CN1947871B - 基板处理装置 - Google Patents

基板处理装置 Download PDF

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Publication number
CN1947871B
CN1947871B CN2006101257687A CN200610125768A CN1947871B CN 1947871 B CN1947871 B CN 1947871B CN 2006101257687 A CN2006101257687 A CN 2006101257687A CN 200610125768 A CN200610125768 A CN 200610125768A CN 1947871 B CN1947871 B CN 1947871B
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CN
China
Prior art keywords
substrate
liquid
unit
curtain
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2006101257687A
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English (en)
Chinese (zh)
Other versions
CN1947871A (zh
Inventor
山本悟史
松本隆雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Skilling Group
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
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Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Publication of CN1947871A publication Critical patent/CN1947871A/zh
Application granted granted Critical
Publication of CN1947871B publication Critical patent/CN1947871B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H10P72/0412—
    • H10P72/0408—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid

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  • Cleaning Or Drying Semiconductors (AREA)
CN2006101257687A 2005-10-14 2006-08-28 基板处理装置 Expired - Fee Related CN1947871B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2005300616 2005-10-14
JP2005300616 2005-10-14
JP2005-300616 2005-10-14
JP2006-054644 2006-03-01
JP2006054644A JP4668088B2 (ja) 2005-10-14 2006-03-01 基板処理装置
JP2006054644 2006-03-01

Publications (2)

Publication Number Publication Date
CN1947871A CN1947871A (zh) 2007-04-18
CN1947871B true CN1947871B (zh) 2010-12-08

Family

ID=38156040

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006101257687A Expired - Fee Related CN1947871B (zh) 2005-10-14 2006-08-28 基板处理装置

Country Status (4)

Country Link
JP (1) JP4668088B2 (OSRAM)
KR (1) KR100817980B1 (OSRAM)
CN (1) CN1947871B (OSRAM)
TW (1) TW200715389A (OSRAM)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100883298B1 (ko) * 2007-06-08 2009-02-11 아프로시스템 주식회사 상하 분리가능한 평판 디스플레이 세정장치
JP2009147260A (ja) * 2007-12-18 2009-07-02 Dainippon Screen Mfg Co Ltd 基板処理装置
KR101296659B1 (ko) * 2008-11-14 2013-08-14 엘지디스플레이 주식회사 세정 장치
KR101034374B1 (ko) * 2008-11-28 2011-05-16 세메스 주식회사 기판 세정 장치 및 방법
KR200451730Y1 (ko) 2008-12-29 2011-01-11 주식회사 케이씨텍 세정장치의 오토셔터
CN101847567B (zh) * 2009-03-26 2012-02-29 北京京东方光电科技有限公司 清洗基板的装置
CN101954358B (zh) * 2010-05-06 2012-07-04 东莞宏威数码机械有限公司 平移式基板清洗装置
DE102010024840B4 (de) * 2010-06-23 2016-09-22 Eisenmann Se Trockner
CN102357479A (zh) * 2011-07-19 2012-02-22 廖启明 应用于线路板生产的环保节水处理系统、装置及处理方法
CN102626695B (zh) * 2011-09-28 2015-04-08 北京京东方光电科技有限公司 基板清洗系统
TWI612568B (zh) * 2012-05-17 2018-01-21 Ebara Corp 基板洗淨裝置
JP6133120B2 (ja) 2012-05-17 2017-05-24 株式会社荏原製作所 基板洗浄装置
CN103406302B (zh) * 2013-08-23 2015-08-12 深圳市华星光电技术有限公司 基于紫外线的清洗方法及清洗装置
CN105665397A (zh) * 2016-03-17 2016-06-15 东旭科技集团有限公司 液晶玻璃基板清洗设备和方法
CN205692805U (zh) * 2016-05-09 2016-11-16 合肥鑫晟光电科技有限公司 基板处理设备
CN108239736B (zh) * 2016-12-23 2024-02-23 无锡市斯威克科技有限公司 一种光伏用反光焊带的脉冲风刀
CN108993960A (zh) * 2017-06-07 2018-12-14 丁保粮 一种气液喷淋清洗机
CN108325900B (zh) * 2017-09-19 2021-02-02 福建晟哲自动化科技有限公司 一种液晶面板清洗设备
CN207793414U (zh) * 2017-12-06 2018-08-31 北京铂阳顶荣光伏科技有限公司 具有防气体飘逸功能的板材镀膜设备
CN109047074B (zh) * 2018-08-26 2021-02-26 东莞市金盘模具配件有限公司 一种精密模具加工用表面清洗装置
CN109248878B (zh) * 2018-08-31 2020-10-13 深圳市华星光电技术有限公司 一种清洗平台以及清洗方法
CN110681666A (zh) * 2019-08-09 2020-01-14 江苏迪佳电子有限公司 一种电容触摸屏加工装置
JP7312738B2 (ja) * 2020-12-11 2023-07-21 芝浦メカトロニクス株式会社 基板処理装置
CN113154862B (zh) * 2021-02-26 2022-07-15 东莞汇和电子有限公司 一种电子线路板装配活塞干燥风刀
CN113020079A (zh) * 2021-03-30 2021-06-25 苏州阿洛斯环境发生器有限公司 一种定向双流体清洗方法
CN113020080A (zh) * 2021-03-30 2021-06-25 苏州阿洛斯环境发生器有限公司 一种定向线性双流体清洗方法及装置
CN116000042A (zh) * 2022-12-21 2023-04-25 芜湖东旭光电科技有限公司 玻璃基板预清洗装置
CN115947119B (zh) * 2023-03-14 2023-05-23 合肥光微光电科技有限公司 一种光学玻璃生产自动化输送设备
CN116765015A (zh) * 2023-05-19 2023-09-19 上海新阳半导体材料股份有限公司 电子元件处理装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5564159A (en) * 1994-05-26 1996-10-15 The John Treiber Company Closed-loop multistage system for cleaning printed circuit boards
CN1194454A (zh) * 1997-01-24 1998-09-30 东京电子株式会社 清洗装置及清洗方法
CN1485150A (zh) * 2002-08-19 2004-03-31 大日本屏影象制造株式会社 基板处理装置及基板清洗设备
CN1531029A (zh) * 2003-03-12 2004-09-22 大日本屏影象制造株式会社 基板处理方法和基板处理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100232593B1 (ko) * 1997-01-24 1999-12-01 구자홍 Pdp용박리장치및그방법
KR100237210B1 (ko) * 1997-07-22 2000-01-15 구자홍 플라스마 디스플레이 패널용 세정 시스템
JPH11121427A (ja) * 1997-10-13 1999-04-30 Dainippon Screen Mfg Co Ltd 基板処理装置
KR100542299B1 (ko) * 1998-04-23 2006-04-14 비오이 하이디스 테크놀로지 주식회사 포토레지스트의 에지부 제거 장치
DE10130999A1 (de) * 2000-06-29 2002-04-18 D M S Co Multifunktions-Reinigungsmodul einer Herstellungseinrichtung für Flachbildschirme und Reinigungsgerät mit Verwendung desselben
JP2004335838A (ja) * 2003-05-09 2004-11-25 Shin Etsu Handotai Co Ltd 洗浄装置、洗浄システム及び洗浄方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5564159A (en) * 1994-05-26 1996-10-15 The John Treiber Company Closed-loop multistage system for cleaning printed circuit boards
CN1194454A (zh) * 1997-01-24 1998-09-30 东京电子株式会社 清洗装置及清洗方法
CN1485150A (zh) * 2002-08-19 2004-03-31 大日本屏影象制造株式会社 基板处理装置及基板清洗设备
CN1531029A (zh) * 2003-03-12 2004-09-22 大日本屏影象制造株式会社 基板处理方法和基板处理装置

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JP特开2000-31112A 2000.01.28
JP特开2002-172369A 2002.06.18
JP特开平11-16871A 1999.01.22

Also Published As

Publication number Publication date
JP4668088B2 (ja) 2011-04-13
TW200715389A (en) 2007-04-16
KR100817980B1 (ko) 2008-03-31
JP2007134665A (ja) 2007-05-31
CN1947871A (zh) 2007-04-18
TWI303849B (OSRAM) 2008-12-01
KR20070041320A (ko) 2007-04-18

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C06 Publication
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SE01 Entry into force of request for substantive examination
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GR01 Patent grant
C56 Change in the name or address of the patentee

Owner name: SCREEN GROUP CO., LTD.

Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD.

Owner name: DAINIPPON SCREEN MFG. CO., LTD.

Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD.

CP01 Change in the name or title of a patent holder

Address after: Kyoto City, Kyoto, Japan

Patentee after: Skilling Group

Address before: Kyoto City, Kyoto, Japan

Patentee before: DAINIPPON SCREEN MFG Co.,Ltd.

Address after: Kyoto City, Kyoto, Japan

Patentee after: DAINIPPON SCREEN MFG Co.,Ltd.

Address before: Kyoto City, Kyoto, Japan

Patentee before: Dainippon Screen Mfg. Co.,Ltd.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20101208

Termination date: 20160828

CF01 Termination of patent right due to non-payment of annual fee