JP4133489B2 - 基板待機装置およびそれを備えた基板処理装置 - Google Patents

基板待機装置およびそれを備えた基板処理装置 Download PDF

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Publication number
JP4133489B2
JP4133489B2 JP2003081032A JP2003081032A JP4133489B2 JP 4133489 B2 JP4133489 B2 JP 4133489B2 JP 2003081032 A JP2003081032 A JP 2003081032A JP 2003081032 A JP2003081032 A JP 2003081032A JP 4133489 B2 JP4133489 B2 JP 4133489B2
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JP
Japan
Prior art keywords
substrate
standby
transport
standby position
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003081032A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004288991A (ja
Inventor
直之 長田
尚久 岡田
茂樹 南
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd, Dainippon Screen Manufacturing Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2003081032A priority Critical patent/JP4133489B2/ja
Priority to CNB2004100082046A priority patent/CN1285099C/zh
Priority to TW093106960A priority patent/TWI245738B/zh
Priority to KR1020040018646A priority patent/KR100591567B1/ko
Publication of JP2004288991A publication Critical patent/JP2004288991A/ja
Application granted granted Critical
Publication of JP4133489B2 publication Critical patent/JP4133489B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2003081032A 2003-03-24 2003-03-24 基板待機装置およびそれを備えた基板処理装置 Expired - Fee Related JP4133489B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003081032A JP4133489B2 (ja) 2003-03-24 2003-03-24 基板待機装置およびそれを備えた基板処理装置
CNB2004100082046A CN1285099C (zh) 2003-03-24 2004-03-01 基板待机装置及具有该装置的基板处理装置
TW093106960A TWI245738B (en) 2003-03-24 2004-03-16 Substrate waiting apparatus and substrate processing apparatus using the same
KR1020040018646A KR100591567B1 (ko) 2003-03-24 2004-03-19 기판 대기장치 및 그것을 구비한 기판 처리장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003081032A JP4133489B2 (ja) 2003-03-24 2003-03-24 基板待機装置およびそれを備えた基板処理装置

Publications (2)

Publication Number Publication Date
JP2004288991A JP2004288991A (ja) 2004-10-14
JP4133489B2 true JP4133489B2 (ja) 2008-08-13

Family

ID=33294716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003081032A Expired - Fee Related JP4133489B2 (ja) 2003-03-24 2003-03-24 基板待機装置およびそれを備えた基板処理装置

Country Status (4)

Country Link
JP (1) JP4133489B2 (ko)
KR (1) KR100591567B1 (ko)
CN (1) CN1285099C (ko)
TW (1) TWI245738B (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101183043B1 (ko) 2008-12-12 2012-09-20 가부시키가이샤 아이에이치아이 기판을 보관 및 공급하는 시스템

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100409424C (zh) * 2005-04-26 2008-08-06 大日本网目版制造株式会社 基板处理装置
CN101339316B (zh) * 2007-07-02 2010-07-28 显示器生产服务株式会社 基板输送装置
JP5000597B2 (ja) * 2008-07-22 2012-08-15 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体ウェーハの支持具
CN102136407B (zh) * 2009-12-31 2013-11-06 丽佳达普株式会社 基板处理装置的导引架

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101183043B1 (ko) 2008-12-12 2012-09-20 가부시키가이샤 아이에이치아이 기판을 보관 및 공급하는 시스템

Also Published As

Publication number Publication date
JP2004288991A (ja) 2004-10-14
CN1532888A (zh) 2004-09-29
KR100591567B1 (ko) 2006-06-19
TW200422243A (en) 2004-11-01
CN1285099C (zh) 2006-11-15
TWI245738B (en) 2005-12-21
KR20040084661A (ko) 2004-10-06

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