GB1029694A - Improvements in or relating to ionization manometers for determining the vapour density of a substance evaporating in vacuo - Google Patents

Improvements in or relating to ionization manometers for determining the vapour density of a substance evaporating in vacuo

Info

Publication number
GB1029694A
GB1029694A GB4185463A GB4185463A GB1029694A GB 1029694 A GB1029694 A GB 1029694A GB 4185463 A GB4185463 A GB 4185463A GB 4185463 A GB4185463 A GB 4185463A GB 1029694 A GB1029694 A GB 1029694A
Authority
GB
United Kingdom
Prior art keywords
density
vacuo
relating
determining
vapour density
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4185463A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASS IND Ltd
PHILIPS ELECTRONIC
Associated Industries Ltd
Philips Electronics UK Ltd
Original Assignee
ASS IND Ltd
PHILIPS ELECTRONIC
Philips Electronic and Associated Industries Ltd
Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASS IND Ltd, PHILIPS ELECTRONIC, Philips Electronic and Associated Industries Ltd, Associated Industries Ltd filed Critical ASS IND Ltd
Publication of GB1029694A publication Critical patent/GB1029694A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/626—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using heat to ionise a gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Electrochemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

<PICT:1029694/C6-C7/1> Material in a recess 2 of a tungsten heating ribbon 1 supported by water-cooled terminals 3 is vaporized on to a plate 4 heated by a coil 5 in an envelope 6. A screen 7 may be interposed when the plate 4 is to be outgassed or to allow a constant evaporation rate to be established befoe condensation takes place. A small quantity of a further material, e.g. a dope, may be deposited from a cylindrical vaporizer 26, Fig. 2 (not shown) provided with a heating coil 27. The vapour density is measured as the difference between the total density and the residual gas density by an ionization manometer (see Division H1).
GB4185463A 1962-10-26 1963-10-23 Improvements in or relating to ionization manometers for determining the vapour density of a substance evaporating in vacuo Expired GB1029694A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL284801 1962-10-26

Publications (1)

Publication Number Publication Date
GB1029694A true GB1029694A (en) 1966-05-18

Family

ID=19754196

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4185463A Expired GB1029694A (en) 1962-10-26 1963-10-23 Improvements in or relating to ionization manometers for determining the vapour density of a substance evaporating in vacuo

Country Status (4)

Country Link
CH (1) CH427448A (en)
DE (1) DE1498924B2 (en)
GB (1) GB1029694A (en)
NL (2) NL132317C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009013310A1 (en) * 2009-03-18 2010-09-30 Von Ardenne Anlagentechnik Gmbh Coating substrates by vacuum evaporation, comprises evaporating evaporation material to be deposited for formation of partially ionized vapor, which moves towards substrate and deposits on substrate, and measuring vapor charge carrier flow

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009013310A1 (en) * 2009-03-18 2010-09-30 Von Ardenne Anlagentechnik Gmbh Coating substrates by vacuum evaporation, comprises evaporating evaporation material to be deposited for formation of partially ionized vapor, which moves towards substrate and deposits on substrate, and measuring vapor charge carrier flow
DE102009013310B4 (en) * 2009-03-18 2013-10-10 Von Ardenne Anlagentechnik Gmbh Method and apparatus for vacuum evaporation under control of the coating rate and measuring device therefor

Also Published As

Publication number Publication date
CH427448A (en) 1966-12-31
DE1498924B2 (en) 1972-02-10
DE1498924A1 (en) 1969-01-23
NL132317C (en)
NL284801A (en)

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