CN1238740C - 光学模块及其制造方法 - Google Patents

光学模块及其制造方法 Download PDF

Info

Publication number
CN1238740C
CN1238740C CNB031586481A CN03158648A CN1238740C CN 1238740 C CN1238740 C CN 1238740C CN B031586481 A CNB031586481 A CN B031586481A CN 03158648 A CN03158648 A CN 03158648A CN 1238740 C CN1238740 C CN 1238740C
Authority
CN
China
Prior art keywords
fibre core
silicon
optical waveguide
end portion
clad layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB031586481A
Other languages
English (en)
Chinese (zh)
Other versions
CN1495447A (zh
Inventor
山田浩治
土泽泰
内山真吾
壮司哲史
高桥淳一
渡边俊文
为近惠美
森田博文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002290775A external-priority patent/JP3795848B2/ja
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of CN1495447A publication Critical patent/CN1495447A/zh
Application granted granted Critical
Publication of CN1238740C publication Critical patent/CN1238740C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
CNB031586481A 2002-09-20 2003-09-19 光学模块及其制造方法 Expired - Lifetime CN1238740C (zh)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2002275216 2002-09-20
JP2002275216 2002-09-20
JP2002290775 2002-10-03
JP2002290775A JP3795848B2 (ja) 2002-10-03 2002-10-03 光平面回路型光学素子の製造方法
JP2002293457 2002-10-07
JP2002293457 2002-10-07
JP2002302960 2002-10-17
JP2002302960 2002-10-17
JP2002336135 2002-11-20
JP2002336135 2002-11-20

Publications (2)

Publication Number Publication Date
CN1495447A CN1495447A (zh) 2004-05-12
CN1238740C true CN1238740C (zh) 2006-01-25

Family

ID=31950855

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB031586481A Expired - Lifetime CN1238740C (zh) 2002-09-20 2003-09-19 光学模块及其制造方法

Country Status (4)

Country Link
US (1) US7076135B2 (fr)
EP (1) EP1400822B1 (fr)
CN (1) CN1238740C (fr)
DE (1) DE60309800T2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102074250A (zh) * 2009-11-05 2011-05-25 希捷科技有限公司 光传输波导
CN106104334A (zh) * 2014-04-11 2016-11-09 华为技术有限公司 悬置式脊形氧化物波导

Families Citing this family (105)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100667214B1 (ko) * 1999-09-16 2007-01-12 한국전자통신연구원 상호 테이퍼측면 접합 광도파로를 이용한 광 모드 크기 변환장치
FR2836724B1 (fr) * 2002-03-01 2004-07-23 Silios Technologies Adaptateur de mode optique pourvu de deux canaux distincts
US6934427B2 (en) * 2002-03-12 2005-08-23 Enablence Holdings Llc High density integrated optical chip with low index difference waveguide functions
US6870987B2 (en) * 2002-08-20 2005-03-22 Lnl Technologies, Inc. Embedded mode converter
US7013067B2 (en) * 2004-02-11 2006-03-14 Sioptical, Inc. Silicon nanotaper couplers and mode-matching devices
US7563628B2 (en) * 2004-11-10 2009-07-21 Lehigh University Fabrication of optical waveguide devices
KR20060093219A (ko) * 2005-02-21 2006-08-24 삼성전자주식회사 차단층을 갖는 평면광파회로 및 이를 이용한 광집적회로
JP2007072433A (ja) * 2005-08-11 2007-03-22 Ricoh Co Ltd 光集積素子及び光制御素子
JP4549949B2 (ja) * 2005-08-12 2010-09-22 株式会社フジクラ 光学素子
JPWO2007105393A1 (ja) * 2006-03-14 2009-07-30 コニカミノルタオプト株式会社 記録ヘッド及び記録装置
US7630602B2 (en) * 2006-12-04 2009-12-08 Electronics And Telecommunications Research Institute Optical filter module and method of manufacturing the same
JP4886627B2 (ja) * 2007-07-31 2012-02-29 株式会社東芝 光結合デバイス
US8078020B2 (en) * 2008-04-08 2011-12-13 Alcatel Lucent Optical mode-converter structure
US8644913B2 (en) 2011-03-28 2014-02-04 Avinger, Inc. Occlusion-crossing devices, imaging, and atherectomy devices
US8062316B2 (en) 2008-04-23 2011-11-22 Avinger, Inc. Catheter system and method for boring through blocked vascular passages
US9125562B2 (en) 2009-07-01 2015-09-08 Avinger, Inc. Catheter-based off-axis optical coherence tomography imaging system
US8031991B2 (en) * 2008-05-28 2011-10-04 Lightwire Inc. Low index, large mode field diameter optical coupler
US7643710B1 (en) * 2008-09-17 2010-01-05 Intel Corporation Method and apparatus for efficient coupling between silicon photonic chip and optical fiber
FR2936613B1 (fr) * 2008-09-30 2011-03-18 Commissariat Energie Atomique Coupleur de lumiere entre une fibre optique et un guide d'onde realise sur un substrat soi.
WO2010129075A1 (fr) 2009-04-28 2010-11-11 Avinger, Inc. Cathéter de support de fil-guide
JP6101078B2 (ja) * 2009-05-28 2017-03-29 アビンガー・インコーポレイテッドＡｖｉｎｇｅｒ， Ｉｎｃ． バイオイメージングのための光コヒーレンストモグラフィ
KR20100133767A (ko) * 2009-06-12 2010-12-22 삼성전기주식회사 광도파로용 인쇄회로기판 및 그 제조방법
EP2448502B1 (fr) 2009-07-01 2022-04-06 Avinger, Inc. Cathéter d'athérectomie pourvu d'une pointe déplaçable de manière latérale
WO2011078789A1 (fr) * 2009-12-23 2011-06-30 Agency For Science, Technology And Research Convertisseur optique et procédé de fabrication associé
JP2013531542A (ja) 2010-07-01 2013-08-08 アビンガー・インコーポレイテッド 長手方向に移動可能なドライブシャフトを有するアテローム切除カテーテル
US11382653B2 (en) 2010-07-01 2022-07-12 Avinger, Inc. Atherectomy catheter
US9040919B2 (en) * 2010-10-25 2015-05-26 Thomas E. Darcie Photomixer-waveguide coupling tapers
EP2487717B1 (fr) 2011-02-09 2014-09-17 Canon Kabushiki Kaisha ÉLÉMENT DE CONVERSION PHOTOÉLECTRIQUE, appareil de conversion photoélectrique et système de détection d'image
US9949754B2 (en) 2011-03-28 2018-04-24 Avinger, Inc. Occlusion-crossing devices
GB2492996B (en) * 2011-07-19 2018-01-10 Huawei Tech Co Ltd Coupled waveguide apparatus and structures therefor
US9885832B2 (en) * 2014-05-27 2018-02-06 Skorpios Technologies, Inc. Waveguide mode expander using amorphous silicon
RU2011140310A (ru) * 2011-09-16 2013-04-10 Конинклейке Филипс Электроникс Н.В. Высокочастотная волоноводная структура
WO2013059363A1 (fr) 2011-10-17 2013-04-25 Avinger, Inc. Cathéters d'athérectomie et mécanisme d'actionnement sans contact pour cathéters
US9345406B2 (en) 2011-11-11 2016-05-24 Avinger, Inc. Occlusion-crossing devices, atherectomy devices, and imaging
JP6140923B2 (ja) 2011-12-28 2017-06-07 富士通株式会社 スポットサイズ変換器、光送信器、光受信器、光送受信器及びスポットサイズ変換器の製造方法
CA2861467A1 (fr) * 2011-12-30 2013-07-04 James Dalton BELL Fibre optique isotopiquement modifiee
US20130230274A1 (en) * 2012-03-05 2013-09-05 Gregory Alan Fish Photonic flexible interconnect
JP2013231753A (ja) * 2012-04-27 2013-11-14 Nippon Telegr & Teleph Corp <Ntt> スポットサイズ変換器およびその製造方法
EP2849660B1 (fr) 2012-05-14 2021-08-25 Avinger, Inc. Ensembles de pilotage de cathéter d'athérectomie
US11406412B2 (en) 2012-05-14 2022-08-09 Avinger, Inc. Atherectomy catheters with imaging
WO2013172972A1 (fr) 2012-05-14 2013-11-21 Avinger, Inc. Tomographie à cohérence optique ayant une fibre à gradient d'indice pour imagerie biologique
US9498247B2 (en) 2014-02-06 2016-11-22 Avinger, Inc. Atherectomy catheters and occlusion crossing devices
US10335173B2 (en) 2012-09-06 2019-07-02 Avinger, Inc. Re-entry stylet for catheter
US11284916B2 (en) 2012-09-06 2022-03-29 Avinger, Inc. Atherectomy catheters and occlusion crossing devices
JP6523170B2 (ja) 2012-09-06 2019-05-29 アビンガー・インコーポレイテッドＡｖｉｎｇｅｒ， Ｉｎｃ． アテロームカテーテル及びアテロームアセンブリ
JP2014165292A (ja) * 2013-02-25 2014-09-08 Hitachi Ltd 発光素子及びその製造方法並びに光送受信器
JP6291025B2 (ja) 2013-03-15 2018-03-14 アビンガー・インコーポレイテッドＡｖｉｎｇｅｒ， Ｉｎｃ． 光学圧力センサアセンブリ
WO2014143064A1 (fr) 2013-03-15 2014-09-18 Avinger, Inc. Dispositifs de traversée d'occlusion totale chronique à l'aide d'imagerie
WO2014142954A1 (fr) 2013-03-15 2014-09-18 Avinger, Inc. Dispositif de collecte de tissu pour cathéter
JP6107948B2 (ja) 2013-06-07 2017-04-05 日本電気株式会社 導波モード変換素子、偏波分離器及び光デバイス
US10130386B2 (en) 2013-07-08 2018-11-20 Avinger, Inc. Identification of elastic lamina to guide interventional therapy
JP2015084019A (ja) * 2013-10-25 2015-04-30 富士通株式会社 スポットサイズ変換器及び光装置
JP2015087510A (ja) * 2013-10-30 2015-05-07 日本電信電話株式会社 光モジュールの作製方法
MX2016010141A (es) 2014-02-06 2017-04-06 Avinger Inc Cateteres de aterectomia y dispositivos de cruce de oclusion.
US9202493B1 (en) * 2014-02-28 2015-12-01 Western Digital (Fremont), Llc Method of making an ultra-sharp tip mode converter for a HAMR head
EP2924482B1 (fr) * 2014-03-26 2017-12-20 Huawei Technologies Co., Ltd. Convertisseur de modes de polarisation utilisant un guide d'ondes de nitrure de silicium asymétrique
US20150277036A1 (en) * 2014-03-28 2015-10-01 Futurewei Technologies, Inc. Apparatus and Method for an Optical Waveguide Edge Coupler for Photonic Integrated Chips
CN106461873B (zh) * 2014-04-30 2021-04-20 华为技术有限公司 低损耗模转换器及其制作方法
EP3166512B1 (fr) 2014-07-08 2020-08-19 Avinger, Inc. Dispositifs traversant une occlusion totale chronique à vitesse élevée
JP6394285B2 (ja) * 2014-10-31 2018-09-26 富士通株式会社 光導波路、スポットサイズ変換器及び光装置
US10031292B2 (en) 2015-01-08 2018-07-24 Acacia Communications, Inc. Horizontal coupling to silicon waveguides
US9917341B2 (en) * 2015-05-27 2018-03-13 At&T Intellectual Property I, L.P. Apparatus and method for launching electromagnetic waves and for modifying radial dimensions of the propagating electromagnetic waves
WO2017011587A1 (fr) 2015-07-13 2017-01-19 Avinger, Inc. Lentille réflectrice anamorphosante micro-moulée pour cathéters à usage diagnostique/thérapeutique guidés par imagerie
CA3012186A1 (fr) 2016-01-25 2017-08-03 Avinger, Inc. Catheter d'imagerie oct avec correction de decalage
EP3206062B1 (fr) * 2016-02-12 2023-01-04 Huawei Technologies Research & Development Belgium NV Structure de guide d'ondes pour couplage optique
CN105607185B (zh) * 2016-03-21 2019-01-08 中国科学院半导体研究所 提高亚微米硅波导与普通单模光纤耦合效率的结构
WO2017173370A1 (fr) 2016-04-01 2017-10-05 Avinger, Inc. Cathéter d'athérectomie avec dispositif de coupe dentelé
WO2017210466A1 (fr) 2016-06-03 2017-12-07 Avinger, Inc. Cathéter à extrémité distale détachable
JP6387373B2 (ja) * 2016-06-24 2018-09-05 株式会社フジクラ 微小光回路および光モード変換器
EP3478190B1 (fr) 2016-06-30 2023-03-15 Avinger, Inc. Cathéter d'athérectomie avec pointe distale formable
WO2018047119A1 (fr) * 2016-09-09 2018-03-15 Ranovus Inc. Coupleur optique avec un guide d'ondes et des matériaux adaptés à un indice de guide d'ondes au niveau d'un bord d'un substrat
KR102313684B1 (ko) 2016-10-12 2021-10-20 한국전자통신연구원 광 결합기
US10345524B2 (en) * 2016-12-22 2019-07-09 Huawei Technologies Co., Ltd. Optical edge coupler with controllable mode field for photonic chip
US10571633B1 (en) 2016-12-23 2020-02-25 Acacia Communications, Inc. Suspended cantilever waveguide
US10416381B1 (en) 2016-12-23 2019-09-17 Acacia Communications, Inc. Spot-size-converter design for facet optical coupling
US11320267B2 (en) 2017-03-23 2022-05-03 Kvh Industries, Inc. Integrated optic wavemeter and method for fiber optic gyroscopes scale factor stabilization
FR3065323B1 (fr) * 2017-04-13 2019-06-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Photodiode
US10718904B2 (en) * 2017-04-26 2020-07-21 University Of Central Florida Research Foundation, Inc. Thin-film integration compatible with silicon photonics foundry production
CN107294606B (zh) * 2017-07-26 2024-01-12 深圳市傲科光电子有限公司 一种单模光纤双向光收发器
CN107561640A (zh) * 2017-08-18 2018-01-09 中国科学院半导体研究所 硅纳米线波导与光纤耦合结构及其制作方法
JP2019045750A (ja) * 2017-09-05 2019-03-22 ルネサスエレクトロニクス株式会社 半導体装置
US11092748B2 (en) * 2017-09-15 2021-08-17 Kvh Industries, Inc. Method and apparatus for self-alignment connection of optical fiber to waveguide of photonic integrated circuit
CN107966761B (zh) * 2017-12-26 2019-11-12 武汉邮电科学研究院 一种渐变匹配耦合器
JP2019117286A (ja) 2017-12-27 2019-07-18 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
CN110231719A (zh) * 2018-03-05 2019-09-13 中国科学院半导体研究所 一种电光调制器
KR102632526B1 (ko) * 2018-04-11 2024-02-02 삼성전자주식회사 광 집적 회로
JP7112254B2 (ja) * 2018-05-31 2022-08-03 ルネサスエレクトロニクス株式会社 半導体モジュールおよび半導体モジュールを用いた通信方法
WO2019228486A1 (fr) * 2018-05-31 2019-12-05 Broadex Technologies Co., Ltd. Transformateur de mode de silice plc en nitrure de silicium pour dispositifs hybrides
CN110749955A (zh) * 2018-07-23 2020-02-04 上海新微技术研发中心有限公司 光波模式转换装置及其制造方法
JP2022504470A (ja) 2018-10-11 2022-01-13 ケーブイエイチ インダストリーズ インク フォトニック集積回路、光ファイバジャイロスコープ及びその製造方法
CN109581588B (zh) * 2018-12-29 2023-11-28 国科光芯(海宁)科技股份有限公司 一种复合硅基波导结构及其制备方法
CN109445032A (zh) * 2019-01-14 2019-03-08 科新网通科技有限公司 SiON波导与光纤耦合结构及其制作方法
CN110379901B (zh) * 2019-05-22 2020-10-27 华灿光电(苏州）有限公司 发光二极管芯片及其制作方法
US11353655B2 (en) 2019-05-22 2022-06-07 Kvh Industries, Inc. Integrated optical polarizer and method of making same
US10921682B1 (en) 2019-08-16 2021-02-16 Kvh Industries, Inc. Integrated optical phase modulator and method of making same
WO2021076356A1 (fr) 2019-10-18 2021-04-22 Avinger, Inc. Dispositifs de croisement d'occlusion
CN110632702B (zh) * 2019-10-23 2021-04-09 北京工业大学 一种lnoi基光波导反向楔形模斑耦合器及制备方法
CN113126217B (zh) * 2020-01-16 2022-11-11 华为技术有限公司 一种光发端器件、光发端器件的制备方法及光通信设备
JP7279658B2 (ja) * 2020-02-12 2023-05-23 住友電気工業株式会社 半導体光素子およびその製造方法
CN111522096B (zh) * 2020-03-31 2022-07-19 长春理工大学 硅波导与氧化硅波导模式转换器的制备方法
US11435525B2 (en) 2020-05-14 2022-09-06 Renesas Electronics Corporation Semiconductor device and method of manufacturing the same
US11860421B2 (en) * 2020-11-13 2024-01-02 Taiwan Semiconductor Manufacturing Co., Ltd. Multi-tip optical coupling devices
US20220365285A1 (en) * 2021-05-14 2022-11-17 Ranovus Inc. Waveguide coupler
WO2023039892A1 (fr) * 2021-09-18 2023-03-23 华为技术有限公司 Puce optique et son procédé de préparation, et dispositif de communication
CN115047563B (zh) * 2022-05-22 2023-03-17 上海图灵智算量子科技有限公司 集成波导的光学组件

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2502494B2 (ja) 1984-08-01 1996-05-29 松下電器産業株式会社 テ−パカツプリング素子の製造方法
FR2625333B1 (fr) 1987-12-24 1993-09-10 Commissariat Energie Atomique Procede de fabrication de microguides de lumiere a faibles pertes de propagation optique par depot de multicouches
JPH02163706A (ja) 1988-12-19 1990-06-25 Nippon Telegr & Teleph Corp <Ntt> シリコン光導波路およびその製造方法
JPH04283704A (ja) 1991-03-13 1992-10-08 Fujitsu Ltd 半導体光導波路
JPH05249331A (ja) 1992-01-09 1993-09-28 Nippon Telegr & Teleph Corp <Ntt> 導波路形ビームスポット変換素子およびその製造方法
JPH06174982A (ja) 1992-12-03 1994-06-24 Nippon Telegr & Teleph Corp <Ntt> 光結合デバイス
JP3318406B2 (ja) 1993-10-13 2002-08-26 京セラ株式会社 光導波路、光導波路と光ファイバの接続装置
JP3462049B2 (ja) 1996-08-30 2003-11-05 本田技研工業株式会社 車両用油圧作動式変速機の温度推定装置
JP3343846B2 (ja) 1996-10-21 2002-11-11 日本電信電話株式会社 光導波路の製造方法
JP3758258B2 (ja) 1996-11-29 2006-03-22 富士通株式会社 光結合装置
KR100333900B1 (ko) * 1999-01-21 2002-04-24 윤종용 모드모양 변환기, 그 제작 방법 및 이를 구비한 집적광학 소자
JP2001033642A (ja) 1999-07-19 2001-02-09 Nippon Telegr & Teleph Corp <Ntt> 光導波路構造
JP2001051144A (ja) 1999-08-17 2001-02-23 Nippon Telegr & Teleph Corp <Ntt> 光導波路及びその作製方法
US6631225B2 (en) 2000-07-10 2003-10-07 Massachusetts Institute Of Technology Mode coupler between low index difference waveguide and high index difference waveguide
US6850683B2 (en) 2000-07-10 2005-02-01 Massachusetts Institute Of Technology Low-loss waveguide and method of making same
JP3543121B2 (ja) 2000-10-18 2004-07-14 日本電信電話株式会社 光導波路接続構造
US20030044118A1 (en) * 2000-10-20 2003-03-06 Phosistor Technologies, Inc. Integrated planar composite coupling structures for bi-directional light beam transformation between a small mode size waveguide and a large mode size waveguide
KR100358133B1 (ko) 2000-12-30 2002-10-25 한국전자통신연구원 스트레인 분산 패드를 이용한 측면-테이퍼 도파로 제조방법과 이를 응용한 모드변환기 제조방법 및 그에 따른광소자
JP2004085868A (ja) 2002-08-27 2004-03-18 Matsushita Electric Ind Co Ltd 光導波路デバイスおよびその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102074250A (zh) * 2009-11-05 2011-05-25 希捷科技有限公司 光传输波导
CN102074250B (zh) * 2009-11-05 2014-06-25 希捷科技有限公司 光传输波导
CN106104334A (zh) * 2014-04-11 2016-11-09 华为技术有限公司 悬置式脊形氧化物波导

Also Published As

Publication number Publication date
US7076135B2 (en) 2006-07-11
CN1495447A (zh) 2004-05-12
DE60309800D1 (de) 2007-01-04
US20040057667A1 (en) 2004-03-25
EP1400822A3 (fr) 2004-04-21
DE60309800T2 (de) 2007-09-13
EP1400822B1 (fr) 2006-11-22
EP1400822A2 (fr) 2004-03-24

Similar Documents

Publication Publication Date Title
CN1238740C (zh) 光学模块及其制造方法
CN1246712C (zh) 光波导装置、光波导装置的制造方法以及光通信装置
CN1253738C (zh) 光耦合器
CN1264035C (zh) 光波导设备及其制作方法
CN1745478A (zh) 固态成像装置及其制造方法
CN1839331A (zh) 与外部光场有低耦合损耗的集成光波导结构
CN1977198A (zh) 用于制造具有整体对准部件的光波导组件的方法
JP2004133446A (ja) 光モジュール及び製造方法
CN1278152C (zh) 光学元件
CN1528009A (zh) 可拆除基片或可拆除结构及其生产方法
US20060193584A1 (en) Optical waveguide and method of fabricating the same
CN1204147A (zh) 具有沟槽隔离结构的半导体器件及其制造方法
WO2020213410A1 (fr) Structure de connexion optique
US6775454B2 (en) Silica-based optical waveguide circuit and fabrication method thereof
CN1507662A (zh) 半导体器件及其制造方法
CN1300103A (zh) 半导体装置,液晶显示装置和它们的制造方法
CN1260865C (zh) 半导体激光装置的制造方法
CN1947043A (zh) 光波导芯片及其制造方法
CN1967300A (zh) 波导和包含波导的装置
US5946433A (en) Method for producing a photocoupler and a photocoupler produced by the same
US8969208B2 (en) Method to form convex structure on surface of semiconductor material
Wang et al. CMOS-compatible silicon etched U-grooves with groove-first fabrication for nanophotonic applications
CN1808196A (zh) 光波导装置、光波导装置的制造方法以及光通信装置
CN114041076A (zh) 模扩展波导和包括这种模扩展波导的用于引导与光纤耦合的光斑尺寸转换器
CN1218197C (zh) 光学开关元件及其制造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20060125