CN113524911B - 液体喷射头、液体喷射装置及其制造方法 - Google Patents

液体喷射头、液体喷射装置及其制造方法 Download PDF

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Publication number
CN113524911B
CN113524911B CN202110783081.7A CN202110783081A CN113524911B CN 113524911 B CN113524911 B CN 113524911B CN 202110783081 A CN202110783081 A CN 202110783081A CN 113524911 B CN113524911 B CN 113524911B
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channel
recovery
liquid
substrate
supply
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CN202110783081.7A
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Chinese (zh)
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CN113524911A (zh
Inventor
福泽祐马
高部本规
渡边峻介
宫岸晓良
福田俊也
佐野纯一
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Seiko Epson Corp
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Seiko Epson Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/1433Structure of nozzle plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/162Manufacturing of the nozzle plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258Multi layer thin film type piezoelectric element
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14419Manifold
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14491Electrical connection
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/12Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
CN202110783081.7A 2018-06-29 2019-06-26 液体喷射头、液体喷射装置及其制造方法 Active CN113524911B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110783081.7A CN113524911B (zh) 2018-06-29 2019-06-26 液体喷射头、液体喷射装置及其制造方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2018124367A JP7102980B2 (ja) 2018-06-29 2018-06-29 液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法
JP2018-124367 2018-06-29
CN202110783081.7A CN113524911B (zh) 2018-06-29 2019-06-26 液体喷射头、液体喷射装置及其制造方法
CN201910561561.1A CN110654115B (zh) 2018-06-29 2019-06-26 液体喷射头、液体喷射装置及其制造方法

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CN113524911B true CN113524911B (zh) 2023-05-05

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US (1) US10906311B2 (enExample)
EP (1) EP3587116B1 (enExample)
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Publication number Priority date Publication date Assignee Title
JP7102980B2 (ja) * 2018-06-29 2022-07-20 セイコーエプソン株式会社 液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法
JP7434997B2 (ja) * 2020-02-14 2024-02-21 セイコーエプソン株式会社 液体吐出ヘッドおよび液体吐出装置
JP7707707B2 (ja) * 2021-07-14 2025-07-15 セイコーエプソン株式会社 液体吐出ヘッド、液体吐出装置
CN117087334A (zh) * 2023-10-19 2023-11-21 季华实验室 打印喷头、喷墨打印设备及其控制方法、设备与存储介质

Citations (1)

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CN110654115B (zh) * 2018-06-29 2021-07-20 精工爱普生株式会社 液体喷射头、液体喷射装置及其制造方法

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JP4366217B2 (ja) * 2004-03-11 2009-11-18 株式会社リコー 液体吐出ヘッド、液体吐出カートリッジ及び画像形成装置
US7347533B2 (en) 2004-12-20 2008-03-25 Palo Alto Research Center Incorporated Low cost piezo printhead based on microfluidics in printed circuit board and screen-printed piezoelectrics
KR101101653B1 (ko) 2006-12-12 2011-12-30 삼성전기주식회사 압전방식 페이지 폭 잉크젯프린트헤드
JP5544690B2 (ja) * 2008-07-23 2014-07-09 セイコーエプソン株式会社 液体供給装置、液体噴射装置及び液体供給方法
JP5171534B2 (ja) * 2008-10-15 2013-03-27 富士フイルム株式会社 インクジェット記録方法
CN102481789B (zh) * 2009-07-10 2015-06-17 富士胶卷迪马蒂克斯股份有限公司 用于密集封装的微机电系统喷射结构
JP2012061717A (ja) 2010-09-16 2012-03-29 Ricoh Co Ltd 液滴吐出ヘッド及びインクジェット記録装置
JP5750753B2 (ja) 2011-01-11 2015-07-22 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP6217217B2 (ja) * 2013-08-01 2017-10-25 セイコーエプソン株式会社 液体吐出ヘッド、及び、液体吐出装置
JP2015033838A (ja) * 2013-08-09 2015-02-19 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP6463107B2 (ja) * 2014-12-05 2019-01-30 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
WO2016114396A1 (ja) * 2015-01-16 2016-07-21 コニカミノルタ株式会社 インクジェットヘッド及びインクジェット記録装置
JP6488807B2 (ja) * 2015-03-24 2019-03-27 セイコーエプソン株式会社 液体吐出装置および信号供給装置
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JP6957885B2 (ja) 2017-01-31 2021-11-02 東レ株式会社 有機エレクトロルミネッセンス表示装置用フィルムおよび積層シート

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Publication number Publication date
US10906311B2 (en) 2021-02-02
CN110654115B (zh) 2021-07-20
EP3587116A1 (en) 2020-01-01
JP2020001316A (ja) 2020-01-09
JP7102980B2 (ja) 2022-07-20
CN110654115A (zh) 2020-01-07
EP3587116B1 (en) 2023-10-18
US20200001601A1 (en) 2020-01-02
CN113524911A (zh) 2021-10-22

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