JP5859154B1 - パーティクルカウンタ - Google Patents
パーティクルカウンタ Download PDFInfo
- Publication number
- JP5859154B1 JP5859154B1 JP2015045175A JP2015045175A JP5859154B1 JP 5859154 B1 JP5859154 B1 JP 5859154B1 JP 2015045175 A JP2015045175 A JP 2015045175A JP 2015045175 A JP2015045175 A JP 2015045175A JP 5859154 B1 JP5859154 B1 JP 5859154B1
- Authority
- JP
- Japan
- Prior art keywords
- light
- detection
- interference
- optical system
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002245 particle Substances 0.000 title claims abstract description 126
- 238000001514 detection method Methods 0.000 claims abstract description 111
- 230000003287 optical effect Effects 0.000 claims abstract description 64
- 239000012530 fluid Substances 0.000 claims abstract description 38
- 230000005540 biological transmission Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 238000001914 filtration Methods 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 11
- 239000000126 substance Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000002296 dynamic light scattering Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 230000005653 Brownian motion process Effects 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 238000005537 brownian motion Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N15/1434—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N15/1456—Electro-optical investigation, e.g. flow cytometers without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
- G01N15/1459—Electro-optical investigation, e.g. flow cytometers without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N2015/0007—Investigating dispersion of gas
- G01N2015/0011—Investigating dispersion of gas in liquids, e.g. bubbles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N2015/0038—Investigating nanoparticles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N2015/0042—Investigating dispersion of solids
- G01N2015/0053—Investigating dispersion of solids in liquids, e.g. trouble
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N15/1434—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
- G01N2015/144—Imaging characterised by its optical setup
- G01N2015/1445—Three-dimensional imaging, imaging in different image planes, e.g. under different angles or at different depths, e.g. by a relative motion of sample and detector, for instance by tomography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N15/1434—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
- G01N2015/1454—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement using phase shift or interference, e.g. for improving contrast
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N2015/1486—Counting the particles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N2015/1493—Particle size
Abstract
Description
4 検出部
5 フィルタ
6 計数部
11 ビームスプリッタ(光分岐部の一例)
12 照射光学系
13 検出光学系
16 ビームエキスパンダ(参照光学系の一例)
17 ビームスプリッタ(光重畳部の一例)
21a,21b 受光素子
Claims (5)
- 光を出射する光源と、
2つの光を空間的に重畳する光重畳部と、
前記光源からの光を分岐して得られる複数の光のうちの1つの光を流路内を流れる流体に照射して検出領域を形成する照射光学系と、
前記検出領域内の前記流体に含まれる粒子からの散乱光のうち、前記照射光学系の光軸とは異なる方向の散乱光を、前記光重畳部に入射させる検出光学系と、
前記複数の光のうちの別の1つの光を参照光として前記光重畳部に入射させる参照光学系と、
前記光重畳部によって得られる、前記散乱光と前記参照光との干渉光を受光素子で受光し、前記干渉光に対応する検出信号を生成する検出部と、
前記検出信号に基づいて前記粒子の計数を行う計数部と、
を備え、
前記光重畳部は、ビームスプリッタであり、前記散乱光の透過成分と前記参照光の反射成分とによる第1干渉光と、前記散乱光の反射成分と前記参照光の透過成分とによる第2干渉光とを生成し、
前記検出部は、2つの受光素子で前記第1干渉光および前記第2干渉光を受光し、前記第1干渉光に対応する電気信号および前記第2干渉光に対応する電気信号の差分を前記検出信号とすること、
を特徴とするパーティクルカウンタ。 - 前記検出光学系は、前記流路内の前記粒子から発する散乱光のうち、前記検出領域での前記流体の進行方向へ沿って発する散乱光を前記光重畳部に入射させることを特徴とする請求項1記載のパーティクルカウンタ。
- 前記検出部により生成された前記検出信号に対してフィルタ処理を行うフィルタをさらに備え、
前記フィルタは、前記流体の進行速度に対応する周波数成分を通過させ、前記流体の進行速度に対応する周波数成分以外の周波数成分を減衰させるフィルタ処理を前記検出信号に対して行い、
前記計数部は、前記フィルタによるフィルタ処理後の前記検出信号に基づいて前記粒子の計数を行うこと、
を特徴とする請求項1または請求項2記載のパーティクルカウンタ。 - 前記検出光学系および前記参照光学系は、前記散乱光の波面形状と前記参照光の波面形状が略一致するように前記散乱光および前記参照光を出射することを特徴とする請求項1から請求項3のうちのいずれか1項記載のパーティクルカウンタ。
- 前記光重畳部とは別に、前記光源からの光を前記複数の光に分岐する光分岐部を備えることを特徴とする請求項1から請求項4のうちのいずれか1項記載のパーティクルカウンタ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015045175A JP5859154B1 (ja) | 2015-03-06 | 2015-03-06 | パーティクルカウンタ |
KR1020177026530A KR101824900B1 (ko) | 2015-03-06 | 2016-03-04 | 파티클 카운터 |
PCT/JP2016/056787 WO2016143696A1 (ja) | 2015-03-06 | 2016-03-04 | パーティクルカウンタ |
US15/555,376 US10054529B2 (en) | 2015-03-06 | 2016-03-04 | Particle counter |
CN201680013946.9A CN107430056B (zh) | 2015-03-06 | 2016-03-04 | 粒子计数器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015045175A JP5859154B1 (ja) | 2015-03-06 | 2015-03-06 | パーティクルカウンタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5859154B1 true JP5859154B1 (ja) | 2016-02-10 |
JP2016164530A JP2016164530A (ja) | 2016-09-08 |
Family
ID=55301035
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015045175A Active JP5859154B1 (ja) | 2015-03-06 | 2015-03-06 | パーティクルカウンタ |
Country Status (5)
Country | Link |
---|---|
US (1) | US10054529B2 (ja) |
JP (1) | JP5859154B1 (ja) |
KR (1) | KR101824900B1 (ja) |
CN (1) | CN107430056B (ja) |
WO (1) | WO2016143696A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016143696A1 (ja) * | 2015-03-06 | 2016-09-15 | リオン株式会社 | パーティクルカウンタ |
CN109900602A (zh) * | 2017-11-28 | 2019-06-18 | 理音株式会社 | 粒子计数器 |
US10705010B2 (en) | 2018-03-09 | 2020-07-07 | Rion Co., Ltd. | Particle counter |
US11268894B2 (en) | 2019-12-26 | 2022-03-08 | Rion Co., Ltd. | Flow cell and particle measuring device |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106644867B (zh) * | 2016-12-30 | 2023-08-29 | 聚光科技(杭州)股份有限公司 | 气体中颗粒物的检测装置及方法 |
JP6549747B2 (ja) * | 2017-04-14 | 2019-07-24 | リオン株式会社 | 粒子測定装置および粒子測定方法 |
EP3401664A1 (en) * | 2017-05-12 | 2018-11-14 | Koninklijke Philips N.V. | Method of suppressing false positive signals during self mixing interference particle detection |
WO2020207908A1 (en) * | 2019-04-11 | 2020-10-15 | Koninklijke Philips N.V. | A particle sensing system for example for use in a pollution mask |
EP3798605A1 (en) * | 2019-09-26 | 2021-03-31 | Acondicionamiento Tarrasense | Optoelectronic device for fluid analysis and related method for optical analysis |
EP3825678A1 (en) * | 2019-11-22 | 2021-05-26 | Ams Ag | Apparatus and method for detecting objects |
KR102321511B1 (ko) | 2020-05-07 | 2021-11-02 | 박준철 | 교체식으로 유지 보수가 가능한 파티클 계수 장치 |
EP4053535A1 (en) * | 2021-03-01 | 2022-09-07 | Q.ant GmbH | Particle sensor, device and method for detecting particles |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62291547A (ja) * | 1986-06-11 | 1987-12-18 | Olympus Optical Co Ltd | 物質の濃度測定方法 |
JPH01245132A (ja) * | 1988-03-28 | 1989-09-29 | Hitachi Electron Eng Co Ltd | 微粒子検出方式 |
JPH01292235A (ja) * | 1988-04-22 | 1989-11-24 | Internatl Business Mach Corp <Ibm> | 流体検査装置 |
JPH06213795A (ja) * | 1993-01-19 | 1994-08-05 | Mitsubishi Electric Corp | 浮遊粒子計測装置 |
JPH11118699A (ja) * | 1997-10-20 | 1999-04-30 | Hitachi Ltd | 据付型濁度計の校正方法 |
JP2001264232A (ja) * | 2000-03-21 | 2001-09-26 | Japan Science & Technology Corp | 微粒子測定方法およびその装置 |
JP2007071794A (ja) * | 2005-09-09 | 2007-03-22 | Rion Co Ltd | 粒子検出器 |
JP2007333409A (ja) * | 2006-06-12 | 2007-12-27 | Horiba Ltd | 浮遊粒子測定装置 |
JP2009030988A (ja) * | 2007-07-24 | 2009-02-12 | Rion Co Ltd | 粒子計数装置 |
JP2011013162A (ja) * | 2009-07-03 | 2011-01-20 | Fujifilm Corp | 低コヒーレンス光源を用いた動的光散乱測定装置及び光散乱強度測定方法 |
JP5438198B1 (ja) * | 2012-11-05 | 2014-03-12 | リオン株式会社 | 光散乱式粒子計数器 |
JP2014092525A (ja) * | 2012-11-06 | 2014-05-19 | Pulstec Industrial Co Ltd | 動的光散乱測定装置および動的光散乱測定方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5134177B1 (ja) | 1963-08-01 | 1976-09-24 | ||
JPH0458137A (ja) | 1990-06-27 | 1992-02-25 | Hitachi Electron Eng Co Ltd | ヘテロダイン微粒子検出器の光学系 |
JPH06331529A (ja) | 1993-05-19 | 1994-12-02 | Toshiba Corp | 微粒子検出装置 |
US6847456B2 (en) | 2000-04-28 | 2005-01-25 | Massachusetts Institute Of Technology | Methods and systems using field-based light scattering spectroscopy |
US9297737B2 (en) * | 2004-03-06 | 2016-03-29 | Michael Trainer | Methods and apparatus for determining characteristics of particles |
CN102003936B (zh) * | 2010-09-14 | 2012-01-04 | 浙江大学 | 同时测量液滴位置、粒径和复折射率的方法和装置 |
JP6193546B2 (ja) | 2012-08-24 | 2017-09-06 | ウシオ電機株式会社 | 三次元位置測定方法、速度測定方法、三次元位置測定装置及び速度測定装置 |
JP2014092425A (ja) | 2012-11-02 | 2014-05-19 | Canon Inc | 光干渉断層撮像装置及び光干渉断層撮像方法 |
CN203705307U (zh) * | 2013-12-16 | 2014-07-09 | 天津大学 | 基于双光束相向照射的干涉粒子成像测量装置 |
CN103674791A (zh) * | 2013-12-16 | 2014-03-26 | 天津大学 | 一种基于双光束照射的干涉粒子成像测量方法 |
CN104020085B (zh) * | 2014-06-17 | 2016-07-06 | 大连理工大学 | 一种不受背景影响的微纳粒子的光学探测与显微成像方法 |
CN104297115B (zh) * | 2014-09-26 | 2017-02-08 | 深圳职业技术学院 | 一种大气颗粒物pm2.5数密度检测的方法 |
JP5859154B1 (ja) | 2015-03-06 | 2016-02-10 | リオン株式会社 | パーティクルカウンタ |
-
2015
- 2015-03-06 JP JP2015045175A patent/JP5859154B1/ja active Active
-
2016
- 2016-03-04 US US15/555,376 patent/US10054529B2/en active Active
- 2016-03-04 KR KR1020177026530A patent/KR101824900B1/ko active IP Right Grant
- 2016-03-04 CN CN201680013946.9A patent/CN107430056B/zh active Active
- 2016-03-04 WO PCT/JP2016/056787 patent/WO2016143696A1/ja active Application Filing
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62291547A (ja) * | 1986-06-11 | 1987-12-18 | Olympus Optical Co Ltd | 物質の濃度測定方法 |
JPH01245132A (ja) * | 1988-03-28 | 1989-09-29 | Hitachi Electron Eng Co Ltd | 微粒子検出方式 |
JPH01292235A (ja) * | 1988-04-22 | 1989-11-24 | Internatl Business Mach Corp <Ibm> | 流体検査装置 |
JPH06213795A (ja) * | 1993-01-19 | 1994-08-05 | Mitsubishi Electric Corp | 浮遊粒子計測装置 |
JPH11118699A (ja) * | 1997-10-20 | 1999-04-30 | Hitachi Ltd | 据付型濁度計の校正方法 |
JP2001264232A (ja) * | 2000-03-21 | 2001-09-26 | Japan Science & Technology Corp | 微粒子測定方法およびその装置 |
JP2007071794A (ja) * | 2005-09-09 | 2007-03-22 | Rion Co Ltd | 粒子検出器 |
JP2007333409A (ja) * | 2006-06-12 | 2007-12-27 | Horiba Ltd | 浮遊粒子測定装置 |
JP2009030988A (ja) * | 2007-07-24 | 2009-02-12 | Rion Co Ltd | 粒子計数装置 |
JP2011013162A (ja) * | 2009-07-03 | 2011-01-20 | Fujifilm Corp | 低コヒーレンス光源を用いた動的光散乱測定装置及び光散乱強度測定方法 |
JP5438198B1 (ja) * | 2012-11-05 | 2014-03-12 | リオン株式会社 | 光散乱式粒子計数器 |
JP2014092525A (ja) * | 2012-11-06 | 2014-05-19 | Pulstec Industrial Co Ltd | 動的光散乱測定装置および動的光散乱測定方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016143696A1 (ja) * | 2015-03-06 | 2016-09-15 | リオン株式会社 | パーティクルカウンタ |
US10054529B2 (en) | 2015-03-06 | 2018-08-21 | Rion Co., Ltd. | Particle counter |
CN109900602A (zh) * | 2017-11-28 | 2019-06-18 | 理音株式会社 | 粒子计数器 |
US10416069B2 (en) | 2017-11-28 | 2019-09-17 | Rion Co., Ltd. | Particle counter |
US10705010B2 (en) | 2018-03-09 | 2020-07-07 | Rion Co., Ltd. | Particle counter |
US11268894B2 (en) | 2019-12-26 | 2022-03-08 | Rion Co., Ltd. | Flow cell and particle measuring device |
Also Published As
Publication number | Publication date |
---|---|
CN107430056B (zh) | 2018-12-14 |
KR101824900B1 (ko) | 2018-03-14 |
KR20170117592A (ko) | 2017-10-23 |
JP2016164530A (ja) | 2016-09-08 |
US10054529B2 (en) | 2018-08-21 |
CN107430056A (zh) | 2017-12-01 |
US20180038781A1 (en) | 2018-02-08 |
WO2016143696A1 (ja) | 2016-09-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5859154B1 (ja) | パーティクルカウンタ | |
JP6030740B1 (ja) | パーティクルカウンタ | |
JP6413006B1 (ja) | パーティクルカウンタ | |
TWI685650B (zh) | 粒子計數器 | |
KR102601473B1 (ko) | 입자 측정을 위한 시스템 및 방법 | |
JP6154812B2 (ja) | 光散乱による粒子径分布測定用装置及び方法 | |
JP2005227077A (ja) | 光学式移動情報検出装置および移動情報検出システムおよび電子機器およびエンコーダ | |
US20190107496A1 (en) | Apparatus and method for increasing dynamic range of a particle sensor | |
JP2015049204A5 (ja) | ||
JP6381779B2 (ja) | テラヘルツ波測定装置 | |
RU2458352C2 (ru) | Детектор и способ определения скорости | |
JP3390243B2 (ja) | 光散乱媒体の吸光情報検出方法 | |
JP3798753B2 (ja) | 粒径分布測定装置 | |
JP2005055204A (ja) | 粒子検出器 | |
JPS6222072A (ja) | スペツクル速度計 | |
JP2009222530A (ja) | 速度計 | |
JPS63243819A (ja) | 微小振動測定装置 | |
JPH0875856A (ja) | 速度計 | |
JPH049687A (ja) | レーザドップラ速度計 | |
JPH03120427A (ja) | レーザ発振出力モニタリング方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20151126 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20151215 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5859154 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |