CN1922731A - 半导体装置及其制造方法 - Google Patents
半导体装置及其制造方法 Download PDFInfo
- Publication number
- CN1922731A CN1922731A CN200480042133.XA CN200480042133A CN1922731A CN 1922731 A CN1922731 A CN 1922731A CN 200480042133 A CN200480042133 A CN 200480042133A CN 1922731 A CN1922731 A CN 1922731A
- Authority
- CN
- China
- Prior art keywords
- film
- semiconductor device
- wiring layer
- silicon oxide
- forms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76826—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. by contacting the layer with gases, liquids or plasmas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76828—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76832—Multiple layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/5329—Insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/5329—Insulating materials
- H01L23/53295—Stacked insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
- H01L28/57—Capacitors with a dielectric comprising a perovskite structure material comprising a barrier layer to prevent diffusion of hydrogen or oxygen
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
- H10B53/30—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors characterised by the memory core region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Semiconductor Memories (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Description
氧化硅膜的厚度(nm) | 氮化硅膜的厚度(nm) | 渗入产生数 | 备注 | |
实施例1 | 350 | 500 | 0/10 | 无腐蚀 |
比较例1 | 100 | 350 | 8/10 | 布线有腐蚀 |
比较例2 | 100 | 500 | 8/10 | 布线有腐蚀 |
72小时后的不良数 | 168小时后的不良数 | 336小时后的不良数 | |
实施例2 | 0/20 | 0/20 | 0/20 |
比较例3 | 12/19 | 11/20 | 未测定 |
Claims (19)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2004/006289 WO2005106957A1 (ja) | 2004-04-30 | 2004-04-30 | 半導体装置及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1922731A true CN1922731A (zh) | 2007-02-28 |
CN1922731B CN1922731B (zh) | 2010-12-08 |
Family
ID=35241935
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200480042133.XA Expired - Fee Related CN1922731B (zh) | 2004-04-30 | 2004-04-30 | 半导体装置的制造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7999301B2 (zh) |
JP (1) | JP5045101B2 (zh) |
CN (1) | CN1922731B (zh) |
WO (1) | WO2005106957A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104637864A (zh) * | 2013-11-14 | 2015-05-20 | 中芯国际集成电路制造(上海)有限公司 | 提高数据保持能力的方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007165350A (ja) * | 2005-12-09 | 2007-06-28 | Fujitsu Ltd | 半導体装置の製造方法 |
KR101005028B1 (ko) * | 2005-12-27 | 2010-12-30 | 후지쯔 세미컨덕터 가부시키가이샤 | 반도체 장치 |
JP5309988B2 (ja) * | 2006-03-29 | 2013-10-09 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法 |
WO2015033623A1 (ja) * | 2013-09-05 | 2015-03-12 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3276007B2 (ja) | 1999-07-02 | 2002-04-22 | 日本電気株式会社 | 混載lsi半導体装置 |
US6611014B1 (en) | 1999-05-14 | 2003-08-26 | Kabushiki Kaisha Toshiba | Semiconductor device having ferroelectric capacitor and hydrogen barrier film and manufacturing method thereof |
JP2001358309A (ja) * | 1999-05-14 | 2001-12-26 | Toshiba Corp | 半導体装置 |
KR20020004539A (ko) * | 2000-07-06 | 2002-01-16 | 박종섭 | 수소확산을 방지할 수 있는 강유전체 메모리 소자 제조 방법 |
JP2002035442A (ja) * | 2000-07-27 | 2002-02-05 | Sony Corp | 模型及び遠隔操作系 |
JP4023770B2 (ja) * | 2000-12-20 | 2007-12-19 | 株式会社東芝 | 半導体記憶装置及びその製造方法 |
JP2002217198A (ja) | 2001-01-19 | 2002-08-02 | Hitachi Ltd | 半導体装置 |
US7358578B2 (en) | 2001-05-22 | 2008-04-15 | Renesas Technology Corporation | Field effect transistor on a substrate with (111) orientation having zirconium oxide gate insulation and cobalt or nickel silicide wiring |
JP3756422B2 (ja) * | 2001-05-22 | 2006-03-15 | 株式会社ルネサステクノロジ | 半導体装置 |
JP4280006B2 (ja) * | 2001-08-28 | 2009-06-17 | パナソニック株式会社 | 半導体装置 |
JP2003197878A (ja) * | 2001-10-15 | 2003-07-11 | Hitachi Ltd | メモリ半導体装置およびその製造方法 |
JP2003209223A (ja) * | 2002-01-15 | 2003-07-25 | Oki Electric Ind Co Ltd | 半導体素子およびその製造方法 |
JP2004095861A (ja) * | 2002-08-30 | 2004-03-25 | Fujitsu Ltd | 半導体装置及びその製造方法 |
-
2004
- 2004-04-30 JP JP2006512706A patent/JP5045101B2/ja not_active Expired - Fee Related
- 2004-04-30 WO PCT/JP2004/006289 patent/WO2005106957A1/ja active Application Filing
- 2004-04-30 CN CN200480042133.XA patent/CN1922731B/zh not_active Expired - Fee Related
-
2006
- 2006-10-11 US US11/545,534 patent/US7999301B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104637864A (zh) * | 2013-11-14 | 2015-05-20 | 中芯国际集成电路制造(上海)有限公司 | 提高数据保持能力的方法 |
CN104637864B (zh) * | 2013-11-14 | 2017-11-24 | 中芯国际集成电路制造(上海)有限公司 | 提高数据保持能力的方法 |
Also Published As
Publication number | Publication date |
---|---|
US20080217668A1 (en) | 2008-09-11 |
US7999301B2 (en) | 2011-08-16 |
JP5045101B2 (ja) | 2012-10-10 |
JPWO2005106957A1 (ja) | 2008-03-21 |
WO2005106957A1 (ja) | 2005-11-10 |
CN1922731B (zh) | 2010-12-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1282243C (zh) | 具有铜布线的半导体器件 | |
CN1129171C (zh) | 半导体器件的电容器的形成方法 | |
CN1230878C (zh) | 半导体装置及其制备方法 | |
CN1271716C (zh) | 半导体器件的制造方法 | |
CN1298054C (zh) | 存储器与逻辑电路混合形成于一芯片的半导体器件及其制法 | |
CN1249792C (zh) | 制造具有多层膜的半导体组件的方法 | |
CN1145208C (zh) | 半导体装置的制造方法和半导体装置 | |
CN1877795A (zh) | 半导体器件及其制造方法 | |
CN1384539A (zh) | 半导体元件的电容器及其制造方法 | |
CN1741263A (zh) | 制造半导体器件的方法以及一种半导体衬底 | |
CN1638112A (zh) | 半导体器件及其制造方法 | |
CN1261985C (zh) | 半导体器件及其制造方法 | |
CN1794456A (zh) | 用于半导体元件的电容器及其制造方法 | |
CN1207786C (zh) | 半导体存储装置及其制造方法 | |
CN1677676A (zh) | 半导体器件 | |
CN1819181A (zh) | 半导体装置及其制造方法 | |
CN1841647A (zh) | 半导体器件及其制造方法 | |
CN1922731A (zh) | 半导体装置及其制造方法 | |
CN1649156A (zh) | 半导体器件及其制造方法 | |
CN1714452A (zh) | 半导体器件及其制造方法 | |
CN1161837C (zh) | 半导体器件及其制造方法 | |
KR100445077B1 (ko) | 반도체소자의 제조방법 | |
CN1943033A (zh) | 半导体装置及其制造方法 | |
JP2007036267A (ja) | Sog膜の形成方法 | |
KR100878865B1 (ko) | 반도체 장치 및 그 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: FUJITSU MICROELECTRONICS CO., LTD. Free format text: FORMER OWNER: FUJITSU LIMITED Effective date: 20081107 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20081107 Address after: Tokyo, Japan, Japan Applicant after: Fujitsu Microelectronics Ltd. Address before: Kanagawa County, Japan Applicant before: Fujitsu Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101208 Termination date: 20210430 |
|
CF01 | Termination of patent right due to non-payment of annual fee |