JP4609172B2 - 樹脂封止型半導体装置 - Google Patents
樹脂封止型半導体装置 Download PDFInfo
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- JP4609172B2 JP4609172B2 JP2005123391A JP2005123391A JP4609172B2 JP 4609172 B2 JP4609172 B2 JP 4609172B2 JP 2005123391 A JP2005123391 A JP 2005123391A JP 2005123391 A JP2005123391 A JP 2005123391A JP 4609172 B2 JP4609172 B2 JP 4609172B2
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Description
図1において、(a)は本発明の第1実施形態に係る樹脂封止型半導体装置100の概略断面構成を示す図であり、(b)は(a)中のリードフレーム20の断面構成を示す図である。
図1、図2に示されるように、本半導体装置100は、大きくは、半導体チップとしてのICチップ10と、このICチップ10がはんだ12を介して搭載固定されたリードフレーム20とを備え、ICチップ10とリードフレーム20とがボンディングワイヤ30を介して互いに電気的に接続され、これらICチップ10、リードフレーム20およびボンディングワイヤ30がモールド樹脂40で封止されてなる。
本実施形態の隆起部24を有するリードフレーム20の形成方法について、図3を参照して述べる。図3は、隆起部24を形成するためのプレス加工の方法を示す概略断面図である。
ところで、本実施形態の樹脂封止型半導体装置100は、ICチップ10と、ICチップ10がはんだ12を介して搭載固定されるチップ搭載面21aを有するとともに、このチップ搭載面21aを含む表面にはんだ接合用のメッキ膜23が形成されたリードフレーム20と、ICチップ10およびリードフレーム20を封止するモールド樹脂40と、を備えるという基本構成を有している。
図5は、本発明の第2実施形態に係る樹脂封止型半導体装置におけるリードフレーム20の要部拡大断面図である。本実施形態では、上記実施形態においてダム部24を変形したところが相違するものであり、この相違点を中心に述べる。
図7は、本発明の第3実施形態に係る樹脂封止型半導体装置におけるリードフレーム20の要部拡大断面図である。本実施形態では、上記第2実施形態のダム部24をさらに変形したものである。
図9は、本発明の第4実施形態に係る樹脂封止型半導体装置におけるリードフレーム20の要部拡大断面図である。
図10は、本発明の第5実施形態に係る樹脂封止型半導体装置におけるリードフレーム20の要部拡大断面図である。図10に示されるように、プレス加工により溝25を形成する場合において、パンチK1の形状を工夫することにより一片の壁をさらに盛り上げることができる。
図11において、(a)は本発明の第6実施形態に係る樹脂封止型半導体装置における半導体チップ10近傍部の拡大図であり、(b)は(a)中の上方から見た概略平面図である。なお、図11中、モールド樹脂40は省略してある。上記実施形態との相違点を中心に述べる。
なお、チップ搭載面を構成するリードフレームの部分はインナーリードでなくてもよい。たとえば、かしめや溶接などでヒートシンクが一体化されたヒートシンク付きのリードフレームを用いてもよく、この場合、チップ搭載面はヒートシンクとなる。
20…リードフレーム、20a…リードフレームの母材、21a…チップ搭載面、
23…メッキ膜、24…ダム部としての隆起部、24a…隆起部の頂部、
24b…コイニング、25…溝、
26…メッキ膜よりもはんだ濡れ性の悪い膜としての樹脂膜、27…ダム部、
40…モールド樹脂。
Claims (2)
- 半導体チップ(10)と、
前記半導体チップ(10)がはんだ(12)を介して搭載固定されるチップ搭載面(21a)を有するとともに、このチップ搭載面(21a)を含む表面にはんだ接合用のメッキ膜(23)が形成されたリードフレーム(20)と、
前記半導体チップ(10)および前記リードフレーム(20)を封止するモールド樹脂(40)と、を備える樹脂封止型半導体装置において、
前記リードフレーム(20)のうち前記モールド樹脂(40)内に位置する部位における前記メッキ膜(23)の最表面は、前記モールド樹脂(40)との密着性を向上させるために粗化された形状となっており、
前記チップ搭載面(21a)のうち前記半導体チップ(10)の周囲部には、前記半導体チップ(10)の直下に位置する前記メッキ膜(23)よりも高く突出するダム部(24、27)が、前記はんだ(12)を取り囲むように前記はんだ(12)の全周に設けられており、
前記チップ配置面(21a)に対してプレス加工を行うことによって並列に配置された2本の溝(25)が形成されており、
前記ダム部は、前記2本の溝(25)の間の部位を隆起させた隆起部(24)として構成されたものであり、
前記隆起部(24)の頂部(24a)の表面は、前記メッキ膜(23)が存在せず前記リードフレーム(20)の母材(20a)が露出した面として構成されていることを特徴とする樹脂封止型半導体装置。 - 前記隆起部(24)の頂部(24a)を含む前記隆起部(24)および前記溝(25)の表面全体は、前記メッキ膜(23)が存在せず前記リードフレーム(20)の母材(20a)が露出した面として構成されていることを特徴とする請求項1に記載の樹脂封止型半導体装置。
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