JP6030740B1 - パーティクルカウンタ - Google Patents
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- JP6030740B1 JP6030740B1 JP2015236987A JP2015236987A JP6030740B1 JP 6030740 B1 JP6030740 B1 JP 6030740B1 JP 2015236987 A JP2015236987 A JP 2015236987A JP 2015236987 A JP2015236987 A JP 2015236987A JP 6030740 B1 JP6030740 B1 JP 6030740B1
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- 239000007788 liquid Substances 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02024—Measuring in transmission, i.e. light traverses the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
- G01N15/0211—Investigating a scatter or diffraction pattern
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1434—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1456—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
- G01N15/1459—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/075—Investigating concentration of particle suspensions by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N2015/0687—Investigating concentration of particle suspensions in solutions, e.g. non volatile residue
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1434—Optical arrangements
- G01N2015/1454—Optical arrangements using phase shift or interference, e.g. for improving contrast
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N2015/1486—Counting the particles
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- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Dispersion Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
4 検出部
5 フィルタ
6 計数部
11 ビームスプリッタ
12 照射光学系
13 検出光学系
15 回折光学系(参照光学系の一例の一部)
16 ミラー(参照光学系の一例の一部)
17 ビームスプリッタ(光重畳部の一例)
21a,21b 受光素子
Claims (5)
- 光源と、
2つの光を空間的に重畳する光重畳部と、
前記光源からの光を分岐して得られる複数の光のうちの1つの光を流路内を流れる流体に照射して検出領域を形成する照射光学系と、
前記検出領域内の前記流体に含まれる粒子からの散乱光のうち、前記照射光学系の光軸とは異なる方向の散乱光を、前記光重畳部に入射させる検出光学系と、
前記複数の光のうちの別の1つの光を空間的に複数の光に分離し、前記複数の光を複数の参照光として前記光重畳部に入射させる参照光学系と、
前記複数の参照光に対応する複数の受光部を備え、前記光重畳部によって得られる、前記散乱光と前記参照光との干渉光を、その参照光に対応する前記受光部で受光して前記干渉光に対応する検出信号を生成する検出部と、
前記検出信号に基づいて前記粒子の計数を行う計数部と、
を備えることを特徴とするパーティクルカウンタ。 - 前記参照光学系は、回折格子で、前記複数の光のうちの別の1つの光を空間的に複数の光に分離することを特徴とする請求項1記載のパーティクルカウンタ。
- 前記検出光学系および前記参照光学系は、前記検出領域内の粒子からの前記散乱光の波面形状と前記複数の参照光のいずれかの波面形状が略一致するように前記散乱光および前記複数の参照光を出射することを特徴とする請求項1または請求項2記載のパーティクルカウンタ。
- 前記干渉光を、前記複数の受光部のうち、前記検出領域内の粒子の光軸からの距離に対応する前記受光部へ入射させる集光部をさらに備えることを特徴とする請求項1から請求項3のうちのいずれか1項記載のパーティクルカウンタ。
- 前記光重畳部は、ビームスプリッタであり、前記散乱光の透過成分と前記参照光の反射成分とによる第1干渉光と、前記散乱光の反射成分と前記参照光の透過成分とによる第2干渉光とを生成し、
前記検出部は、前記複数の参照光に対応する複数の受光部をそれぞれ備える2つの受光素子におけるいずれかの受光部で前記第1干渉光および前記第2干渉光をそれぞれ受光し、前記第1干渉光に対応する電気信号および前記第2干渉光に対応する電気信号の差分を前記検出信号とすること、
を特徴とする請求項1から請求項4のうちのいずれか1項記載のパーティクルカウンタ。
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JP2015236987A JP6030740B1 (ja) | 2015-12-03 | 2015-12-03 | パーティクルカウンタ |
US15/365,096 US9983113B2 (en) | 2015-12-03 | 2016-11-30 | Particle counter |
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JP2015236987A JP6030740B1 (ja) | 2015-12-03 | 2015-12-03 | パーティクルカウンタ |
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JP6030740B1 true JP6030740B1 (ja) | 2016-11-24 |
JP2017102068A JP2017102068A (ja) | 2017-06-08 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106644867A (zh) * | 2016-12-30 | 2017-05-10 | 聚光科技(杭州)股份有限公司 | 气体中颗粒物的检测装置及方法 |
WO2018190162A1 (ja) * | 2017-04-14 | 2018-10-18 | リオン株式会社 | 粒子測定装置および粒子測定方法 |
JP2018179971A (ja) * | 2017-04-14 | 2018-11-15 | リオン株式会社 | 粒子測定装置および粒子測定方法 |
KR102585276B1 (ko) | 2017-03-31 | 2023-10-05 | 라이프 테크놀로지스 코포레이션 | 이미징 유세포 분석을 위한 장치, 시스템, 및 방법 |
Families Citing this family (8)
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JP7326256B2 (ja) | 2017-10-26 | 2023-08-15 | パーティクル・メージャーリング・システムズ・インコーポレーテッド | 粒子計測システム及び方法 |
JP6413006B1 (ja) * | 2017-11-28 | 2018-10-24 | リオン株式会社 | パーティクルカウンタ |
GB201803523D0 (en) * | 2018-03-05 | 2018-04-18 | Malvern Panalytical Ltd | Improved particle sizing by optical diffraction |
JP7071849B2 (ja) * | 2018-03-09 | 2022-05-19 | リオン株式会社 | パーティクルカウンタ |
JP2020067538A (ja) * | 2018-10-23 | 2020-04-30 | 国立大学法人 東京大学 | 顕微鏡及び顕微法 |
JP7115406B2 (ja) * | 2019-04-18 | 2022-08-09 | 株式会社島津製作所 | パーティクル計数方法及びパーティクル計数装置 |
US11237095B2 (en) | 2019-04-25 | 2022-02-01 | Particle Measuring Systems, Inc. | Particle detection systems and methods for on-axis particle detection and/or differential detection |
CN114729868A (zh) | 2019-11-22 | 2022-07-08 | 粒子监测系统有限公司 | 先进的用于干涉测量颗粒检测和具有小大小尺寸的颗粒的检测的系统和方法 |
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JPH0458137A (ja) * | 1990-06-27 | 1992-02-25 | Hitachi Electron Eng Co Ltd | ヘテロダイン微粒子検出器の光学系 |
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JP2009030988A (ja) * | 2007-07-24 | 2009-02-12 | Rion Co Ltd | 粒子計数装置 |
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JP2002223019A (ja) * | 2001-01-24 | 2002-08-09 | Rion Co Ltd | レーザ発振器とそれを用いた光散乱式粒子検出器 |
JP2003270120A (ja) | 2002-03-18 | 2003-09-25 | Rion Co Ltd | 粒子検出器 |
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JP5489962B2 (ja) * | 2010-11-30 | 2014-05-14 | リオン株式会社 | 粒子計数方法 |
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2015
- 2015-12-03 JP JP2015236987A patent/JP6030740B1/ja active Active
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- 2016-11-30 US US15/365,096 patent/US9983113B2/en active Active
Patent Citations (4)
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JPH0458137A (ja) * | 1990-06-27 | 1992-02-25 | Hitachi Electron Eng Co Ltd | ヘテロダイン微粒子検出器の光学系 |
JP2006064610A (ja) * | 2004-08-30 | 2006-03-09 | Naohiro Tanno | 同軸型空間光干渉断層画像計測装置 |
JP2007333409A (ja) * | 2006-06-12 | 2007-12-27 | Horiba Ltd | 浮遊粒子測定装置 |
JP2009030988A (ja) * | 2007-07-24 | 2009-02-12 | Rion Co Ltd | 粒子計数装置 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106644867A (zh) * | 2016-12-30 | 2017-05-10 | 聚光科技(杭州)股份有限公司 | 气体中颗粒物的检测装置及方法 |
CN106644867B (zh) * | 2016-12-30 | 2023-08-29 | 聚光科技(杭州)股份有限公司 | 气体中颗粒物的检测装置及方法 |
KR102585276B1 (ko) | 2017-03-31 | 2023-10-05 | 라이프 테크놀로지스 코포레이션 | 이미징 유세포 분석을 위한 장치, 시스템, 및 방법 |
WO2018190162A1 (ja) * | 2017-04-14 | 2018-10-18 | リオン株式会社 | 粒子測定装置および粒子測定方法 |
JP2018179971A (ja) * | 2017-04-14 | 2018-11-15 | リオン株式会社 | 粒子測定装置および粒子測定方法 |
TWI674401B (zh) * | 2017-04-14 | 2019-10-11 | 日商理音股份有限公司 | 粒子測量裝置和粒子測量方法 |
EP3611492A4 (en) * | 2017-04-14 | 2020-05-13 | Rion Co., Ltd. | PARTICLE MEASURING DEVICE AND PARTICLE MEASURING METHOD |
US10837890B2 (en) | 2017-04-14 | 2020-11-17 | Rion Co., Ltd. | Particle measuring device and particle measuring method |
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US9983113B2 (en) | 2018-05-29 |
US20170160178A1 (en) | 2017-06-08 |
JP2017102068A (ja) | 2017-06-08 |
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