GB1103211A - Improvements in and relating to vapour deposition and evaporation sources - Google Patents

Improvements in and relating to vapour deposition and evaporation sources

Info

Publication number
GB1103211A
GB1103211A GB104965A GB104965A GB1103211A GB 1103211 A GB1103211 A GB 1103211A GB 104965 A GB104965 A GB 104965A GB 104965 A GB104965 A GB 104965A GB 1103211 A GB1103211 A GB 1103211A
Authority
GB
United Kingdom
Prior art keywords
crucible
evaporated
reservoir
evaporating
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB104965A
Inventor
John Chadwick Brice
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Components Ltd
Original Assignee
Mullard Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mullard Ltd filed Critical Mullard Ltd
Priority to GB104965A priority Critical patent/GB1103211A/en
Priority to CH7366A priority patent/CH487263A/en
Priority to NL6600024A priority patent/NL6600024A/xx
Priority to AT9766A priority patent/AT264953B/en
Priority to DE19661521421 priority patent/DE1521421A1/en
Priority to FR45048A priority patent/FR1462913A/en
Publication of GB1103211A publication Critical patent/GB1103211A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The parent invention of evaporating material e.g. 50/50 Fe-Ni alloy from the liquid phase and depositing in on to a substrate using an <PICT:1103211/C6-C7/1> evaporating surface of the material which is curved sufficiently to confine scum to a peripheral zone on the exposed molten surface is improved by replenishing the material during evaporation to maintain its desired composition. As shown, the material 2 to be evaporated may be contained in an inner crucible 1 floating in a reservoir 3 of the same or differing composition contained in an outer crucible 4, heated by electron bombardment or R.F. heating if conducting or by radiation or conduction from an electrically conductive jacket 11 if insulating e.g. of Al2O3 or ZrO2 to radiate heat from the upper rim 9 of the crucible 4 on to the surface to be evaporated. A passage 5 in the base of the inner crucible 1 weighted by weights 8 interconnects the material 2 with reservoir 3.
GB104965A 1965-01-08 1965-01-08 Improvements in and relating to vapour deposition and evaporation sources Expired GB1103211A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB104965A GB1103211A (en) 1965-01-08 1965-01-08 Improvements in and relating to vapour deposition and evaporation sources
CH7366A CH487263A (en) 1965-01-08 1966-01-04 Method for vaporizing a material and device for carrying out this method
NL6600024A NL6600024A (en) 1965-01-08 1966-01-04
AT9766A AT264953B (en) 1965-01-08 1966-01-05 Process for vapor deposition of thin layers
DE19661521421 DE1521421A1 (en) 1965-01-08 1966-01-05 Process for the vapor deposition of thin layers and apparatus for carrying out this process
FR45048A FR1462913A (en) 1965-01-08 1966-01-06 Process for applying thin layers by spraying and device for implementing this process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB104965A GB1103211A (en) 1965-01-08 1965-01-08 Improvements in and relating to vapour deposition and evaporation sources

Publications (1)

Publication Number Publication Date
GB1103211A true GB1103211A (en) 1968-02-14

Family

ID=9715280

Family Applications (1)

Application Number Title Priority Date Filing Date
GB104965A Expired GB1103211A (en) 1965-01-08 1965-01-08 Improvements in and relating to vapour deposition and evaporation sources

Country Status (6)

Country Link
AT (1) AT264953B (en)
CH (1) CH487263A (en)
DE (1) DE1521421A1 (en)
FR (1) FR1462913A (en)
GB (1) GB1103211A (en)
NL (1) NL6600024A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017001910A1 (en) * 2015-06-29 2017-01-05 Flisom Ag Evaporation crucible with floater

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1440921A (en) * 1972-07-14 1976-06-30 Secr Defence Evaporation of metals
US6223683B1 (en) 1997-03-14 2001-05-01 The Coca-Cola Company Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating
US6251233B1 (en) * 1998-08-03 2001-06-26 The Coca-Cola Company Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation
US6740378B1 (en) 2000-08-24 2004-05-25 The Coca-Cola Company Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and uv barrier and method for making same
US6720052B1 (en) 2000-08-24 2004-04-13 The Coca-Cola Company Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same
US6599584B2 (en) 2001-04-27 2003-07-29 The Coca-Cola Company Barrier coated plastic containers and coating methods therefor
ES2250891T3 (en) 2002-04-15 2006-04-16 The Coca-Cola Company COATING COMPOSITION CONTAINING AN EPOXIDIC ADDITIVE AND STRUCTURES COVERED WITH THE SAME.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017001910A1 (en) * 2015-06-29 2017-01-05 Flisom Ag Evaporation crucible with floater

Also Published As

Publication number Publication date
DE1521421A1 (en) 1969-12-11
FR1462913A (en) 1966-12-16
CH487263A (en) 1970-03-15
NL6600024A (en) 1966-07-11
AT264953B (en) 1968-09-25

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