CN1285099C - 基板待机装置及具有该装置的基板处理装置 - Google Patents

基板待机装置及具有该装置的基板处理装置 Download PDF

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Publication number
CN1285099C
CN1285099C CNB2004100082046A CN200410008204A CN1285099C CN 1285099 C CN1285099 C CN 1285099C CN B2004100082046 A CNB2004100082046 A CN B2004100082046A CN 200410008204 A CN200410008204 A CN 200410008204A CN 1285099 C CN1285099 C CN 1285099C
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CN
China
Prior art keywords
substrate
standby
aforesaid substrate
aforesaid
stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004100082046A
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English (en)
Chinese (zh)
Other versions
CN1532888A (zh
Inventor
长田直之
冈田尚久
南茂树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Publication of CN1532888A publication Critical patent/CN1532888A/zh
Application granted granted Critical
Publication of CN1285099C publication Critical patent/CN1285099C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
CNB2004100082046A 2003-03-24 2004-03-01 基板待机装置及具有该装置的基板处理装置 Expired - Fee Related CN1285099C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003081032 2003-03-24
JP2003081032A JP4133489B2 (ja) 2003-03-24 2003-03-24 基板待機装置およびそれを備えた基板処理装置

Publications (2)

Publication Number Publication Date
CN1532888A CN1532888A (zh) 2004-09-29
CN1285099C true CN1285099C (zh) 2006-11-15

Family

ID=33294716

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004100082046A Expired - Fee Related CN1285099C (zh) 2003-03-24 2004-03-01 基板待机装置及具有该装置的基板处理装置

Country Status (4)

Country Link
JP (1) JP4133489B2 (ko)
KR (1) KR100591567B1 (ko)
CN (1) CN1285099C (ko)
TW (1) TWI245738B (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100409424C (zh) * 2005-04-26 2008-08-06 大日本网目版制造株式会社 基板处理装置
CN101339316B (zh) * 2007-07-02 2010-07-28 显示器生产服务株式会社 基板输送装置
JP5000597B2 (ja) * 2008-07-22 2012-08-15 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体ウェーハの支持具
JP5218000B2 (ja) 2008-12-12 2013-06-19 株式会社Ｉｈｉ 基板保管供給システム
CN102136407B (zh) * 2009-12-31 2013-11-06 丽佳达普株式会社 基板处理装置的导引架

Also Published As

Publication number Publication date
JP2004288991A (ja) 2004-10-14
CN1532888A (zh) 2004-09-29
JP4133489B2 (ja) 2008-08-13
KR100591567B1 (ko) 2006-06-19
TW200422243A (en) 2004-11-01
TWI245738B (en) 2005-12-21
KR20040084661A (ko) 2004-10-06

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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20061115

Termination date: 20160301

CF01 Termination of patent right due to non-payment of annual fee