CN1682364A - 半导体器件测试装置 - Google Patents
半导体器件测试装置 Download PDFInfo
- Publication number
- CN1682364A CN1682364A CNA038218682A CN03821868A CN1682364A CN 1682364 A CN1682364 A CN 1682364A CN A038218682 A CNA038218682 A CN A038218682A CN 03821868 A CN03821868 A CN 03821868A CN 1682364 A CN1682364 A CN 1682364A
- Authority
- CN
- China
- Prior art keywords
- signal
- semiconductor device
- output
- test
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 123
- 239000004065 semiconductor Substances 0.000 title claims abstract description 72
- 238000003860 storage Methods 0.000 claims description 9
- 230000002950 deficient Effects 0.000 claims description 8
- 230000004044 response Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims 3
- 230000008676 import Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 230000014759 maintenance of location Effects 0.000 description 5
- 238000011990 functional testing Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
- G11C29/12—Built-in arrangements for testing, e.g. built-in self testing [BIST] or interconnection details
- G11C29/18—Address generation devices; Devices for accessing memories, e.g. details of addressing circuits
- G11C29/26—Accessing multiple arrays
- G11C2029/2602—Concurrent test
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
Claims (8)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2003/002445 WO2004079816A1 (ja) | 2003-03-03 | 2003-03-03 | 半導体装置の試験装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1682364A true CN1682364A (zh) | 2005-10-12 |
CN100345269C CN100345269C (zh) | 2007-10-24 |
Family
ID=32948235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038218682A Expired - Fee Related CN100345269C (zh) | 2003-03-03 | 2003-03-03 | 半导体器件测试装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7526690B2 (zh) |
JP (1) | JP4111955B2 (zh) |
CN (1) | CN100345269C (zh) |
WO (1) | WO2004079816A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106205735A (zh) * | 2015-04-29 | 2016-12-07 | 中芯国际集成电路制造(上海)有限公司 | 嵌入式芯片测试方法及系统 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100512175B1 (ko) * | 2003-03-17 | 2005-09-02 | 삼성전자주식회사 | 출력 신호들을 선택적으로 출력가능한 반도체 집적 회로및 그것의 테스트 방법 |
US7913002B2 (en) * | 2004-08-20 | 2011-03-22 | Advantest Corporation | Test apparatus, configuration method, and device interface |
DE112014006642T5 (de) * | 2014-07-28 | 2017-01-19 | Intel Corporation | Halbleitervorrichtungs-Prüfgerät mit Dut-Daten-Streaming |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4862067A (en) * | 1987-06-24 | 1989-08-29 | Schlumberger Technologies, Inc. | Method and apparatus for in-circuit testing of electronic devices |
JP2919087B2 (ja) * | 1991-01-21 | 1999-07-12 | 富士通株式会社 | 半導体試験装置 |
JPH04285875A (ja) * | 1991-03-14 | 1992-10-09 | Fujitsu Ltd | ディジタル電子回路モジュールの試験装置 |
JPH0778499A (ja) * | 1993-09-10 | 1995-03-20 | Advantest Corp | フラッシュメモリ試験装置 |
JP3547059B2 (ja) * | 1995-06-30 | 2004-07-28 | 株式会社アドバンテスト | 半導体メモリ試験方法およびこの方法を実施する装置 |
US5621312A (en) * | 1995-07-05 | 1997-04-15 | Altera Corporation | Method and apparatus for checking the integrity of a device tester-handler setup |
JPH0963300A (ja) * | 1995-08-22 | 1997-03-07 | Advantest Corp | 半導体メモリ試験装置のフェイル解析装置 |
JPH1164454A (ja) | 1997-08-18 | 1999-03-05 | Advantest Corp | 半導体試験装置用同時測定制御回路 |
JP2000163989A (ja) * | 1998-11-30 | 2000-06-16 | Advantest Corp | Ic試験装置 |
JP4251707B2 (ja) * | 1999-04-02 | 2009-04-08 | 株式会社アドバンテスト | 半導体デバイス試験装置及び試験方法 |
JP2000314762A (ja) * | 1999-04-30 | 2000-11-14 | Asahi Kasei Microsystems Kk | 半導体試験装置 |
JP2001236797A (ja) * | 1999-12-17 | 2001-08-31 | Fujitsu Ltd | 自己試験回路及びそれを内蔵するメモリデバイス |
DE10112560B4 (de) * | 2001-03-15 | 2011-02-17 | Infineon Technologies Ag | Verfahren und Vorrichtung zum Prüfen von Schaltungsmodulen |
US6961880B2 (en) * | 2001-07-30 | 2005-11-01 | Infineon Technologies Ag | Recording test information to identify memory cell errors |
US6880117B2 (en) * | 2002-06-14 | 2005-04-12 | Macronix International Co., Ltd. | Memory device test system and method |
-
2003
- 2003-03-03 JP JP2004569073A patent/JP4111955B2/ja not_active Expired - Fee Related
- 2003-03-03 CN CNB038218682A patent/CN100345269C/zh not_active Expired - Fee Related
- 2003-03-03 WO PCT/JP2003/002445 patent/WO2004079816A1/ja active Application Filing
-
2005
- 2005-03-07 US US11/072,237 patent/US7526690B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106205735A (zh) * | 2015-04-29 | 2016-12-07 | 中芯国际集成电路制造(上海)有限公司 | 嵌入式芯片测试方法及系统 |
Also Published As
Publication number | Publication date |
---|---|
WO2004079816A1 (ja) | 2004-09-16 |
JPWO2004079816A1 (ja) | 2006-06-08 |
JP4111955B2 (ja) | 2008-07-02 |
US20050166113A1 (en) | 2005-07-28 |
US7526690B2 (en) | 2009-04-28 |
CN100345269C (zh) | 2007-10-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: FUJITSU MICROELECTRONICS CO., LTD. Free format text: FORMER OWNER: FUJITSU LIMITED Effective date: 20081017 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20081017 Address after: Tokyo, Japan, Japan Patentee after: Fujitsu Microelectronics Ltd. Address before: Kawasaki, Kanagawa, Japan Patentee before: Fujitsu Ltd. |
|
C56 | Change in the name or address of the patentee |
Owner name: FUJITSU SEMICONDUCTOR CO., LTD. Free format text: FORMER NAME: FUJITSU MICROELECTRON CO., LTD. |
|
CP03 | Change of name, title or address |
Address after: Kanagawa Patentee after: Fujitsu Semiconductor Co., Ltd. Address before: Tokyo, Japan Patentee before: Fujitsu Microelectronics Ltd. |
|
ASS | Succession or assignment of patent right |
Owner name: SUOSI FUTURE CO., LTD. Free format text: FORMER OWNER: FUJITSU SEMICONDUCTOR CO., LTD. Effective date: 20150511 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20150511 Address after: Kanagawa Patentee after: Co., Ltd. Suo Si future Address before: Kanagawa Patentee before: Fujitsu Semiconductor Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071024 Termination date: 20170303 |