DE102004002708A1 - Sortierhandler für Burn-In-Tester - Google Patents
Sortierhandler für Burn-In-Tester Download PDFInfo
- Publication number
- DE102004002708A1 DE102004002708A1 DE102004002708A DE102004002708A DE102004002708A1 DE 102004002708 A1 DE102004002708 A1 DE 102004002708A1 DE 102004002708 A DE102004002708 A DE 102004002708A DE 102004002708 A DE102004002708 A DE 102004002708A DE 102004002708 A1 DE102004002708 A1 DE 102004002708A1
- Authority
- DE
- Germany
- Prior art keywords
- burn
- devices
- board
- test
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Sortierhandler für einen Burn-In-Tester, enthaltend zwei DC-Testteile (131, 132) bzw. zwei Entladepuffer (141) 142) auf gegenüberliegenden Seiten einer Burn-In-Platine (B) an einem Arbeitsplatz in einer Linie mit einer Hauptarbeitslinie (ML), je ein Paar Ladeteile (110, 120) zur Zufuhr neuer Vorrichtungen und Entladeteile (115, 125) zur Aufnahme von Vorrichtungen, welche sich in einem Test als gut erwiesen haben, an jedem Seitenteil eines Grundkörpers (101), so dass zwei Einfüge-/Entfernungspicker (162, 163) eine Arbeit kontinuierlich ausführen, bei welcher zwei Einfüge-/Entfernungspicker (162, 163) sich längs der Hauptarbeitslinie (ML) in beiden Richtungen mit Bezug auf die Burn-In-Platine (B) bewegen, um die Vorrichtungen von der Burn-In-Platine (B) zu entnehmen und zu testende Vorrichtungen wiederum in den Raum einsetzen, wodurch eine Testproduktivität pro Einheitszeitdauer verbessert wird.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2003-0064836 | 2003-09-18 | ||
KR10-2003-0064836A KR100491304B1 (ko) | 2003-09-18 | 2003-09-18 | 번인 테스터용 소팅 핸들러 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE102004002708A1 true DE102004002708A1 (de) | 2005-04-21 |
DE102004002708B4 DE102004002708B4 (de) | 2006-08-31 |
Family
ID=34309442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102004002708A Expired - Fee Related DE102004002708B4 (de) | 2003-09-18 | 2004-01-19 | Sortierhandler für Burn-In-Tester |
Country Status (5)
Country | Link |
---|---|
US (2) | US6882141B2 (de) |
KR (1) | KR100491304B1 (de) |
CN (1) | CN1306581C (de) |
DE (1) | DE102004002708B4 (de) |
TW (1) | TWI252209B (de) |
Families Citing this family (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100541395B1 (ko) * | 2003-09-09 | 2006-01-11 | 삼성전자주식회사 | 반도체칩 적층장치, 이것을 이용한 반도체 패키지의제조방법, 그리고 이러한 방법에 의하여 제조된 반도체패키지 |
US7151388B2 (en) * | 2004-09-30 | 2006-12-19 | Kes Systems, Inc. | Method for testing semiconductor devices and an apparatus therefor |
US7196508B2 (en) * | 2005-03-22 | 2007-03-27 | Mirae Corporation | Handler for testing semiconductor devices |
CN100373574C (zh) * | 2005-05-30 | 2008-03-05 | 京元电子股份有限公司 | 晶粒拾取分类装置 |
KR100652417B1 (ko) * | 2005-07-18 | 2006-12-01 | 삼성전자주식회사 | 인-트레이(In-tray) 상태의 반도체 패키지 검사장치및 검사방법 |
EP1752778A3 (de) * | 2005-08-09 | 2008-10-29 | Mirae Corporation | IC-Sortierer |
KR100706330B1 (ko) * | 2005-08-18 | 2007-04-13 | (주)테크윙 | 테스트 핸들러 |
CN101208606B (zh) * | 2005-08-31 | 2011-07-13 | 平田机工株式会社 | 工件装卸装置 |
US7293487B2 (en) * | 2005-11-15 | 2007-11-13 | 3M Innovative Properties Company | Cutting tool having variable and independent movement in an x-direction and a z-direction into and laterally along a work piece for making microstructures |
US7420385B2 (en) * | 2005-12-05 | 2008-09-02 | Verigy (Singapore) Pte. Ltd. | System-on-a-chip pipeline tester and method |
KR100800312B1 (ko) * | 2006-01-25 | 2008-02-04 | (주)테크윙 | 테스트핸들러 및 테스트핸들러의 로딩방법 |
KR100706138B1 (ko) * | 2006-02-21 | 2007-04-12 | 우 옵트로닉스 코포레이션 | 번인 장비 |
DE102006009321A1 (de) * | 2006-03-01 | 2007-09-06 | Atmel Germany Gmbh | Vorrichtung für die Endmesstechnik |
US7589545B2 (en) * | 2006-03-01 | 2009-09-15 | Atmel Germany Gmbh | Device for final inspection |
KR101188841B1 (ko) | 2006-06-13 | 2012-10-08 | 미래산업 주식회사 | 번인 소터 및 이를 이용한 번인 소팅 방법 |
TWI344189B (en) * | 2006-11-22 | 2011-06-21 | Mirae Corp | Method for transferring test trays in a handler |
KR100857911B1 (ko) * | 2007-02-01 | 2008-09-10 | 미래산업 주식회사 | 반도체 소자 테스트 핸들러용 소팅장치 및 소팅방법 |
KR100820357B1 (ko) * | 2007-02-14 | 2008-04-08 | 미래산업 주식회사 | 전자부품 테스트용 핸들러 |
CN101284600B (zh) * | 2007-04-12 | 2011-07-06 | 威光自动化科技股份有限公司 | 可作为输送及检测界面的载盘传递装置 |
KR101335916B1 (ko) * | 2007-07-11 | 2013-12-03 | 삼성전자주식회사 | 테스트 장치 |
US7783447B2 (en) * | 2007-11-24 | 2010-08-24 | Kingston Technology Corp. | Chip handler with a buffer traveling between roaming areas for two non-colliding robotic arms |
KR100938172B1 (ko) * | 2007-12-28 | 2010-01-21 | 미래산업 주식회사 | 핸들러, 반도체 소자 로딩방법, 테스트트레이 이송방법, 및반도체 소자 제조방법 |
KR100930260B1 (ko) * | 2008-01-18 | 2009-12-09 | 에이엠티 주식회사 | 테스트 핸들러 및 그 동작 방법 |
KR101214808B1 (ko) * | 2008-02-29 | 2012-12-24 | 가부시키가이샤 아드반테스트 | 전자부품 이송과 적재장치 및 이를 구비한 전자부품 시험장치 |
KR100981634B1 (ko) * | 2008-05-23 | 2010-09-13 | (주) 예스티 | 반도체패키지의 이송장치 |
KR100981637B1 (ko) * | 2008-06-09 | 2010-09-13 | (주) 예스티 | 트레이 공급장치 |
US7960992B2 (en) * | 2009-02-25 | 2011-06-14 | Kingston Technology Corp. | Conveyor-based memory-module tester with elevators distributing moving test motherboards among parallel conveyors for testing |
KR101103289B1 (ko) * | 2010-04-19 | 2012-01-11 | 에이엠티 주식회사 | 번인 소터 및 그 동작 방법 |
TWI416652B (zh) * | 2010-08-20 | 2013-11-21 | Chroma Ate Inc | With a single through the shuttle shuttle of the semiconductor components test machine |
KR101149759B1 (ko) * | 2011-03-14 | 2012-06-01 | 리노공업주식회사 | 반도체 디바이스의 검사장치 |
US20130146418A1 (en) * | 2011-12-09 | 2013-06-13 | Electro Scientific Industries, Inc | Sorting apparatus and method of sorting components |
WO2014011475A1 (en) * | 2012-07-10 | 2014-01-16 | Kla-Tencor Corporation | Apparatus and method for in-tray and bottom inspection of semiconductor devices |
CN107042197B (zh) * | 2013-02-25 | 2018-11-09 | 泰克元有限公司 | 用于测试处理机的振动装置 |
CN105364315A (zh) * | 2014-08-19 | 2016-03-02 | 深圳市普尔信通讯设备有限公司 | 一种自动镭射机 |
KR101670814B1 (ko) * | 2014-12-03 | 2016-10-31 | 주식회사 이노비즈 | Ic제품 분류기 |
KR102401058B1 (ko) * | 2015-05-12 | 2022-05-23 | (주)제이티 | 소자핸들러 |
KR102391516B1 (ko) * | 2015-10-08 | 2022-04-27 | 삼성전자주식회사 | 반도체 테스트 장치 |
TWI668172B (zh) * | 2016-01-07 | 2019-08-11 | 南韓商宰體有限公司 | 元件處理器 |
KR20180089325A (ko) * | 2017-01-31 | 2018-08-08 | (주)제이티 | 소자소팅장치 |
KR20180092355A (ko) * | 2017-02-09 | 2018-08-20 | (주)테크윙 | 테스트핸들러용 테스트트레이 이송장치 및 테스트핸들러에서의 테스트트레이 이송방법 |
US10725091B2 (en) * | 2017-08-28 | 2020-07-28 | Teradyne, Inc. | Automated test system having multiple stages |
US11226390B2 (en) | 2017-08-28 | 2022-01-18 | Teradyne, Inc. | Calibration process for an automated test system |
US10845410B2 (en) * | 2017-08-28 | 2020-11-24 | Teradyne, Inc. | Automated test system having orthogonal robots |
KR20200121187A (ko) * | 2019-04-15 | 2020-10-23 | 주식회사 아테코 | 전자부품 테스트 핸들러의 스태커 및 이를 포함하는 전자부품 테스트 핸들러 |
US11867749B2 (en) | 2020-10-22 | 2024-01-09 | Teradyne, Inc. | Vision system for an automated test system |
US11754596B2 (en) | 2020-10-22 | 2023-09-12 | Teradyne, Inc. | Test site configuration in an automated test system |
US11953519B2 (en) | 2020-10-22 | 2024-04-09 | Teradyne, Inc. | Modular automated test system |
US11899042B2 (en) | 2020-10-22 | 2024-02-13 | Teradyne, Inc. | Automated test system |
US11754622B2 (en) | 2020-10-22 | 2023-09-12 | Teradyne, Inc. | Thermal control system for an automated test system |
US12007411B2 (en) | 2021-06-22 | 2024-06-11 | Teradyne, Inc. | Test socket having an automated lid |
CN116990618B (zh) * | 2023-08-31 | 2024-08-16 | 江苏辰阳电子有限公司 | 一种充电器批量自动老化测试装置及其使用方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5307011A (en) * | 1991-12-04 | 1994-04-26 | Advantest Corporation | Loader and unloader for test handler |
US5635832A (en) * | 1994-06-15 | 1997-06-03 | Advantest Corporation | IC carrier for use with an IC handler |
US5621312A (en) * | 1995-07-05 | 1997-04-15 | Altera Corporation | Method and apparatus for checking the integrity of a device tester-handler setup |
JP3494828B2 (ja) * | 1996-11-18 | 2004-02-09 | 株式会社アドバンテスト | 水平搬送テストハンドラ |
TW369692B (en) * | 1997-12-26 | 1999-09-11 | Samsung Electronics Co Ltd | Test and burn-in apparatus, in-line system using the apparatus, and test method using the system |
KR100269948B1 (ko) * | 1998-08-07 | 2000-10-16 | 윤종용 | 반도체 번-인 공정의 반도체 디바이스 추출/삽입 및자동분류장치 |
JP2000111613A (ja) * | 1998-10-07 | 2000-04-21 | Nippon Eng Kk | バーンインボード用ローダアンローダ装置 |
JP4202498B2 (ja) * | 1998-12-15 | 2008-12-24 | 株式会社アドバンテスト | 部品ハンドリング装置 |
KR100295774B1 (ko) * | 1999-04-08 | 2001-07-12 | 정문술 | 번인테스터용 소팅 핸들러 |
KR100312862B1 (ko) * | 1999-04-30 | 2001-11-03 | 정문술 | 번인 테스터용 소팅 핸들러에서 번인보드 양측으로부터의 디바이스 로딩/언로딩하는 방법 및 그 장치 |
WO2002050953A1 (en) * | 2000-12-21 | 2002-06-27 | Andrew Corporation | Dual polarisation antenna |
-
2003
- 2003-09-18 KR KR10-2003-0064836A patent/KR100491304B1/ko not_active IP Right Cessation
-
2004
- 2004-01-09 US US10/753,432 patent/US6882141B2/en not_active Expired - Fee Related
- 2004-01-16 TW TW093101229A patent/TWI252209B/zh not_active IP Right Cessation
- 2004-01-18 CN CNB2004100008870A patent/CN1306581C/zh not_active Expired - Fee Related
- 2004-01-19 DE DE102004002708A patent/DE102004002708B4/de not_active Expired - Fee Related
-
2005
- 2005-04-05 US US11/098,536 patent/US7268534B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE102004002708B4 (de) | 2006-08-31 |
US20050062463A1 (en) | 2005-03-24 |
CN1306581C (zh) | 2007-03-21 |
CN1599049A (zh) | 2005-03-23 |
KR20050028221A (ko) | 2005-03-22 |
KR100491304B1 (ko) | 2005-05-24 |
US6882141B2 (en) | 2005-04-19 |
US7268534B2 (en) | 2007-09-11 |
TW200512145A (en) | 2005-04-01 |
US20050168214A1 (en) | 2005-08-04 |
TWI252209B (en) | 2006-04-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |