GB1111955A - Improvements in or relating to devices for evaporating powdered material - Google Patents

Improvements in or relating to devices for evaporating powdered material

Info

Publication number
GB1111955A
GB1111955A GB2066366A GB2066366A GB1111955A GB 1111955 A GB1111955 A GB 1111955A GB 2066366 A GB2066366 A GB 2066366A GB 2066366 A GB2066366 A GB 2066366A GB 1111955 A GB1111955 A GB 1111955A
Authority
GB
United Kingdom
Prior art keywords
crucible
wire
gauzes
evaporating
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2066366A
Inventor
Ulrich Pick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Components Ltd
Original Assignee
Mullard Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mullard Ltd filed Critical Mullard Ltd
Priority to GB2066366A priority Critical patent/GB1111955A/en
Publication of GB1111955A publication Critical patent/GB1111955A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

To provide an even film on a substrate by evaporation and subsequent deposition, charge 5 is heated in crucible 1, preferably by electron bombardment from wire 4, and fine-mesh refractory metal gauzes 6 and 8 even the flow of material from the crucible. Any of the charge material which reaches gauze 6 without being vaporized is vaporized immediately, as the gauzes are, if anything, at a higher temperature than the base of the crucible, due to the positioning of wire 4. The crucible 1, gauzes 6 and 8 and retaining rings 7 and 9 are suitably all of molybdenum, as are support 2 and housing 3. Wire 4 may be a tungsten filament. The source is stated to be particularly suitable for the deposition of silicon monoxide from a powdered mixture of silicon and silica. Radio-frequency induction heating of the crucible may be employed in place of electron bombardment. <PICT:1111955/C6-C7/1>
GB2066366A 1966-05-10 1966-05-10 Improvements in or relating to devices for evaporating powdered material Expired GB1111955A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2066366A GB1111955A (en) 1966-05-10 1966-05-10 Improvements in or relating to devices for evaporating powdered material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2066366A GB1111955A (en) 1966-05-10 1966-05-10 Improvements in or relating to devices for evaporating powdered material

Publications (1)

Publication Number Publication Date
GB1111955A true GB1111955A (en) 1968-05-01

Family

ID=10149599

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2066366A Expired GB1111955A (en) 1966-05-10 1966-05-10 Improvements in or relating to devices for evaporating powdered material

Country Status (1)

Country Link
GB (1) GB1111955A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2356268A1 (en) * 1976-06-26 1978-01-20 Leybold Heraeus Gmbh & Co Kg ELECTRONIC BEAM EVAPORATOR AND TANK FOR THE MATERIAL TO BE EVAPORATED
CN104271794A (en) * 2012-04-20 2015-01-07 Mmt有限公司 High efficiency container for thermal evaporation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2356268A1 (en) * 1976-06-26 1978-01-20 Leybold Heraeus Gmbh & Co Kg ELECTRONIC BEAM EVAPORATOR AND TANK FOR THE MATERIAL TO BE EVAPORATED
CN104271794A (en) * 2012-04-20 2015-01-07 Mmt有限公司 High efficiency container for thermal evaporation

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