JP5438198B1 - 光散乱式粒子計数器 - Google Patents
光散乱式粒子計数器 Download PDFInfo
- Publication number
- JP5438198B1 JP5438198B1 JP2012243355A JP2012243355A JP5438198B1 JP 5438198 B1 JP5438198 B1 JP 5438198B1 JP 2012243355 A JP2012243355 A JP 2012243355A JP 2012243355 A JP2012243355 A JP 2012243355A JP 5438198 B1 JP5438198 B1 JP 5438198B1
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- light
- receiving element
- detection region
- particle detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002245 particle Substances 0.000 title claims abstract description 99
- 238000000149 argon plasma sintering Methods 0.000 title claims abstract description 17
- 238000001514 detection method Methods 0.000 claims abstract description 49
- 239000012530 fluid Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 238000007493 shaping process Methods 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
【解決手段】 試料流体にレーザ光Laを照射して粒子検出領域13を形成し、この粒子検出領域13を通過する粒子による散乱光Lsを多分割受光素子23で受光して前記粒子を検出する光散乱式粒子計数器において、粒子検出領域13における位置に応じて多分割受光素子23を構成する各受光素子の有効な受光面積を設定する。多分割受光素子23を構成する各受光素子の有効な受光面積の設定は、多分割受光素子23に光を遮蔽する遮蔽部材24を設け、この遮蔽部材24の形状により、多分割受光素子23の中心部に対して端部の受光素子の有効な受光面積を小さく設定する。
【選択図】 図3
Description
Claims (1)
- 試料流体に光ビームを照射して粒子検出領域を形成し、この粒子検出領域を通過する粒子による散乱光を多分割受光素子で受光して前記粒子を検出する光散乱式粒子計数器において、その散乱光は受光素子の受光面積内に収まって、前記多分割受光素子に光を遮蔽する遮蔽部材を設け、この遮蔽部材の形状により、前記粒子検出領域におけるレーザ光の光強度分布の位置に応じて前記多分割受光素子を構成する中心部の受光素子の受光面積に対して、端部の受光素子の有効な受光面積を徐々に小さく設定することを特徴とする光散乱式粒子計数器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012243355A JP5438198B1 (ja) | 2012-11-05 | 2012-11-05 | 光散乱式粒子計数器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012243355A JP5438198B1 (ja) | 2012-11-05 | 2012-11-05 | 光散乱式粒子計数器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5438198B1 true JP5438198B1 (ja) | 2014-03-12 |
JP2014092468A JP2014092468A (ja) | 2014-05-19 |
Family
ID=50396690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012243355A Active JP5438198B1 (ja) | 2012-11-05 | 2012-11-05 | 光散乱式粒子計数器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5438198B1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5859154B1 (ja) * | 2015-03-06 | 2016-02-10 | リオン株式会社 | パーティクルカウンタ |
US9983113B2 (en) | 2015-12-03 | 2018-05-29 | Rion Co., Ltd. | Particle counter |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5719473B1 (ja) | 2014-09-25 | 2015-05-20 | リオン株式会社 | 薬液用パーティクルカウンタ |
-
2012
- 2012-11-05 JP JP2012243355A patent/JP5438198B1/ja active Active
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5859154B1 (ja) * | 2015-03-06 | 2016-02-10 | リオン株式会社 | パーティクルカウンタ |
JP2016164530A (ja) * | 2015-03-06 | 2016-09-08 | リオン株式会社 | パーティクルカウンタ |
CN107430056A (zh) * | 2015-03-06 | 2017-12-01 | 理音株式会社 | 粒子计数器 |
KR101824900B1 (ko) | 2015-03-06 | 2018-03-14 | 리온 가부시키가이샤 | 파티클 카운터 |
US10054529B2 (en) | 2015-03-06 | 2018-08-21 | Rion Co., Ltd. | Particle counter |
US9983113B2 (en) | 2015-12-03 | 2018-05-29 | Rion Co., Ltd. | Particle counter |
Also Published As
Publication number | Publication date |
---|---|
JP2014092468A (ja) | 2014-05-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8427642B2 (en) | Two-dimensional optical imaging methods and systems for particle detection | |
WO2021132017A1 (ja) | 粒子測定装置 | |
CN106950162B (zh) | 一种颗粒计数方法及系统 | |
CN108956402B (zh) | 一种具有复合多光敏区结构的高灵敏度粉尘浓度检测方法 | |
JP5438198B1 (ja) | 光散乱式粒子計数器 | |
JP2011505577A5 (ja) | ||
JP4981569B2 (ja) | 粒子計数装置 | |
US9103914B2 (en) | Optical angle of arrival sensors and methods for determining an angle of arrival of incident light | |
JP5362895B1 (ja) | 光散乱式粒子計数器 | |
US10254418B2 (en) | Semiconductor detector, radiation detector and radiation detector and radiation detection apparatus | |
JP5719473B1 (ja) | 薬液用パーティクルカウンタ | |
JP4050748B2 (ja) | 粒子測定装置 | |
JP2017083263A (ja) | 微粒子検出装置 | |
US9274203B1 (en) | Centroid locating sensors having plural spatial filtering logic circuits connected to plural digitization comparators and methods for locating an illuminated spot on a detector | |
CN110823786A (zh) | 一种液体中微小颗粒的检测装置和方法 | |
JP4064445B1 (ja) | 粒子測定装置 | |
JP6536034B2 (ja) | 粒子検出装置及び粒子検出方法 | |
CN110672498B (zh) | 一种使用空间分割和时间相关的高浓度粒子计数方法 | |
JP3480669B2 (ja) | 粒子通過位置検出装置 | |
US9829445B2 (en) | Testing diffraction or diffusion of a light beam | |
JPH11211651A (ja) | 光強度分布検出装置 | |
CN211206179U (zh) | 一种液体中微小颗粒的检测装置 | |
KR100860933B1 (ko) | 플로우 셀 및 이를 이용한 입자측정장치 | |
JPH0498145A (ja) | 流体中の微粒子計数装置 | |
JP3798753B2 (ja) | 粒径分布測定装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TRDD | Decision of grant or rejection written | ||
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131212 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5438198 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |