KR102834987B1 - 교환 장치 및 교환 방법 - Google Patents
교환 장치 및 교환 방법Info
- Publication number
- KR102834987B1 KR102834987B1 KR1020227041301A KR20227041301A KR102834987B1 KR 102834987 B1 KR102834987 B1 KR 102834987B1 KR 1020227041301 A KR1020227041301 A KR 1020227041301A KR 20227041301 A KR20227041301 A KR 20227041301A KR 102834987 B1 KR102834987 B1 KR 102834987B1
- Authority
- KR
- South Korea
- Prior art keywords
- processing
- exchange
- processing tool
- grinding
- outer cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
- B23Q3/157—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling of rotary tools
- B23Q3/15713—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling of rotary tools a transfer device taking a single tool from a storage device and inserting it in a spindle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
- B23Q3/1552—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling parts of devices for automatically inserting or removing tools
- B23Q3/1554—Transfer mechanisms, e.g. tool gripping arms; Drive mechanisms therefore
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B45/00—Means for securing grinding wheels on rotary arbors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B45/00—Means for securing grinding wheels on rotary arbors
- B24B45/003—Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B45/00—Means for securing grinding wheels on rotary arbors
- B24B45/006—Quick mount and release means for disc-like wheels, e.g. on power tools
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Automatic Tool Replacement In Machine Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020257022340A KR20250110935A (ko) | 2020-05-01 | 2021-04-07 | 교환 장치 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2020-081377 | 2020-05-01 | ||
| JP2020081377 | 2020-05-01 | ||
| PCT/JP2021/014827 WO2021220753A1 (ja) | 2020-05-01 | 2021-04-07 | 交換装置、及び交換方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020257022340A Division KR20250110935A (ko) | 2020-05-01 | 2021-04-07 | 교환 장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20230003055A KR20230003055A (ko) | 2023-01-05 |
| KR102834987B1 true KR102834987B1 (ko) | 2025-07-16 |
Family
ID=78331523
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020227041301A Active KR102834987B1 (ko) | 2020-05-01 | 2021-04-07 | 교환 장치 및 교환 방법 |
| KR1020257022340A Pending KR20250110935A (ko) | 2020-05-01 | 2021-04-07 | 교환 장치 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020257022340A Pending KR20250110935A (ko) | 2020-05-01 | 2021-04-07 | 교환 장치 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20230264309A1 (https=) |
| JP (3) | JP7412542B2 (https=) |
| KR (2) | KR102834987B1 (https=) |
| CN (1) | CN115461195A (https=) |
| WO (1) | WO2021220753A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023141940A (ja) * | 2022-03-24 | 2023-10-05 | 株式会社荏原製作所 | 回転体を回転軸に連結するための連結装置、および回転体の着脱装置 |
| TW202439517A (zh) | 2023-03-16 | 2024-10-01 | 日商東京威力科創股份有限公司 | 維護作業支援系統、控制方法及控制程式 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002144183A (ja) | 2000-11-14 | 2002-05-21 | Nippei Toyama Corp | 加工装置および加工装置に用いられるカバー部材 |
| JP2010017796A (ja) | 2008-07-09 | 2010-01-28 | Komatsu Ntc Ltd | 砥石脱着補助装置 |
| JP2012056024A (ja) | 2010-09-09 | 2012-03-22 | Mitsubishi Heavy Ind Ltd | 砥石交換台車及び砥石交換装置 |
| JP2012183629A (ja) * | 2011-03-04 | 2012-09-27 | Washino Kiko Kk | 工具交換装置 |
| JP2012232397A (ja) | 2011-04-27 | 2012-11-29 | Washino Kiko Kk | 工具交換装置 |
| WO2020049701A1 (ja) | 2018-09-06 | 2020-03-12 | ヤマザキマザック株式会社 | 工具保管装置、工作機械及び複合加工機械 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1140765B (it) * | 1980-02-29 | 1986-10-10 | Jobs Spa | Gruppo alimentatori di utensili, per macchine utensili ad asportazione di truciolo, costituito da un carrello mobile porta-utensili e da una piastra fissa, entramei carrello e piastra dotati di organi di impegno e riferimento reciproco |
| JPS58143934A (ja) * | 1982-02-19 | 1983-08-26 | Toyoda Mach Works Ltd | 工具取替装置を備えた数値制御工作機械 |
| US4654953A (en) * | 1984-09-04 | 1987-04-07 | Ex-Cell-O Corporation | Tool quill exchanging mechanism for a machine tool |
| DE3607391A1 (de) * | 1986-03-06 | 1987-09-10 | Maho Ag | Werkzeugwagen zur beschickung von werkzeugmaschinen |
| JPH08229812A (ja) * | 1995-02-27 | 1996-09-10 | Daido Steel Co Ltd | 鋳造製品の研削・研磨装置 |
| JP3483648B2 (ja) * | 1995-03-24 | 2004-01-06 | 東芝機械株式会社 | 研磨装置 |
| US6379221B1 (en) * | 1996-12-31 | 2002-04-30 | Applied Materials, Inc. | Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system |
| US6030326A (en) * | 1997-06-05 | 2000-02-29 | Tokyo Seimitsu Co., Ltd. | Automatic blade changing system |
| EP1112812A3 (en) * | 1999-12-27 | 2003-10-15 | Nippei Toyama Corporation | Grinding spindle with dual tool mounting means |
| JP2005342872A (ja) * | 2004-06-07 | 2005-12-15 | Denso Corp | 安全カバー付き自動処理設備 |
| JP2006334700A (ja) * | 2005-05-31 | 2006-12-14 | Nippei Toyama Corp | 加工システム |
| JP2009006455A (ja) * | 2007-06-29 | 2009-01-15 | Komatsu Ntc Ltd | 工作機械 |
| JP2009125915A (ja) * | 2007-11-28 | 2009-06-11 | Disco Abrasive Syst Ltd | 研削ホイール装着機構 |
| JP5283684B2 (ja) * | 2010-11-30 | 2013-09-04 | 本田技研工業株式会社 | 加工ラインシステム及び加工方法 |
| JP5721446B2 (ja) * | 2011-01-13 | 2015-05-20 | 矢崎総業株式会社 | 室内ランプの固定構造 |
| JP5689504B2 (ja) * | 2013-03-21 | 2015-03-25 | ファナック株式会社 | サーボ自動開閉扉を備えた加工システム |
| US11273530B2 (en) * | 2016-11-16 | 2022-03-15 | Makino Milling Machine Co., Ltd. | Machine tool system |
| EP3683011B1 (en) * | 2017-09-15 | 2025-07-09 | Makino Milling Machine Co., Ltd. | Machine tool system |
| JP2019126901A (ja) * | 2018-01-26 | 2019-08-01 | オークマ株式会社 | 工作機械 |
| JP7260961B2 (ja) | 2018-03-30 | 2023-04-19 | 株式会社ディスコ | 研削ホイールの着脱治具 |
| JP2020097089A (ja) * | 2018-12-19 | 2020-06-25 | 株式会社ディスコ | 研削装置 |
| CH715996A1 (de) * | 2019-03-25 | 2020-09-30 | Erowa Ag | Anordnung zur Bearbeitung von Werkstücken. |
| DE202019102226U1 (de) * | 2019-04-18 | 2019-07-11 | Krones Ag | Robotersystem für eine Behälterverarbeitungsanlage |
| DE102019214081A1 (de) * | 2019-09-16 | 2021-03-18 | Deckel Maho Pfronten Gmbh | Ent- bzw. beladevorrichtung und ent- bzw. beladesystem zum einsatz an einer oder mehreren werkzeugmaschinen |
| CN112720012B (zh) * | 2020-12-18 | 2023-01-03 | 上海德舒赫金属制品有限公司 | 能够无限扩展的加工中心共享刀库系统及方法 |
-
2021
- 2021-04-07 KR KR1020227041301A patent/KR102834987B1/ko active Active
- 2021-04-07 WO PCT/JP2021/014827 patent/WO2021220753A1/ja not_active Ceased
- 2021-04-07 US US17/997,558 patent/US20230264309A1/en active Pending
- 2021-04-07 KR KR1020257022340A patent/KR20250110935A/ko active Pending
- 2021-04-07 JP JP2022517592A patent/JP7412542B2/ja active Active
- 2021-04-07 CN CN202180029625.9A patent/CN115461195A/zh active Pending
-
2023
- 2023-12-22 JP JP2023216551A patent/JP7612824B2/ja active Active
-
2024
- 2024-12-25 JP JP2024228148A patent/JP2025036529A/ja active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002144183A (ja) | 2000-11-14 | 2002-05-21 | Nippei Toyama Corp | 加工装置および加工装置に用いられるカバー部材 |
| JP2010017796A (ja) | 2008-07-09 | 2010-01-28 | Komatsu Ntc Ltd | 砥石脱着補助装置 |
| JP2012056024A (ja) | 2010-09-09 | 2012-03-22 | Mitsubishi Heavy Ind Ltd | 砥石交換台車及び砥石交換装置 |
| JP2012183629A (ja) * | 2011-03-04 | 2012-09-27 | Washino Kiko Kk | 工具交換装置 |
| JP2012232397A (ja) | 2011-04-27 | 2012-11-29 | Washino Kiko Kk | 工具交換装置 |
| WO2020049701A1 (ja) | 2018-09-06 | 2020-03-12 | ヤマザキマザック株式会社 | 工具保管装置、工作機械及び複合加工機械 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20230264309A1 (en) | 2023-08-24 |
| CN115461195A (zh) | 2022-12-09 |
| KR20230003055A (ko) | 2023-01-05 |
| WO2021220753A1 (ja) | 2021-11-04 |
| JP2025036529A (ja) | 2025-03-14 |
| JPWO2021220753A1 (https=) | 2021-11-04 |
| KR20250110935A (ko) | 2025-07-21 |
| JP7612824B2 (ja) | 2025-01-14 |
| JP7412542B2 (ja) | 2024-01-12 |
| JP2024026477A (ja) | 2024-02-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6878044B2 (en) | Polishing apparatus | |
| US7850817B2 (en) | Polishing device and substrate processing device | |
| JP4127346B2 (ja) | ポリッシング装置及び方法 | |
| JP2025036529A (ja) | 交換装置、及び交換方法 | |
| JP2008537317A (ja) | 基板処理装置 | |
| TW201812928A (zh) | 研磨基板表面的裝置及方法 | |
| JP2008066755A (ja) | ポリッシング装置 | |
| KR20180036557A (ko) | 가공 장치 | |
| EP1034887A2 (en) | Polishing apparatus | |
| JP7529408B2 (ja) | 加工装置 | |
| JP7786857B2 (ja) | 加工装置の加工具の取付方法 | |
| JP2015205359A (ja) | 基板処理装置 | |
| CN115279549B (zh) | 去除加工装置 | |
| TWI905263B (zh) | 更換裝置及更換方法 | |
| JP7740828B2 (ja) | 交換装置、処理装置、及び交換方法 | |
| CN220971725U (zh) | 基板处理装置 | |
| JP2008098574A (ja) | ウエーハの研磨装置 | |
| JP2022180712A (ja) | 研削装置、研削装置の制御方法、及び記憶媒体 | |
| JP2025132102A (ja) | 加工装置 | |
| JP7202152B2 (ja) | 研削装置 | |
| JP2025135545A (ja) | 加工装置およびウェーハの加工方法 | |
| WO2025187818A1 (ja) | 中間ユニットを備えた基板処理システム | |
| JP2024022107A (ja) | 加工装置 | |
| JP2025021193A (ja) | 研削ホイールの着脱方法 | |
| JP2025103099A (ja) | 加工装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| A201 | Request for examination | ||
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
|
| E13-X000 | Pre-grant limitation requested |
St.27 status event code: A-2-3-E10-E13-lim-X000 |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
St.27 status event code: A-1-2-D10-D22-exm-PE0701 |
|
| PA0104 | Divisional application for international application |
St.27 status event code: A-0-1-A10-A16-div-PA0104 |
|
| F11 | Ip right granted following substantive examination |
Free format text: ST27 STATUS EVENT CODE: A-2-4-F10-F11-EXM-PR0701 (AS PROVIDED BY THE NATIONAL OFFICE) |
|
| PR0701 | Registration of establishment |
St.27 status event code: A-2-4-F10-F11-exm-PR0701 |
|
| PR1002 | Payment of registration fee |
St.27 status event code: A-2-2-U10-U12-oth-PR1002 Fee payment year number: 1 |
|
| U12 | Designation fee paid |
Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U12-OTH-PR1002 (AS PROVIDED BY THE NATIONAL OFFICE) Year of fee payment: 1 |
|
| PG1601 | Publication of registration |
St.27 status event code: A-4-4-Q10-Q13-nap-PG1601 |
|
| Q13 | Ip right document published |
Free format text: ST27 STATUS EVENT CODE: A-4-4-Q10-Q13-NAP-PG1601 (AS PROVIDED BY THE NATIONAL OFFICE) |