material
    • H01L2224/854Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/85463Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
    • H01L2224/85464Palladium (Pd) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • HELECTRICITY
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/50Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)
DE112018001998.5T 2017-04-14 2018-03-08 Basismaterial, formpackung, die dasselbe verwendet, basismaterialherstellungsverfahren und formpackungsherstellungsverfahren Active DE112018001998B4 (de)

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Families Citing this family (8)

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JP6777063B2 (ja) 2017-12-20 2020-10-28 株式会社デンソー 電子装置およびその製造方法
US10714418B2 (en) * 2018-03-26 2020-07-14 Texas Instruments Incorporated Electronic device having inverted lead pins
CN111886623B (zh) * 2018-05-01 2024-05-07 株式会社村田制作所 电子设备以及搭载了该电子设备的指纹认证装置
JP7255466B2 (ja) * 2019-12-03 2023-04-11 いすゞ自動車株式会社 樹脂組成物との接合用の金属部材、金属樹脂接合体の製造方法、および金属樹脂接合体
CN115244684A (zh) * 2020-03-11 2022-10-25 罗姆股份有限公司 半导体器件
US11784050B2 (en) 2021-04-27 2023-10-10 Micron Technology, Inc. Method of fabricating microelectronic devices and related microelectronic devices, tools, and apparatus
JP2023007028A (ja) * 2021-07-01 2023-01-18 ローム株式会社 半導体装置
DE102023106492A1 (de) * 2023-03-15 2024-09-19 Ams-Osram International Gmbh Leiterrahmen, bauteil mit einem leiterrahmen und verfahren zur herstellung eines leiterrahmens

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002105432A (ja) 2000-09-27 2002-04-10 Ibiden Co Ltd 接着剤、セラミック構造体及びその製造方法
JP2002280512A (ja) 2001-03-19 2002-09-27 Denso Corp リードフレームの製造方法
JP2012243889A (ja) 2011-05-18 2012-12-10 Denso Corp 半導体装置およびその製造方法
JP2016020001A (ja) 2013-12-09 2016-02-04 株式会社デンソー 金属部材およびその表面加工方法、半導体装置およびその製造方法、複合成形体
JP2016105432A (ja) 2014-12-01 2016-06-09 Shマテリアル株式会社 リードフレームの製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0832006A (ja) 1994-07-18 1996-02-02 Daido Steel Co Ltd Icパッケージ用リードフレーム材
JP4595505B2 (ja) 2004-11-24 2010-12-08 ソニー株式会社 モールド及びその製造方法、パターンの形成方法
KR100819800B1 (ko) 2005-04-15 2008-04-07 삼성테크윈 주식회사 반도체 패키지용 리드 프레임
JP4609172B2 (ja) 2005-04-21 2011-01-12 株式会社デンソー 樹脂封止型半導体装置
JP2007258205A (ja) 2006-03-20 2007-10-04 Denso Corp 電子装置およびその製造方法
US20080001264A1 (en) * 2006-07-03 2008-01-03 Texas Instruments Incorporated Exposed top side copper leadframe manufacturing
JP2014093425A (ja) 2012-11-02 2014-05-19 Sumitomo Metal Mining Co Ltd Znを主成分とするはんだ合金との接合部を有する電子部品
JP6578900B2 (ja) 2014-12-10 2019-09-25 株式会社デンソー 半導体装置及びその製造方法
JP6459656B2 (ja) 2015-03-10 2019-01-30 株式会社村田製作所 接合用部材およびそれを用いた電子部品の実装方法
JP6618328B2 (ja) 2015-10-28 2019-12-11 東亜建設工業株式会社 泥土の脱水処理方法
US10211131B1 (en) * 2017-10-06 2019-02-19 Microchip Technology Incorporated Systems and methods for improved adhesion between a leadframe and molding compound in a semiconductor device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002105432A (ja) 2000-09-27 2002-04-10 Ibiden Co Ltd 接着剤、セラミック構造体及びその製造方法
JP2002280512A (ja) 2001-03-19 2002-09-27 Denso Corp リードフレームの製造方法
JP2012243889A (ja) 2011-05-18 2012-12-10 Denso Corp 半導体装置およびその製造方法
JP2016020001A (ja) 2013-12-09 2016-02-04 株式会社デンソー 金属部材およびその表面加工方法、半導体装置およびその製造方法、複合成形体
JP2016105432A (ja) 2014-12-01 2016-06-09 Shマテリアル株式会社 リードフレームの製造方法

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