JP7102980B2 - 液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法 - Google Patents

液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法 Download PDF

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Publication number
JP7102980B2
JP7102980B2 JP2018124367A JP2018124367A JP7102980B2 JP 7102980 B2 JP7102980 B2 JP 7102980B2 JP 2018124367 A JP2018124367 A JP 2018124367A JP 2018124367 A JP2018124367 A JP 2018124367A JP 7102980 B2 JP7102980 B2 JP 7102980B2
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Prior art keywords
flow path
liquid
recovery
liquid injection
supply
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JP2018124367A
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English (en)
Japanese (ja)
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JP2020001316A5 (enExample
JP2020001316A (ja
Inventor
祐馬 福澤
本規 ▲高▼部
峻介 渡邉
暁良 宮岸
俊也 福田
純一 佐野
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
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Priority to JP2018124367A priority Critical patent/JP7102980B2/ja
Priority to US16/452,951 priority patent/US10906311B2/en
Priority to CN202110783081.7A priority patent/CN113524911B/zh
Priority to CN201910561561.1A priority patent/CN110654115B/zh
Priority to EP19182769.0A priority patent/EP3587116B1/en
Publication of JP2020001316A publication Critical patent/JP2020001316A/ja
Publication of JP2020001316A5 publication Critical patent/JP2020001316A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258—Multi layer thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
JP2018124367A 2018-06-29 2018-06-29 液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法 Active JP7102980B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2018124367A JP7102980B2 (ja) 2018-06-29 2018-06-29 液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法
US16/452,951 US10906311B2 (en) 2018-06-29 2019-06-26 Liquid ejecting head, liquid ejecting apparatus, and manufacturing method thereof
CN202110783081.7A CN113524911B (zh) 2018-06-29 2019-06-26 液体喷射头、液体喷射装置及其制造方法
CN201910561561.1A CN110654115B (zh) 2018-06-29 2019-06-26 液体喷射头、液体喷射装置及其制造方法
EP19182769.0A EP3587116B1 (en) 2018-06-29 2019-06-27 Liquid ejecting head, liquid ejecting apparatus, and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018124367A JP7102980B2 (ja) 2018-06-29 2018-06-29 液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法

Publications (3)

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JP2020001316A JP2020001316A (ja) 2020-01-09
JP2020001316A5 JP2020001316A5 (enExample) 2021-07-26
JP7102980B2 true JP7102980B2 (ja) 2022-07-20

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JP2018124367A Active JP7102980B2 (ja) 2018-06-29 2018-06-29 液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法

Country Status (4)

Country Link
US (1) US10906311B2 (enExample)
EP (1) EP3587116B1 (enExample)
JP (1) JP7102980B2 (enExample)
CN (2) CN113524911B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7102980B2 (ja) * 2018-06-29 2022-07-20 セイコーエプソン株式会社 液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法
JP7434997B2 (ja) * 2020-02-14 2024-02-21 セイコーエプソン株式会社 液体吐出ヘッドおよび液体吐出装置
JP7707707B2 (ja) * 2021-07-14 2025-07-15 セイコーエプソン株式会社 液体吐出ヘッド、液体吐出装置
CN117087334A (zh) * 2023-10-19 2023-11-21 季华实验室 打印喷头、喷墨打印设备及其控制方法、设备与存储介质

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006175869A (ja) 2004-12-20 2006-07-06 Palo Alto Research Center Inc プリント回路基板およびスクリーン印刷圧電物質における微小流体に基づいた低価格の圧電プリントヘッド
US20080136873A1 (en) 2006-12-12 2008-06-12 Samsung Electronics Co., Ltd. Piezo-electric type page width inkjet printhead and image forming apparatus having the same
JP2012061717A (ja) 2010-09-16 2012-03-29 Ricoh Co Ltd 液滴吐出ヘッド及びインクジェット記録装置
JP2018103418A (ja) 2016-12-26 2018-07-05 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、液体循環方法及び液体吐出方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4366217B2 (ja) * 2004-03-11 2009-11-18 株式会社リコー 液体吐出ヘッド、液体吐出カートリッジ及び画像形成装置
JP5544690B2 (ja) * 2008-07-23 2014-07-09 セイコーエプソン株式会社 液体供給装置、液体噴射装置及び液体供給方法
JP5171534B2 (ja) * 2008-10-15 2013-03-27 富士フイルム株式会社 インクジェット記録方法
CN102481789B (zh) * 2009-07-10 2015-06-17 富士胶卷迪马蒂克斯股份有限公司 用于密集封装的微机电系统喷射结构
JP5750753B2 (ja) 2011-01-11 2015-07-22 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP6217217B2 (ja) * 2013-08-01 2017-10-25 セイコーエプソン株式会社 液体吐出ヘッド、及び、液体吐出装置
JP2015033838A (ja) * 2013-08-09 2015-02-19 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP6463107B2 (ja) * 2014-12-05 2019-01-30 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
WO2016114396A1 (ja) * 2015-01-16 2016-07-21 コニカミノルタ株式会社 インクジェットヘッド及びインクジェット記録装置
JP6488807B2 (ja) * 2015-03-24 2019-03-27 セイコーエプソン株式会社 液体吐出装置および信号供給装置
US9694581B2 (en) * 2015-04-09 2017-07-04 Ricoh Company, Ltd. Liquid discharge head, liquid discharge device, liquid discharge apparatus, and image forming apparatus
JP6724923B2 (ja) 2015-09-18 2020-07-15 コニカミノルタ株式会社 インクジェットヘッド及びインクジェット記録装置
JP6781942B2 (ja) 2015-11-04 2020-11-11 株式会社リコー 液滴吐出ヘッド及び画像形成装置
JP6135887B2 (ja) * 2016-04-19 2017-05-31 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置並びに液体吐出方法
JP6957885B2 (ja) 2017-01-31 2021-11-02 東レ株式会社 有機エレクトロルミネッセンス表示装置用フィルムおよび積層シート
JP7102980B2 (ja) * 2018-06-29 2022-07-20 セイコーエプソン株式会社 液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006175869A (ja) 2004-12-20 2006-07-06 Palo Alto Research Center Inc プリント回路基板およびスクリーン印刷圧電物質における微小流体に基づいた低価格の圧電プリントヘッド
US20080136873A1 (en) 2006-12-12 2008-06-12 Samsung Electronics Co., Ltd. Piezo-electric type page width inkjet printhead and image forming apparatus having the same
JP2012061717A (ja) 2010-09-16 2012-03-29 Ricoh Co Ltd 液滴吐出ヘッド及びインクジェット記録装置
JP2018103418A (ja) 2016-12-26 2018-07-05 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、液体循環方法及び液体吐出方法

Also Published As

Publication number Publication date
US10906311B2 (en) 2021-02-02
CN110654115B (zh) 2021-07-20
EP3587116A1 (en) 2020-01-01
CN113524911B (zh) 2023-05-05
JP2020001316A (ja) 2020-01-09
CN110654115A (zh) 2020-01-07
EP3587116B1 (en) 2023-10-18
US20200001601A1 (en) 2020-01-02
CN113524911A (zh) 2021-10-22

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