CN114846180B - 石英玻璃坩埚及其制造方法 - Google Patents

石英玻璃坩埚及其制造方法 Download PDF

Info

Publication number
CN114846180B
CN114846180B CN202080089556.6A CN202080089556A CN114846180B CN 114846180 B CN114846180 B CN 114846180B CN 202080089556 A CN202080089556 A CN 202080089556A CN 114846180 B CN114846180 B CN 114846180B
Authority
CN
China
Prior art keywords
crucible
total concentration
quartz glass
layer
glass crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080089556.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN114846180A (zh
Inventor
大原真美
岸弘史
北原江梨子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumco Corp
Original Assignee
Sumco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumco Corp filed Critical Sumco Corp
Publication of CN114846180A publication Critical patent/CN114846180A/zh
Application granted granted Critical
Publication of CN114846180B publication Critical patent/CN114846180B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/50—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with alkali metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/54—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with beryllium, magnesium or alkaline earth metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/30—Doped silica-based glasses containing metals
    • C03C2201/50—Doped silica-based glasses containing metals containing alkali metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/30—Doped silica-based glasses containing metals
    • C03C2201/54—Doped silica-based glasses containing metals containing beryllium, magnesium or alkaline earth metals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
CN202080089556.6A 2019-12-23 2020-10-30 石英玻璃坩埚及其制造方法 Active CN114846180B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-231815 2019-12-23
JP2019231815 2019-12-23
PCT/JP2020/040832 WO2021131321A1 (ja) 2019-12-23 2020-10-30 石英ガラスルツボ及びその製造方法

Publications (2)

Publication Number Publication Date
CN114846180A CN114846180A (zh) 2022-08-02
CN114846180B true CN114846180B (zh) 2024-07-05

Family

ID=76574082

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080089556.6A Active CN114846180B (zh) 2019-12-23 2020-10-30 石英玻璃坩埚及其制造方法

Country Status (7)

Country Link
US (2) US12371812B2 (https=)
JP (1) JP7400835B2 (https=)
KR (1) KR102723301B1 (https=)
CN (1) CN114846180B (https=)
DE (1) DE112020006320T5 (https=)
TW (1) TWI762073B (https=)
WO (1) WO2021131321A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010280567A (ja) * 2010-09-17 2010-12-16 Covalent Materials Corp シリカガラスルツボの製造方法
JP2012136379A (ja) * 2010-12-27 2012-07-19 Covalent Materials Corp シリカガラスルツボ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2840195B2 (ja) 1994-05-31 1998-12-24 信越石英株式会社 単結晶引上用石英ガラスルツボの製造方法
JP3552401B2 (ja) 1996-03-22 2004-08-11 信越半導体株式会社 ルツボの洗浄方法
JPH1143392A (ja) * 1997-07-24 1999-02-16 Kusuwa Kuorutsu:Kk 単結晶引き上げ用石英ガラスルツボの洗浄方法
JP4437368B2 (ja) * 2000-12-12 2010-03-24 コバレントマテリアル株式会社 シリコン単結晶引上げ用石英ガラスルツボの製造方法
JP4233059B2 (ja) 2003-05-01 2009-03-04 信越石英株式会社 シリコン単結晶引上げ用石英ガラスルツボ及びその製造方法
JP2005306708A (ja) 2004-03-26 2005-11-04 Kuramoto Seisakusho Co Ltd 石英ルツボ
JP4995069B2 (ja) 2007-12-28 2012-08-08 ジャパンスーパークォーツ株式会社 内面結晶化ルツボおよび該ルツボを用いた引上げ方法
JP5072933B2 (ja) 2008-10-31 2012-11-14 ジャパンスーパークォーツ株式会社 シリコン単結晶引き上げ用石英ガラスルツボ及びその製造方法並びにシリコン単結晶の製造方法
JP5500689B2 (ja) * 2010-12-03 2014-05-21 株式会社Ｓｕｍｃｏ シリカガラスルツボ
JP5508251B2 (ja) 2010-12-24 2014-05-28 コバレントマテリアル株式会社 シリコン単結晶引上げ用シリカガラスルツボの洗浄方法
JP5543326B2 (ja) 2010-12-27 2014-07-09 コバレントマテリアル株式会社 シリコン単結晶引上げ用シリカガラスルツボ
CN103502513A (zh) * 2012-01-13 2014-01-08 信越石英株式会社 单晶硅提拉用二氧化硅容器及其制造方法
JP6773121B2 (ja) * 2016-09-23 2020-10-21 株式会社Sumco 石英ガラスルツボ及びその製造方法並びに石英ガラスルツボを用いたシリコン単結晶の製造方法
JP6885287B2 (ja) * 2017-09-29 2021-06-09 株式会社Sumco 石英ルツボの不純物分析方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010280567A (ja) * 2010-09-17 2010-12-16 Covalent Materials Corp シリカガラスルツボの製造方法
JP2012136379A (ja) * 2010-12-27 2012-07-19 Covalent Materials Corp シリカガラスルツボ

Also Published As

Publication number Publication date
US20230010489A1 (en) 2023-01-12
JPWO2021131321A1 (https=) 2021-07-01
US20250313985A1 (en) 2025-10-09
KR102723301B1 (ko) 2024-10-31
JP7400835B2 (ja) 2023-12-19
KR20220107274A (ko) 2022-08-02
TW202129089A (zh) 2021-08-01
US12371812B2 (en) 2025-07-29
TWI762073B (zh) 2022-04-21
CN114846180A (zh) 2022-08-02
WO2021131321A1 (ja) 2021-07-01
DE112020006320T5 (de) 2022-10-06

Similar Documents

Publication Publication Date Title
JP4948504B2 (ja) シリコン単結晶引上げ方法
JP5072933B2 (ja) シリコン単結晶引き上げ用石英ガラスルツボ及びその製造方法並びにシリコン単結晶の製造方法
JP5137670B2 (ja) 多結晶シリコンロッドの製造方法
JP4975012B2 (ja) シリコン単結晶引き上げ用石英ガラスルツボ及びその製造方法
KR102290102B1 (ko) 단결정 실리콘 인상용 석영 유리 도가니 및 그의 제조방법
JP4233059B2 (ja) シリコン単結晶引上げ用石英ガラスルツボ及びその製造方法
CN114846180B (zh) 石英玻璃坩埚及其制造方法
JPS59213697A (ja) 単結晶半導体引上装置
US8524319B2 (en) Methods for producing crucibles with a reduced amount of bubbles
WO2007093082A1 (fr) Procédé de production de tranche de silicium utilisant la méthode du flottage et appareil correspondant
JP4726138B2 (ja) 石英ガラスルツボ
TWI568898B (zh) Silicon single crystal manufacturing method
JP2012136398A (ja) シリコン単結晶引上げ用シリカガラスルツボ
US20120285372A1 (en) Vitreous silica crucible for pulling silicon single crystal, and method for manufacturing the same
JP7768072B2 (ja) シリコン単結晶引き上げ用石英ガラスルツボ及びこれを用いたシリコン単結晶の製造方法
WO2024090073A1 (ja) シリコン単結晶引き上げ用石英ガラスルツボ及びこれを用いたシリコン単結晶の製造方法
US20130125719A1 (en) Processes for producing silicon ingots
US20130125587A1 (en) Methods for producing crucibles with a reduced amount of bubbles
US20130129973A1 (en) Crucibles with a reduced amount of bubbles and ingots and wafers produced by use of such crucibles
TWI410534B (zh) 石英玻璃坩堝及使用其之矽單晶拉提方法
WO2013074743A1 (en) Crucibles with a reduced amount of bubbles, ingots and wafers produced by use of such crucibles and related methods
JP5473002B2 (ja) シリコン単結晶引上げ用シリカガラスルツボ
JP2012136400A (ja) シリコン単結晶引上げ用シリカガラスルツボ

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant