CN1231921C - 非易失性半导体存储器件 - Google Patents
非易失性半导体存储器件 Download PDFInfo
- Publication number
- CN1231921C CN1231921C CN02122195.2A CN02122195A CN1231921C CN 1231921 C CN1231921 C CN 1231921C CN 02122195 A CN02122195 A CN 02122195A CN 1231921 C CN1231921 C CN 1231921C
- Authority
- CN
- China
- Prior art keywords
- sector
- control gate
- line
- sectors
- memory cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 49
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- 150000004767 nitrides Chemical class 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 2
- LPQOADBMXVRBNX-UHFFFAOYSA-N ac1ldcw0 Chemical compound Cl.C1CN(C)CCN1C1=C(F)C=C2C(=O)C(C(O)=O)=CN3CCSC1=C32 LPQOADBMXVRBNX-UHFFFAOYSA-N 0.000 abstract description 32
- 230000010354 integration Effects 0.000 abstract 1
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- 101000735365 Homo sapiens Poly(rC)-binding protein 4 Proteins 0.000 description 2
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- 102100034956 Poly(rC)-binding protein 4 Human genes 0.000 description 2
- 102100020867 Secretogranin-1 Human genes 0.000 description 2
- 102100035835 Secretogranin-2 Human genes 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 101150016268 BLS1 gene Proteins 0.000 description 1
- 101100256382 Candida albicans (strain SC5314 / ATCC MYA-2876) PGA63 gene Proteins 0.000 description 1
- 101100335694 Oryza sativa subsp. japonica G1L6 gene Proteins 0.000 description 1
- 101150092584 SEC31 gene Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 101150070760 cgs1 gene Proteins 0.000 description 1
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- 229910021332 silicide Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/3418—Disturbance prevention or evaluation; Refreshing of disturbed memory data
- G11C16/3427—Circuits or methods to prevent or reduce disturbance of the state of a memory cell when neighbouring cells are read or written
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0466—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS]
- G11C16/0475—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS] comprising two or more independent storage sites which store independent data
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
- G11C7/18—Bit line organisation; Bit line lay-out
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0491—Virtual ground arrays
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Read Only Memory (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001115678A JP3640175B2 (ja) | 2001-04-13 | 2001-04-13 | 不揮発性半導体記憶装置 |
| JP115678/2001 | 2001-04-13 | ||
| JP115678/01 | 2001-04-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1391232A CN1391232A (zh) | 2003-01-15 |
| CN1231921C true CN1231921C (zh) | 2005-12-14 |
Family
ID=18966541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN02122195.2A Expired - Fee Related CN1231921C (zh) | 2001-04-13 | 2002-04-13 | 非易失性半导体存储器件 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6822900B2 (https=) |
| JP (1) | JP3640175B2 (https=) |
| CN (1) | CN1231921C (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6532172B2 (en) * | 2001-05-31 | 2003-03-11 | Sandisk Corporation | Steering gate and bit line segmentation in non-volatile memories |
| JP3716914B2 (ja) | 2001-05-31 | 2005-11-16 | セイコーエプソン株式会社 | 不揮発性半導体記憶装置 |
| JP3821032B2 (ja) | 2002-03-20 | 2006-09-13 | セイコーエプソン株式会社 | ファイルストレージ型不揮発性半導体記憶装置 |
| JP3815381B2 (ja) * | 2002-06-06 | 2006-08-30 | セイコーエプソン株式会社 | 不揮発性半導体記憶装置およびその駆動方法 |
| JP3867624B2 (ja) * | 2002-06-06 | 2007-01-10 | セイコーエプソン株式会社 | 不揮発性半導体記憶装置およびその駆動方法 |
| JP3871049B2 (ja) | 2002-12-10 | 2007-01-24 | セイコーエプソン株式会社 | 不揮発性半導体記憶装置 |
| JP2004199738A (ja) * | 2002-12-16 | 2004-07-15 | Seiko Epson Corp | 不揮発性記憶装置 |
| JP3985689B2 (ja) * | 2003-02-21 | 2007-10-03 | セイコーエプソン株式会社 | 不揮発性半導体記憶装置 |
| JP2004265508A (ja) * | 2003-02-28 | 2004-09-24 | Seiko Epson Corp | 不揮発性半導体記憶装置 |
| JP3786095B2 (ja) | 2003-02-28 | 2006-06-14 | セイコーエプソン株式会社 | 不揮発性半導体記憶装置 |
| JP3873908B2 (ja) * | 2003-02-28 | 2007-01-31 | セイコーエプソン株式会社 | 不揮発性半導体記憶装置及びその製造方法 |
| KR100506941B1 (ko) * | 2003-08-19 | 2005-08-05 | 삼성전자주식회사 | 더미 셀들을 갖는 플래쉬 메모리소자 및 그것의 소거방법들 |
| US8233322B2 (en) * | 2003-10-10 | 2012-07-31 | Micron Technology, Inc. | Multi-partition memory with separated read and algorithm datalines |
| FR2871940B1 (fr) * | 2004-06-18 | 2007-06-15 | St Microelectronics Rousset | Transistor mos a grille flottante, a double grille de controle |
| US7130221B1 (en) * | 2005-09-26 | 2006-10-31 | Macronix International Co., Ltd. | Dual gate multi-bit semiconductor memory |
| KR100706789B1 (ko) * | 2005-11-17 | 2007-04-12 | 삼성전자주식회사 | 비휘발성 메모리 소자 |
| US7916551B2 (en) * | 2007-11-06 | 2011-03-29 | Macronix International Co., Ltd. | Method of programming cell in memory and memory apparatus utilizing the method |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63225991A (ja) | 1987-03-16 | 1988-09-20 | Hitachi Ltd | 半導体記憶装置 |
| JPH01300496A (ja) | 1988-05-30 | 1989-12-04 | Hitachi Ltd | 半導体メモリ装置 |
| JPH07161851A (ja) | 1993-12-10 | 1995-06-23 | Sony Corp | 半導体不揮発性記憶装置およびその製造方法 |
| US5408115A (en) | 1994-04-04 | 1995-04-18 | Motorola Inc. | Self-aligned, split-gate EEPROM device |
| US5422504A (en) | 1994-05-02 | 1995-06-06 | Motorola Inc. | EEPROM memory device having a sidewall spacer floating gate electrode and process |
| US5663923A (en) | 1995-04-28 | 1997-09-02 | Intel Corporation | Nonvolatile memory blocking architecture |
| US5969383A (en) | 1997-06-16 | 1999-10-19 | Motorola, Inc. | Split-gate memory device and method for accessing the same |
| JP2978477B1 (ja) | 1998-06-12 | 1999-11-15 | 株式会社日立製作所 | 半導体集積回路装置およびその製造方法 |
| JP3973819B2 (ja) | 1999-03-08 | 2007-09-12 | 株式会社東芝 | 半導体記憶装置およびその製造方法 |
| US6255166B1 (en) | 1999-08-05 | 2001-07-03 | Aalo Lsi Design & Device Technology, Inc. | Nonvolatile memory cell, method of programming the same and nonvolatile memory array |
| US6177318B1 (en) | 1999-10-18 | 2001-01-23 | Halo Lsi Design & Device Technology, Inc. | Integration method for sidewall split gate monos transistor |
| US6248633B1 (en) | 1999-10-25 | 2001-06-19 | Halo Lsi Design & Device Technology, Inc. | Process for making and programming and operating a dual-bit multi-level ballistic MONOS memory |
| JP4899241B2 (ja) * | 1999-12-06 | 2012-03-21 | ソニー株式会社 | 不揮発性半導体記憶装置およびその動作方法 |
| DE60235335D1 (de) * | 2001-03-15 | 2010-04-01 | Halo Inc | Doppelbit MONOS Speicherzellgebrauch für breite Programbandbreite |
| JP3780865B2 (ja) * | 2001-04-13 | 2006-05-31 | セイコーエプソン株式会社 | 不揮発性半導体記憶装置 |
| JP4715024B2 (ja) * | 2001-05-08 | 2011-07-06 | セイコーエプソン株式会社 | 不揮発性半導体記憶装置のプログラム方法 |
| US6563736B2 (en) * | 2001-05-18 | 2003-05-13 | Ibm Corporation | Flash memory structure having double celled elements and method for fabricating the same |
-
2001
- 2001-04-13 JP JP2001115678A patent/JP3640175B2/ja not_active Expired - Fee Related
-
2002
- 2002-04-05 US US10/115,956 patent/US6822900B2/en not_active Expired - Fee Related
- 2002-04-13 CN CN02122195.2A patent/CN1231921C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US6822900B2 (en) | 2004-11-23 |
| JP2002313090A (ja) | 2002-10-25 |
| JP3640175B2 (ja) | 2005-04-20 |
| CN1391232A (zh) | 2003-01-15 |
| US20030072191A1 (en) | 2003-04-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20051214 Termination date: 20130413 |