CN1522468A - 具有用于改善可靠性和雪崩耐受性的结合的二极管的高压soi ldmos器件 - Google Patents
具有用于改善可靠性和雪崩耐受性的结合的二极管的高压soi ldmos器件 Download PDFInfo
- Publication number
- CN1522468A CN1522468A CNA028131827A CN02813182A CN1522468A CN 1522468 A CN1522468 A CN 1522468A CN A028131827 A CNA028131827 A CN A028131827A CN 02813182 A CN02813182 A CN 02813182A CN 1522468 A CN1522468 A CN 1522468A
- Authority
- CN
- China
- Prior art keywords
- see
- diode
- transistor
- region
- utmost point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 22
- 230000015556 catabolic process Effects 0.000 claims abstract description 21
- 229910044991 metal oxide Inorganic materials 0.000 claims description 8
- 150000004706 metal oxides Chemical class 0.000 claims description 8
- 239000012212 insulator Substances 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 6
- 230000007246 mechanism Effects 0.000 abstract description 3
- 230000001052 transient effect Effects 0.000 abstract description 2
- 230000006378 damage Effects 0.000 description 8
- 239000002184 metal Substances 0.000 description 4
- 210000000746 body region Anatomy 0.000 description 3
- 210000001163 endosome Anatomy 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 2
- 210000002583 cell-derived microparticle Anatomy 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
- H01L29/7824—Lateral DMOS transistors, i.e. LDMOS transistors with a substrate comprising an insulating layer, e.g. SOI-LDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
- H01L21/76281—Lateral isolation by selective oxidation of silicon
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
Abstract
Description
Claims (18)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/894,083 US6794719B2 (en) | 2001-06-28 | 2001-06-28 | HV-SOI LDMOS device with integrated diode to improve reliability and avalanche ruggedness |
US09/894,083 | 2001-06-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1522468A true CN1522468A (zh) | 2004-08-18 |
CN1302549C CN1302549C (zh) | 2007-02-28 |
Family
ID=25402579
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB028131827A Expired - Fee Related CN1302549C (zh) | 2001-06-28 | 2002-06-20 | 结合有二极管以改善可靠性和雪崩耐受性的高压soi ldmos器件 |
Country Status (6)
Country | Link |
---|---|
US (2) | US6794719B2 (zh) |
EP (1) | EP1405348A2 (zh) |
JP (1) | JP2004521516A (zh) |
KR (1) | KR100904783B1 (zh) |
CN (1) | CN1302549C (zh) |
WO (1) | WO2003003464A2 (zh) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100514674C (zh) * | 2004-10-21 | 2009-07-15 | 株式会社瑞萨科技 | 半导体集成电路和半导体器件 |
CN100546481C (zh) * | 2007-08-01 | 2009-10-07 | 扬州大学 | 棉花网底塑料穴盘育苗的出苗保护剂 |
CN101217162B (zh) * | 2008-01-04 | 2010-06-16 | 东南大学 | 高压n型金属氧化物半导体管及其制备方法 |
CN102130061A (zh) * | 2011-01-05 | 2011-07-20 | 杭州电子科技大学 | 制作集成双纵向沟道soi ldmos器件的方法 |
CN102157518A (zh) * | 2011-01-07 | 2011-08-17 | 北方工业大学 | 单片集成的新型双重突波保护器件及其制作方法 |
CN102194832A (zh) * | 2011-05-16 | 2011-09-21 | 重庆大学 | 具有界面横向变掺杂的soi耐压结构 |
CN103389443A (zh) * | 2012-05-07 | 2013-11-13 | 无锡华润上华科技有限公司 | 绝缘体上硅mos器件动态击穿电压的测试方法 |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6468878B1 (en) * | 2001-02-27 | 2002-10-22 | Koninklijke Philips Electronics N.V. | SOI LDMOS structure with improved switching characteristics |
EP2267784B1 (en) * | 2001-07-24 | 2020-04-29 | Cree, Inc. | INSULATING GATE AlGaN/GaN HEMT |
DE102004005948B4 (de) * | 2004-02-02 | 2009-04-02 | Atmel Germany Gmbh | MOS-Transistor und Verfahren zur Herstellung einer MOS-Transistorstruktur |
US7029981B2 (en) * | 2004-06-25 | 2006-04-18 | Intersil Americas, Inc. | Radiation hardened bipolar junction transistor |
JP2006245548A (ja) | 2005-02-01 | 2006-09-14 | Toshiba Corp | 半導体装置 |
KR100690173B1 (ko) * | 2005-03-08 | 2007-03-08 | 매그나칩 반도체 유한회사 | 반도체 소자 및 그 제조방법 |
CN100369265C (zh) * | 2005-08-26 | 2008-02-13 | 东南大学 | 三维多栅高压p型横向双扩散金属氧化物半导体管 |
CN100369264C (zh) * | 2005-08-26 | 2008-02-13 | 东南大学 | 三维多栅高压n型横向双扩散金属氧化物半导体管 |
US7638818B2 (en) * | 2005-09-07 | 2009-12-29 | Cree, Inc. | Robust transistors with fluorine treatment |
KR101147366B1 (ko) | 2005-12-29 | 2012-05-22 | 매그나칩 반도체 유한회사 | 고주파 파워증폭기를 위한 수평형확산모스트랜지스터 및그의 제조 방법 |
DE102006001922B3 (de) * | 2006-01-14 | 2007-05-03 | Infineon Technologies Austria Ag | Lateraler Leistungstransistor und Verfahren zu dessen Herstellung |
US7692263B2 (en) * | 2006-11-21 | 2010-04-06 | Cree, Inc. | High voltage GaN transistors |
US8212290B2 (en) | 2007-03-23 | 2012-07-03 | Cree, Inc. | High temperature performance capable gallium nitride transistor |
US8174071B2 (en) * | 2008-05-02 | 2012-05-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | High voltage LDMOS transistor |
JP2011061051A (ja) * | 2009-09-11 | 2011-03-24 | Toyota Motor Corp | 半導体装置 |
JP5167323B2 (ja) * | 2010-09-30 | 2013-03-21 | トヨタ自動車株式会社 | 半導体装置 |
US8629026B2 (en) | 2010-11-12 | 2014-01-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Source tip optimization for high voltage transistor devices |
US8853833B2 (en) | 2011-06-13 | 2014-10-07 | Micron Technology, Inc. | Electromagnetic shield and associated methods |
US8680615B2 (en) | 2011-12-13 | 2014-03-25 | Freescale Semiconductor, Inc. | Customized shield plate for a field effect transistor |
CN103296080B (zh) * | 2012-02-22 | 2015-09-09 | 旺宏电子股份有限公司 | 半导体结构及其形成方法 |
US9029950B2 (en) * | 2012-03-20 | 2015-05-12 | Macronix International Co., Ltd. | Semiconductor structure and method for forming the same |
US9236472B2 (en) * | 2012-04-17 | 2016-01-12 | Freescale Semiconductor, Inc. | Semiconductor device with integrated breakdown protection |
EP2665187B1 (en) | 2012-05-14 | 2016-07-20 | Ampleon Netherlands B.V. | Electronic device comprising RF-LDMOS transistor having improved ruggedness |
US10290702B2 (en) | 2012-07-31 | 2019-05-14 | Silanna Asia Pte Ltd | Power device on bulk substrate |
US8994105B2 (en) | 2012-07-31 | 2015-03-31 | Azure Silicon LLC | Power device integration on a common substrate |
US8674440B2 (en) | 2012-07-31 | 2014-03-18 | Io Semiconductor Inc. | Power device integration on a common substrate |
US9412881B2 (en) | 2012-07-31 | 2016-08-09 | Silanna Asia Pte Ltd | Power device integration on a common substrate |
US8928116B2 (en) | 2012-07-31 | 2015-01-06 | Silanna Semiconductor U.S.A., Inc. | Power device integration on a common substrate |
US8847310B1 (en) | 2012-07-31 | 2014-09-30 | Azure Silicon LLC | Power device integration on a common substrate |
EP2757580A1 (en) * | 2013-01-22 | 2014-07-23 | Nxp B.V. | Bipolar cmos dmos (bcd) processes |
KR101699585B1 (ko) * | 2014-09-24 | 2017-01-24 | 주식회사 동부하이텍 | 고전압 반도체 소자 및 그 제조 방법 |
US11088031B2 (en) | 2014-11-19 | 2021-08-10 | Key Foundry Co., Ltd. | Semiconductor and method of fabricating the same |
US10083897B2 (en) | 2017-02-20 | 2018-09-25 | Silanna Asia Pte Ltd | Connection arrangements for integrated lateral diffusion field effect transistors having a backside contact |
US9923059B1 (en) | 2017-02-20 | 2018-03-20 | Silanna Asia Pte Ltd | Connection arrangements for integrated lateral diffusion field effect transistors |
US10424661B1 (en) | 2018-04-04 | 2019-09-24 | Silanna Asia Pte Ltd | Avalanche robust LDMOS |
CN108828422B (zh) * | 2018-05-30 | 2021-08-13 | 西安易恩电气科技有限公司 | 雪崩耐量测试电路 |
KR102291315B1 (ko) * | 2019-10-16 | 2021-08-18 | 주식회사 키 파운드리 | 반도체 소자 |
CN111092123A (zh) * | 2019-12-10 | 2020-05-01 | 杰华特微电子(杭州)有限公司 | 横向双扩散晶体管及其制造方法 |
Family Cites Families (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US468984A (en) * | 1892-02-16 | Ernst boeing | ||
US767550A (en) * | 1904-01-28 | 1904-08-16 | Frank Lorenzo Doty | Apparatus for loading wagons. |
JPS51147972A (en) * | 1975-06-13 | 1976-12-18 | Nec Corp | Insulated gate field effect semiconductor device |
US4058822A (en) * | 1975-05-30 | 1977-11-15 | Sharp Kabushiki Kaisha | High voltage, low on-resistance diffusion-self-alignment metal oxide semiconductor device and manufacture thereof |
GB2011178B (en) * | 1977-12-15 | 1982-03-17 | Philips Electronic Associated | Fieldeffect devices |
US4290078A (en) * | 1979-05-30 | 1981-09-15 | Xerox Corporation | High voltage MOSFET without field plate structure |
JPS56169368A (en) * | 1980-05-30 | 1981-12-26 | Sharp Corp | High withstand voltage mos field effect semiconductor device |
DE3122352A1 (de) * | 1981-06-05 | 1983-01-13 | Horst Dipl.-Phys. 7410 Reutlingen Meinders | Hochsperrendes, planares halbleiterbauelement mit lackabdeckung |
DE3408285A1 (de) * | 1984-03-07 | 1985-09-19 | Telefunken electronic GmbH, 7100 Heilbronn | Schutzanordnung fuer einen feldeffekttransistor |
EP0157389B1 (en) * | 1984-03-31 | 1991-06-26 | Kabushiki Kaisha Toshiba | Protection device for a mos transistor |
JPH0716005B2 (ja) * | 1988-04-08 | 1995-02-22 | 株式会社東芝 | 半導体装置 |
US4896243A (en) * | 1988-12-20 | 1990-01-23 | Texas Instruments Incorporated | Efficient ESD input protection scheme |
US5386136A (en) * | 1991-05-06 | 1995-01-31 | Siliconix Incorporated | Lightly-doped drain MOSFET with improved breakdown characteristics |
JP3456242B2 (ja) * | 1993-01-07 | 2003-10-14 | セイコーエプソン株式会社 | 半導体装置及びその製造方法 |
EP0613186B1 (en) * | 1993-02-24 | 1997-01-02 | STMicroelectronics S.r.l. | Fully depleted lateral transistor |
JP3216743B2 (ja) * | 1993-04-22 | 2001-10-09 | 富士電機株式会社 | トランジスタ用保護ダイオード |
JP3173268B2 (ja) * | 1994-01-06 | 2001-06-04 | 富士電機株式会社 | Mis電界効果トランジスタを備えた半導体装置 |
US5990516A (en) * | 1994-09-13 | 1999-11-23 | Kabushiki Kaisha Toshiba | MOSFET with a thin gate insulating film |
US5468984A (en) | 1994-11-02 | 1995-11-21 | Texas Instruments Incorporated | ESD protection structure using LDMOS diodes with thick copper interconnect |
KR0154702B1 (ko) * | 1995-06-09 | 1998-10-15 | 김광호 | 항복전압을 향상시킨 다이오드 제조 방법 |
EP0757389B1 (en) * | 1995-07-31 | 2001-09-26 | STMicroelectronics S.r.l. | High voltage driver circuit for inductive loads |
US5602046A (en) * | 1996-04-12 | 1997-02-11 | National Semiconductor Corporation | Integrated zener diode protection structures and fabrication methods for DMOS power devices |
FR2754406A1 (fr) | 1996-10-03 | 1998-04-10 | Motorola Semiconducteurs | Circuit actif de fixation de niveau pour transistor metal-oxyde-semiconducteur a double diffusion de type lateral, montage l'incorporant et procede de formation de ce montage |
US5812006A (en) * | 1996-10-29 | 1998-09-22 | Texas Instruments Incorporated | Optimized power output clamping structure |
JPH10242159A (ja) * | 1997-02-25 | 1998-09-11 | Mitsubishi Electric Corp | 定電圧ダイオード内蔵トランジスタ |
US5844282A (en) * | 1997-03-28 | 1998-12-01 | Nec Corporation | Semiconductor device having field effect transistor connected at gate electrode to protective junction diode discharging in the presence of light |
DE19725091B4 (de) * | 1997-06-13 | 2004-09-02 | Robert Bosch Gmbh | Laterales Transistorbauelement und Verfahren zu seiner Herstellung |
US5996387A (en) * | 1997-10-07 | 1999-12-07 | Williams; J. Terrell | Method and apparatus for pre-stretching continuous chain-link drilling mud separation belt |
US6160290A (en) * | 1997-11-25 | 2000-12-12 | Texas Instruments Incorporated | Reduced surface field device having an extended field plate and method for forming the same |
GB2334633B (en) * | 1998-02-21 | 2002-09-25 | Mitel Corp | Low leakage electrostatic discharge protection system |
US5969387A (en) * | 1998-06-19 | 1999-10-19 | Philips Electronics North America Corporation | Lateral thin-film SOI devices with graded top oxide and graded drift region |
US6133591A (en) * | 1998-07-24 | 2000-10-17 | Philips Electronics North America Corporation | Silicon-on-insulator (SOI) hybrid transistor device structure |
JP3275850B2 (ja) * | 1998-10-09 | 2002-04-22 | 日本電気株式会社 | 高耐圧ダイオードとその製造方法 |
DE19855781C2 (de) * | 1998-12-03 | 2002-12-12 | Reifenhaeuser Masch | Wickelvorrichtung |
KR100275758B1 (ko) * | 1998-12-17 | 2001-02-01 | 김덕중 | 제너 다이오드를 내장한 수평형 모스 게이트형 반도체 소자 및그 제조 방법 |
JP2000260883A (ja) * | 1999-03-09 | 2000-09-22 | Toshiba Corp | 半導体集積回路 |
US6365932B1 (en) * | 1999-08-20 | 2002-04-02 | Denso Corporation | Power MOS transistor |
JP2001094094A (ja) * | 1999-09-21 | 2001-04-06 | Hitachi Ltd | 半導体装置およびその製造方法 |
WO2001047030A1 (en) * | 1999-12-20 | 2001-06-28 | Koninklijke Philips Electronics N.V. | Depletion type mos transistor |
JP2001352070A (ja) * | 2000-04-07 | 2001-12-21 | Denso Corp | 半導体装置およびその製造方法 |
-
2001
- 2001-06-28 US US09/894,083 patent/US6794719B2/en not_active Expired - Fee Related
-
2002
- 2002-06-20 JP JP2003509539A patent/JP2004521516A/ja active Pending
- 2002-06-20 WO PCT/IB2002/002414 patent/WO2003003464A2/en active Application Filing
- 2002-06-20 EP EP02735903A patent/EP1405348A2/en not_active Ceased
- 2002-06-20 KR KR1020037002882A patent/KR100904783B1/ko not_active IP Right Cessation
- 2002-06-20 CN CNB028131827A patent/CN1302549C/zh not_active Expired - Fee Related
-
2004
- 2004-07-02 US US10/884,148 patent/US20040232510A1/en not_active Abandoned
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100514674C (zh) * | 2004-10-21 | 2009-07-15 | 株式会社瑞萨科技 | 半导体集成电路和半导体器件 |
CN100546481C (zh) * | 2007-08-01 | 2009-10-07 | 扬州大学 | 棉花网底塑料穴盘育苗的出苗保护剂 |
CN101217162B (zh) * | 2008-01-04 | 2010-06-16 | 东南大学 | 高压n型金属氧化物半导体管及其制备方法 |
CN102130061A (zh) * | 2011-01-05 | 2011-07-20 | 杭州电子科技大学 | 制作集成双纵向沟道soi ldmos器件的方法 |
CN102130061B (zh) * | 2011-01-05 | 2012-12-05 | 杭州电子科技大学 | 制作集成双纵向沟道soi ldmos器件的方法 |
CN102157518A (zh) * | 2011-01-07 | 2011-08-17 | 北方工业大学 | 单片集成的新型双重突波保护器件及其制作方法 |
CN102194832A (zh) * | 2011-05-16 | 2011-09-21 | 重庆大学 | 具有界面横向变掺杂的soi耐压结构 |
CN103389443A (zh) * | 2012-05-07 | 2013-11-13 | 无锡华润上华科技有限公司 | 绝缘体上硅mos器件动态击穿电压的测试方法 |
CN103389443B (zh) * | 2012-05-07 | 2015-12-09 | 无锡华润上华科技有限公司 | 绝缘体上硅mos器件动态击穿电压的测试方法 |
Also Published As
Publication number | Publication date |
---|---|
KR100904783B1 (ko) | 2009-06-25 |
KR20040014968A (ko) | 2004-02-18 |
WO2003003464A3 (en) | 2003-11-27 |
WO2003003464A2 (en) | 2003-01-09 |
US20040232510A1 (en) | 2004-11-25 |
EP1405348A2 (en) | 2004-04-07 |
JP2004521516A (ja) | 2004-07-15 |
CN1302549C (zh) | 2007-02-28 |
US20030001209A1 (en) | 2003-01-02 |
US6794719B2 (en) | 2004-09-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1302549C (zh) | 结合有二极管以改善可靠性和雪崩耐受性的高压soi ldmos器件 | |
DE102008064698B4 (de) | Leistungshalbleiterbauelement mit einer Sensorzelle | |
EP1175700B1 (de) | Halbleiter-bauelement | |
CN102403341A (zh) | 横向绝缘栅双极晶体管 | |
EP0905780A2 (de) | Integrierte Halbleiterschaltung mit Schutzstruktur zum Schutz vor elektrostatischer Entladung | |
DE102012207878B4 (de) | Halbleiterbauelement mit verbesserter Softness | |
DE102006062077B4 (de) | Halbleitervorrichtung | |
CN101599508A (zh) | 半导体装置 | |
CN100477268C (zh) | 半导体器件 | |
CN1890815A (zh) | Ldmos晶体管 | |
CN104160509B (zh) | Esd保护半导体器件 | |
DE19638769C1 (de) | Emittergesteuerter Thyristor | |
DE102007013848A1 (de) | Halbleiterbauelement und Verfahren zur Herstellung desselben | |
DE102008028452B4 (de) | Leistungstransistor für hohe Spannungen in SOI-Technologie | |
CN101589471B (zh) | 半导体器件及形成半导体器件的方法 | |
EP0115098B1 (en) | Lateral dmos transistor device having an injector region | |
DE102014119544B4 (de) | Halbleitervorrichtung | |
EP0768717A2 (de) | Leistungshalbleiterelement | |
DE102015106688B4 (de) | Schalter mit einem feldeffekttransistor, insbesondere in einer integrierten schaltung zur verwendung in systemen mit lasten | |
CN1364316A (zh) | 横向dmos中改进的击穿结构与方法 | |
US5298770A (en) | Power switching MOS transistor | |
DE10126309B4 (de) | Rückwärtssperrendes Leistungshalbleiterbauelement und Verfahren zu dessen Herstellung | |
CN100474625C (zh) | 场效应晶体管及其应用器件 | |
DE10005772B4 (de) | Trench-MOSFET | |
EP2963678A1 (en) | Semiconductor device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: NXP CO., LTD. Free format text: FORMER OWNER: ROYAL PHILIPS ELECTRONICS CO., LTD. Effective date: 20071102 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20071102 Address after: Holland Ian Deho Finn Patentee after: Koninkl Philips Electronics NV Address before: Holland Ian Deho Finn Patentee before: Koninklike Philips Electronics N. V. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070228 Termination date: 20160620 |
|
CF01 | Termination of patent right due to non-payment of annual fee |