CN110637109B - SiC外延晶片及其制造方法 - Google Patents
SiC外延晶片及其制造方法 Download PDFInfo
- Publication number
- CN110637109B CN110637109B CN201880032744.8A CN201880032744A CN110637109B CN 110637109 B CN110637109 B CN 110637109B CN 201880032744 A CN201880032744 A CN 201880032744A CN 110637109 B CN110637109 B CN 110637109B
- Authority
- CN
- China
- Prior art keywords
- sic
- single crystal
- crystal substrate
- growth
- epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 98
- 239000013078 crystal Substances 0.000 claims abstract description 94
- 238000000034 method Methods 0.000 claims abstract description 25
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 15
- 230000007547 defect Effects 0.000 claims description 100
- 239000007789 gas Substances 0.000 claims description 91
- 238000005530 etching Methods 0.000 claims description 30
- 238000004140 cleaning Methods 0.000 claims description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 175
- 229910010271 silicon carbide Inorganic materials 0.000 description 174
- 235000012431 wafers Nutrition 0.000 description 85
- 239000000460 chlorine Substances 0.000 description 71
- 230000006399 behavior Effects 0.000 description 17
- 239000002994 raw material Substances 0.000 description 17
- 230000008569 process Effects 0.000 description 11
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 10
- 238000001000 micrograph Methods 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 9
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 9
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 8
- 239000005052 trichlorosilane Substances 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 6
- 230000007704 transition Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052801 chlorine Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000012159 carrier gas Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000005424 photoluminescence Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000001294 propane Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 229910003910 SiCl4 Inorganic materials 0.000 description 2
- 229910003818 SiH2Cl2 Inorganic materials 0.000 description 2
- 229910003822 SiHCl3 Inorganic materials 0.000 description 2
- 238000004854 X-ray topography Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000005092 sublimation method Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1608—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/42—Silicides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/16—Controlling or regulating
- C30B25/165—Controlling or regulating the flow of the reactive gases
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
- C30B25/20—Epitaxial-layer growth characterised by the substrate the substrate being of the same materials as the epitaxial layer
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02378—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/02433—Crystal orientation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02529—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02576—N-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02579—P-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02658—Pretreatments
- H01L21/02661—In-situ cleaning
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Recrystallisation Techniques (AREA)
Abstract
Description
Claims (7)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017-104625 | 2017-05-26 | ||
JP2017104625A JP6832240B2 (ja) | 2017-05-26 | 2017-05-26 | SiCエピタキシャルウェハ及びその製造方法 |
PCT/JP2018/016123 WO2018216407A1 (ja) | 2017-05-26 | 2018-04-19 | SiCエピタキシャルウェハ及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110637109A CN110637109A (zh) | 2019-12-31 |
CN110637109B true CN110637109B (zh) | 2021-09-07 |
Family
ID=64396675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201880032744.8A Active CN110637109B (zh) | 2017-05-26 | 2018-04-19 | SiC外延晶片及其制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11107892B2 (zh) |
JP (1) | JP6832240B2 (zh) |
CN (1) | CN110637109B (zh) |
DE (1) | DE112018002713T5 (zh) |
WO (1) | WO2018216407A1 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6585799B1 (ja) * | 2018-10-15 | 2019-10-02 | 昭和電工株式会社 | SiC基板の評価方法及びSiCエピタキシャルウェハの製造方法 |
JP7023882B2 (ja) * | 2019-02-04 | 2022-02-22 | 株式会社東芝 | 半導体装置の製造方法、基板の製造方法、半導体装置、基板、及び、基板の製造装置 |
FR3118284B1 (fr) * | 2020-12-17 | 2022-11-04 | Commissariat Energie Atomique | Dispositif électronique en siliciure de carbone et son procédé de fabrication |
CN116259534A (zh) * | 2023-05-12 | 2023-06-13 | 比亚迪股份有限公司 | 碳化硅外延方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101194052A (zh) * | 2005-06-08 | 2008-06-04 | 克里公司 | 低基面位错块体生长的SiC晶片 |
CN102576666A (zh) * | 2009-08-28 | 2012-07-11 | 昭和电工株式会社 | SiC外延晶片及其制造方法 |
CN104246979A (zh) * | 2012-09-11 | 2014-12-24 | 道康宁公司 | SiC上的高电压功率半导体器件 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5068423B2 (ja) * | 2004-10-13 | 2012-11-07 | 新日本製鐵株式会社 | 炭化珪素単結晶インゴット、炭化珪素単結晶ウェハ及びその製造方法 |
JP5353800B2 (ja) | 2010-04-07 | 2013-11-27 | 新日鐵住金株式会社 | 炭化珪素エピタキシャル膜の製造方法 |
JP4850960B2 (ja) | 2010-04-07 | 2012-01-11 | 新日本製鐵株式会社 | エピタキシャル炭化珪素単結晶基板の製造方法 |
SE536605C2 (sv) | 2012-01-30 | 2014-03-25 | Odling av kiselkarbidkristall i en CVD-reaktor vid användning av klorineringskemi | |
US9988738B2 (en) * | 2013-02-13 | 2018-06-05 | Mitsubishi Electric Corporation | Method for manufacturing SiC epitaxial wafer |
KR20150025648A (ko) | 2013-08-29 | 2015-03-11 | 엘지이노텍 주식회사 | 에피택셜 웨이퍼 |
JP6723219B2 (ja) * | 2015-03-03 | 2020-07-15 | 昭和電工株式会社 | SiCエピタキシャルウェハ、SiCエピタキシャルウェハの製造方法 |
JP6762484B2 (ja) * | 2017-01-10 | 2020-09-30 | 昭和電工株式会社 | SiCエピタキシャルウェハ及びその製造方法 |
-
2017
- 2017-05-26 JP JP2017104625A patent/JP6832240B2/ja active Active
-
2018
- 2018-04-19 WO PCT/JP2018/016123 patent/WO2018216407A1/ja active Application Filing
- 2018-04-19 DE DE112018002713.9T patent/DE112018002713T5/de active Pending
- 2018-04-19 CN CN201880032744.8A patent/CN110637109B/zh active Active
- 2018-04-19 US US16/616,780 patent/US11107892B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101194052A (zh) * | 2005-06-08 | 2008-06-04 | 克里公司 | 低基面位错块体生长的SiC晶片 |
CN102576666A (zh) * | 2009-08-28 | 2012-07-11 | 昭和电工株式会社 | SiC外延晶片及其制造方法 |
CN104246979A (zh) * | 2012-09-11 | 2014-12-24 | 道康宁公司 | SiC上的高电压功率半导体器件 |
Non-Patent Citations (1)
Title |
---|
Thick 4H-SiC Epitaxial Growth and Defect Reduction for Very High Voltage Bipolar Devices;Miyazawa, Tetsuya;《CS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY》;20130619;N3036-N3040 * |
Also Published As
Publication number | Publication date |
---|---|
JP2018199595A (ja) | 2018-12-20 |
US20200083330A1 (en) | 2020-03-12 |
WO2018216407A1 (ja) | 2018-11-29 |
JP6832240B2 (ja) | 2021-02-24 |
US11107892B2 (en) | 2021-08-31 |
CN110637109A (zh) | 2019-12-31 |
DE112018002713T5 (de) | 2020-02-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110192266B (zh) | SiC外延晶片及其制造方法 | |
CN110637109B (zh) | SiC外延晶片及其制造方法 | |
JP5268354B2 (ja) | 低減されたニンジン状欠陥を有する単結晶エピタキシャル炭化珪素層構造およびその製造方法 | |
EP2557205B1 (en) | Process for producing epitaxial single-crystal silicon carbide substrate | |
EP2570522B1 (en) | Epitaxial silicon carbide single-crystal substrate and method for producing the same | |
JP6012841B2 (ja) | SiCエピタキシャルウエハの製造方法 | |
JP4714192B2 (ja) | 窒化ガリウム結晶の成長方法、窒化ガリウム結晶基板、エピウエハの製造方法およびエピウエハ | |
CN101410950A (zh) | 使用纳米结构柔性层和hvpe制造高质量化合物半导体材料的生长方法 | |
Zhao | Surface defects in 4H-SiC homoepitaxial layers | |
WO2018123534A1 (ja) | p型SiCエピタキシャルウェハ及びその製造方法 | |
EP3929336A1 (en) | Gan crystal and substrate | |
WO2016136548A1 (ja) | 窒化物半導体テンプレート及びその製造方法、並びにエピタキシャルウエハ | |
JP6669157B2 (ja) | C面GaN基板 | |
US10774444B2 (en) | Method for producing SiC epitaxial wafer including forming epitaxial layer under different conditions | |
JP5733258B2 (ja) | 窒化物半導体エピタキシャルウェハの製造方法 | |
EP2959512B1 (en) | Sic single crystal, sic wafer, sic substrate, and sic device | |
JP2014043388A (ja) | 第13族窒化物結晶の製造方法 | |
JP6763347B2 (ja) | 窒化物半導体基板の製造方法および窒化物半導体基板 | |
Ho et al. | Growth of InGaN nanopyramid arrays on Si for potential photovoltaic applications | |
JP5110117B2 (ja) | 窒化ガリウム結晶の成長方法、窒化ガリウム結晶基板、エピウエハの製造方法およびエピウエハ | |
WO2020241761A1 (ja) | GaN基板ウエハおよびその製造方法 | |
KR102131245B1 (ko) | 에피택셜 웨이퍼 | |
CN113906169A (zh) | GaN基板晶片及其制造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan Patentee after: Lishennoco Co.,Ltd. Patentee after: CENTRAL Research Institute ELECT Patentee after: DENSO Corp. Address before: Tokyo, Japan Patentee before: Showa electrical materials Co.,Ltd. Patentee before: CENTRAL Research Institute ELECT Patentee before: DENSO Corp. |
|
CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230425 Address after: Tokyo, Japan Patentee after: Showa electrical materials Co.,Ltd. Patentee after: CENTRAL Research Institute ELECT Patentee after: DENSO Corp. Address before: Tokyo, Japan Patentee before: SHOWA DENKO Kabushiki Kaisha Patentee before: CENTRAL Research Institute ELECT Patentee before: DENSO Corp. |
|
TR01 | Transfer of patent right |