AT264953B - Process for vapor deposition of thin layers - Google Patents
Process for vapor deposition of thin layersInfo
- Publication number
- AT264953B AT264953B AT9766A AT9766A AT264953B AT 264953 B AT264953 B AT 264953B AT 9766 A AT9766 A AT 9766A AT 9766 A AT9766 A AT 9766A AT 264953 B AT264953 B AT 264953B
- Authority
- AT
- Austria
- Prior art keywords
- vapor deposition
- thin layers
- layers
- thin
- deposition
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB104965A GB1103211A (en) | 1965-01-08 | 1965-01-08 | Improvements in and relating to vapour deposition and evaporation sources |
Publications (1)
Publication Number | Publication Date |
---|---|
AT264953B true AT264953B (en) | 1968-09-25 |
Family
ID=9715280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT9766A AT264953B (en) | 1965-01-08 | 1966-01-05 | Process for vapor deposition of thin layers |
Country Status (6)
Country | Link |
---|---|
AT (1) | AT264953B (en) |
CH (1) | CH487263A (en) |
DE (1) | DE1521421A1 (en) |
FR (1) | FR1462913A (en) |
GB (1) | GB1103211A (en) |
NL (1) | NL6600024A (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1440921A (en) * | 1972-07-14 | 1976-06-30 | Secr Defence | Evaporation of metals |
US6223683B1 (en) | 1997-03-14 | 2001-05-01 | The Coca-Cola Company | Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating |
US6251233B1 (en) * | 1998-08-03 | 2001-06-26 | The Coca-Cola Company | Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation |
US6720052B1 (en) | 2000-08-24 | 2004-04-13 | The Coca-Cola Company | Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same |
US6740378B1 (en) | 2000-08-24 | 2004-05-25 | The Coca-Cola Company | Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and uv barrier and method for making same |
US6599584B2 (en) | 2001-04-27 | 2003-07-29 | The Coca-Cola Company | Barrier coated plastic containers and coating methods therefor |
EP1495069A1 (en) | 2002-04-15 | 2005-01-12 | The Coca-Cola Company | Coating composition containing an epoxide additive and structures coated therewith |
HUE052716T2 (en) * | 2015-06-29 | 2021-05-28 | Flisom Ag | Evaporation crucible with floater |
-
1965
- 1965-01-08 GB GB104965A patent/GB1103211A/en not_active Expired
-
1966
- 1966-01-04 CH CH7366A patent/CH487263A/en not_active IP Right Cessation
- 1966-01-04 NL NL6600024A patent/NL6600024A/xx unknown
- 1966-01-05 DE DE19661521421 patent/DE1521421A1/en active Pending
- 1966-01-05 AT AT9766A patent/AT264953B/en active
- 1966-01-06 FR FR45048A patent/FR1462913A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL6600024A (en) | 1966-07-11 |
CH487263A (en) | 1970-03-15 |
FR1462913A (en) | 1966-12-16 |
GB1103211A (en) | 1968-02-14 |
DE1521421A1 (en) | 1969-12-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CH510747A (en) | Process for the deposition of a thin film | |
CH458710A (en) | Process for coating substrates | |
CH499628A (en) | Process for growing thin, non-conductive layers | |
CH491207A (en) | Maskless vapor deposition process | |
AT250541B (en) | Process for coating objects | |
AT264953B (en) | Process for vapor deposition of thin layers | |
SE333175B (en) | PROCEDURE FOR ELECTROLY-FREE DEPOSIT OF A COBOLATE LAYER | |
CH418770A (en) | Process for applying thin layers by thermal evaporation | |
CH457374A (en) | Process for depositing an epitaxial layer of crystalline material | |
AT303485B (en) | PROCESS FOR VACUUM EVAPORATION OF LAYERS | |
CH475030A (en) | Process for the production of semiconductor layers by deposition from the gas phase | |
AT270749B (en) | Process for the deposition of highly pure crystalline material | |
AT280478B (en) | Process for coating tablets | |
CH513252A (en) | Process for the thermal application of layers | |
CH484198A (en) | Process for reducing substituted silanes | |
AT264746B (en) | Arrangement for vapor deposition of interference layers | |
AT273230B (en) | Process for covering substrates by vapor deposition | |
AT280449B (en) | Process for coating an electrode | |
CH532128A (en) | Process for vapor deposition of a thin layer | |
CH519584A (en) | Process for depositing thin layers of metal | |
CH469815A (en) | Process for vapor deposition of a layer | |
CH438701A (en) | Process for coating synthetic organic thermoplastic films | |
CH480449A (en) | Process for the deposition of monocrystalline semiconducting or metallic substances | |
CH499461A (en) | Process for the production of dicyan | |
AT285164B (en) | Process for the interpolymerization of olefinic compounds |