CN1295680A - 含有马来酰亚胺的光致聚合组合物及其使用方法 - Google Patents

含有马来酰亚胺的光致聚合组合物及其使用方法 Download PDF

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Publication number
CN1295680A
CN1295680A CN99804722A CN99804722A CN1295680A CN 1295680 A CN1295680 A CN 1295680A CN 99804722 A CN99804722 A CN 99804722A CN 99804722 A CN99804722 A CN 99804722A CN 1295680 A CN1295680 A CN 1295680A
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China
Prior art keywords
maleimide
group
alkyl
compound
aryl
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Pending
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CN99804722A
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English (en)
Chinese (zh)
Inventor
查尔斯·E·霍伊尔
拉加马尼·纳加拉汉
克里斯托弗·W·米勒
山·克里斯托弗·克拉克
E·索尼·延山
邵立英
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University of Southern Mississippi
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University of Southern Mississippi
First Chemical Corp
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Publication of CN1295680A publication Critical patent/CN1295680A/zh
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/46—Polymerisation initiated by wave energy or particle radiation
    • C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/46—Polymerisation initiated by wave energy or particle radiation
    • C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F22/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides or nitriles thereof
    • C08F22/10—Esters
    • C08F22/12—Esters of phenols or saturated alcohols
    • C08F22/18—Esters containing halogen
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J151/00—Adhesives based on graft polymers in which the grafted component is obtained by reactions only involving carbon-to-carbon unsaturated bonds; Adhesives based on derivatives of such polymers
    • C09J151/08—Adhesives based on graft polymers in which the grafted component is obtained by reactions only involving carbon-to-carbon unsaturated bonds; Adhesives based on derivatives of such polymers grafted on to macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031—Organic compounds not covered by group G03F7/029
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Organic Chemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Pyrrole Compounds (AREA)
  • Polymerisation Methods In General (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
CN99804722A 1998-01-30 1999-01-29 含有马来酰亚胺的光致聚合组合物及其使用方法 Pending CN1295680A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US7310098P 1998-01-30 1998-01-30
US60/073,100 1998-01-30

Publications (1)

Publication Number Publication Date
CN1295680A true CN1295680A (zh) 2001-05-16

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CN99804722A Pending CN1295680A (zh) 1998-01-30 1999-01-29 含有马来酰亚胺的光致聚合组合物及其使用方法

Country Status (12)

Country Link
US (1) US6555593B1 (https=)
EP (1) EP1051665B1 (https=)
JP (1) JP2002502056A (https=)
KR (1) KR100594956B1 (https=)
CN (1) CN1295680A (https=)
AT (1) ATE333114T1 (https=)
AU (1) AU2485199A (https=)
BR (1) BR9908044A (https=)
CA (1) CA2318809A1 (https=)
DE (1) DE69932320T2 (https=)
TW (1) TWI238841B (https=)
WO (1) WO1999039247A1 (https=)

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CN1752846B (zh) * 2004-09-23 2012-01-11 三星电子株式会社 用于半导体器件制造的、包括凝胶层的掩模图形及其形成方法
CN101556434B (zh) * 2008-04-07 2012-06-13 三养Ems株式会社 负性抗蚀剂组合物
CN114163551A (zh) * 2021-12-02 2022-03-11 广东博兴新材料科技有限公司 一种水性uv/eb敏感树脂及其制备方法和应用

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JP6463361B2 (ja) 2013-09-08 2019-01-30 コディアック サイエンシーズ インコーポレイテッドＫｏｄｉａｋ Ｓｃｉｅｎｃｅｓ Ｉｎｃ． 第ｖｉｉｉ因子両性イオンポリマーコンジュゲート
US9840553B2 (en) 2014-06-28 2017-12-12 Kodiak Sciences Inc. Dual PDGF/VEGF antagonists
KR20210013299A (ko) 2014-10-17 2021-02-03 코디악 사이언시스 인코포레이티드 부티릴콜린에스테라제 양성이온성 중합체 컨쥬게이트
BR112017009711B1 (pt) * 2014-11-13 2021-06-01 Rhodia Operations Composições, pasta de dentes, gel dental, dentifrício, pó dental, pasta profilática, enxaguante bucal, solução para enxágue, mousse dental, fio dental, goma de mascar, tira ou filme de cuidados bucais solúveis para aplicação direta ou fixação a uma superfície bucal, composto de fosfato e método de cuidados bucais
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Publication number Priority date Publication date Assignee Title
CN1752846B (zh) * 2004-09-23 2012-01-11 三星电子株式会社 用于半导体器件制造的、包括凝胶层的掩模图形及其形成方法
CN101556434B (zh) * 2008-04-07 2012-06-13 三养Ems株式会社 负性抗蚀剂组合物
CN114163551A (zh) * 2021-12-02 2022-03-11 广东博兴新材料科技有限公司 一种水性uv/eb敏感树脂及其制备方法和应用

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KR20010040466A (ko) 2001-05-15
AU2485199A (en) 1999-08-16
ATE333114T1 (de) 2006-08-15
DE69932320T2 (de) 2007-07-12
EP1051665A1 (en) 2000-11-15
EP1051665B1 (en) 2006-07-12
BR9908044A (pt) 2000-11-28
TWI238841B (en) 2005-09-01
DE69932320D1 (de) 2006-08-24
CA2318809A1 (en) 1999-08-05
US6555593B1 (en) 2003-04-29
JP2002502056A (ja) 2002-01-22
WO1999039247A1 (en) 1999-08-05
KR100594956B1 (ko) 2006-06-30

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