CN110520979B - 基材、利用该基材的模塑封装、基材的制造方法以及模塑封装的制造方法 - Google Patents
基材、利用该基材的模塑封装、基材的制造方法以及模塑封装的制造方法 Download PDFInfo
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- CN110520979B CN110520979B CN201880024454.9A CN201880024454A CN110520979B CN 110520979 B CN110520979 B CN 110520979B CN 201880024454 A CN201880024454 A CN 201880024454A CN 110520979 B CN110520979 B CN 110520979B
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- H01L2224/854—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/85438—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/85444—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/8538—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/85399—Material
- H01L2224/854—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/85438—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/85455—Nickel (Ni) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/8538—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/85399—Material
- H01L2224/854—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/85463—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/85464—Palladium (Pd) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Geometry (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Lead Frames For Integrated Circuits (AREA)
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| JP2017080679A JP6724851B2 (ja) | 2017-04-14 | 2017-04-14 | 基材、それを用いたモールドパーケージ、基材の製造方法、およびモールドパッケージの製造方法 |
| JP2017-080679 | 2017-04-14 | ||
| PCT/JP2018/009056 WO2018190046A1 (ja) | 2017-04-14 | 2018-03-08 | 基材、それを用いたモールドパーケージ、基材の製造方法、およびモールドパッケージの製造方法 |
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| CN110520979A CN110520979A (zh) | 2019-11-29 |
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| JP6777063B2 (ja) | 2017-12-20 | 2020-10-28 | 株式会社デンソー | 電子装置およびその製造方法 |
| US10714418B2 (en) * | 2018-03-26 | 2020-07-14 | Texas Instruments Incorporated | Electronic device having inverted lead pins |
| CN111886623B (zh) * | 2018-05-01 | 2024-05-07 | 株式会社村田制作所 | 电子设备以及搭载了该电子设备的指纹认证装置 |
| JP7255466B2 (ja) * | 2019-12-03 | 2023-04-11 | いすゞ自動車株式会社 | 樹脂組成物との接合用の金属部材、金属樹脂接合体の製造方法、および金属樹脂接合体 |
| CN115244684A (zh) * | 2020-03-11 | 2022-10-25 | 罗姆股份有限公司 | 半导体器件 |
| US11784050B2 (en) | 2021-04-27 | 2023-10-10 | Micron Technology, Inc. | Method of fabricating microelectronic devices and related microelectronic devices, tools, and apparatus |
| JP2023007028A (ja) * | 2021-07-01 | 2023-01-18 | ローム株式会社 | 半導体装置 |
| DE102023106492A1 (de) * | 2023-03-15 | 2024-09-19 | Ams-Osram International Gmbh | Leiterrahmen, bauteil mit einem leiterrahmen und verfahren zur herstellung eines leiterrahmens |
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| JP2002280512A (ja) * | 2001-03-19 | 2002-09-27 | Denso Corp | リードフレームの製造方法 |
| CN105655259A (zh) * | 2014-12-01 | 2016-06-08 | 友立材料株式会社 | 引线框的制造方法 |
Family Cites Families (14)
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| JPH0832006A (ja) | 1994-07-18 | 1996-02-02 | Daido Steel Co Ltd | Icパッケージ用リードフレーム材 |
| JP4641605B2 (ja) | 2000-09-27 | 2011-03-02 | イビデン株式会社 | 接着剤、セラミック構造体及びその製造方法 |
| JP4595505B2 (ja) | 2004-11-24 | 2010-12-08 | ソニー株式会社 | モールド及びその製造方法、パターンの形成方法 |
| KR100819800B1 (ko) | 2005-04-15 | 2008-04-07 | 삼성테크윈 주식회사 | 반도체 패키지용 리드 프레임 |
| JP4609172B2 (ja) | 2005-04-21 | 2011-01-12 | 株式会社デンソー | 樹脂封止型半導体装置 |
| JP2007258205A (ja) | 2006-03-20 | 2007-10-04 | Denso Corp | 電子装置およびその製造方法 |
| US20080001264A1 (en) * | 2006-07-03 | 2008-01-03 | Texas Instruments Incorporated | Exposed top side copper leadframe manufacturing |
| JP5691831B2 (ja) * | 2011-05-18 | 2015-04-01 | 株式会社デンソー | 半導体装置およびその製造方法 |
| JP2014093425A (ja) | 2012-11-02 | 2014-05-19 | Sumitomo Metal Mining Co Ltd | Znを主成分とするはんだ合金との接合部を有する電子部品 |
| JP5983700B2 (ja) | 2013-12-09 | 2016-09-06 | 株式会社デンソー | 半導体装置およびその製造方法、複合成形体 |
| JP6578900B2 (ja) | 2014-12-10 | 2019-09-25 | 株式会社デンソー | 半導体装置及びその製造方法 |
| JP6459656B2 (ja) | 2015-03-10 | 2019-01-30 | 株式会社村田製作所 | 接合用部材およびそれを用いた電子部品の実装方法 |
| JP6618328B2 (ja) | 2015-10-28 | 2019-12-11 | 東亜建設工業株式会社 | 泥土の脱水処理方法 |
| US10211131B1 (en) * | 2017-10-06 | 2019-02-19 | Microchip Technology Incorporated | Systems and methods for improved adhesion between a leadframe and molding compound in a semiconductor device |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002280512A (ja) * | 2001-03-19 | 2002-09-27 | Denso Corp | リードフレームの製造方法 |
| CN105655259A (zh) * | 2014-12-01 | 2016-06-08 | 友立材料株式会社 | 引线框的制造方法 |
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| Publication number | Publication date |
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| WO2018190046A1 (ja) | 2018-10-18 |
| DE112018001998T5 (de) | 2019-12-24 |
| CN110520979A (zh) | 2019-11-29 |
| US20200043835A1 (en) | 2020-02-06 |
| JP2018182101A (ja) | 2018-11-15 |
| DE112018001998B4 (de) | 2022-02-03 |
| JP6724851B2 (ja) | 2020-07-15 |
| US11114368B2 (en) | 2021-09-07 |
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