CO5111049A1 - Disposiciones de deposicion de vapor por vacio reforzado con plasma que incluyen disposiciones para evaporacion de un solido, produccion de una descarga de arco electrico y medicion de ionizacion y evaporacion - Google Patents
Disposiciones de deposicion de vapor por vacio reforzado con plasma que incluyen disposiciones para evaporacion de un solido, produccion de una descarga de arco electrico y medicion de ionizacion y evaporacionInfo
- Publication number
- CO5111049A1 CO5111049A1 CO99048733A CO99048733A CO5111049A1 CO 5111049 A1 CO5111049 A1 CO 5111049A1 CO 99048733 A CO99048733 A CO 99048733A CO 99048733 A CO99048733 A CO 99048733A CO 5111049 A1 CO5111049 A1 CO 5111049A1
- Authority
- CO
- Colombia
- Prior art keywords
- electrode
- electric arc
- arc discharge
- anode
- evaporation
- Prior art date
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Abstract
Un método para producir una descarga de arco eléctrico que comprende las etapas de: alimentar continuamente una pluralidad de componentes de electrodo, en serie, a través de un alojamiento de electrodos a una posición de descarga de arco eléctrico de modo que uno de la pluralidad de componentes de electrodo esté en la posición de descarga de arco eléctrico por vez; y suministrar energía eléctrica al un componente de electrodo a medida que un componente de electrodo es alimentado a la posición de descarga de arco eléctrico ya un segundo electrodo próximo al un componente de electrodo, de modo que el un componente de electrodo y el ánodo queden cargados con carga opuesta, teniendo el un electrodo una carga catódica y teniendo el ánodo una carga anódica, y creen una descarga de arco eléctrico entre el un componente de electrodo y el ánodo, de modo que la pluralidad de componentes de electrodo sean vaporizados, en serie, en la posición de descarga de arco eléctrico. Un electrodo alimentado continuamente para llevar a cabo el método de la reivindicación 1, que comprende: una pluralidad de componentes de electrodo que vaporiza cuando es descargado en una descarga de arco eléctrico; un alojamiento que define una cámara de carga para recibir los componentes de electrodo en serie; y un alimentador de componentes de electrodo para alimentar continuamente la pluralidad de componentes de electrodos, en serie, a través del alojamiento a una posición de descarga de arco eléctrico de modo que uno de la pluralidad de componentes de electrodo esté en la posición de descarga de arco eléctrico por vez. 1Un aparato de descarga de arco eléctrico que comprende el electrodo alimentado continuamente de acuerdo con la reivindicación 68, un ánodo, y un suministro de energía eléctrica para suministrar energía eléctrica al un componente de electrodo y ánodo, de modo que el un componente de electrodo y el ánodo queden cargados con cargas opuestas teniendo el un electrodo una carga catódica y teniendo el ánodo una carga anódica, y crear una descarga de arco eléctrico entre el un componente de electrodo y el ánodo, de modo que la pluralidad de componentes de electrodo sean vaporizados, en serie, en la posición de descarga de arco eléctrico.<EMI FILE="99048733_1" ID="1" IMF=JPEG >
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/128,456 US6251233B1 (en) | 1998-08-03 | 1998-08-03 | Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation |
Publications (1)
Publication Number | Publication Date |
---|---|
CO5111049A1 true CO5111049A1 (es) | 2001-12-26 |
Family
ID=22435473
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CO99048733D CO5111064A1 (es) | 1998-08-03 | 1999-08-02 | Metodo y aparato para la medicion del grado de ionizacion o rata de evaporacion en un sistema de deposicion de vapor |
CO99048733A CO5111049A1 (es) | 1998-08-03 | 1999-08-02 | Disposiciones de deposicion de vapor por vacio reforzado con plasma que incluyen disposiciones para evaporacion de un solido, produccion de una descarga de arco electrico y medicion de ionizacion y evaporacion |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CO99048733D CO5111064A1 (es) | 1998-08-03 | 1999-08-02 | Metodo y aparato para la medicion del grado de ionizacion o rata de evaporacion en un sistema de deposicion de vapor |
Country Status (12)
Country | Link |
---|---|
US (3) | US6251233B1 (es) |
EP (1) | EP1109944A2 (es) |
JP (1) | JP2002522637A (es) |
KR (1) | KR20010083127A (es) |
CN (1) | CN1348509A (es) |
AR (5) | AR016735A1 (es) |
AU (1) | AU4990699A (es) |
BR (1) | BR9912722A (es) |
CA (1) | CA2338352A1 (es) |
CO (2) | CO5111064A1 (es) |
IL (1) | IL140811A0 (es) |
WO (1) | WO2000008226A2 (es) |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6223683B1 (en) * | 1997-03-14 | 2001-05-01 | The Coca-Cola Company | Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating |
DE10024827B4 (de) * | 1999-11-17 | 2008-03-27 | Applied Materials Gmbh & Co. Kg | Elektrodenanordnung und ihre Verwendung |
TW490714B (en) * | 1999-12-27 | 2002-06-11 | Semiconductor Energy Lab | Film formation apparatus and method for forming a film |
US20020011205A1 (en) | 2000-05-02 | 2002-01-31 | Shunpei Yamazaki | Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device |
US7517551B2 (en) * | 2000-05-12 | 2009-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a light-emitting device |
US6599584B2 (en) | 2001-04-27 | 2003-07-29 | The Coca-Cola Company | Barrier coated plastic containers and coating methods therefor |
DE10130666A1 (de) * | 2001-06-28 | 2003-01-23 | Applied Films Gmbh & Co Kg | Softcoat |
SG113448A1 (en) * | 2002-02-25 | 2005-08-29 | Semiconductor Energy Lab | Fabrication system and a fabrication method of a light emitting device |
US7309269B2 (en) * | 2002-04-15 | 2007-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device |
EP1495069A1 (en) * | 2002-04-15 | 2005-01-12 | The Coca-Cola Company | Coating composition containing an epoxide additive and structures coated therewith |
US20040035360A1 (en) * | 2002-05-17 | 2004-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing apparatus |
TWI336905B (en) * | 2002-05-17 | 2011-02-01 | Semiconductor Energy Lab | Evaporation method, evaporation device and method of fabricating light emitting device |
KR100838065B1 (ko) * | 2002-05-31 | 2008-06-16 | 삼성에스디아이 주식회사 | 박막증착기용 고정장치와 이를 이용한 고정방법 |
US20030221620A1 (en) * | 2002-06-03 | 2003-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Vapor deposition device |
US7601225B2 (en) * | 2002-06-17 | 2009-10-13 | Asm International N.V. | System for controlling the sublimation of reactants |
ATE326555T1 (de) * | 2002-07-19 | 2006-06-15 | Lg Electronics Inc | Quelle zur thermischen pvd-beschichtung für organische elektrolumineszente schichten |
AU2003263609A1 (en) * | 2002-09-20 | 2004-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Fabrication system and manufacturing method of light emitting device |
DE10354625A1 (de) * | 2003-11-22 | 2005-06-30 | Sig Technology Ltd. | Verfahren zur Bestimmung der Gasdurchlässigkeit von Behälterwandungen, Behälter mit Oberflächenbeschichtung sowie Beschichtungseinrichtung mit Messvorrichtung |
US7513953B1 (en) | 2003-11-25 | 2009-04-07 | Nano Scale Surface Systems, Inc. | Continuous system for depositing films onto plastic bottles and method |
US7232588B2 (en) * | 2004-02-23 | 2007-06-19 | Eastman Kodak Company | Device and method for vaporizing temperature sensitive materials |
US20050244580A1 (en) * | 2004-04-30 | 2005-11-03 | Eastman Kodak Company | Deposition apparatus for temperature sensitive materials |
JP4668561B2 (ja) * | 2004-07-30 | 2011-04-13 | 株式会社アルバック | 成膜材料供給装置 |
DE102005049906B4 (de) * | 2005-10-17 | 2009-12-03 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Vorrichtung zur Verdampfung von Verdampfungsmaterial |
US8261690B2 (en) * | 2006-07-14 | 2012-09-11 | Georgia Tech Research Corporation | In-situ flux measurement devices, methods, and systems |
US8133367B1 (en) * | 2006-08-11 | 2012-03-13 | Raytheon Company | Sputtering system and method using a loose granular sputtering target |
AT503646B1 (de) * | 2006-09-15 | 2007-12-15 | Fronius Int Gmbh | Wasserdampfplasmabrenner und verfahren zur verschleisserkennung und prozessregelung bei einem solchen wasserdampfplasmabrenner |
EP1967606A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation crucible and evaporation apparatus with adapted evaporation characteristic |
US8061353B2 (en) | 2007-03-09 | 2011-11-22 | Global Medical Holdings LLC | Method and apparatus for delivering a dose of a gaseous drug to a patient |
EP1972699A1 (fr) * | 2007-03-20 | 2008-09-24 | ArcelorMittal France | Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique |
JP5081899B2 (ja) * | 2007-03-26 | 2012-11-28 | 株式会社アルバック | 蒸着源、蒸着装置、成膜方法 |
EP2025773A1 (en) * | 2007-07-19 | 2009-02-18 | Applied Materials, Inc. | Vacuum evaporation apparatus for solid materials |
US7883745B2 (en) | 2007-07-30 | 2011-02-08 | Micron Technology, Inc. | Chemical vaporizer for material deposition systems and associated methods |
DE102008026001B4 (de) * | 2007-09-04 | 2012-02-16 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Vorrichtung zur Erzeugung und Bearbeitung von Schichten auf Substraten unter definierter Prozessatmosphäre und Heizelement |
JP5228437B2 (ja) * | 2007-10-19 | 2013-07-03 | 東京エレクトロン株式会社 | 処理装置及びその使用方法 |
US20090317547A1 (en) * | 2008-06-18 | 2009-12-24 | Honeywell International Inc. | Chemical vapor deposition systems and methods for coating a substrate |
US8343583B2 (en) * | 2008-07-10 | 2013-01-01 | Asm International N.V. | Method for vaporizing non-gaseous precursor in a fluidized bed |
JP2010144221A (ja) * | 2008-12-18 | 2010-07-01 | Tokyo Electron Ltd | 原料ガス発生装置及び成膜装置 |
JP5795266B2 (ja) | 2009-02-18 | 2015-10-14 | カウンシル オブ サイエンティフィック アンド インダストリアル リサーチ | 成形された物体の内側表面上に、保護被膜としてダイヤモンド状炭素を堆積する方法 |
KR100936378B1 (ko) * | 2009-04-27 | 2010-01-13 | 에스엔유 프리시젼 주식회사 | 원료 공급 유닛과 박막 증착 장치 및 박막 증착 방법 |
EP2369033A1 (de) * | 2010-03-26 | 2011-09-28 | Saint-Gobain Glass France | Verfahren zum Nachfüllen einer Verdampferkammer |
EP2795657B1 (de) * | 2011-12-19 | 2018-12-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zum erzeugen eines hohlkathodenbogenentladungsplasmas |
TWI477625B (zh) * | 2012-12-26 | 2015-03-21 | Au Optronics Corp | 蒸鍍裝置 |
US9527107B2 (en) * | 2013-01-11 | 2016-12-27 | International Business Machines Corporation | Method and apparatus to apply material to a surface |
JP2014136827A (ja) * | 2013-01-18 | 2014-07-28 | Hitachi High-Technologies Corp | 蒸着装置およびこれに用いる蒸発源 |
KR101432514B1 (ko) * | 2013-01-29 | 2014-08-21 | 한국기초과학지원연구원 | 플라즈마 보조 물리 기상 증착원 |
KR101611669B1 (ko) * | 2013-12-19 | 2016-04-12 | 주식회사 포스코 | 가열장치 및 이를 포함하는 코팅기구 |
JP6650442B2 (ja) * | 2014-09-18 | 2020-02-19 | ティッセンクルップ スチール ヨーロッパ アーゲーThyssenkrupp Steel Europe Ag | 構成部品、バンド状の材料又はツールの表面にコーティングを形成する装置 |
TWI595110B (zh) * | 2016-06-30 | 2017-08-11 | Jung Tsai Weng | Preparation of Multivariate Alloy Reactive Coating by Vacuum Ion Evaporation |
WO2018020296A1 (en) | 2016-07-27 | 2018-02-01 | Arcelormittal | Apparatus and method for vacuum deposition |
CN106119781B (zh) * | 2016-07-27 | 2018-10-30 | 京东方科技集团股份有限公司 | 蒸发装置、蒸镀设备和蒸镀方法 |
US10801101B2 (en) * | 2017-08-17 | 2020-10-13 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Vapor evaporation source |
TWI634221B (zh) * | 2017-09-01 | 2018-09-01 | 行政院原子能委員會核能硏究所 | 電化學元件之製造方法 |
CN107881485B (zh) * | 2017-11-01 | 2019-10-01 | 深圳市华星光电半导体显示技术有限公司 | 等离子体增强化学气相沉积设备及oled面板的封装方法 |
GB2574400B (en) * | 2018-06-04 | 2022-11-23 | Dyson Technology Ltd | A Device |
Family Cites Families (79)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2664852A (en) | 1950-04-27 | 1954-01-05 | Nat Res Corp | Vapor coating apparatus |
US2665226A (en) | 1950-04-27 | 1954-01-05 | Nat Res Corp | Method and apparatus for vapor coating |
US3016873A (en) | 1959-01-26 | 1962-01-16 | Nat Res Corp | Coating |
US2996037A (en) | 1959-01-26 | 1961-08-15 | Nat Res Corp | Vacuum coating apparatus |
US3511703A (en) | 1963-09-20 | 1970-05-12 | Motorola Inc | Method for depositing mixed oxide films containing aluminum oxide |
GB1103211A (en) | 1965-01-08 | 1968-02-14 | Mullard Ltd | Improvements in and relating to vapour deposition and evaporation sources |
US3625848A (en) * | 1968-12-26 | 1971-12-07 | Alvin A Snaper | Arc deposition process and apparatus |
US4024399A (en) * | 1975-01-06 | 1977-05-17 | Jersey Nuclear-Avco Isotopes, Inc. | Method and apparatus for measuring vapor flow in isotope separation |
JPS543853A (en) | 1977-06-13 | 1979-01-12 | Onoda Cement Co Ltd | Removing device of excess powder for electrostatidc powder coating |
JPS5779621A (en) | 1980-11-05 | 1982-05-18 | Mitsubishi Electric Corp | Plasma processing device |
CH645137A5 (de) | 1981-03-13 | 1984-09-14 | Balzers Hochvakuum | Verfahren und vorrichtung zum verdampfen von material unter vakuum. |
JPS57169088A (en) | 1981-04-09 | 1982-10-18 | Olympus Optical Co Ltd | Crucible |
US4532196A (en) | 1982-01-25 | 1985-07-30 | Stanley Electric Co., Ltd. | Amorphous silicon photoreceptor with nitrogen and boron |
DE3239131A1 (de) | 1982-10-22 | 1984-04-26 | Ulrich 8950 Kaufbeuren Goetz | Verfahren zur thermischen verdampfung von metallen im vakuum |
JPS59128281A (ja) | 1982-12-29 | 1984-07-24 | 信越化学工業株式会社 | 炭化けい素被覆物の製造方法 |
GB2139647B (en) | 1983-02-24 | 1986-11-19 | Boc Group Plc | Bottle coated ion-plating or magnetron sputtering |
US4573429A (en) | 1983-06-03 | 1986-03-04 | Nordson Corporation | Process for coating substrates with aqueous polymer dispersions |
US4552791A (en) | 1983-12-09 | 1985-11-12 | Cosden Technology, Inc. | Plastic container with decreased gas permeability |
US5096558A (en) | 1984-04-12 | 1992-03-17 | Plasco Dr. Ehrich Plasma - Coating Gmbh | Method and apparatus for evaporating material in vacuum |
DE3413891A1 (de) | 1984-04-12 | 1985-10-17 | Horst Dipl.-Phys. Dr. 4270 Dorsten Ehrich | Verfahren und vorrichtung zum verdampfen von material in vakuum |
US4634605A (en) | 1984-05-23 | 1987-01-06 | Wiesmann Harold J | Method for the indirect deposition of amorphous silicon and polycrystalline silicone and alloys thereof |
US4615916A (en) | 1984-06-25 | 1986-10-07 | Owens-Illinois, Inc. | Surface treatment of glass containers |
JPS61104075A (ja) | 1984-10-23 | 1986-05-22 | Hironobu Sato | イオン化蒸発速度制御装置 |
US4752426A (en) | 1985-06-27 | 1988-06-21 | Yoshito Ikada | Process for manufacture of plastic resinous tubes |
US4697974A (en) | 1986-01-24 | 1987-10-06 | Trimedia Corporation | Pallet-loading system |
DE3623970A1 (de) | 1986-07-16 | 1988-01-28 | Leybold Heraeus Gmbh & Co Kg | Transporteinrichtung mit rollensystemen fuer vakuum-beschichtungsanlagen |
US4902531A (en) | 1986-10-30 | 1990-02-20 | Nihon Shinku Gijutsu Kabushiki Kaisha | Vacuum processing method and apparatus |
US5215640A (en) | 1987-02-03 | 1993-06-01 | Balzers Ag | Method and arrangement for stabilizing an arc between an anode and a cathode particularly for vacuum coating devices |
DE3881256D1 (de) | 1987-03-06 | 1993-07-01 | Balzers Hochvakuum | Verfahren und vorrichtungen zum vakuumbeschichten mittels einer elektrischen bogenentladung. |
NL8700620A (nl) | 1987-03-16 | 1988-10-17 | Hauzer Holding | Kathode boogverdampingsinrichting alsmede werkwijze voor het bedrijven daarvan. |
JPS63243264A (ja) | 1987-03-31 | 1988-10-11 | Matsushita Electric Ind Co Ltd | 薄膜製造装置 |
JPS63312968A (ja) | 1987-06-15 | 1988-12-21 | Hitachi Ltd | 溶解蒸発装置 |
US4888199A (en) | 1987-07-15 | 1989-12-19 | The Boc Group, Inc. | Plasma thin film deposition process |
DE3731444A1 (de) | 1987-09-18 | 1989-03-30 | Leybold Ag | Vorrichtung zum beschichten von substraten |
JPH01268859A (ja) | 1988-04-20 | 1989-10-26 | Casio Comput Co Ltd | 透明導電膜の形成方法および形成装置 |
JPH02118064A (ja) | 1988-10-27 | 1990-05-02 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
JPH02305963A (ja) * | 1989-05-19 | 1990-12-19 | Osaka Shinku Kiki Seisakusho:Kk | イオンプレーティング装置に於ける材料蒸発速度検出装置及び材料蒸発速度制御装置 |
DD286375A5 (de) | 1989-08-04 | 1991-01-24 | ��@���������@�������k�� | Bogenentladungsverdampfer mit mehreren verdampfertiegeln |
JP2726118B2 (ja) | 1989-09-26 | 1998-03-11 | キヤノン株式会社 | 堆積膜形成法 |
JPH07110991B2 (ja) | 1989-10-02 | 1995-11-29 | 株式会社日立製作所 | プラズマ処理装置およびプラズマ処理方法 |
JPH0733576B2 (ja) * | 1989-11-29 | 1995-04-12 | 株式会社日立製作所 | スパツタ装置、及びターゲツト交換装置、並びにその交換方法 |
DE4006457C2 (de) | 1990-03-01 | 1993-09-30 | Balzers Hochvakuum | Verfahren zum Verdampfen von Material in einer Vakuumaufdampfanlage sowie Anlage derselben |
US5112644A (en) | 1990-03-08 | 1992-05-12 | Optical Coating Laboratory, Inc. | Horizontal precession tooling and method for tube rotation |
US5085904A (en) | 1990-04-20 | 1992-02-04 | E. I. Du Pont De Nemours And Company | Barrier materials useful for packaging |
US5084356A (en) | 1990-04-20 | 1992-01-28 | E. I. Du Pont De Nemours And Company | Film coated with glass barrier layer with metal dopant |
CA2040638A1 (en) | 1990-04-20 | 1991-10-21 | Gedeon I. Deak | Barrier materials useful for packaging |
DE4114108C1 (es) | 1991-04-30 | 1991-12-19 | Schott Glaswerke, 6500 Mainz, De | |
DE4042337C1 (en) | 1990-08-22 | 1991-09-12 | Plasco Dr. Ehrich Plasma-Coating Gmbh, 6501 Heidesheim, De | Controlling degree of ionisation of vapour for surface coating - by preventing straight line current flow between hot anode target surface and cold cathode by using movable wall between them |
DE4100541C1 (es) | 1991-01-10 | 1992-01-16 | Plasco Dr. Ehrich Plasma-Coating Gmbh, 6501 Heidesheim, De | |
EP0510340B1 (de) | 1991-04-23 | 1995-05-10 | Balzers Aktiengesellschaft | Verfahren zur Abtragung von Material von einer Oberfläche in einer Vakuumkammer |
ES2086667T3 (es) | 1991-10-03 | 1996-07-01 | Becton Dickinson Co | Tubo para la recogida de sangre. |
EP0812779B1 (en) | 1991-12-26 | 2000-08-09 | Toyo Boseki Kabushiki Kaisha | A gas barrier film |
DE4200429A1 (de) | 1992-01-10 | 1993-07-15 | Ehrich Plasma Coating | Verfahren zur ionisation thermisch erzeugter materialdaempfe und vorrichtung zur durchfuehrung des verfahrens |
GB2263472B (en) | 1992-01-14 | 1995-09-06 | Stalplex Limited | Handling and processing plastics bottles |
DE4203371C1 (es) | 1992-02-06 | 1993-02-25 | Multi-Arc Oberflaechentechnik Gmbh, 5060 Bergisch Gladbach, De | |
CH689767A5 (de) * | 1992-03-24 | 1999-10-15 | Balzers Hochvakuum | Verfahren zur Werkstueckbehandlung in einer Vakuumatmosphaere und Vakuumbehandlungsanlage. |
MX9303141A (es) | 1992-05-28 | 1994-04-29 | Polar Materials Inc | Metodos y aparatos para depositar recubrimientos de barrera. |
US5308649A (en) | 1992-06-26 | 1994-05-03 | Polar Materials, Inc. | Methods for externally treating a container with application of internal bias gas |
US5462779A (en) | 1992-10-02 | 1995-10-31 | Consorzio Ce.Te.V. Centro Tecnologie Del Vuoto | Thin film multilayer structure as permeation barrier on plastic film |
US5670224A (en) | 1992-11-13 | 1997-09-23 | Energy Conversion Devices, Inc. | Modified silicon oxide barrier coatings produced by microwave CVD deposition on polymeric substrates |
DE4305721C1 (de) * | 1993-02-25 | 1994-07-21 | Dresden Vakuumtech Gmbh | Niedervoltbogenverdampfer mit Nachfütterungseinrichtung und Verfahren zu dessen Verwendung |
EP0778089A1 (de) | 1993-06-01 | 1997-06-11 | Kautex Werke Reinold Hagen Ag | Einrichtung zum Herstellen einer polymeren Beschichtung an Kunststoff-Hohlkörpern |
JPH0794421A (ja) | 1993-09-21 | 1995-04-07 | Anelva Corp | アモルファスシリコン薄膜の製造方法 |
US5364666A (en) | 1993-09-23 | 1994-11-15 | Becton, Dickinson And Company | Process for barrier coating of plastic objects |
DE4343042C1 (de) * | 1993-12-16 | 1995-03-09 | Fraunhofer Ges Forschung | Verfahren und Einrichtung zum plasmaaktivierten Bedampfen |
CH687601A5 (de) | 1994-02-04 | 1997-01-15 | Tetra Pak Suisse Sa | Verfahren zur Herstellung von im Innern sterilen Verpackungen mit hervorragenden Sperreigenschaften. |
US5565248A (en) | 1994-02-09 | 1996-10-15 | The Coca-Cola Company | Method and apparatus for coating hollow containers through plasma-assisted deposition of an inorganic substance |
DE4412906C1 (de) * | 1994-04-14 | 1995-07-13 | Fraunhofer Ges Forschung | Verfahren und Einrichtung für die ionengestützte Vakuumbeschichtung |
US5521351A (en) | 1994-08-30 | 1996-05-28 | Wisconsin Alumni Research Foundation | Method and apparatus for plasma surface treatment of the interior of hollow forms |
US5510155A (en) | 1994-09-06 | 1996-04-23 | Becton, Dickinson And Company | Method to reduce gas transmission |
JPH0892764A (ja) | 1994-09-22 | 1996-04-09 | Nec Kyushu Ltd | スパッタ装置 |
DE4444763C2 (de) | 1994-12-19 | 1996-11-21 | Apvv Angewandte Plasma Vakuum | Elektrode zur Materialverdampfung für die Beschichtung von Substraten |
DE19600993A1 (de) | 1995-01-13 | 1996-08-08 | Technics Plasma Gmbh | Vorrichtung und Verfahren zur anodischen Verdampfung eines Materials mittels einer Vakuumlichtbogenentladung |
DE19546827C2 (de) | 1995-12-15 | 1999-03-25 | Fraunhofer Ges Forschung | Einrichtung zur Erzeugung dichter Plasmen in Vakuumprozessen |
US5558720A (en) | 1996-01-11 | 1996-09-24 | Thermacore, Inc. | Rapid response vapor source |
EP0785291A1 (en) | 1996-01-19 | 1997-07-23 | The Boc Group, Inc. | Electron beam evaporation system |
US5691007A (en) | 1996-09-30 | 1997-11-25 | Becton Dickinson And Company | Process for depositing barrier film on three-dimensional articles |
US6223683B1 (en) | 1997-03-14 | 2001-05-01 | The Coca-Cola Company | Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating |
DE19807032A1 (de) | 1998-02-19 | 1999-08-26 | Leybold Systems Gmbh | Verfahren und Vorrichtung zum Transportieren zu beschichtender zylindrischer Substrate |
-
1998
- 1998-08-03 US US09/128,456 patent/US6251233B1/en not_active Expired - Fee Related
-
1999
- 1999-07-14 EP EP99933968A patent/EP1109944A2/en not_active Withdrawn
- 1999-07-14 BR BR9912722-9A patent/BR9912722A/pt not_active IP Right Cessation
- 1999-07-14 AU AU49906/99A patent/AU4990699A/en not_active Abandoned
- 1999-07-14 KR KR1020017000786A patent/KR20010083127A/ko not_active Application Discontinuation
- 1999-07-14 CN CN99810350A patent/CN1348509A/zh active Pending
- 1999-07-14 IL IL14081199A patent/IL140811A0/xx unknown
- 1999-07-14 WO PCT/US1999/015828 patent/WO2000008226A2/en not_active Application Discontinuation
- 1999-07-14 JP JP2000563847A patent/JP2002522637A/ja active Pending
- 1999-07-14 CA CA002338352A patent/CA2338352A1/en not_active Abandoned
- 1999-07-22 AR ARP990103620A patent/AR016735A1/es unknown
- 1999-08-02 CO CO99048733D patent/CO5111064A1/es unknown
- 1999-08-02 CO CO99048733A patent/CO5111049A1/es unknown
-
2000
- 2000-08-07 AR ARP000104070A patent/AR025065A2/es unknown
- 2000-08-07 AR ARP000104069A patent/AR025064A2/es unknown
- 2000-08-07 AR ARP000104071A patent/AR025066A2/es unknown
- 2000-08-07 AR ARP000104072A patent/AR025067A2/es unknown
-
2001
- 2001-04-30 US US09/845,885 patent/US6447837B2/en not_active Expired - Fee Related
-
2002
- 2002-09-09 US US10/237,316 patent/US20030007786A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US6251233B1 (en) | 2001-06-26 |
US20010022272A1 (en) | 2001-09-20 |
US6447837B2 (en) | 2002-09-10 |
WO2000008226A2 (en) | 2000-02-17 |
AR016735A1 (es) | 2001-07-25 |
AU4990699A (en) | 2000-02-28 |
EP1109944A2 (en) | 2001-06-27 |
US20030007786A1 (en) | 2003-01-09 |
CN1348509A (zh) | 2002-05-08 |
WO2000008226A3 (en) | 2000-12-07 |
KR20010083127A (ko) | 2001-08-31 |
AR025064A2 (es) | 2002-11-06 |
CO5111064A1 (es) | 2001-12-26 |
AR025065A2 (es) | 2002-11-06 |
JP2002522637A (ja) | 2002-07-23 |
CA2338352A1 (en) | 2000-02-17 |
BR9912722A (pt) | 2001-05-02 |
AR025066A2 (es) | 2002-11-06 |
IL140811A0 (en) | 2002-02-10 |
AR025067A2 (es) | 2002-11-06 |
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