CN1625676A - 流体控制装置 - Google Patents

流体控制装置 Download PDF

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CN1625676A
CN1625676A CNA028287886A CN02828788A CN1625676A CN 1625676 A CN1625676 A CN 1625676A CN A028287886 A CNA028287886 A CN A028287886A CN 02828788 A CN02828788 A CN 02828788A CN 1625676 A CN1625676 A CN 1625676A
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fluid control
heater
bearing parts
control device
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CN100408932C (zh
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星丈治
冈部庸之
五岛宪一
小林英雄
长屋晓典
山路道雄
吉川和博
川野祐司
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CKD Corp
Fujikin Inc
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Fujikin Inc
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00—Details
    • F24H9/18—Arrangement or mounting of grates or heating means
    • F24H9/1854—Arrangement or mounting of grates or heating means for air heaters
    • F24H9/1863—Arrangement or mounting of electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
    • F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
    • F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
    • F24H1/121—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium using electric energy supply
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H2250/00—Electrical heat generating means
    • F24H2250/02—Resistances
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y10T137/6606—With electric heating element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)

Abstract

一种流体控制装置，其中，在线(A)(B)的两侧配置有带式加热器(11)，而且在该线(A)(B)内在相邻的流体控制器间的多处设有容纳用于保持带式加热器的夹子(13)的间隙，带式加热器(11)由从其两侧夹紧的夹子(13)保持在线(A)(B)上，带有加热器的线(A)(B)安装在可装卸地安装于基座部件(1)上的线支承部件(10)上。在线支承部件(10)上设有沿长度方向延伸的加热器插入孔(14)，在该孔(14)中插入护套加热器(12)。

Description

流体控制装置
技术领域
本发明涉及半导体制造装置使用的流体控制装置，更详细地说，是涉及有必要进行流体的加热的流体控制装置。
在该说明书中，关于前后·上下，是以图1的右为前、左为后，以同图的上下为上下，左右是指朝向后方的方向。该前后·上下为了方便，也有前后倒转、上下成为左右而使用的情况。
背景技术
在半导体制造装置使用的流体控制装置中，正在推进过管而将质量流量控制器或开关阀等连结的集成化，作为这种装置，人们知道的有：条线由配置于上阶段的多个流体控制器和配置于下阶段的多个块状连接器部件形成，多条线呈并列状地配置于基板上，其入口及出口朝向同方向，连接器部件可自由装卸地安装于基板上，流体控制器可自由装卸地安装于连接器部件上。在这种流体控制装置中，根据其用途，有必要在1个或多个线上安装加热装置。
上述现有技术的流体控制装置，存在包含加热装置的各部件的组装作业费时的问题，另外，由于对线的增设及变更没有进行充分考虑，所以在发生系统改造时，必须将所有的部件连同基板一起卸下，更换为安装有必要部件的基板，从而引起长时间的装置停止和现场施工工时数的增加。
发明内容
本发明的目的在于提供一种既具有加热装置，也容易组装，而且能够容易地对应线的增设·变更的流体控制装置。
第1发明的流体控制装置，其中的1条线由配置于上阶段的多个流体控制器和配置于下阶段的多个块状连接器部件形成，多条线呈并列状地配置于基座部件上，其入口及出口朝向同方向，其特征在于，至少在1条线的两侧配置有带式加热器，而且在同线内相邻的流体控制器间的多处设有容纳用于保持带式加热器的夹子的间隙，带式加热器由从其两侧夹紧其的夹子保持在线上，带有加热器的线安装在可装卸地安装于基座部件上的线支承部件上。
根据第1发明的流体控制装置，在组装装置整体时，在线支承部件上安装了连接器部件及流体控制器之后，在需要加热的线的两侧配置带式加热器，将这些带式加热器用夹子从两侧夹紧而形成各线，只要连同各线一起安装于基座部件上即可，易于组装。另外，在将没有装加热装置的线更换成带有带式加热器的线时，根据需要而将通路连结装置从上方卸下之后，将被更换的旧线连同线支承部件一起卸下，将带有带式加热器的线的线支承部件安装在基座部件上，更换后只需要安装必要的通路连接装置即可，能够容易地得到带有加热装置的线。在增设带有带式加热器的线时也可同样进行，从而易于进行线的增设。
第2发明的流体控制装置，其中的1条线由配置于上阶段的多个流体控制器和配置于下阶段的多个块状连接器部件形成，多条线呈并列状地配置于基座部件上，其入口及出口朝向同方向，其特征在于，各线分别安装在可装卸地安装于基座部件上的线支承部件上，在线支承部件上设有沿长度方向延伸的加热器插入孔，在该孔中插入护套加热器(シ一スヒ一タ)。
根据第2发明的流体控制装置，在组装装置整体时，预先在线支承部件的加热插入孔中插入护套加热器，在该线支承部件上安装连接器部件及流体控制器而形成各线，只要连同各线一起安装于基座部件上即可，易于组装。另外，在将没有装加热装置的线更换成带有带式加热器的线时，根据需要而将通路连结装置从上方卸下之后，将被更换的旧线连同线支承部件一起卸下，用带有护套加热器的线支承部件替换线支承部件安装在基座部件上，更换后只需要安装必要的通路连接装置即可，能够容易地得到带有加热装置的线。在增设带有带式加热器的线时也可同样进行，从而易于进行线的增设。
上述第1及第2的发明既可以分别单独使用，也可以两者并用。
在上述第1及第2发明中，作为线支承部件，例如，也可以使用具有各种各样形状的导轨，在这种情况下，最好是，线支承部件使用能够可装卸地安装于基座部件上的导轨，而且各连接器部件可相对于线支承部件上滑动地安装于线支承部件上，跨越这些连接器部件地安装流体控制器。通过这样做，在将连接器部件、流体控制器及带式加热器安装于线支承部件上时，使连接器部件沿线支承部件的轨道滑动而将其配置到所期望的位置上之后，跨越这些连接器部件地安装流体控制器，并且用夹子保持带式加热器即可，能够容易地组装带有带式加热器的线。
另外，基座部件有的使用形成线支承部件的导轨(非金属制)，由连结入口侧导轨、出口侧导轨及两导轨彼此之间的连结部件形成为框状。在这种场合，有连结部件也使用导轨的情况。通过这样做，在进行线的更换时，按照需要而将通路连结装置从上方卸下之后，将被更换的旧线连同线支承部件一起卸下，使不更换的线的线支承部件按照需要而滑动，将更换的线的线支承部件安装于基座部件上，此外，使不更换的线的线支承部件滑动而返回适当位置，最后，只需要安装变更后必要的通路连结装置即可，在增设时也同样，可更加容易进行线的增设及变更。而且，由于基座部件的导轨为非金属制，所以基座部件具有隔热效果，所以不必另外再设置其他的隔热材料层。
作为流体控制器，有质量流量控制器、开关阀、止回阀、调节器、过滤器、通路部件(通路ブロツク)等，带式加热器正对设于流体控制器的下部的带有通路的本体的侧面(在是通路部件的场合为其侧面全体)。另外，带式加热器正对流体控制器的本体和块状连接器部件。
附图说明
图1是表示本发明的流体控制装置的第1实施方式的侧视图。
图2是沿图1的II-II线的剖视图。
图3是表示作为第1加热装置的带式加热器的放大分解立体图。
图4是表示作为第2加热装置的护套加热器的放大分解立体图。
图5是表示本发明的流体控制装置的第2实施方式的侧视图。
图6是沿图5的VI-VI线的剖视图。
具体实施方式
以下参照图对本发明的实施方式进行说明。
图1至图4表示本发明的流体控制装置的第1实施方式，流体控制装置被形成为：多条线(在图2中示出A及B两条线)(A)(B)呈并列状地配置于基座部件(1)上，其入口及出口朝向同方向，各条线(在图1中只表示出A线)(A)(B)由配置于上阶段的多个流体控制器(2)(3)(4)(5)(6)(7)和配置于下阶段的多个块状连接器部件(8)形成。各线(A)(B)分别安装于线支承部件(10)上。另外，各线(A)(B)可由使用如图3所示的带式加热器(11)的第1加热装置和使用如图4所示的护套加热器(12)的第2加热装置加热。
如图1所示的A线(A)的流体控制器为：质量流量控制器(2)、设置于质量流量控制器(2)的前方(入口侧)的入口侧第1开关阀(3)及入口侧第2开关阀(4)、设置于质量流量控制器(2)的后方(出口侧)的止回阀(5)、出口侧第1开关阀(6)及出口侧第2开关阀(7)。
各流体控制器(2)(3)(4)(5)(6)(7)在下部具有形成有通路的块状本体，邻接的流体控制器(2)(3)(4)(5)(6)(7)彼此间由配置于它们下方的带有V字状通路的块状连接器(8)连通。在块状连接器(8)的上表面上设有垂直内螺纹部，各流体控制器(2)(3)(4)(5)(6)(7)通过将贯通其本体的外螺纹(16)旋入连结器(8)的垂直内螺纹部而安装于连结器(8)上。
基座部件(1)由多个向与各线正交的方向延伸的横向导轨(1a)和连结它们的连结部件(省略图示)形成为框状。
线支承部件(10)为合成树脂制的轨道，各块状连接器(8)可相对于该线支承部件(10)滑动地被安装于该线支承部件(10)上。线支承部件(10)由挤压型材形成，在其内部形成有两个截面为下窄的梯形状的槽(10a)，在这两个槽(10a)内嵌入沿其滑动的滑动部件(9)。滑动部件(9)与块状连结器(8)之间由贯通块状连接器(8)的外螺纹(15)的前端压紧滑动部件(9)而结合，块状连接器(8)通过松开外螺纹(15)而变得可滑动、通过拧紧外螺纹(16)而将线支承部件(10)固定到规定位置上。
带式加热器(11)配置于各线的流体控制器(2)(3)(4)(5)(6)(7)的本体的左右两侧，在其需要处由从其左右两侧夹紧的多个夹子(13)安装于流体控制器(2)(3)(5)(7)的本体上。夹子(13)由金属制薄板形成为倒U字状，通过使其相对的壁(13a)间隔具有变小的趋势的弹力而保持带式加热器(11)。夹子(13)在质量流量控制器(2)的前后分别设置两处、在入口及出口分别设置一处。夹子(13)的顶壁部(13b)的前后宽度短，在质量流量控制器(2)的前后设有收容该顶壁部(13b)的间隙。
护套加热器(12)埋入线支承部件(10)上，为此，在线支承部件(10)上设有向线方向延伸的两个加热器插入孔(14)。各加热器插入孔(14)配设于在线支承部件(10)上设有的下窄的梯形槽(10a)的底面的左右边缘部中。并且，护套加热器(12)插入加热器插入孔时，其端子从线支承部件(10)上露出。
基座部件(1)的横方向导轨(1a)使用的是与无加热器插入孔(14)的线支承部件(10)同样的部件。线支承部件(10)由与将连接器部件(8)安装于其上的构成同样的构成安装于横方向导轨(1a)上，因此，各线支承部件(10)能向与线(前后方向)正交的方向(左右方向)滑动。
根据上述的流体控制装置，在进行装置整体的组装、线的变更·增设时，能够预先将各线的构成部件(2)(3)(4)(5)(6)(7)(8)(11)(13)组装于线支承部件(10)上，能够由线支承部件单位组装·拆卸，并能使这些作业易于进行。由于块连结器(8)能够沿线支承部件(10)滑动，所以易于进行将各线的构成部件(2)(3)(4)(5)(6)(7)(8)向线支承部件(10)上组装的作业。
图5及图6表示了本发明的流体控制装置的第2实施方式。如同图中所示，各流体控制器(17)(18)(19)具有比第1实施方式的流体控制器(3)(4)(5)(6)(7)的本体上下高度小的本体(17a)(18a)(19a)，带式加热器(11)不仅位于流体控制器本体(17a)(18a)(19a)上，还位于连接器部件(8)的侧面上。而且，夹子(13)不仅由流体控制器本体(17a)(18a)(19a)保持，还由连接器部件(8)保持。其他构成与第1实施方式相同，对同样的构成标注同样的附图标记而省略其说明。
第2实施方式也能够易于进行装置整体的组装、线的变更·增设，在这一点上其与第1实施方式相同。第2实施方式较适用于加热的必要性较高的场合。其中，带式加热器(11)及护套加热器(12)并非必须并用，也可以根据加热的必要性而使用其中的某一方。
本发明的流体控制装置适用于有必要对半导体制造装置的半导体处理使用的流体进行加热的场合。

Claims (6)

1.一种流体控制装置，其中，1条线(A)(B)由配置于上阶段的多个流体控制器(2)(3)(4)(5)(6)(7)(17)(18)(19)和配置于下阶段的多个块状连接器部件(8)形成，多条线(A)(B)呈并列状地配置于基座部件(1)上，其入口及出口朝向同方向，其特征在于，
在至少在1条线(A)(B)的两侧配置有带式加热器(11)，而且在该线(A)(B)内在相邻的流体控制器(2)(3)(4)(5)(6)(7)(17)(18)(19)间的多处设有容纳用于保持带式加热器的夹子(13)的间隙，带式加热器(11)由从其两侧将其夹紧的夹子(13)保持在线(A)(B)上，带有加热器的线(A)(B)安装在可装卸地安装于基座部件(1)上的线支承部件(10)上。
2.一种流体控制装置，其中的1条线(A)(B)由配置于上阶段的多个流体控制器(2)(3)(4)(5)(6)(7)(17)(18)(19)和配置于下阶段的多个块状连接器部件(8)形成，多条线(A)(B)呈并列状地配置于基座部件(1)上，其入口及出口朝向同方向，其特征在于，
各线(A)(B)分别安装在可装卸地安装于基座部件(1)上的线支承部件(10)上，在线支承部件(10)上设有沿其长度方向延伸的加热器插入孔(14)，在该孔(14)中插入护套加热器(12)。
3.如权利要求1所述的流体控制装置，其特征在于，
在线支承部件(10)上设有沿其长度方向延伸的加热器插入孔(14)，在该孔(14)中插入护套加热器(12)。
4.如权利要求1至3中所述的流体控制装置，其特征在于，
各连接器部件(8)可相对于线支承部件(10)滑动地安装于线支承部件(10)上，跨越这些连接器部件(8)地安装流体控制器(2)(3)(4)(5)(6)(7)(17)(18)(19)。
5.如权利要求1至3中所述的流体控制装置，其特征在于，
基座部件(1)具有多个向与各线(A)(B)正交的方向延伸的非金属制横方向导轨(1a)，各线(A)(B)的线支承部件(10)可横方向滑动地安装于基座部件(1)上。
6.如权利要求1所述的流体控制装置，其特征在于，
带式加热器(11)贴靠于流体控制器(17)(18)(19)的本体(17a)(18a)(19a)和连接器部件(8)两方上。
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