CN115461195A - 更换装置和更换方法 - Google Patents

更换装置和更换方法 Download PDF

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Publication number
CN115461195A
CN115461195A CN202180029625.9A CN202180029625A CN115461195A CN 115461195 A CN115461195 A CN 115461195A CN 202180029625 A CN202180029625 A CN 202180029625A CN 115461195 A CN115461195 A CN 115461195A
Authority
CN
China
Prior art keywords
processing
replacement
grinding
housing
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180029625.9A
Other languages
English (en)
Chinese (zh)
Inventor
沟本康隆
早川晋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of CN115461195A publication Critical patent/CN115461195A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B23Q3/157—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling of rotary tools
    • B23Q3/15713—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling of rotary tools a transfer device taking a single tool from a storage device and inserting it in a spindle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B24B45/003—Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B23Q3/1552—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling parts of devices for automatically inserting or removing tools
    • B23Q3/1554—Transfer mechanisms, e.g. tool gripping arms; Drive mechanisms therefore
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B24B45/006—Quick mount and release means for disc-like wheels, e.g. on power tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Automatic Tool Replacement In Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
CN202180029625.9A 2020-05-01 2021-04-07 更换装置和更换方法 Pending CN115461195A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-081377 2020-05-01
JP2020081377 2020-05-01
PCT/JP2021/014827 WO2021220753A1 (ja) 2020-05-01 2021-04-07 交換装置、及び交換方法

Publications (1)

Publication Number Publication Date
CN115461195A true CN115461195A (zh) 2022-12-09

Family

ID=78331523

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180029625.9A Pending CN115461195A (zh) 2020-05-01 2021-04-07 更换装置和更换方法

Country Status (5)

Country Link
US (1) US20230264309A1 (https=)
JP (3) JP7412542B2 (https=)
KR (2) KR102834987B1 (https=)
CN (1) CN115461195A (https=)
WO (1) WO2021220753A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023141940A (ja) * 2022-03-24 2023-10-05 株式会社荏原製作所 回転体を回転軸に連結するための連結装置、および回転体の着脱装置
TW202439517A (zh) 2023-03-16 2024-10-01 日商東京威力科創股份有限公司 維護作業支援系統、控制方法及控制程式

Citations (5)

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US4654953A (en) * 1984-09-04 1987-04-07 Ex-Cell-O Corporation Tool quill exchanging mechanism for a machine tool
JP2002144183A (ja) * 2000-11-14 2002-05-21 Nippei Toyama Corp 加工装置および加工装置に用いられるカバー部材
JP2005342872A (ja) * 2004-06-07 2005-12-15 Denso Corp 安全カバー付き自動処理設備
JP2009006455A (ja) * 2007-06-29 2009-01-15 Komatsu Ntc Ltd 工作機械
JP2012232397A (ja) * 2011-04-27 2012-11-29 Washino Kiko Kk 工具交換装置

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IT1140765B (it) * 1980-02-29 1986-10-10 Jobs Spa Gruppo alimentatori di utensili, per macchine utensili ad asportazione di truciolo, costituito da un carrello mobile porta-utensili e da una piastra fissa, entramei carrello e piastra dotati di organi di impegno e riferimento reciproco
JPS58143934A (ja) * 1982-02-19 1983-08-26 Toyoda Mach Works Ltd 工具取替装置を備えた数値制御工作機械
DE3607391A1 (de) * 1986-03-06 1987-09-10 Maho Ag Werkzeugwagen zur beschickung von werkzeugmaschinen
JPH08229812A (ja) * 1995-02-27 1996-09-10 Daido Steel Co Ltd 鋳造製品の研削・研磨装置
JP3483648B2 (ja) * 1995-03-24 2004-01-06 東芝機械株式会社 研磨装置
US6379221B1 (en) * 1996-12-31 2002-04-30 Applied Materials, Inc. Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system
US6030326A (en) * 1997-06-05 2000-02-29 Tokyo Seimitsu Co., Ltd. Automatic blade changing system
EP1112812A3 (en) * 1999-12-27 2003-10-15 Nippei Toyama Corporation Grinding spindle with dual tool mounting means
JP2006334700A (ja) * 2005-05-31 2006-12-14 Nippei Toyama Corp 加工システム
JP2009125915A (ja) * 2007-11-28 2009-06-11 Disco Abrasive Syst Ltd 研削ホイール装着機構
JP2010017796A (ja) * 2008-07-09 2010-01-28 Komatsu Ntc Ltd 砥石脱着補助装置
JP5562771B2 (ja) * 2010-09-09 2014-07-30 三菱重工業株式会社 砥石交換台車及び砥石交換装置
JP5283684B2 (ja) * 2010-11-30 2013-09-04 本田技研工業株式会社 加工ラインシステム及び加工方法
JP5721446B2 (ja) * 2011-01-13 2015-05-20 矢崎総業株式会社 室内ランプの固定構造
JP2012183629A (ja) * 2011-03-04 2012-09-27 Washino Kiko Kk 工具交換装置
JP5689504B2 (ja) * 2013-03-21 2015-03-25 ファナック株式会社 サーボ自動開閉扉を備えた加工システム
US11273530B2 (en) * 2016-11-16 2022-03-15 Makino Milling Machine Co., Ltd. Machine tool system
EP3683011B1 (en) * 2017-09-15 2025-07-09 Makino Milling Machine Co., Ltd. Machine tool system
JP2019126901A (ja) * 2018-01-26 2019-08-01 オークマ株式会社 工作機械
JP7260961B2 (ja) 2018-03-30 2023-04-19 株式会社ディスコ 研削ホイールの着脱治具
JP6563622B1 (ja) * 2018-09-06 2019-08-21 ヤマザキマザック株式会社 工具保管装置、工作機械及び複合加工機械
JP2020097089A (ja) * 2018-12-19 2020-06-25 株式会社ディスコ 研削装置
CH715996A1 (de) * 2019-03-25 2020-09-30 Erowa Ag Anordnung zur Bearbeitung von Werkstücken.
DE202019102226U1 (de) * 2019-04-18 2019-07-11 Krones Ag Robotersystem für eine Behälterverarbeitungsanlage
DE102019214081A1 (de) * 2019-09-16 2021-03-18 Deckel Maho Pfronten Gmbh Ent- bzw. beladevorrichtung und ent- bzw. beladesystem zum einsatz an einer oder mehreren werkzeugmaschinen
CN112720012B (zh) * 2020-12-18 2023-01-03 上海德舒赫金属制品有限公司 能够无限扩展的加工中心共享刀库系统及方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4654953A (en) * 1984-09-04 1987-04-07 Ex-Cell-O Corporation Tool quill exchanging mechanism for a machine tool
JP2002144183A (ja) * 2000-11-14 2002-05-21 Nippei Toyama Corp 加工装置および加工装置に用いられるカバー部材
JP2005342872A (ja) * 2004-06-07 2005-12-15 Denso Corp 安全カバー付き自動処理設備
JP2009006455A (ja) * 2007-06-29 2009-01-15 Komatsu Ntc Ltd 工作機械
JP2012232397A (ja) * 2011-04-27 2012-11-29 Washino Kiko Kk 工具交換装置

Also Published As

Publication number Publication date
US20230264309A1 (en) 2023-08-24
KR20230003055A (ko) 2023-01-05
WO2021220753A1 (ja) 2021-11-04
KR102834987B1 (ko) 2025-07-16
JP2025036529A (ja) 2025-03-14
JPWO2021220753A1 (https=) 2021-11-04
KR20250110935A (ko) 2025-07-21
JP7612824B2 (ja) 2025-01-14
JP7412542B2 (ja) 2024-01-12
JP2024026477A (ja) 2024-02-28

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