CN101339316B - 基板输送装置 - Google Patents
基板输送装置 Download PDFInfo
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- CN101339316B CN101339316B CN2007101232307A CN200710123230A CN101339316B CN 101339316 B CN101339316 B CN 101339316B CN 2007101232307 A CN2007101232307 A CN 2007101232307A CN 200710123230 A CN200710123230 A CN 200710123230A CN 101339316 B CN101339316 B CN 101339316B
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- buffer arm
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2007101232307A CN101339316B (zh) | 2007-07-02 | 2007-07-02 | 基板输送装置 |
Applications Claiming Priority (1)
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CN2007101232307A CN101339316B (zh) | 2007-07-02 | 2007-07-02 | 基板输送装置 |
Publications (2)
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CN101339316A CN101339316A (zh) | 2009-01-07 |
CN101339316B true CN101339316B (zh) | 2010-07-28 |
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CN2007101232307A Active CN101339316B (zh) | 2007-07-02 | 2007-07-02 | 基板输送装置 |
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CN (1) | CN101339316B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103587962B (zh) * | 2012-08-14 | 2016-12-28 | 营口金辰机械股份有限公司 | 太阳能电池组件龙门式存储堆栈机 |
CN103662803B (zh) * | 2013-12-09 | 2016-02-24 | 合肥京东方光电科技有限公司 | 一种基板传输装置 |
CN105059968B (zh) * | 2015-08-09 | 2017-05-03 | 新乡医学院 | 一种互联网式同步搬板装置 |
TWI623359B (zh) * | 2017-03-17 | 2018-05-11 | 亞智科技股份有限公司 | 基板清洗方法與清洗設備 |
CN106932931B (zh) * | 2017-05-02 | 2019-09-27 | 武汉华星光电技术有限公司 | 一种对准玻璃板的装置及方法 |
FR3079507A1 (fr) * | 2018-03-29 | 2019-10-04 | Saint-Gobain Glass France | Ensemble de convoyage ameliore |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6022185A (en) * | 1992-08-18 | 2000-02-08 | Tokyo Electron Limited | Substrate transferring device |
CN1532888A (zh) * | 2003-03-24 | 2004-09-29 | 大日本网目版制造株式会社 | 基板待机装置及具有该装置的基板处理装置 |
CN1654289A (zh) * | 2004-02-09 | 2005-08-17 | 富士机械制造株式会社 | 基板运送装置 |
CN1847117A (zh) * | 2005-04-12 | 2006-10-18 | 显示器生产服务株式会社 | 叠层基板输送装置 |
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2007
- 2007-07-02 CN CN2007101232307A patent/CN101339316B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6022185A (en) * | 1992-08-18 | 2000-02-08 | Tokyo Electron Limited | Substrate transferring device |
CN1532888A (zh) * | 2003-03-24 | 2004-09-29 | 大日本网目版制造株式会社 | 基板待机装置及具有该装置的基板处理装置 |
CN1654289A (zh) * | 2004-02-09 | 2005-08-17 | 富士机械制造株式会社 | 基板运送装置 |
CN1847117A (zh) * | 2005-04-12 | 2006-10-18 | 显示器生产服务株式会社 | 叠层基板输送装置 |
Non-Patent Citations (2)
Title |
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JP特开2002-261142A 2002.09.13 |
JP特开2005-217020A 2005.08.11 |
Also Published As
Publication number | Publication date |
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CN101339316A (zh) | 2009-01-07 |
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C06 | Publication | ||
PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140226 |
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TR01 | Transfer of patent right |
Effective date of registration: 20140226 Address after: Gyeonggi Do, South Korea Patentee after: Display Production Service Co., Ltd. Patentee after: Weihai dianmei Shiguang electromechanical Co Ltd Address before: Gyeonggi Do, South Korea Patentee before: Display Production Service Co., Ltd. |
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TR01 | Transfer of patent right | ||
CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |
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CP03 | Change of name, title or address |