DE10296978B4 - Elektrodenteil für eine Plasmabehandlungsvorrichtung, Plasmabehandlungsvorrichtung und Plasmabehandlungsverfahren - Google Patents

Elektrodenteil für eine Plasmabehandlungsvorrichtung, Plasmabehandlungsvorrichtung und Plasmabehandlungsverfahren Download PDF

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Publication number
DE10296978B4
DE10296978B4 DE10296978T DE10296978T DE10296978B4 DE 10296978 B4 DE10296978 B4 DE 10296978B4 DE 10296978 T DE10296978 T DE 10296978T DE 10296978 T DE10296978 T DE 10296978T DE 10296978 B4 DE10296978 B4 DE 10296978B4
Authority
DE
Germany
Prior art keywords
electrode
plasma
gas
gas supply
process chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10296978T
Other languages
German (de)
English (en)
Other versions
DE10296978T5 (de
Inventor
Kiyoshi Arita
Tetsuhiro Iwai
Hiroshi Chikushino Haji
Shoji Ogoori Sakemi
Taiji Kitakyushu Matano
Nobuhiro Kitakyushu Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Krosaki Harima Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Krosaki Harima Corp filed Critical Panasonic Corp
Publication of DE10296978T5 publication Critical patent/DE10296978T5/de
Application granted granted Critical
Publication of DE10296978B4 publication Critical patent/DE10296978B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45568—Porous nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • ing And Chemical Polishing (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE10296978T 2001-06-25 2002-06-24 Elektrodenteil für eine Plasmabehandlungsvorrichtung, Plasmabehandlungsvorrichtung und Plasmabehandlungsverfahren Expired - Fee Related DE10296978B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001190891A JP2003007682A (ja) 2001-06-25 2001-06-25 プラズマ処理装置用の電極部材
JP2001-190891 2001-06-25
PCT/JP2002/006293 WO2003001557A1 (en) 2001-06-25 2002-06-24 Electrode member for plasma treating apparatus, plasma treating apparatus and plasma treating method

Publications (2)

Publication Number Publication Date
DE10296978T5 DE10296978T5 (de) 2004-10-07
DE10296978B4 true DE10296978B4 (de) 2010-03-04

Family

ID=19029592

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10296978T Expired - Fee Related DE10296978B4 (de) 2001-06-25 2002-06-24 Elektrodenteil für eine Plasmabehandlungsvorrichtung, Plasmabehandlungsvorrichtung und Plasmabehandlungsverfahren

Country Status (8)

Country Link
US (1) US7138034B2 (enExample)
JP (1) JP2003007682A (enExample)
KR (1) KR100845178B1 (enExample)
CN (1) CN1302512C (enExample)
DE (1) DE10296978B4 (enExample)
MY (1) MY142898A (enExample)
TW (1) TW559942B (enExample)
WO (1) WO2003001557A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7074720B2 (en) * 2001-06-25 2006-07-11 Matsushita Electric Industrial Co., Ltd. Plasma treating apparatus, plasma treating method and method of manufacturing semiconductor device
KR100622831B1 (ko) 2004-04-13 2006-09-18 주식회사 에이디피엔지니어링 플라즈마 처리장치
JP2006120822A (ja) * 2004-10-21 2006-05-11 Tokyo Electron Ltd 基板処理装置及び基板処理装置の圧力制御方法
JP4654738B2 (ja) * 2005-04-05 2011-03-23 パナソニック株式会社 プラズマ処理装置
JP4746620B2 (ja) 2005-04-05 2011-08-10 パナソニック株式会社 プラズマ処理装置用のガスシャワープレート
JP4619854B2 (ja) * 2005-04-18 2011-01-26 東京エレクトロン株式会社 ロードロック装置及び処理方法
JP5058909B2 (ja) * 2007-08-17 2012-10-24 株式会社半導体エネルギー研究所 プラズマｃｖｄ装置及び薄膜トランジスタの作製方法
JP5835722B2 (ja) 2009-12-10 2015-12-24 オルボテック エルティ ソラー，エルエルシー 自動順位付け多方向直列型処理装置
JP5809396B2 (ja) * 2010-06-24 2015-11-10 東京エレクトロン株式会社 基板処理方法及び基板処理装置
US10658161B2 (en) * 2010-10-15 2020-05-19 Applied Materials, Inc. Method and apparatus for reducing particle defects in plasma etch chambers
US8459276B2 (en) 2011-05-24 2013-06-11 Orbotech LT Solar, LLC. Broken wafer recovery system
CN103169199A (zh) * 2013-03-15 2013-06-26 苏州卫鹏机电科技有限公司 一种鞋材表面等离子体放电处理设备的真空箱
CN104425289B (zh) * 2013-09-11 2017-12-15 先进科技新加坡有限公司 利用激发的混合气体的晶粒安装装置和方法
TWI584706B (zh) * 2014-07-24 2017-05-21 Uvat Technology Co Ltd A plasma etch device for a printed circuit board
CN104835876B (zh) * 2015-04-27 2018-01-05 北京金晟阳光科技有限公司 气体均匀布气装置
KR101938306B1 (ko) * 2016-04-18 2019-01-14 최상준 건식 에칭장치의 제어방법
IT201700083957A1 (it) * 2017-07-24 2019-01-24 Wise S R L Metodo e apparato per il trattamento di pannelli
KR102849949B1 (ko) * 2019-03-08 2025-08-22 어플라이드 머티어리얼스, 인코포레이티드 프로세싱 챔버를 위한 다공성 샤워헤드
KR102405333B1 (ko) 2020-11-25 2022-06-07 (주)이노플라즈텍 평판형 필터 전극을 이용한 분말 표면처리용 플라즈마 장치

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586134A (ja) * 1981-07-03 1983-01-13 Seiko Epson Corp プラズマエツチング装置
AT386316B (de) * 1985-11-11 1988-08-10 Voest Alpine Ag Plasmareaktor zum aetzen von leiterplatten
JPH062149A (ja) * 1992-06-19 1994-01-11 Matsushita Electric Works Ltd プラズマ処理方法およびその装置
US5968377A (en) * 1996-05-24 1999-10-19 Sekisui Chemical Co., Ltd. Treatment method in glow-discharge plasma and apparatus thereof
US5999589A (en) * 1992-09-25 1999-12-07 Canon Kabushiki Kaisha Substrate holding device and exposing apparatus using the same
US6086710A (en) * 1995-04-07 2000-07-11 Seiko Epson Corporation Surface treatment apparatus

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4367114A (en) * 1981-05-06 1983-01-04 The Perkin-Elmer Corporation High speed plasma etching system
JPS59111967A (ja) 1982-12-17 1984-06-28 株式会社ブリヂストン セラミック多孔体
FR2538987A1 (fr) * 1983-01-05 1984-07-06 Commissariat Energie Atomique Enceinte pour le traitement et notamment la gravure de substrats par la methode du plasma reactif
JPS60171220A (ja) 1984-02-14 1985-09-04 Nippon Cement Co Ltd アルミナ多孔体の製造方法
US4664858A (en) 1984-08-21 1987-05-12 Kurosaki Refractories Co., Ltd. Manufacturing method of a ceramics body having through holes
JPS61278144A (ja) 1985-06-01 1986-12-09 Anelva Corp プラズマ処理装置
JPS63282179A (ja) 1987-05-12 1988-11-18 Nippon Steel Corp 多孔質セラミックスの製造方法
JPH03101126A (ja) 1989-09-13 1991-04-25 Eagle Ind Co Ltd プラズマエッチング装置用電極
JPH07114198B2 (ja) * 1989-10-02 1995-12-06 東海カーボン株式会社 プラズマエッチング用電極板
JPH0437124A (ja) * 1990-06-01 1992-02-07 Matsushita Electric Ind Co Ltd プラズマ処理装置
JPH0797690A (ja) * 1993-09-29 1995-04-11 Toppan Printing Co Ltd プラズマｃｖｄ装置
WO1995026844A1 (fr) * 1994-03-31 1995-10-12 Hitachi Chemical Company, Ltd. Procede de production de corps poreux
JPH08209349A (ja) * 1995-02-06 1996-08-13 Kokusai Electric Co Ltd プラズマｃｖｄ装置
DE19505906A1 (de) 1995-02-21 1996-08-22 Siemens Ag Verfahren zum Damage-Ätzen der Rückseite einer Halbleiterscheibe bei geschützter Scheibenvorderseite
BR9710709A (pt) * 1996-05-15 1999-08-17 Hyperion Catalysis Int Estruturas de carbono porosas e rigidas processos de fabrica-Æo processos de uso e produtos que as cont-m
FR2756668B1 (fr) * 1996-12-02 1999-01-08 Accumulateurs Fixes Electrode a support tridimensionnel poreux
JPH11135442A (ja) * 1997-10-31 1999-05-21 Canon Inc 堆積膜形成装置及び堆積膜形成方法
JPH11283973A (ja) 1998-03-27 1999-10-15 Toshiba Ceramics Co Ltd プラズマエッチング装置用電極の製造方法
JP3695184B2 (ja) 1998-12-03 2005-09-14 松下電器産業株式会社 プラズマエッチング装置およびプラズマエッチング方法
US6118218A (en) * 1999-02-01 2000-09-12 Sigma Technologies International, Inc. Steady-state glow-discharge plasma at atmospheric pressure

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586134A (ja) * 1981-07-03 1983-01-13 Seiko Epson Corp プラズマエツチング装置
AT386316B (de) * 1985-11-11 1988-08-10 Voest Alpine Ag Plasmareaktor zum aetzen von leiterplatten
JPH062149A (ja) * 1992-06-19 1994-01-11 Matsushita Electric Works Ltd プラズマ処理方法およびその装置
US5999589A (en) * 1992-09-25 1999-12-07 Canon Kabushiki Kaisha Substrate holding device and exposing apparatus using the same
US6086710A (en) * 1995-04-07 2000-07-11 Seiko Epson Corporation Surface treatment apparatus
US5968377A (en) * 1996-05-24 1999-10-19 Sekisui Chemical Co., Ltd. Treatment method in glow-discharge plasma and apparatus thereof

Also Published As

Publication number Publication date
KR20040021617A (ko) 2004-03-10
CN1302512C (zh) 2007-02-28
TW559942B (en) 2003-11-01
DE10296978T5 (de) 2004-10-07
KR100845178B1 (ko) 2008-07-10
US7138034B2 (en) 2006-11-21
JP2003007682A (ja) 2003-01-10
CN1520604A (zh) 2004-08-11
MY142898A (en) 2011-01-31
US20020195202A1 (en) 2002-12-26
WO2003001557A1 (en) 2003-01-03

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8127 New person/name/address of the applicant

Owner name: KROSAKI HARIMA CORPORATION, KITAKYUSHU, FUKUOK, JP

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8364 No opposition during term of opposition
R082 Change of representative

Representative=s name: GRUENECKER, KINKELDEY, STOCKMAIR & SCHWANHAEUSSER,

Representative=s name: GRUENECKER, KINKELDEY, STOCKMAIR & SCHWANHAEUS, DE

R081 Change of applicant/patentee

Owner name: PANASONIC CORPORATION, KADOMA-SHI, JP

Free format text: FORMER OWNER: KROSAKI HARIMA CORPORATION, PANASONIC CORPORATION, , JP

Effective date: 20120502

Owner name: PANASONIC CORPORATION, KADOMA-SHI, JP

Free format text: FORMER OWNERS: KROSAKI HARIMA CORPORATION, KITAKYUSHU, FUKUOKA, JP; PANASONIC CORPORATION, KADOMA-SHI, OSAKA, JP

Effective date: 20120502

R082 Change of representative

Representative=s name: GRUENECKER, KINKELDEY, STOCKMAIR & SCHWANHAEUS, DE

Effective date: 20120502

Representative=s name: GRUENECKER PATENT- UND RECHTSANWAELTE PARTG MB, DE

Effective date: 20120502

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20150101