JP7412542B2 - 交換装置、及び交換方法 - Google Patents

交換装置、及び交換方法 Download PDF

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Publication number
JP7412542B2
JP7412542B2 JP2022517592A JP2022517592A JP7412542B2 JP 7412542 B2 JP7412542 B2 JP 7412542B2 JP 2022517592 A JP2022517592 A JP 2022517592A JP 2022517592 A JP2022517592 A JP 2022517592A JP 7412542 B2 JP7412542 B2 JP 7412542B2
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Japan
Prior art keywords
processing
exchange
exterior cover
grinding
tool
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JP2022517592A
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English (en)
Japanese (ja)
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JPWO2021220753A1 (https=
JPWO2021220753A5 (https=
Inventor
康隆 溝本
晋 早川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of JPWO2021220753A1 publication Critical patent/JPWO2021220753A1/ja
Publication of JPWO2021220753A5 publication Critical patent/JPWO2021220753A5/ja
Priority to JP2023216551A priority Critical patent/JP7612824B2/ja
Application granted granted Critical
Publication of JP7412542B2 publication Critical patent/JP7412542B2/ja
Priority to JP2024228148A priority patent/JP2025036529A/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B23Q3/157—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling of rotary tools
    • B23Q3/15713—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling of rotary tools a transfer device taking a single tool from a storage device and inserting it in a spindle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B24B45/003—Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B23Q3/1552—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling parts of devices for automatically inserting or removing tools
    • B23Q3/1554—Transfer mechanisms, e.g. tool gripping arms; Drive mechanisms therefore
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B24B45/006—Quick mount and release means for disc-like wheels, e.g. on power tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Automatic Tool Replacement In Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
JP2022517592A 2020-05-01 2021-04-07 交換装置、及び交換方法 Active JP7412542B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023216551A JP7612824B2 (ja) 2020-05-01 2023-12-22 交換装置
JP2024228148A JP2025036529A (ja) 2020-05-01 2024-12-25 交換装置、及び交換方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020081377 2020-05-01
JP2020081377 2020-05-01
PCT/JP2021/014827 WO2021220753A1 (ja) 2020-05-01 2021-04-07 交換装置、及び交換方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023216551A Division JP7612824B2 (ja) 2020-05-01 2023-12-22 交換装置

Publications (3)

Publication Number Publication Date
JPWO2021220753A1 JPWO2021220753A1 (https=) 2021-11-04
JPWO2021220753A5 JPWO2021220753A5 (https=) 2023-01-23
JP7412542B2 true JP7412542B2 (ja) 2024-01-12

Family

ID=78331523

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2022517592A Active JP7412542B2 (ja) 2020-05-01 2021-04-07 交換装置、及び交換方法
JP2023216551A Active JP7612824B2 (ja) 2020-05-01 2023-12-22 交換装置
JP2024228148A Pending JP2025036529A (ja) 2020-05-01 2024-12-25 交換装置、及び交換方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2023216551A Active JP7612824B2 (ja) 2020-05-01 2023-12-22 交換装置
JP2024228148A Pending JP2025036529A (ja) 2020-05-01 2024-12-25 交換装置、及び交換方法

Country Status (5)

Country Link
US (1) US20230264309A1 (https=)
JP (3) JP7412542B2 (https=)
KR (2) KR102834987B1 (https=)
CN (1) CN115461195A (https=)
WO (1) WO2021220753A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023141940A (ja) * 2022-03-24 2023-10-05 株式会社荏原製作所 回転体を回転軸に連結するための連結装置、および回転体の着脱装置
TW202439517A (zh) 2023-03-16 2024-10-01 日商東京威力科創股份有限公司 維護作業支援系統、控制方法及控制程式

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002144183A (ja) 2000-11-14 2002-05-21 Nippei Toyama Corp 加工装置および加工装置に用いられるカバー部材
JP2010017796A (ja) 2008-07-09 2010-01-28 Komatsu Ntc Ltd 砥石脱着補助装置
JP2012056024A (ja) 2010-09-09 2012-03-22 Mitsubishi Heavy Ind Ltd 砥石交換台車及び砥石交換装置
JP2012183629A (ja) 2011-03-04 2012-09-27 Washino Kiko Kk 工具交換装置
JP2012232397A (ja) 2011-04-27 2012-11-29 Washino Kiko Kk 工具交換装置
WO2020049701A1 (ja) 2018-09-06 2020-03-12 ヤマザキマザック株式会社 工具保管装置、工作機械及び複合加工機械

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IT1140765B (it) * 1980-02-29 1986-10-10 Jobs Spa Gruppo alimentatori di utensili, per macchine utensili ad asportazione di truciolo, costituito da un carrello mobile porta-utensili e da una piastra fissa, entramei carrello e piastra dotati di organi di impegno e riferimento reciproco
JPS58143934A (ja) * 1982-02-19 1983-08-26 Toyoda Mach Works Ltd 工具取替装置を備えた数値制御工作機械
US4654953A (en) * 1984-09-04 1987-04-07 Ex-Cell-O Corporation Tool quill exchanging mechanism for a machine tool
DE3607391A1 (de) * 1986-03-06 1987-09-10 Maho Ag Werkzeugwagen zur beschickung von werkzeugmaschinen
JPH08229812A (ja) * 1995-02-27 1996-09-10 Daido Steel Co Ltd 鋳造製品の研削・研磨装置
JP3483648B2 (ja) * 1995-03-24 2004-01-06 東芝機械株式会社 研磨装置
US6379221B1 (en) * 1996-12-31 2002-04-30 Applied Materials, Inc. Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system
US6030326A (en) * 1997-06-05 2000-02-29 Tokyo Seimitsu Co., Ltd. Automatic blade changing system
EP1112812A3 (en) * 1999-12-27 2003-10-15 Nippei Toyama Corporation Grinding spindle with dual tool mounting means
JP2005342872A (ja) * 2004-06-07 2005-12-15 Denso Corp 安全カバー付き自動処理設備
JP2006334700A (ja) * 2005-05-31 2006-12-14 Nippei Toyama Corp 加工システム
JP2009006455A (ja) * 2007-06-29 2009-01-15 Komatsu Ntc Ltd 工作機械
JP2009125915A (ja) * 2007-11-28 2009-06-11 Disco Abrasive Syst Ltd 研削ホイール装着機構
JP5283684B2 (ja) * 2010-11-30 2013-09-04 本田技研工業株式会社 加工ラインシステム及び加工方法
JP5721446B2 (ja) * 2011-01-13 2015-05-20 矢崎総業株式会社 室内ランプの固定構造
JP5689504B2 (ja) * 2013-03-21 2015-03-25 ファナック株式会社 サーボ自動開閉扉を備えた加工システム
US11273530B2 (en) * 2016-11-16 2022-03-15 Makino Milling Machine Co., Ltd. Machine tool system
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JP7260961B2 (ja) 2018-03-30 2023-04-19 株式会社ディスコ 研削ホイールの着脱治具
JP2020097089A (ja) * 2018-12-19 2020-06-25 株式会社ディスコ 研削装置
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DE202019102226U1 (de) * 2019-04-18 2019-07-11 Krones Ag Robotersystem für eine Behälterverarbeitungsanlage
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Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002144183A (ja) 2000-11-14 2002-05-21 Nippei Toyama Corp 加工装置および加工装置に用いられるカバー部材
JP2010017796A (ja) 2008-07-09 2010-01-28 Komatsu Ntc Ltd 砥石脱着補助装置
JP2012056024A (ja) 2010-09-09 2012-03-22 Mitsubishi Heavy Ind Ltd 砥石交換台車及び砥石交換装置
JP2012183629A (ja) 2011-03-04 2012-09-27 Washino Kiko Kk 工具交換装置
JP2012232397A (ja) 2011-04-27 2012-11-29 Washino Kiko Kk 工具交換装置
WO2020049701A1 (ja) 2018-09-06 2020-03-12 ヤマザキマザック株式会社 工具保管装置、工作機械及び複合加工機械

Also Published As

Publication number Publication date
US20230264309A1 (en) 2023-08-24
CN115461195A (zh) 2022-12-09
KR20230003055A (ko) 2023-01-05
WO2021220753A1 (ja) 2021-11-04
KR102834987B1 (ko) 2025-07-16
JP2025036529A (ja) 2025-03-14
JPWO2021220753A1 (https=) 2021-11-04
KR20250110935A (ko) 2025-07-21
JP7612824B2 (ja) 2025-01-14
JP2024026477A (ja) 2024-02-28

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