CN110243729B - 粒子计数器 - Google Patents

粒子计数器 Download PDF

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Publication number
CN110243729B
CN110243729B CN201910173746.5A CN201910173746A CN110243729B CN 110243729 B CN110243729 B CN 110243729B CN 201910173746 A CN201910173746 A CN 201910173746A CN 110243729 B CN110243729 B CN 110243729B
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China
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light
optical path
path length
particles
detection
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Chinese (zh)
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CN110243729A (zh
Inventor
松田朋信
进村正树
齐藤光秋
山川雄生
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Rion Co Ltd
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Rion Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1456—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
    • G01N15/1459—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/075—Investigating concentration of particle suspensions by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0053—Investigating dispersion of solids in liquids, e.g. trouble
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G01N2015/1454—Optical arrangements using phase shift or interference, e.g. for improving contrast
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1486—Counting the particles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1493—Particle size

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN201910173746.5A 2018-03-09 2019-03-07 粒子计数器 Active CN110243729B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-043571 2018-03-09
JP2018043571A JP7071849B2 (ja) 2018-03-09 2018-03-09 パーティクルカウンタ

Publications (2)

Publication Number Publication Date
CN110243729A CN110243729A (zh) 2019-09-17
CN110243729B true CN110243729B (zh) 2022-07-15

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CN201910173746.5A Active CN110243729B (zh) 2018-03-09 2019-03-07 粒子计数器

Country Status (5)

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US (1) US10705010B2 (OSRAM)
JP (1) JP7071849B2 (OSRAM)
KR (1) KR102166583B1 (OSRAM)
CN (1) CN110243729B (OSRAM)
TW (1) TWI685650B (OSRAM)

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US10928297B2 (en) 2019-01-09 2021-02-23 University Of Washington Method for determining detection angle of optical particle sizer
JP7504912B2 (ja) 2019-04-25 2024-06-24 パーティクル・メージャーリング・システムズ・インコーポレーテッド 軸上粒子検出及び／又は差分検出のための粒子検出システム及び方法
WO2021102256A1 (en) * 2019-11-22 2021-05-27 Particle Measuring Systems, Inc. Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions
JP7420551B2 (ja) * 2019-12-27 2024-01-23 リオン株式会社 粒子測定装置
JP7726920B2 (ja) 2020-06-09 2025-08-20 パーティクル・メージャーリング・システムズ・インコーポレーテッド 粒子検出システムおよび粒子検出の方法
KR102622195B1 (ko) * 2021-12-02 2024-01-05 세메스 주식회사 약액 검사 장치와, 이를 포함하는 기판 처리 장치 및 기판을 처리하는 약액을 검사하는 방법
TW202346835A (zh) * 2022-01-21 2023-12-01 美商粒子監測系統有限公司 增強的雙遍次及多遍次粒子偵測
TW202507254A (zh) * 2023-06-06 2025-02-16 美商恩特葛瑞斯股份有限公司 光學顆粒計數器及方法
TW202507253A (zh) * 2023-06-06 2025-02-16 美商恩特葛瑞斯股份有限公司 光學顆粒計數器及方法
WO2025106628A1 (en) 2023-11-16 2025-05-22 Particle Measuring Systems, Inc. Systems and methods for reducing false positive particle detection events in a particle detector

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Also Published As

Publication number Publication date
CN110243729A (zh) 2019-09-17
JP2019158478A (ja) 2019-09-19
KR102166583B1 (ko) 2020-10-16
KR20190106724A (ko) 2019-09-18
TW201939011A (zh) 2019-10-01
JP7071849B2 (ja) 2022-05-19
US10705010B2 (en) 2020-07-07
TWI685650B (zh) 2020-02-21
US20190277745A1 (en) 2019-09-12

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