CN207793414U - 具有防气体飘逸功能的板材镀膜设备 - Google Patents

具有防气体飘逸功能的板材镀膜设备 Download PDF

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CN207793414U
CN207793414U CN201721687021.0U CN201721687021U CN207793414U CN 207793414 U CN207793414 U CN 207793414U CN 201721687021 U CN201721687021 U CN 201721687021U CN 207793414 U CN207793414 U CN 207793414U
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施栓林
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Shanghai zuqiang Energy Co.,Ltd.
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Abstract

本实用新型公开了一种具有防气体飘逸功能的板材镀膜设备，包括第一靶材镀膜腔和第二靶材镀膜腔，所述第一靶材镀膜腔与所述第二靶材镀膜腔之间设有隔离腔，所述隔离腔通过第一隔板与所述第一靶材镀膜腔分隔，通过第二隔板与所述第二靶材镀膜腔分隔，所述第一隔板和所述第二隔板上均具有狭缝和吹扫装置；所述第一靶材镀膜腔内靠近所述第一隔板的一端设有第一泵腔，所述第二靶材镀膜腔内靠近所述第二隔板的一端设有第二泵腔，所述隔离腔、所述第一泵腔和所述第二泵腔内均设有分子泵。本实用新型能够有效解决镀膜腔室间的气氛飘逸问题，保证玻璃镀膜质量，具有结构简单和制造成本低的优点。

Description

具有防气体飘逸功能的板材镀膜设备
技术领域
本实用新型涉及一种镀膜设备，特别是一种具有防气体飘逸功能的板材镀膜设备。
背景技术
在板材镀膜设备中，根据不同的制程工艺，需要不同种类的靶材同时溅射沉积镀膜，每种靶材都有相应的工艺要求，在有主溅射气体的同时，还需要加入辅助溅射气体，如O2，H2，N2等，多种靶材的溅射过程是在同一个真空腔室发生的，为了在制程工艺中不同靶材之间反应气体互不影响，需要将不同靶材溅射工艺分隔开，来保证镀膜质量。
如图1所示，现有的隔离方式通常是在根据不同靶材溅射工艺分别设置加工腔室100，工艺腔室100之间添加一个隔离腔200，隔离腔200内配有分子泵300来抽气，前后隔离腔200各安装一个翻板阀400来代替腔体间的门板，以实现不同工艺腔室气体的隔离，其造价贵，要求高，必须要有自动化控制。
实用新型内容
本实用新型的目的是提供一种具有防气体飘逸功能的板材镀膜设备，以解决现有技术中的技术问题，它能够有效隔离镀膜设备的各个腔室，防止腔室间气体飘逸，保证玻璃镀膜质量，具有结构简单和制造成本低的优点。
本实用新型提供了一种具有防气体飘逸功能的板材镀膜设备，包括第一靶材镀膜腔和第二靶材镀膜腔，所述第一靶材镀膜腔与所述第二靶材镀膜腔之间设有隔离腔，所述隔离腔通过第一隔板与所述第一靶材镀膜腔分隔，通过第二隔板与所述第二靶材镀膜腔分隔，所述第一隔板和所述第二隔板上均具有狭缝和吹扫装置；所述第一靶材镀膜腔内靠近所述第一隔板的一端设有第一泵腔，所述第二靶材镀膜腔内靠近所述第二隔板的一端设有第二泵腔，所述隔离腔、所述第一泵腔和所述第二泵腔内均设有分子泵。
前述的具有防气体飘逸功能的板材镀膜设备中，优选地，所述第一隔板和所述第二隔板上的所述吹扫装置均位于所述隔离腔内。
前述的具有防气体飘逸功能的板材镀膜设备中，优选地，所述吹扫装置包括气管、端板和流量控制阀，所述端板为2个，分别固定在所述狭缝长度方向上的两端，所述气管固定在2个所述端板上，所述气管的进气端与所述流量控制阀的出气端连接，所述流量控制阀的进气端通过管路与气源连接，所述气管上具有喷嘴。
前述的具有防气体飘逸功能的板材镀膜设备中，优选地，所述气管为环形结构。
前述的具有防气体飘逸功能的板材镀膜设备中，优选地，所述喷嘴的喷气方向朝向所述狭缝，所述喷嘴与所述狭缝的夹角为30°-60°度。
前述的具有防气体飘逸功能的板材镀膜设备中，优选地，所述喷嘴与所述狭缝的夹角为45°。
前述的具有防气体飘逸功能的板材镀膜设备中，优选地，所述狭缝的内壁面为粗糙面。
前述的具有防气体飘逸功能的板材镀膜设备中，优选地，所述隔离腔内的所述分子泵为4个。
前述的具有防气体飘逸功能的板材镀膜设备中，优选地，所述第一泵腔和所述第二泵腔内均设有2个所述分子泵。
与现有技术相比，本实用新型在隔离腔内设置了分子泵，分子泵可以将隔离腔内的气体抽出隔离腔，以防止气体经过狭缝进入其它镀膜腔内；为了保证各个靶材镀膜腔内的镀膜质量，除了设置分子泵外，还在第一隔板和第二隔板上设置了吹扫装置，通过吹扫装置的吹扫可以将进入到狭缝内的气体吹回到镀膜腔的泵腔内，通过泵腔排出被吹回的气体，完全解决气体飘逸的问题。
附图说明
图1是现有技术中板材镀膜设备的俯视图；
图2是本实用新型整体结构的俯视图；
图3是吹扫装置的轴测图。
附图标记说明：
图1中：100-工艺腔室，200-隔离腔，300-分子泵，400-翻板阀；
图2和图3中：1-第一靶材镀膜腔，2-第二靶材镀膜腔，3-隔离腔，4-分子泵，5-第一隔板，6-第二隔板，7-狭缝，8-吹扫装置，9-气管，10-端板，11- 流量控制阀，12-喷嘴，13-第一泵腔，14-第二泵腔。
具体实施方式
下面详细描述本实用新型的实施例，所述实施例的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的，仅用于解释本实用新型，而不能解释为对本实用新型的限制。
本实用新型的实施例：如图2和图3所示，一种具有防气体飘逸功能的板材镀膜设备，包括第一靶材镀膜腔1和第二靶材镀膜腔2，第一靶材镀膜腔1 与第二靶材镀膜腔2之间设有隔离腔3，隔离腔3通过第一隔板5与第一靶材镀膜腔1分隔，通过第二隔板6与第二靶材镀膜腔2分隔，第一隔板5和第二隔板6上均具有狭缝7，第一隔板5和第二隔板6上设有吹扫装置8；第一靶材镀膜腔1内靠近第一隔板5的一端设有第一泵腔13，第二靶材镀膜腔2内靠近第二隔板6的一端设有第二泵腔14，隔离腔3、第一泵腔13和第二泵腔 14内均设有分子泵4。第一隔板5和第二隔板6上的吹扫装置8均位于隔离腔 3内。
工作时，为第一隔板5上的吹扫装置8通入第一靶材镀膜腔1内的主溅射气体，为第二隔板6上的吹扫装置8通入第二靶材镀膜腔2内的主溅射气体，二者分别朝向相应的狭缝7进行吹气，通过第一隔板5上的吹扫装置8吹回的气体通过第一泵腔13内的分子泵4抽出，通过第二隔板5上的吹扫装置8吹回的气体通过第二泵腔14内的分子泵4抽出，隔离腔3内的气体则通过其内的分子泵4抽出，为了保证隔离效果，优选地，隔离腔3内的分子泵4设为4 个，第一泵腔13和第二泵腔14内的分子泵4均设为2个。通过这种结构设计，可以有效防止一个镀膜腔内的气体飘逸到另一个镀膜腔内，从而保证各镀膜腔内的工艺正常进行。
上述实施例中，吹扫装置8可采用任意带有吹气功能的装置，但为了保证隔离效果，本实施例提供一种优选方案，如图3所示，吹扫装置8包括气管9、端板10和流量控制阀11，端板10为2个，分别通过螺丝固定在狭缝7长度方向上的两端，气管9固定在2个端板10上，气管9的进气端与流量控制阀11的出气端连接，流量控制阀11的进气端通过管路与气源连接，气管9上具有喷嘴12。
通过流量控制阀11控制气管9的供气量，为了保证效果，气管9优选为环形结构，该环形结构与狭缝7仿形设计，且环绕狭缝7安装。喷嘴12的喷气方向朝向狭缝7，喷嘴12与狭缝7的夹角采用30°-60°，优选为45°。
此外，将狭缝7的内壁面通过喷砂工艺制成粗糙面也可以在一定程度上起到缓解气氛飘逸的作用。
以上依据图式所示的实施例详细说明了本实用新型的构造、特征及作用效果，以上所述仅为本实用新型的较佳实施例，但本实用新型不以图面所示限定实施范围，凡是依照本实用新型的构想所作的改变，或修改为等同变化的等效实施例，仍未超出说明书与图示所涵盖的精神时，均应在本实用新型的保护范围内。

Claims (9)

1.一种具有防气体飘逸功能的板材镀膜设备，包括第一靶材镀膜腔(1)和第二靶材镀膜腔(2)，所述第一靶材镀膜腔(1)与所述第二靶材镀膜腔(2)之间设有隔离腔(3)，其特征在于：所述隔离腔(3)通过第一隔板(5)与所述第一靶材镀膜腔(1)分隔，通过第二隔板(6)与所述第二靶材镀膜腔(2)分隔，所述第一隔板(5)和所述第二隔板(6)上均具有狭缝(7)和设有吹扫装置(8)；所述第一靶材镀膜腔(1)内靠近所述第一隔板(5)的一端设有第一泵腔(13)，所述第二靶材镀膜腔(2)内靠近所述第二隔板(6)的一端设有第二泵腔(14)，所述隔离腔(3)、所述第一泵腔(13)和所述第二泵腔(14)内均设有分子泵(4)。
2.根据权利要求1所述的具有防气体飘逸功能的板材镀膜设备，其特征在于：所述第一隔板(5)和所述第二隔板(6)上的所述吹扫装置(8)均位于所述隔离腔(3)内。
3.根据权利要求1或2所述的具有防气体飘逸功能的板材镀膜设备，其特征在于：所述吹扫装置(8)包括气管(9)、端板(10)和流量控制阀(11)，所述端板(10)为2个，分别固定在所述狭缝(7)长度方向上的两端，所述气管(9)固定在2个所述端板(10)上，所述气管(9)的进气端与所述流量控制阀(11)的出气端连接，所述流量控制阀(11)的进气端通过管路与气源连接，所述气管(9)上具有喷嘴(12)。
4.根据权利要求3所述的具有防气体飘逸功能的板材镀膜设备，其特征在于：所述气管(9)为环形结构。
5.根据权利要求3所述的具有防气体飘逸功能的板材镀膜设备，其特征在于：所述喷嘴(12)的喷气方向朝向所述狭缝(7)，所述喷嘴(12)与所述狭缝(7)的夹角为30°-60°度。
6.根据权利要求5所述的具有防气体飘逸功能的板材镀膜设备，其特征在于：所述喷嘴(12)与所述狭缝(7)的夹角为45°。
7.根据权利要求1所述的具有防气体飘逸功能的板材镀膜设备，其特征在于：所述狭缝(7)的内壁面为粗糙面。
8.根据权利要求1所述的具有防气体飘逸功能的板材镀膜设备，其特征在于：所述隔离腔(3)内的所述分子泵(4)为4个。
9.根据权利要求1所述的具有防气体飘逸功能的板材镀膜设备，其特征在于：所述第一泵腔(13)和所述第二泵腔(14)内均设有2个所述分子泵(4)。
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