JPS647691A - Cleaning device - Google Patents

Cleaning device

Info

Publication number
JPS647691A
JPS647691A JP16299187A JP16299187A JPS647691A JP S647691 A JPS647691 A JP S647691A JP 16299187 A JP16299187 A JP 16299187A JP 16299187 A JP16299187 A JP 16299187A JP S647691 A JPS647691 A JP S647691A
Authority
JP
Japan
Prior art keywords
work
cleaning solution
tank
transfer
tanks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16299187A
Other languages
Japanese (ja)
Inventor
Toshihiro Hanaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP16299187A priority Critical patent/JPS647691A/en
Publication of JPS647691A publication Critical patent/JPS647691A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/26—Cleaning or polishing of the conductive pattern

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To surely clean a work in a short period of time utilizing the combined action thereof with the dissolving effect of a cleaning solution and assure secure brushing for the work not only in the same direction as that of the transfer of the work but also in the direction perpendicular to said direction by circulating a clear cleaning solution through a rotating brush tank and a slide brush tank. CONSTITUTION:There are provided on a transfer passage for a work W such as a printed circuit board, tanks 11A, 11B each provided with rotating brushes 12, each of which has its rotary shaft perpendicularly to the direction 100 of the transfer of the work W and is rotated in a direction of the transfer of the work W, and a tank 11c provided with a slide brush 14 supported slidably in reciprocation perpendicularly to the direction 100 of the work W transfer, both tanks being arranged adjoining to each other. A clear cleaning solution is successively circulated through the rotating brush tanks 11A, 11B and through the slide brush tank 11C from a cleaning solution tank 16. For example, the cleaning solution is circulated in opposite direction to the transfer direction 100 of the work 100, and the cleaning solution directed to an outer tank 10 is, after being purified by a purifying device 20, recovered in the cleaning solution tank 16.
JP16299187A 1987-06-30 1987-06-30 Cleaning device Pending JPS647691A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16299187A JPS647691A (en) 1987-06-30 1987-06-30 Cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16299187A JPS647691A (en) 1987-06-30 1987-06-30 Cleaning device

Publications (1)

Publication Number Publication Date
JPS647691A true JPS647691A (en) 1989-01-11

Family

ID=15765129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16299187A Pending JPS647691A (en) 1987-06-30 1987-06-30 Cleaning device

Country Status (1)

Country Link
JP (1) JPS647691A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0330462U (en) * 1989-08-01 1991-03-26
US8372210B2 (en) 2003-10-27 2013-02-12 Applied Materials, Inc. Post CMP scrubbing of substrates
JP2019126749A (en) * 2018-01-22 2019-08-01 Ｔｏｗａ株式会社 Processing device and production method of product

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0330462U (en) * 1989-08-01 1991-03-26
US8372210B2 (en) 2003-10-27 2013-02-12 Applied Materials, Inc. Post CMP scrubbing of substrates
JP2019126749A (en) * 2018-01-22 2019-08-01 Ｔｏｗａ株式会社 Processing device and production method of product

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