CN110064611B - 加工装置、及制品的制造方法 - Google Patents
加工装置、及制品的制造方法 Download PDFInfo
- Publication number
- CN110064611B CN110064611B CN201910047528.7A CN201910047528A CN110064611B CN 110064611 B CN110064611 B CN 110064611B CN 201910047528 A CN201910047528 A CN 201910047528A CN 110064611 B CN110064611 B CN 110064611B
- Authority
- CN
- China
- Prior art keywords
- liquid
- cleaning
- cleaning roller
- water
- reservoir
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000000034 method Methods 0.000 title claims description 3
- 239000007788 liquid Substances 0.000 claims abstract description 240
- 238000004140 cleaning Methods 0.000 claims abstract description 216
- 230000007246 mechanism Effects 0.000 claims abstract description 78
- 238000003860 storage Methods 0.000 claims abstract description 39
- 238000007599 discharging Methods 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 65
- 238000005520 cutting process Methods 0.000 claims description 44
- 238000005192 partition Methods 0.000 claims description 16
- 238000005406 washing Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 description 46
- 238000003754 machining Methods 0.000 description 29
- 239000011347 resin Substances 0.000 description 13
- 229920005989 resin Polymers 0.000 description 13
- 238000007689 inspection Methods 0.000 description 9
- 238000001035 drying Methods 0.000 description 7
- 230000002950 deficient Effects 0.000 description 5
- 239000007921 spray Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/50—Cleaning by methods involving the use of tools involving cleaning of the cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Dicing (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
- Details Of Cutting Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018008101A JP7018323B2 (ja) | 2018-01-22 | 2018-01-22 | 加工装置、及び製品の製造方法 |
JP2018-008101 | 2018-01-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110064611A CN110064611A (zh) | 2019-07-30 |
CN110064611B true CN110064611B (zh) | 2022-04-05 |
Family
ID=67365939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910047528.7A Active CN110064611B (zh) | 2018-01-22 | 2019-01-18 | 加工装置、及制品的制造方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7018323B2 (ja) |
KR (1) | KR102243615B1 (ja) |
CN (1) | CN110064611B (ja) |
TW (1) | TWI740094B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7149248B2 (ja) * | 2019-10-31 | 2022-10-06 | Towa株式会社 | 洗浄モジュール、切断装置及び切断品の製造方法 |
JP2021074825A (ja) * | 2019-11-11 | 2021-05-20 | 株式会社ディスコ | 保持面洗浄装置 |
CN110866360B (zh) * | 2019-11-19 | 2021-08-24 | 南京航空航天大学 | 一种旋转陶瓷基复合材料叶片的模态计算方法 |
KR102325830B1 (ko) * | 2020-01-10 | 2021-11-12 | 상동화주식회사 | 감광성 수지판 대형 세척장치 |
CN111604981B (zh) * | 2020-05-25 | 2020-12-01 | 广东嘉元科技股份有限公司 | 一种具有除尘功能的铜箔分切设备 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5077256A (ja) * | 1973-11-13 | 1975-06-24 | ||
JPS647691A (en) * | 1987-06-30 | 1989-01-11 | Nippon Denki Home Electronics | Cleaning device |
JPS6463200A (en) * | 1987-09-03 | 1989-03-09 | Ebara Shoji Kk | Washer for card print |
JP3327981B2 (ja) * | 1993-04-05 | 2002-09-24 | 富士通株式会社 | 洗浄液槽及び洗浄装置 |
JPH0739843A (ja) * | 1993-07-29 | 1995-02-10 | Sony Corp | シート状材料洗浄装置 |
KR200162216Y1 (ko) * | 1995-07-14 | 1999-12-01 | 황태근 | 라벨 이음 장치 |
JP2002028583A (ja) * | 2000-07-13 | 2002-01-29 | Apic Yamada Corp | ワークの洗浄装置 |
KR100756811B1 (ko) * | 2005-11-24 | 2007-09-10 | 쥬가이로 고교 가부시키가이샤 | 토출 노즐의 세정장치 |
JP4957299B2 (ja) * | 2007-03-06 | 2012-06-20 | Jfeスチール株式会社 | 鋼板の洗浄設備 |
JP2010240550A (ja) * | 2009-04-03 | 2010-10-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
KR101982206B1 (ko) * | 2012-09-20 | 2019-05-27 | 삼성디스플레이 주식회사 | 기판 세정 장치 |
TWI542532B (zh) * | 2015-06-17 | 2016-07-21 | 伊扎維克技術有限公司 | 用於在固體表面上形成奈米機構的塗層的裝置 |
TWM546857U (zh) * | 2017-05-09 | 2017-08-11 | Eclat Forever Machinery Co Ltd | 透明薄板之清潔裝置 |
-
2018
- 2018-01-22 JP JP2018008101A patent/JP7018323B2/ja active Active
-
2019
- 2019-01-17 KR KR1020190006100A patent/KR102243615B1/ko active IP Right Grant
- 2019-01-18 CN CN201910047528.7A patent/CN110064611B/zh active Active
- 2019-01-18 TW TW108102039A patent/TWI740094B/zh active
Also Published As
Publication number | Publication date |
---|---|
TWI740094B (zh) | 2021-09-21 |
CN110064611A (zh) | 2019-07-30 |
TW201932205A (zh) | 2019-08-16 |
JP2019126749A (ja) | 2019-08-01 |
JP7018323B2 (ja) | 2022-02-10 |
KR102243615B1 (ko) | 2021-04-23 |
KR20190089740A (ko) | 2019-07-31 |
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Legal Events
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |